应用光学——光学系统设计指南

第十九章相干光学系统 19.3.5 特殊的全息图记录方法 19.3.5.1 非相干照明全息术只要使每个物点有可能产生它自己的参考波,那么就可以制作非相干照明物体的全息图。为此,来自每个物点的波前分裂成两个成分,然后使它们产生干涉形成全息图。这样,每个物点产生一个全息图,并与其他     

显微镜的分辨率问题

显微镜照明的相干性对分辨率有明显的影响．聚光镜的数值孔径及光的波长决定对两物点照明的相干度，从而影响显微镜的分辨本领．     

光学仪器分辨本领三种判据的比较

判断光学仪器分辨本领最常用的是瑞利判据，但除了瑞利判据外，还有泰勒判据［１］［２］和史派劳判据［３］等．本文针对单缝衍射和圆孔衍射，用这三种判据在非相干照明和相干照明情况下，分别导出最小可分辨角，并对三种判据给出的结果加以比较．文中还指出了Ｍ玻恩，Ｅ．沃耳夫所著《光学原理》一书对相干照明圆孔衍射分辨极限表达式的错误之处．     

照相系统的分辨率分析

光学系统的分辨率,是指仪器可分辨的最邻近两个物点的距离或角度;仪器能分辨两个物点间的距离或角度越小,则分辨率越大.     

基于点扫描结构光的SHG超分辨显微技术研究

二次谐波产生(SHG)成像技术是一种针对非中心对称生物组织的免标记成像技术,已经成为生命科学研究的重要手段。衍射极限使得SHG技术无法分辨衍射极限以下的精细结构。虽然超分辨显微技术取得了突破性进展,但是SHG的相干非线性过程限制了SHG超分辨显微技术的发展。提出了一种点扫描结构光照明SHG超分辨显微(SHG-psSIM)技术,实现了氧化锌颗粒和小鼠尾腱的超分辨SHG显微成像。在传统的SHG显微系统的激发光路中引入电光调制器,通过对激发光正弦调制产生点扫描结构照明图案。基于点扫描结构照明图案与样本结构相互作用产生的莫尔条纹效应,将原本不可探测的样本高频信息搬移到显微镜通频带内,并利用光电倍增管探测。最后,利用软件重构出超分辨率图像。对比传统SHG系统,SHG-psSIM分辨率提高了1.86倍。     

光学系统超分辨的光源编码技术

本文从Wolf的部分相干理论出发,提出了采用编码光源照明的新的光学像超分辨方法,并用实验证实了这种方法的正确性.它克服了以往超分辨术的一些缺点,为超分辨的实用化研究展现了新的途径.     

掩模衍射频谱轴向分量对光刻成像性能的影响EI北大核心CSCD

传统三维光刻矢量成像模型中将投影系统物方电磁场表示为二维形式,实现方式分为两种:采用局部坐标和忽略掩模衍射频谱的轴向分量。后者在浸没式光刻系统仿真中的适用性需要进一步分析。简述了忽略掩模频谱轴向分量的矢量成像模型和引入该分量的全光路三维光刻矢量成像模型,利用这两种模型和商业仿真软件,研究了掩模衍射频谱轴向分量对光刻胶中成像特征尺寸的影响并对结果进行了讨论。研究结果表明,相干照明和部分相干照明条件下,掩模衍射频谱轴向分量对光刻成像的影响随着数值孔径的变化趋势存在较大差异。这说明相干照明下的分析结论并不适用于部分相干照明条件,且只有全光路三维矢量成像模型才能满足浸没式高分辨光刻仿真的要求。     

光学成象的分辨与相关

本文从光振动的相关函数出发,研究光学成象的分辨问题。首先将两个点的相关定义,推广到两个点集的相关,然后应用了H·H·Hopkins关于两点的分辨与相关的结果求得了两个点集的分辨,并且计算了线与线、线与半无限大平面、点与圆环等的分辨,由计算结果看出各种情况的差异是比较大的。     

3-光栅系统的干涉效应

本文用部份相干的观点提出并研究了三个独立光栅串联排列系统的干涉效应。用模糊函数导出了干涉条纹光强分布为三个光栅等效函数的联合卷积-相关积分。给出了条纹存在的光栅间距离和周期比条件。随光源光栅狭缝宽度的变化相应产生相干的Talbot效应、部份相干效应和非相干的Lau效应。部份相干条纹的波形随光栅的平移而变化。最后给出了实验验证。 关键词：     

用作图法求全息再现像

本文从物理光学的角度出发，给出两条特殊光线，可用作图法找到全息图再现的原始像和共轭像的位置，定义参考光源与物点的联线为主轴，主轴与全息图的交点为节点。两条特殊光线一条是沿再现照明光源与节点联线方向，称之为不偏折光线。另一条对原始像来说是自照明光发出通过参考光源的一条光线，这条光线经全息图衍射后与不偏折光线的交点即原始像点的位置；对共轭像来说是自照明光源发出通过物点的一条光线，这条光线经全息图衍射后与不偏折光线的交点即共轭像点的位置。     

Resolution of 90 nm (lambda/5) in an optical transmission microscope with an annular condenser

Resolution of 90 nm was achieved with a research microscope simply by replacing the standard bright-field condenser with a homebuilt illumination system with a cardioid annular condenser. Diffraction gratings with 100 nm width lines as well as less than 100 nm size features of different-shaped objects were clearly visible on a calibrated microscope test slide. The resolution increase results from a known narrower diffraction pattern in coherent illumination for the annular aperture compared with the circular aperture. This explanation is supported by an excellent accord of calculated and measured diffraction patterns for a 50 nm radius disk.     

Rayleigh two-point resolution by a semi-transparent and φ-phase annular optical system operating in partially coherent light

A theoretical study has been made to investigate the dependence of the two-point resolution by an aberration free, semi-transparent and φ-phase annular aperture, on the real part of the complex degree of coherence. Rayleigh's criterion in its modified version has been used for the partially coherent optical systems and a comparison between Rayleigh and Sparrow resolution has been made. In order to reveal important information concerning the characteristics of the image, the intensity distribution from two mutually partially coherent point sources has also been evaluated.     

A simple experimental method to generate partially coherent optical bottle beam

An experimental study is carried out to investigate a special kind of three-dimensional intensity distribution of a partially coherent optical beam known as optical bottle beam produced by using an annular aperture and lens combination (Lens Aperture System). In this paper, we are demonstrating the experimental results of our observations. The investigation also includes the effects of coherence modulation and central obstruction of the annular aperture (used in Lens Aperture System) on the resultant partially coherent optical bottle beam. The method discussed in this paper is simple and cost effective.     

微细光刻中部分相干系统成像研究

分析了投影光刻系统中部分相干成像的过程，结果表明部分相干成像的像强是相干成像的像强对光源上每一点互相干强度的权重和，得出了近年来改进照明条件提高分辨力的物理本质，部分相干成像系统是一个空间频率可变的系统，频率的调制是通过照明函数的变化来实现的提出了进一步提高光刻分辨力的新途径。     

Partially coherent Fresnel diffraction by a slit aperture. III. Fresnel diffraction patterns

The intensity distribution in the Fresnel diffraction pattern of a slit aperture illuminated with partially coherent light is obtained, as a function of the coherence condition across the aperture, by evaluating the formula developed in a previous paper. It is shown that the Fresnel diffraction pattern is affected by the coherence condition of illumination across the aperture and its form.     

Effect of partially space coherent illumination on the performance of a defocused optical system with a slit aperture

The focusing properties of an aberration free defocused optical system with a slit aperture have been investigated in the case of quasimonochromatic partially space coherent light. The point spread function has been plotted for sinc and gaussian forms of the mutual coherence function. In certain cases, partially coherent illumination results in an improved performance of the system.     

基于大数值孔径环形光锥照明的超分辨光学 显微成像方法研究

提出和发展了一种基于大数值孔径环形光锥照明的远场超分辨光学显微成像新方法, 采用将发光二极管(LED)面光源、窄带滤光和环形光锥照明相结合的特种照明方式, 实现超分辨显微成像. 建立了大数值孔径环形光锥照明成像的物理模型, 根据标量衍射理论, 在不同环形光锥照明时, 推导出光学显微系统像面衍射斑光强分布的理论计算公式; 通过Matlab求解和绘图, 得到衍射斑光强的分布图样, 从理论上证明这一成像方法可以有效提高光学显微镜的分辨率; 建立了相应的显微成像系统, 通过实验验证了该方法可有效改善显微镜的成像质量, 显著提高分辨率; 在中心波长450 nm、环形光锥数值孔径1.125—1.25时, 实验获得的分辨率至少优于150 nm, 与理论研究结果相符合, 从而证明了这一方法的可行性.     

Effect of annular obstruction on tight focusing of partially coherent radially polarized Vortex beam

Based on vectorial Debye theory, the effect of annular apodization of tightly focused partially coherent radially polarized vortex beams in the focal field of high NA lens is studied. The intensity distribution in the focal region is illustrated by numerical calculations. It is found that the focal depth of the generated focal segment strongly dependent on the source coherence length for unobstructed case and the presence of annular aperture reduces the variation of focal depth with source coherence length.     

Partially coherent fresnel diffraction by a slit aperture. 1. Theoretical analysis

A formulation is developed for investigating the intensity distribution of Fresnel diffraction by a slit aperture illuminated with partially coherent light. The formulation is further extended to the case that the complex degree of coherence of the illumination contains a quadratic phase term.     

Experiments on partially coherent multiple-beam interference

The intensity distribution in the interference pattern of a multiple-slit aperture illuminated with the partially coherent light is examined experimentally. The experimental results showing excellent agreement with the theoretical predictions indicate both a gradual loss in the contrast of interference fringes and a broadening of the principal maximum fringes with decreasing spatial coherence of the illumination.