Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

A Monte Carlo simulation including surface excitation, Auger electron‐ and secondary electron production has been performed to calculate the energy spectrum of electrons emitted from silicon in Auger electron spectroscopy (AES), covering the full energy range from the elastic peak down to the true‐secondary‐electron peak. The work aims to provide a more comprehensive understanding of the experimental AES spectrum by integrating the up‐to‐date knowledge of electron scattering and electronic excitation near the solid surface region. The Monte Carlo simulation model of beam–sample interaction includes the atomic ionization and relaxation for Auger electron production with Casnati's ionization cross section, surface plasmon excitation and bulk plasmon excitation as well as other bulk electronic excitation for inelastic scattering of electrons (including primary electrons, Auger electrons and secondary electrons) through a dielectric functional approach, cascade secondary electron production in electron inelastic scattering events, and electron elastic scattering with use of Mott's cross section. The simulated energy spectrum for Si sample describes very well the experimental AES EN(E) spectrum measured with a cylindrical mirror analyzer for primary energies ranging from 500 eV to 3000 eV. Surface excitation is found to affect strongly the loss peak shape and the intensities of the elastic peak and Auger peak, and weakly the low energy backscattering background, but it has less effect to high energy backscattering background and the Auger electron peak shape. Copyright © 2014 John Wiley & Sons, Ltd.     

Neue Methode zur quantitativen Analyse von AES-Spektren

Summary The quantitative analysis of Auger electron spectra may lead to problems using Auger peak-to-peak heights (APPH), especially in connection with chemical peak deformation and peak overlap. To eliminate these problems a method has been developed and was applied to metalnonmetal compounds. An integral spectrum is fitted with reference spectra and correction spectra, background differences are compensated. To deal with chemical effects a digital filter process is used. In order to test this method a copper-palladium alloy series has been measured and evaluated according to this method. The results show that a more accurate quantification could be obtained than by using APPHs and sensitivity factors. As a further advantage, relative sensitivity factors are no longer necessary due to peak/background standardization.     

Benefits of X-Ray Spectrum Simulation at low Energies

 There are particular benefits in spectrum simulation for the interpretation of characteristic X-ray peaks below about 2 keV in energy, where peak overlaps, a sloping background and changing detector efficiency make it difficult to measure true peak intensities. Despite these difficulties, we have shown that a useful accuracy of simulation is possible without major revision of the existing theory, allowing the electron microprobe user to compare on-line a measured spectrum with one synthesised from an assumed sample composition. As part of a wider study, we have used a database of X-ray spectra from 150 samples of known composition to confirm the accuracy of simulation over the energy range from 0.28–1.9 keV, finding an RMS error of better than 8%. The database included 181 Kα, Lα and Mα peaks from elements of atomic number 6–77, excited by beam voltages from 5–30 kV. Central to the method is the use of the ratio of (Peak Intensity)/(Total Background Intensity), which allows spectra to be compared from instruments of differing collection efficiency, thereby easing the collection of data over a wide range of conditions. Examples are given to illustrate the use of the simulator in helping to choose the best conditions for analysis, and as an aid in interpreting the spectra so obtained. Both modes of operation are iterative in nature and require a fast and accurate simulator that is easy to use. Further development will be guided by experience in its use.     

An integrated method for spectrum extraction and compound identification from gas chromatography/mass spectrometry data

A method is presented for extracting individual component spectra from gas chromatography/mass spectrometry (GC/MS) data files and then using these spectra to identify target compounds by matching spectra in a reference library. It extends a published “model peak” approach which uses selected ion chromatograms as models for component shape. On the basis of this shape, individual mass spectral peak abundance profiles are extracted to produce a “purified” spectrum. In the present work, ion-counting noise is explicitly treated and a number of characteristic features of GC/MS data are taken into account. This allows spectrum extraction to be reliably performed down to very low signal levels and for overlapping components. A spectrum match factor for compound identification is developed that incorporates a number of new corrections, some of which employ information derived from chromatographic behavior. Test results suggest that the ability of this system to identify compounds is comparable to that of conventional analysis.     

Reminiscences with Martin P. Seah

Starting in the mid-1960s, the detection and display of peaks in Auger electron spectroscopy (AES) were improved by using modulation of the electron energy analyzer coupled with electron detection using a lock-in amplifier. This allowed a derivative of the electron energy distribution, N(E), to be obtained directly at the output of the lock-in amplifier thereby removing most of the effect from the relatively large, slowly varying, electron background signal due to secondary and backscattered electrons. For relatively low modulation amplitudes, the peak-to-peak intensity of the Auger features increased linearly with modulation amplitude (for a deflection-type analyzer), improving the signal-to-noise ratio. However, with relatively large modulations, the Auger peak shapes distorted, and the peak-to-peak heights eventually decreased in size, and this nonlinearity would cause problems in quantitative analysis. A universal curve was developed for singlet Auger peaks to approximate corrections due to this peak distortion, but an approach to exactly correct for such distortions was largely ignored by the AES community. This approach was called Dynamic Background Subtraction and is even relevant today as some Auger instruments using modulation and lock-in amplifiers are still being manufactured. This review paper describes approximate and exact corrections for modulation effects in AES data.     

Peak shape analysis of core level photoelectron spectra using UNIFIT for WINDOWS

Several approaches used in the peak shape analysis of core level spectra for the purpose of modelling of both peak shapes and background profiles will be discussed. A universal program is presented, which combines options for adequate modelling of the peak shapes and background, implementation of a successful numerical algorithm for an iterative non-linear parameter estimation procedure, and a flexible as well as convenient data handling. The performance of this program code is demonstrated by fitting a synthesized model spectrum. An example for analysis of a complex experimental spectrum is presented, too. An S 2p spectrum recorded from a MBT-treated pyrite surface is successfully analyzed using the presented software and is found to be characterized by five different S 2p contributions.     

X-ray absorption and resonant Auger spectroscopy of O2 in the vicinity of the O 1s-->sigma* resonance: experiment and theory

We report on an experimental and theoretical investigation of x-ray absorption and resonant Auger electron spectra of gas phase O(2) recorded in the vicinity of the O 1s-->sigma(*) excitation region. Our investigation shows that core excitation takes place in a region with multiple crossings of potential energy curves of the excited states. We find a complete breakdown of the diabatic picture for this part of the x-ray absorption spectrum, which allows us to assign an hitherto unexplained fine structure in this spectral region. The experimental Auger data reveal an extended vibrational progression, for the outermost singly ionized X (2)Pi(g) final state, which exhibits strong changes in spectral shape within a short range of photon energy detuning (0 eV>Omega>-0.7 eV). To explain the experimental resonant Auger electron spectra, we use a mixed adiabatic/diabatic picture selecting crossing points according to the strength of the electronic coupling. Reasonable agreement is found between experiment and theory even though the nonadiabatic couplings are neglected. The resonant Auger electron scattering, which is essentially due to decay from dissociative core-excited states, is accompanied by strong lifetime-vibrational and intermediate electronic state interferences as well as an interference with the direct photoionization channel. The overall agreement between the experimental Auger spectra and the calculated spectra supports the mixed diabatic/adiabatic picture.     

Quantitative Auger electron spectroscopic analysis of carbides,nitrides and carbonitrides

A novel method for the quantitative evaluation of Auger electron spectra based on peak areas is presented. Sample and reference spectra in integral mode are filtered by an area conserving digital filter. This transforms the peak shapes influenced by chemical effects into standard peak shapes. After filtering a linear combination of reference spectra, differentiated spectra accounting for peak shifts and some low order polynomials to account for variations in the background is fitted to the sample spectrum by a least squares method. The need to approximate the spectrum of the secondary electron background explicitly for direct calculation of peak areas is thus eliminated. Filters of different widths are applied to reduce errors by chemical effects. The composition of the sample is computed from the composition of the reference samples and the coefficients obtained from the fit.To demonstrate the validity of this technique it has been applied to both, Gaussian model peaks and spectra of titanium carbonitrides. A further test on an alloy series is under investigation. The results show that the method works as predicted and gives accurate quantification.     

A fast and simple method for background removal in Auger electron spectroscopy

A purely formal method for background removal in electron beam induced Auger electron spectroscopy is presented. The method has been developed for practical purposes. It is typically used to remove the background of a complete recorded spectrum, no fit is necessary to remove the backscattered electrons background. An overcompensation of the background, resulting in negative values of the background removed spectrum is not possible, all values of the background removed spectrum are positive or zero. Since the Auger peaks are separated by zeros after background removal, the method is well suited for peak finding and identification.     

X-ray and electron induced Auger processes for I2 adsorption on uranium

The accurate determination of the kinetic energy of X-ray induced Auger electrons, which is necessary in XPS experiments, e.g. for calculating the Auger parameter, is sometimes hampered by peak interferences or by the high secondary electron background. The latter is of special importance for low kinetic energy electrons like e.g. the U(OPV) and U(OVV) Auger electrons. These problems can be circumvented by using electron induced Auger transitions (AES). However, since XPS and AES use different reference points for the energy scales, both scales have to be matched. This can be done by measuring the kinetic energy of an appropriate Auger transition in XPS and relating this value to the maximum of the second derivative of the same peak in AES.     

Physical foundation of quantitative Auger analysis

The possibility of using an Auger peak height in the dN (E) /dE spectrum and an integrated N (E) spectrum as a measure of the Auger current is discussed and necessary relations are presented. The methods of the background determination are reviewed and discussed.

The relation between the Auger current and the atomic cancentration of a corresponding sample component is derived and the state of art in the field of theoretical and experimental determination of factors appearing in this relation (ionization cross-section, Auger transition probability. backscattering factor, and inelastic mean free path of Auger electrons) is presented.

Approaches to the quantitative Auger analysis (QAA) of homogeneous, isotropic samples, including corrections for matrix factors, are presented and discussed. Problems arising when heterogeneous samples are analyzed are discussed and practical approaches to such an analysis are presented.

The role of crystalline effects (the dependence of the Auger signal from crystalline samples on the direction of the primary electron beam and angular distribution of Auger electron emission from such samples) in QAA is discussed and examples of such crystalline effects are presented together with their physical foundation.

Some rules are suggested allowing the quantitative Auger analysis to be performed with the smallest possible error.     

Studies of AuNi alloys by electron spectroscopies with the aid of the line shape analysis by the pattern recognition method

The spectrum of electrons elastically backscattered from the surface and within its vicinity reflects the probability of electron elastic backscattering on the surface atoms, quasi‐elastic scattering and the inelastic scattering visible in the low energy side of the elastic peak. The method for investigating the processes of electron elastic backscattering on the surface atom is called the elastic peak electron spectroscopy (EPES). In the present work, AuNi alloys of different compositions are investigated using X‐ray photoelectron spectroscopy (XPS) and the EPES method with the aid of the line shape analysis called the fuzzy k‐nearest neighbour (fkNN) rule. The line shape analysis was found to be applicable for EPES spectroscopy. It allows distinguishing the surfaces exhibiting various surface roughness, texture and grain size, and quantifying the selected information depths. The quantitative results obtained from the XPS analysis and the EPES spectra line shape analysis indicated Au surface segregation with Au surface enriched profile. Quantitative discrepancies are discussed within the non‐uniform concentration profiles of constituents due to sputter cleaning and annealing, different diffusion coefficients for Au and Ni, differences in the information depths sampled by XPS and EPES methods and differences in electron elastic backscattering cross‐sections for Ni and Au. Copyright © 2006 John Wiley & Sons, Ltd.     

A fast and simple method for background removal in Auger electron spectroscopy

A purely formal method for background removal in electron beam induced Auger electron spectroscopy is presented. The method has been developed for practical purposes. It is typically used to remove the background of a complete recorded spectrum, no fit is necessary to remove the backscattered electrons background. An overcompensation of the background, resulting in negative values of the background removed spectrum is not possible, all values of the background removed spectrum are positive or zero. Since the Auger peaks are separated by zeros after background removal, the method is well suited for peak finding and identification.Dedicated to Professor Dr. H. Seiler on the occasion of his 65th birthday     

Multivariate analysis of extremely large ToFSIMS imaging datasets by a rapid PCA method

Principal component analysis (PCA) and other multivariate analysis methods have been used increasingly to analyse and understand depth profiles in X‐ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) and secondary ion mass spectrometry (SIMS). These methods have proved equally useful in fundamental studies as in applied work where speed of interpretation is very valuable. Until now these methods have been difficult to apply to very large datasets such as spectra associated with 2D images or 3D depth‐profiles. Existing algorithms for computing PCA matrices have been either too slow or demanded more memory than is available on desktop PCs. This often forces analysts to ‘bin’ spectra on much more coarse a grid than they would like, perhaps even to unity mass bins even though much higher resolution is available, or select only part of an image for PCA analysis, even though PCA of the full data would be preferred. We apply the new ‘random vectors’ method of singular value decomposition proposed by Halko and co‐authors to time‐of‐flight (ToF)SIMS data for the first time. This increases the speed of calculation by a factor of several hundred, making PCA of these datasets practical on desktop PCs for the first time. For large images or 3D depth profiles we have implemented a version of this algorithm which minimises memory needs, so that even datasets too large to store in memory can be processed into PCA results on an ordinary PC with a few gigabytes of memory in a few hours. We present results from ToFSIMS imaging of a citrate crystal and a basalt rock sample, the largest of which is 134GB in file size corresponding to 67 111 mass values at each of 512 × 512 pixels. This was processed into 100 PCA components in six hours on a conventional Windows desktop PC. © 2015 The Authors. Surface and Interface Analysis published by John Wiley & Sons Ltd.     

EDXTOOLS — Computer Programmes for the Determination of Critical EDX Spectrometer Parameters

 Quality assurance according to ISO or EN norms entails a periodical check of critical instrumental parameters. Not yet all commercial software purchased with instruments supports the related measurements and their fast evaluation. EDXTOOLS consist of a programme library which complements the existing software for electron excited energy dispersive X-ray spectrometry (EDS) in this respect. EDXTOOLS can be used to check the detection efficiency by the evaluation of the L/K intensity ratio in a copper or nickel spectrum or by the calculation of the thickness of absorbing detector layers from experiments, which can be performed on any scanning electron microscope. Moreover, measured spectra can be modified by the transmission curve of absorbing media to estimate their influence on the result of quantitative analysis. EDXTOOLS allow the determination of the signal to background ratio from an Fe-55 spectrum and the fitting of measured FWHM’s of K-lines to find the resolution curve . They are completed by the possibility of calculating EDX spectra for the K-lines of light elements and to compare the resulting spectra for different formulae, physical data tables, and detector parameters chosen for the calculation. EDXTOOLS are written in MATLAB?, a wide spread interpreter language. This has the advantage that the programmes are readable text files. A user can check each computational step and modify it. The installation of MATLAB? and its optimization toolbox is necessary to work with EDXTOOLS.     

XPS光电子峰和俄歇电子峰峰位表

在长期从事XPS分析测试的经验基础上,搜集了有关文献中的大量数据,编制了XPS光电子峰和俄歇电子峰峰位表,用于正确识别各种样品XPS谱图中的电子峰,达到快速、正确分析各种样品元素组成和化学组成的目的．本峰位表对于从事XPS测试的分析人员和应用XPS的科技人员具有很好的实用价值．     

Quantitative surface analysis by X-ray photoelectron spectroscopy and X-ray excited auger electron spectroscopy

It is shown that X-ray excited KLL Auger electron spectra allow it to describe measured signal strengths similarly to X-ray photoelectron signals, thus offering valuable information on the quantitative surface composition of a solid sample. The principal equation and corresponding fundamental parameters are discussed. As a result Auger spectra of C, N, O, F, and Na can be easily used in a multiline approach for quantitative analysis. LMM and MNN spectra give rise to more problems, due to their more complicated structure, uncertainties with regard to the background and the influence of Coster-Kronig transitions. These problems are overcome by the use of empirical ratios of the strongest lines of 2p/LMM or 3d/MNN. Since these ratios are independent of sample composition, they allow it to transform the Auger signal into the corresponding photoelectron signal, provided that a standard sample has been measured. Thus a true additional information is obtained and moreover difficulties in cases of photoelectron spectra with overlapping lines from other chemical elements can be overcome.Dedicated to Professor Günther Tölg on the occasion of his 60th birthday     

Projection of Si 1s photoexcited orbitals into resonant Auger electron spectra in KLL decays of Si(CH3)4 and SiF4

Spectator resonant KL(23)L(23) Auger electron spectra have been measured in the Si 1s photoexcitation region of Si(CH(3))(4) using monochromatized undulator radiation combined with a hemispherical electron spectrometer. The broad peak with high intensity in a total ion yield spectrum, coming mainly from excitation of a 1s electron into the 6t(2) vacant orbital, induces a spectator Auger decay in which the excited electron remains in its excited orbital. The component on the higher energy side of this peak through 1s excitation into a Rydberg orbital produces resonant Auger decays in which the excited Rydberg electron moves into a slightly higher Rydberg orbital, or is partly shaken up to a significantly higher Rydberg orbital. These findings of Si(CH(3))(4) indicate a clear contrast to those for SiF(4), in which the 1s excitation into a Rydberg orbital induces a shake-down phenomenon as well as a shake-up one. The results of these molecules exhibit a clear splitting effect among excited orbitals which are smeared out by overlapping due to lifetime widths and due to densely populated levels in the 1s electron excitation spectrum. This is consistent with the calculation on photoexcitation within the framework of density functional theory.     

Auger decay of molecular double core-hole state

We report on theoretical Auger electron kinetic energy distribution originated from sequential two-step Auger decays of molecular double core-hole (DCH) state, using CH(4), NH(3), and H(2)CO molecules as representative examples. For CH(4) and NH(3) molecules, the DCH state has an empty 1s inner-shell orbital and its Auger spectrum has two well-separated components. One is originated from the 1st Auger transition from the DCH state to the triply ionized states with one core hole and two valence holes (CVV states) and the other is originated from the 2nd Auger transition from the CVV states to quadruply valence ionized (VVVV) states. Our result on the NH(3) Auger spectrum is consistent with the experimental spectrum of the DCH Auger decay observed recently [J. H. D. Eland, M. Tashiro, P. Linusson, M. Ehara, K. Ueda, and R. Feifel, Phys. Rev. Lett. 105, 213005 (2010)]. In contrast to CH(4) and NH(3) molecules, H(2)CO has four different DCH states with C1s(-2), O1s(-2), and C1s(-1)O1s(-1) (singlet and triplet) configurations, and its Auger spectrum has more complicated structure compared to the Auger spectra of CH(4) and NH(3) molecules. In the H(2)CO Auger spectra, the C1s(-1)O1s(-1) DCH → CVV Auger spectrum and the CVV → VVVV Auger spectrum overlap each other, which suggests that isolation of these Auger components may be difficult in experiment. The C1s(-2) and O1s(-2) DCH → CVV Auger components are separated from the other components in the H(2)CO Auger spectra and can be observed in experiment. Two-dimensional Auger spectrum, representing a probability of finding two Auger electrons at specific pair of energies, may be obtained by four-electron coincidence detection technique in experiment. Our calculation shows that this two-dimensional spectrum is useful in understanding contributions of CVV and VVVV states to the Auger decay of molecular DCH states.