阵列光栅压缩器的空域特性

 引入角度偏差、位移偏差作为拼接光栅系统的物理参数,定义了拼接光栅的孔径函数,利用傅里叶角谱理论研究了高斯脉冲入射拼接光栅压缩器后的远场分布特性。研究表明：出射脉冲仍然是高斯型脉冲,但包络中心发生偏移,偏移量由角度偏差量和光束口径决定;位移偏差引入的相位随着拼接光栅压缩器传递,其对远场焦斑的影响,取决于每片子光栅的非整数倍光栅常数的横向位移偏差和纵向位移偏差的综合作用。通过数值计算得到了各维偏差对阵列光栅压缩器空域特性的影响,计算表明:光栅面外角度偏差(俯仰左右)和条纹平行度偏差都必须控制在1 mrad以内,在此范围内,应将位移偏差控制在52 nm以内。     

基于叠栅条纹的光刻对准理论分析及标定方法

在线光栅用于纳米光刻对准理论的基础上,为实现光栅方向的标定和掩模硅片对准,提出一种利用相位斜率消除角位移的新方法,并给出线光栅标记及其对准原理。在对准前,掩模对准标记和硅片对准标记存在角位移,重点讨论了此种情况下叠栅条纹的特性以及与光栅物理参数的关系,并给出了相应的计算公式。基于傅里叶频域分析法,对叠栅条纹频率成分与条纹的关系做了简要分析。利用提取叠栅条纹行列方向的一维相位,通过数据拟合,得出了相位斜率与角位移的内在关系,实现了条纹方向的标定。模拟实验结果表明,该方法简单可靠,可分辨的最小角位移低于0.02°。     

Digital moiré fringe measurement method for alignment in imprint lithography

Accurate layer-to-layer alignment, which is of prime importance for the fabrication of multilayer nanostructures in integrated circuits, is one of the main obstacles for imprint lithography. Current alignment measurement techniques commonly involve an image detection process for coarse alignment followed by a grating interference process for fine alignment. Though this kind of two-level alignment system is reasonable for measurement, when it is used in real imprint lithography, it is inconvenient because of the existence of a complex loading system that needs space for alignment. In this study, we propose a fine alignment method using only image detection using grating images and digital moiré fringe technology. In this method, though the gratings are also selected as alignment marks for accurate measurement, they do not interfere with the physics. The grating images captured from the template and wafer are used to measure angular displacement and to form parallel digital moiré fringes. The relative linear displacement between the template and wafer is determined by detecting the spatial phase of parallel digital moiré fringes. Owing to the magnification effect of digital moiré fringes, this method is capable of generating accurate measurements. According to the experimental results, this digital moiré fringe technique is accurate to less than 10 nm. In addition, without a complex grating interference system, this method has the advantage of being easy to operate.     

一种新型的光栅成象型位移传感器

光栅的成象效应是光栅被点光源或扩展光源照明后自成象的一种特殊效应。该文应用傅里叶光学原理对扩展光源照明下光栅的成象特性作了分析,并由此设计出一种新型的光栅成象型位移传感器。     

多层介质膜脉冲压缩光栅近场光学特性分析

利用傅里叶模式理论分析了TE波自准直角入射的使用条件下，多层介质膜光栅的光栅区和多层膜区电场分布的特点.分别讨论了HfO₂和SiO₂为顶层光栅材料时，光栅结构参数对光栅脊峰值电场的影响，结果表明，对于不同膜厚的顶层材料，存在一个最佳膜厚度，使光栅脊峰值电场最小，并且当膜厚增大时，设计大高宽比的光栅可以降低该电场峰值.最后，在大角度条件下使用多层膜光栅也可以降低光栅脊处的峰值电场. 关键词： 衍射光学 多层介质膜光栅 模式理论 损伤阈值     

傅里叶位相的光学探测

根据光栅在傅里叶光学系统中的衍射特性,获得物体的傅里叶谱的实部和虚部信息,进而测出其傅里叶谱的实部和虚部信息,进而测出其傅里叶位相分布.本文给出了一维实物体的傅里叶位相的实验探测结果,并给予讨论.     

从光子与光栅相互作用的观点来推演光栅方程

根据光的量子特性,假定光子与光栅相互碰撞,推导出光栅方程,并将其扩展到空间,提出空间光栅方程.     

高功率激光装置光束准直系统新型远场监测技术

利用高功率激光装置空间滤波器小孔成像和取样光栅的衍射,设计出一套新型光路远场监测方案,并且在实验平台上进行了实验验证.实验结果表明：相对传统的远场监测方法,该远场监测系统通过侧面离轴光栅取样灵活利用空间,其调整平均误差为空间滤波器小孔直径0.9%,能够满足准直系统远场调整精度(<小孔直径5%)的要求. 关键词： 激光技术 光束准直 光栅 远场     

Digital volume gratings

An optical element constructed by stacking a set of binary-phase grating sheets can simulate the functions of optically recorded volume gratings. Our electromagnetic numerical study also shows that if one of the grating sheets is replaced by another one with different grating period, power spectrum of the diffracted wave changes completely with extra diffraction orders. This property will claim strong advantage in security document applications. Analysis of alignment error reveals interesting phenomena concerning to how misalignment affects diffraction efficiency.     

Improved composite Fourier transform profilometry

An improved composite Fourier transform profilometry (ICFTP) is proposed through optimizing the composite grating. Compared with the composite Fourier transform profilometry (CFTP), the frequencies of the two sinusoidal images modulated along the orthogonal direction in the optimized composite grating are not equal. The overlapping degree of Fourier spectrum of the optimized grating is lowered. The measuring accuracy is improved because two frequencies are used to calculate phase more accurately. By using a more advantageous flat image extracted ingeniously from the optimized grating, the zero component of the lower frequency sinusoidal image in the Fourier spectrum can be eliminated. So the measuring range is extended the same as that by the π phase shifting technique. Both numerical simulation and experiment demonstrate the feasibility and validity of the proposed method.     

一种亚纳米级变栅距衍射光栅制作方法的研究

变栅距(VLS)衍射光栅具有自聚焦、像差校正等独特优点。VLS光栅要求的最小栅距变化量为亚纳米数量级,仅靠提高光栅刻划机的分度精度已很难实现,针对这一问题,提出了一种相位扫描方法用于光栅刻划机的变栅距分度控制,即通过对刻划机分度系统的干涉条纹进行微位移扫描来进行相位控制。实验结果表明,相位扫描方法达到了变栅距光栅所要求的亚纳米级的栅距变化精度。     

Investigation of thermo-mechanical behaviour of diffractive optical elements for CO2 lasers

Phase diffractive optical elements are at present proposed for use with infrared high power lasers, for material surface treatment applications. However, the heating of the component exposed to several kilowatts per square centimetre can be a problem for practical implementation. The deformations due to thermal expansion of a gold binary diffraction grating under high power CO₂ laser exposure at 10.6 μm are estimated by a Finite Element Method. They are compared to the geometrical tolerances obtained by a rigorous electromagnetic Fourier modal method which is used to calculate the optical performances. Several exposure parameters (duration, average laser power) and grating parameters (period, line space ratio) are investigated. The laser exposure should be limited to a few milliseconds with a power density on the grating of 10⁴ W/cm², so that the amplitude of the deformations does not exceed the 75 nm tolerance on the grating depth. One is thus assured that the diffraction efficiency in the first order remains superior to 38.5%.     

提高叠栅条纹信号质量的一种新方法

在国内外普遍使用的细栅距幅光栅叠栅条纹系统中,衍射效应是很明显的,这是造成叠栅条纹信号的衬比(度)和正弦性不好的主要原因.本文在分析了叠栅条纹信号的基础上,导出了衍射光栅副中±1级叠栅条纹的相位与光栅副间隔,光线入射角等的关系,提出了用±1级叠栅条纹来提高叠栅条纹的信号质量,实验结果与理论分析一致,实际应用,效果良好.     

Formation of positive and negative anisotropic holographic gratings depending on recording energy in photoreactive liquid crystalline copolymer films

Anisotropic diffractive gratings formed by birefringent molecular alignment are fabricated by a holographic technique using a photo-cross-linkable liquid crystalline copolymer (PLCCP). Depending on the exposure energy used for holographic recording, bright or dark regions of the interference fringe can be chosen for the molecular-aligned region, analogous to positive- and negative-type photoresist processing in photolithography. In conjunction with simultaneously generated surface relief gratings, the anisotropic refractive index modulation inherent in the PLCCP film exhibits different diffraction properties depending on the incident beam polarization. The anisotropic refractive index grating profiles are quantitatively presented for two cases determined by the exposure energy, based on the Fourier analysis of diffractive optics. The selection of different grating formations selected by varying only the exposure energy could provide a strategy for the fabrication of functionalized diffractive optical elements.     

运动光栅的量子特性研究

讨论了空间周期结构和时间周期性对波和物质波的作用，即动量和能量的量子化变化，并用傅里叶分析和相对论的方法对其进行了分析论证，提出了一种对于运动和物体相互作用在概念上的处理方法。     

A modified alignment method based on four-quadrant-grating moiré for proximity lithography

In this paper, we demonstrate a modified coarse-fine alignment scheme designed for proximity lithography. Both wafer alignment mark and mask alignment mark consists of linear grating arrays and “+” bar. Coarse alignment and fine alignment could work together to achieve the perfect alignment. Thereinto, coarse alignment, measured from two superposed “+” bars, guarantees the misalignment across wafer and mask within the measurement range of fine alignment, which is based on moiré fringes formed by the superposition of linear grating arrays. Then we conduct the experiments using a nanometer actuator to drive the wafer alignment mark meanwhile keeping the mask alignment mark motionless, which validates the feasibility and rationality of our designed scheme.     

紫外光诱导液晶相位光栅

使用紫外光诱导取向技术制作了可转换的液晶相位光栅,通过光掩模两次曝光的方法形成光栅条纹.这种光栅制作工艺较为简单,不需要上下基板精确的对准,驱动电压较低.采用He-Ne激光器和光探测器进行测试,结果表明,衍射效率具有电场调制性并出现同预测一致的衍射条纹.对液晶光栅的偏振特性进行了研究,利用琼斯矩阵和衍射理论对液晶相位光栅衍射强度进行了分析和模拟计算.     

T-matrix analysis of electromagnetic wave differaction from a Fourier grating

This paper is described for T-matrix analysis of the electromagnetic wave diffraction from a Fourier grating that the boundary value problem is treated by applying the extended boundary condition. The rigorous form of the expression of matrix elements is presented in the term of Bessel functions of the first kind. The error of power conservation versus the truncated number has been examined for mode number. Diffraction efficiencies versus groove depth and wavelength for a second or third harmonic wave of Fourier grating have been discussed. Numerical results are in good agreement with those obtained from other method and experimental values. Reasonable numerical results are presented for a groove depth per period of the Fourier grating less than 0.25.     

Generation of millimeter-wave in optical pulse carrier by using an apodized Moiré fiber grating

A novel scheme is proposed to transform a Gaussian pulse to a millimeter-wave frequency modulation pulse by using an apodized Moiré fiber Bragg grating in radio-over-fiber system. The relation between the input and output pulses is analyzed theoretically by Fourier transformation method and the requirements for the proposed fiber grating are presented. An apodized Moiré fiber Bragg grating is designed and its characteristics are studied. It is shown that the proposed device is feasible, and the new scheme is believed to be an effective solution for the generation of millimeter-wave sub-carrier in future radio-over-fiber systems.     

Wavelength modulation in a two-window common path interferometer for phase-shifting

A novel and simple method for phase-shifting under the scheme of a two-window 4f common path interferometer configuration with a binary grating at the Fourier plane is proposed. The proposal is based on periodicity variations of the grating grooves in the frequency space, which is emulated in an experimental implementation by changing the wavelength of a tunable laser diode used as the light source. Because of the common path configuration, it is expected to diminish errors due to undesired vibrations and optical aberrations. The viability of the proposal will be sustained with simulated and experimental, which include phase-shifted interferograms and reconstructed wavefronts. Due to the characteristics of the proposed experimental setup, it can be easily replicated and automated.