High repetition rate femtosecond laser nano-machining of thin films

Thin film laser micromachining has been utilized for repairing semiconductor masks, creating solar cells and fabricating MEMS devices. A unique high repetition rate femtosecond fiber laser system capable of variable repetition rates from 200 KHz to 25 MHz along with helium gas assist was used to study the effect of pulse repetition rate and pulse energy on femtosecond laser machining of gold-coated silicon wafer. It was seen that high repetition rates lead to smaller craters with uniform line width. Craters created at 13 MHz pulse repetition rate with 2.042 J/cm² beam energy fluence measured 110 nm in width and had a heat affected zone of 0.79 μm. It was found that pulse repetition rate only played a significant role in the size of the heat affected zone in the lower pulse energy ranges. In the future, a 1 W laser system will be acquired to find the optimal repetition rate that would create the minimal feature size with the least heat affected zone. Using this kind of setup along with techniques such as radial polarization and a different gas assist may enable us to create sub 100 nm feature size with good quality.     

Optodynamic monitoring of laser micro-drilling of glass by using a laser probe

We present a new method for monitoring of the laser micro-drilling process. The method is based on detection of acoustic waves in air above the processed sample using a laser beam deflection probe (LBDP). We present an augmentation of the experimental set-up by means of a digital micrographic system which enables the acquisition of images of the plasma plume and of the hole cross-section during a drilling sequence. Comparing the acquired images with the detected LBDP signals, we examine the drilling process from a new perspective.     

Laser etching of glass substrates by 1064 nm laser irradiation

TiB₂-based cermets are prepared by combustion synthesis followed by a pressing stage in a granulate medium. Products obtained by combustion synthesis are characterized by a large remaining porosity (typically 50%). To produce dense cermets, a subsequent densification step is performed after the combustion process and when the reacted material is still hot. To design the process, numerical simulations are carried out and compared to experimental results. In addition, physical and electrical properties of the products related to electrical contact applications are evaluated. PACS 81.20.Ka; 81.05.Mh; 72.80.Tm     

Scanning the laser beam for ultrafast pulse laser cleaning of paint

Aligned arrays of N₂-encapsulated multilevel branched carbon nanotubes were synthesized using a simple one step CVD method by pyrolysis of ferrocene and acetonitrile. Electron energy loss spectroscopy (EELS) and elemental mapping studies reveal that gaseous nitrogen was encapsulated in the carbon nanotubes. Batch-type pyrolysis of catalysts induced flow fluctuation of the reaction gases, resulting in the growth of branched junctions. Molecular nitrogen extruded rapidly along conical catalyst particles inducing N₂ encapsulation inside the branched nanotubes. PACS 07.78.+s; 61.46.+w; 81.07.De; 81.15.Gh     

Substrate dependence of ion motion in femtosecond laser ablation cloud observed by planar laser-induced fluorescence

We have observed the motion of Sm⁺ ions as well as Sm atoms produced by femtosecond laser ablation of a solidified samarium solution sample on substrates by using a planar laser-induced fluorescence method. Kinetic energies of both Sm⁺ ions and Sm atoms increase as the electrical conductivity of the substrate decreases, which suggests the effect of surface charging. The kinetic energy of Sm⁺ ions is larger than that of Sm atoms for a variety of substrates due to the further electrical acceleration by the surface charge. The knowledge of ion motion will be the key information for the optimization of femtosecond laser simultaneous atomization and ionization of organic and inorganic samples on substrates.     

Localized desvitrifiation in Er<Superscript>3+</Superscript>-doped strontium barium niobate glass by laser irradiation

Localized desvitrifiation in strontium barium niobate glass doped with Er³⁺ under laser irradiation has been carried out. The samples of this study have been fabricated by the melt quenching method and doped with 5% mol of Er³⁺. A 1.5-W cw Ar laser was focused on the sample to obtain desvitrifiation of the glass. Evidence of the changes induced by the Ar laser has been observed through the analysis of the photoluminescence of the Er³⁺ ions. The transitions corresponding to ²H_11/2→⁴I_15/2, ⁴S_3/2→⁴I_15/2 and ⁴F_9/2→⁴I_15/2 have been studied to analyze structure changes. Microluminescence measurements have been carried out to spatially select positions inside and outside the irradiated area. We have observed changes in the emission bands corresponding to these transitions. The emission bands from Er³⁺ ions in the irradiated zone show a resolved structure while they are broadened outside that area. These changes in the optical properties of the Er³⁺ ions indicate that the Ar-laser irradiation has produced a change in the local structure of the material. These results show that a localized desvitrifiation has been produced after the laser action and the transition from glass to glass ceramic has been completed.     

Femtosecond fiber laser based methane optical clock

An optical clock based on an Er³⁺ fiber femtosecond laser and a two-mode He–Ne/CH₄ optical frequency standard (λ=3.39 μm) is realized. Difference-frequency generation is used to down convert the 1.5-μm frequency comb of the Er³⁺ femtosecond laser to the 3.4-μm range. The generated infrared comb overlaps with the He–Ne/CH₄ laser wavelength and does not depend on the carrier–envelope offset frequency of the 1.5-μm comb. In this way a direct phase-coherent connection between the optical frequency of the He–Ne/CH₄ standard and the radio frequency pulse repetition rate of the fiber laser is established. The stability of the optical clock is measured against a commercial hydrogen maser. The measured relative instability is 1×10⁻¹² at 1 s and for averaging times less than 50 s it is determined by the microwave standard, while for longer times a drift of the He–Ne/CH₄ optical standard is dominant.     

Formation of highly organised,periodic microstructures on steel surfaces upon pulsed laser irradiation

We present results on the growth of highly organised, reproducible, periodic microstructure arrays on a stainless steel substrate using multi-pulsed Nd:YAG (wavelength of 1064 nm, pulse duration of 7 ns, repetition rate of 25 kHz, beam quality factor of M ²∼1.5) laser irradiation in standard atmospheric environment (room temperature and normal pressure) with laser spot diameter of the target being ∼50 μm. The target surface was irradiated at laser fluence of ∼2.2 J/cm² and intensity of ∼0.31×10⁹ W/cm², resulting in the controllable generation of arrays of microstructures with average periods ranging from ∼30 to ∼70 μm, depending on the hatching overlap between the consecutive scans. The received tips of the structures were either below or at the level of the original substrate surface, depending on the experimental conditions. The peculiarity of our work is on the utilised approach for scanning the laser beam over the surface. A possible mechanism for the formation of the structures is proposed.     

Synthesis of crystalline TiN and Si particles by laser ablation in liquid nitrogen

Laser ablation of titanium and silicon targets immersed in liquid nitrogen was carried out using a YAG laser at 1.06 μm. Synthesized particles were collected and were characterized by TEM, SEM, EDS, XRD, and XPS. In the case of a titanium target, the synthesized particles had an atomic ratio of N/Ti=0.4 and a polycrystalline structure with many XRD peaks of TiN. This result indicates the usefulness of laser ablation in liquid nitrogen for synthesizing nitrides. On the other hand, in the case of a silicon target, the nitridation of the synthesized particles was negligible, and the synthesized particles had a polycrystalline structure of pure cubic silicon. This means that the oxygen-free environment realized by liquid nitrogen is useful for synthesizing particles with negligible oxidation.     

Plasma plume induced during laser ablation of graphite

The plasma plume induced during ArF laser ablation of a graphite target is studied. Velocities of the plasma expansion front are determined by the optical time of flight method. Mass center velocities of the emitting atoms and ions are constant and amount to 1.7×10⁴ and 3.8×10⁴ m s⁻¹, respectively. Higher velocities of ions result probably from their acceleration in electrostatic field created by electron emission prior to ion emission. The emission spectroscopy of the plasma plume is used to determine the electron densities and temperatures at various distances from the target. The electron density is determined from the Stark broadening of the Ca II and Ca I lines. It reaches a maximum of ∼9.5×10²³ m⁻³ 30 ns from the beginning of the laser pulse at the distance of 1.2 mm from the target and next decreases to ∼1.2×10²² m⁻³ at the distance of 7.6 mm from the target. The electron temperature is determined from the ratio of intensities of ionic and atomic lines. Close to the target the electron temperature of ∼30 kK is found but it decreases quickly to 11.5 kK 4 mm from the target.     

Influence of fast electrical discharge on expansion of laser produced plasma

For some applications of laser produced plasma it may be advantageous to implement some degree of control on the ion flux and velocity distribution in the plasma expansion. We have shown how a fast, high current discharge in a laser produced plasma leads to a dramatic increase in the plasma ionization and expansion velocity. These observations are consistent with a magnetohydrodynamic discharge model whereby the self-induced magnetic field causes radial compression of an open-ended plasma column.     

Analysis of the laser ablation processes for thin-film silicon solar cells

A detailed analysis of the monolithical series connection of thin-film silicon modules with ZnO/Ag back contact is presented. In this study, pulsed lasers with wavelengths of 1064 nm and 532 nm were used. The influence of various laser parameters like laser power, pulse overlap, etc., on the different patterning steps is discussed. The focus of this study was on the back contact patterning process. Here (i) the flake formation process during the ablation and (ii) the influence of a NIR-laser source as an alternative approach to the green laser were investigated in detail. The latter would reduce system costs if only one NIR-laser source could be used for all patterning steps.     

Fabrication of fluorescent nanoparticles of dendronized perylenediimide by laser ablation in water

Highly fluorescent organic nanoparticles with size of about 300 nm were prepared by nanosecond laser ablation of micrometer-sized powder of dendronized perylenediimide dispersed in water. The nanoparticle colloidal solution provided a fluorescence quantum yield of 0.58. The absorption and emission spectral studies demonstrated that the bulky dendron groups at the side bays of perylenediimide chromophore efficiently suppress the interchromophoric interactions in the nanoparticles. Fluorescence measurement on several single nanoparticles underlines that the prepared nanoparticles are bright and photo-stable enough to be a useful probe for single particle fluorescence investigation.     

Molecular imaging by Mid-IR laser ablation mass spectrometry

Mid-IR laser ablation at atmospheric pressure (AP) produces a mixture of ions, neutrals, clusters, and particles with a size distribution extending into the nanoparticle range. Using external electric fields the ions can be extracted and sampled by a mass spectrometer. In AP infrared (IR) matrix-assisted laser desorption ionization (MALDI) experiments, the plume was shown to contain an appreciable proportion of ionic components that reflected the composition of the ablated target and enabled mass spectrometric analysis. The detected ion intensities rapidly declined with increasing distance of sampling from the ablated surface to ∼4 mm. This was rationalized in terms of ion recombination and the stopping of the plume expansion by the background gas. In laser ablation electrospray ionization (LAESI) experiments, the ablation plume was intercepted by an electrospray. The neutral particles in the plume were ionized by the charged droplets in the spray and enabled the detection of large molecules (up to 66 kDa). Maximum ion production in LAESI was observed at large (∼15 mm) spray axis to ablated surface distance indicating a radically different ion formation mechanism compared to AP IR-MALDI. The feasibility of molecular imaging by both AP IR-MALDI and LAESI was demonstrated on targets with mock patterns. Presented at the 9-th International Conference on Laser Ablation, 2007 Tenerife, Canary Islands, Spain     

A point source analytical model of inverse pulsed laser deposition

A simple analytical model for inverse pulsed laser deposition is proposed. In the model the motion of the evaporated material is assumed to emerge as from a point source located above the surface of evaporation at some distance. The obtained thickness profiles of inverse deposited films agree well with those calculated by the test particle Monte Carlo method. The proposed approach has been applied for analysis of experimental data on inverse pulsed laser deposition of graphite in nitrogen atmosphere with nanosecond pulses of laser fluences between 1 and 7 J/cm². The model describes well the thickness profiles and pressure dependence of film growth rate for inverse deposition.     

Optical absorption in early stage low temperature laser produced plasma

We describe a new technique to measure the UV/visible absorption spectrum of the ablated material during the laser pulse. The technique utilizes the continuum emission from one laser produced plasma as a light source to measure the absorption properties of a second laser produced plasma which is formed on a semi-transparent target with an array of 40 μm holes. A 6 ns, 1064 nm laser was used to ablate a Ag target and the plasma absorption was measured in the range 450–625 nm for a laser fluence of 1 J cm⁻². The total absorption cross-section is (0.5–1.5)×10⁻¹⁷ cm² in the range 450–540 nm. By comparing the measured absorption with a calculation using the plasma spectroscopy code FLYCHK it can be concluded that, in the wavelength region examined here, the absorption is mainly due to bound-bound transitions.     

Microplasma generated at solid–solid interface and its application to nanostructure formation

The dynamics of the microplasmas created at a transparent solid–solid interface were investigated extensively. Microplasmas were generated at an interface between a carbon (C) or a germanium (Ge) target and a SiO₂ substrate by irradiating a KrF excimer laser beam onto the target, and the dynamics of the plasmas were investigated with the aid of optical emission spectroscopy. Although the emission spectra that contained the characteristic emission lines and the absorption bands originated from C and Ge species were observed from the C and Ge plasmas without the SiO₂ substrate, identical spectra were obtained from both the plasmas created at the C–SiO₂ and Ge–SiO₂ interfaces. Furthermore, the target and the Si substrate surfaces were examined with a scanning electron microscope. The SiO₂ substrate was smoothly etched and a nanostructure of a chain-like morphology was also observed in the deposits on the SiO₂ substrate.     

Ultrashort laser ablation of PMMA and intraocular lenses

The use of intraocular lenses (IOLs) is the most promising method to restore vision after cataract surgery. Several new materials, techniques, and patterns have been studied for forming and etching IOLs to improve their optical properties and reduce diffractive aberrations. This study is aimed at investigating the use of ultrashort laser pulses to ablate the surface of PMMA and intraocular lenses, and thus provide an alternative to conventional techniques. Ablation experiments were conducted using various polymer substrates (PMMA samples, hydrophobic acrylic IOL, yellow azo dye doped IOL, and hydrophilic acrylic IOL consist of 25% H₂O). The irradiation was performed using 100 fs pulses of 800 nm radiation from a regeneratively amplified Ti:sapphire laser system. We investigated the ablation efficiency and the phenomenology of the ablated patterns by probing the ablation depth using a profilometer. The surface modification was examined using a high resolution optical microscope (IOLs) or atomic force microscope—AFM (PMMA samples). It was found that different polymers exhibited different ablation characteristics, a result that we attribute to the differing optical properties of the materials. In particular, it was observed that the topography of the ablation tracks created on the hydrophilic intraocular lenses was smoother in comparison to those created on the PMMA and hydrophobic lens. The yellow doped hydrophobic intraocular lenses show higher ablation efficiency than undoped hydrophobic acrylic lenses.     

Study of laser fragmentation process of silver nanoparticles in aqueous media

Laser fragmentation of Ag nanoparticles in Ag hydrosol was studied by simultaneous measurements of the transmitted fluence of the incident laser beam and the time evolution of the surface plasmon extinction (SPE) spectra. The experiments showed that the laser fragmentation in a small volume of hydrosol proceeds during first 20 pulses and then reaches saturation. The value of the transmitted fluence corresponding to saturation increases with incident pulse fluence, but the impact of the first pulse applied to the hydrosols shows an optical limitation. Fluences above 303 mJ/cm² cause the formation of less stable, aggregating nanoparticles, while fluences below 90 mJ/cm² do not provide sufficient energy for efficient fragmentation. The interval of fluences between 90–303 mJ/cm² is optimal for fragmentation, since stable hydrosols constituted by small, non-aggregated nanoparticles are formed.     

Interference effects in 157 nm laser ablated cones in polycarbonate and application to spatial coherence measurement

Conical structures formed in 157 nm laser-ablated polycarbonate exhibit a well-defined fringe structure with a period of a few 100 nm surrounding the cone base. Experiments and modelling studies of the interference produced by these micro-conical mirrors are shown to provide a means of measuring the spatial coherence of the highly multi-mode 157 nm laser.