Planarization of CMOS ROIC dies for uncooled detectors

This paper presents a planarization procedure to achieve a flat CMOS surface of Readout Integrated Circuit (ROIC) for the integration between uncooled infrared detector arrays and ROIC. The CMOS fabrication process produces about 2 μm surface roughness on the silicon wafer, so the CMOS dies must be first planarized before integration with the detector arrays. To acquire a satisfying surface roughness in the small CMOS die, three commercially available polymers including bisbenzocyclobutene (BCB) and two types of polyimides are evaluated in our experiments. BCB shows the best results for our applications. A single layer of BCB coating successfully reduce the surface topology from 2 μm to less than 1500 Å and two layers of BCB coating reduce the surface topology to about 600 Å.     

Metallic waveguide mirrors in polymer film waveguides

A technology for the fabrication of metallic waveguide mirrors is developed. Plane and curved waveguide mirrors, the latter acting in the same way as cylindrical lenses, are realized in benzocyclobutene (BCB) film waveguides. The waveguide mirror structure is dry-etched into the BCB film waveguide. To enhance the reflectivity of the waveguide mirrors, the waveguide edge is metallized. The BCB film waveguide mirrors are characterized with respect to waveguide attenuation and mirror reflectivity. The waveguide attenuation of the processed BCB waveguide is 0.5 dB/cm. Ag-coated BCB waveguide mirrors show a reflectivity of 71%. The efficiency of total internal reflection (TIR, i.e. in the case without metallization) at the dry-etched waveguide edge is 74%. As an application of the BCB waveguide mirrors a hybrid integrated optical module for Fourier-optical transverse mode selection in broad area lasers (BAL) is proposed. Received: 16 May 2001 / Published online: 23 October 2001     

Spin-cast planarization of liquid-crystal-on-silicon microdisplays

A simplified method for planarizing liquid-crystal-on-silicon (LCOS) backplanes is presented. The method relies on the planarizing capability of spin-cast benzocyclobutene (BCB) polymeric resin. BCB planarization shows a sixfold reduction in step height on the surface of a typical LCOS backplane. Contact with the underlying pixel circuitry is made by dry etching through openings in the BCB layer. Reflective metal (87% reflectivity) is deposited over the planarized surface and patterned to form high-aperture-ratio pixel mirrors (84%). An average resistance of 0.75 Omega per via was achieved with 3.6-microm-diameter vias in 2-microm-thick BCB. The method and the results of this LCOS backplane planarization and postprocessing are described.     

光谱法研究灿烂甲酚蓝与DNA的相互作用

利用紫外-可见(UV/Vis)光谱法研究了小分子染料灿烂甲酚蓝(BCB)与小牛胸腺DNA(ct DNA)的相互作用。实验表明,DNA在低浓度时,BCB能结合DNA形成1∶1的化合物,结合常数为4.3×104 L·mol-1,DNA与BCB的主要结合方式是“静电作用”方式;而在较高浓度时,则变成“嵌入作用”方式。为了进一步证明BCB分子嵌入到DNA, 利用了羟丙基-β环糊精(HP-β-CD)与BCB的包合行为来研究。实验证明,BCB分子能进入HP-β-CD的疏水性空腔形成包合物, 稳定常数为1.98×103 L·mol-1;高浓度DNA存在时,BCB分子从HP-β-CD空腔中离解而与DNA发生嵌入作用。据此可推断出BCB分子能嵌入到DNA的双螺旋沟槽中。BCB分子属经典的嵌入剂。     

采用BCB平整技术的高速850 nm垂直面发射激光器

垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯（BCB）平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7 μm氧化孔径下3 dB小信号调制带宽可达15.2 GHz。     

超薄LiTaO3晶片的键合减薄技术

在制造红外热释电探测器阵列过程中，需要利用超薄钽酸锂(LiTaO₃)晶片作为红外热释电探测器件的敏感层。通常LiTaO₃晶片的厚度远厚于红外热释电探测器件要求的厚度，所以需要采用键合减薄技术对LiTaO₃晶片进行加工处理。键合减薄技术主要包括：苯并环丁烯（BCB）键合、铣磨、抛光、加热剥离、刻蚀BCB。加工后得到面积为10mm×10mm、厚度为25μm的超薄单晶LiTaO₃薄膜，晶片厚度、表面粗糙度和面形精度比较理想。测得了LT晶片减薄后的热释电系数为1.6×10^-4Cm^-2K^-1。得到的单晶LiTaO₃薄膜满足红外热释电探测器敏感层的要求。     

Low-temperature sintering of M-type barium ferrite with BaCu(B2O5) additive

The aim of this work is to lower the sintered temperature of M-type barium ferrite (BaM) by BaCu(B₂O₅) (BCB) additives. The effects of BCB additives on the sintering behavior, structure and magnetic properties of BaM were also discussed. It was found that the sintered density, saturation magnetization and initial permeability of BaM are modified obviously as small amount of BCB (1-4 wt%) is added. Especially, when BaM with 3 wt% BCB was sintered at 900 °C, the single-phase BaM was obtained and showed excellent properties with sintered density of 4.88 g/cm³, saturation magnetization of 61.4 emu/g and initial permeability of 3.15. In addition, the SEM result revealed that the sample can be co-fired well with the Ag electrode at 900 °C. The reason for this was attributed to be the formation of the BCB liquid phase. It suggests that this M-type barium ferrite can be used as LTCC substrate for millimeter wave circulator, filter and other magnetic microwave devices.     

Ni/Au Schottky gate oxidation and BCB passivation for high-breakdown-voltage AlGaN/GaN HEMT

A new AlGaN/GaN high electron mobility transistor (HEMT) employing Ni/Au Schottky gate oxidation and benzocyclobutene (BCB) passivation is fabricated in order to increase a breakdown voltage and forward drain current. The Ni/Au Schottky gate metal with a thickness of 50/300 nm is oxidized under oxygen ambient at 500 C and the highly resistive NiO is formed at the gate edge. The leakage current of AlGaN/GaN HEMTs is decreased from 4.94 μA to 3.34 nA due to the formation of NiO. The BCB, which has a low dielectric constant, successfully passivates AlGaN/GaN HEMTs by suppressing electron injection into surface states. The BCB passivation layer has a low capacitance, so BCB passivation increases the switching speed of AlGaN/GaN HEMTs compared with silicon nitride passivation, which has a high dielectric constant. The forward drain current of a BCB-passivated device is 199 mA /mm, while that of an unpassivated device is 172 mA /mm due to the increase in two-dimensional electron gas (2DEG) charge.     

High-throughput fabrication of TERS probes using DC bias

Tip-enhanced Raman spectroscopy (TERS) has gained great attentions for sensitive characterization and super-resolution chemical imaging of various materials. The performance of TERS is mainly affected by the probe geometry, such as the diameter of the tip apex, surface roughness, etc. In this regard, the fabrication of a sharp apex from metal wire is the one of the most important factor for TERS experiments. Conventionally, the electrochemical etching is commonly used technique for fabricating those metallic probes. To avoid the surface defects, the pulsed bias was commonly employed in the electrochemical etching process. However, it would make the fabrication system to be complex and sophisticated. Here, we report an simple automated electrochemical etching systems using DC bias for the efficient fabrication of TERS probes. With our optimized condition for DC electrochemical etching, gold probes with a clean surface and a radius of curvature below 200 nm can be obtained with yield of 85%. The fabricated metallic probe is used to detect the brilliant cresyl blue (BCB) molecules on the gold film, and it is confirmed that the enhancement factor is about 3,400.     

Incorporation of Benzocyclobutene Cross-Linkable Moieties in Poly(Methyl Acrylate): A Novel Approach to Shape-Memory Polymers Accompanied with Microphase Separation

Benzocyclobutene (BCB) moieties were incorporated into a typical polyolefin, poly(methyl acrylate), by free radical copolymerization of benzocyclobutene-4-yl acrylate and methyl acrylate. The subsequent cross-linking of the generated copolymers by ring-opening reaction of BCB gave rise to shape-memory polymers. This new cross-linking process did not require cross-linker and yielded small molecules. Most importantly, submicron-sized particles within the cross-linked polymers, which were observed using atomic force microscope, were induced by this cross-linking strategy. The results of the shape-memory tests suggested that the cross-linked polymers displayed good shape-memory performance.     

Preparation and Raman Spectrum of Rutile Single Crystals Using Floating Zone Method

With anatase-type titanium dioxide as the raw materials, the futile type titanium dioxide single crystal is prepared using the floating zone method. The results of XRD measurement show that the grown crystal is highly crystalline with a futile structure, which has orientation to the c-axis. The four Raman vibration characteristic peaks （143, 240, 450 and 610 cm^-1） at room temperature show that the crystalline structure of the single crystal is a typical futile phase, meanwhile a new Raman peak at around 690 cm^-1 is found. The results of the Raman measurement at various temperatures for the single crystal show that the Raman frequency shifts are different.     

单个鼻咽癌细胞的拉曼光谱分析的研究

利用激光镊子拉曼光谱系统研究了鼻咽癌细胞株和正常人鼻咽部气道上皮细胞株的单个细胞的拉曼光谱,对于每个细胞在不同部位测3个点。结果显示：正常细胞和癌细胞的平均拉曼光谱有显著差异：正常的细胞光谱强度比癌细胞的明显要高;正常细胞的1304和1336 cm-1处峰的强度比值为1.05,癌细胞的为1.22。用PCA主成分分析和DFA判别分析分别对单个细胞的平均光谱和不同位置所取得的单独光谱进行分析,结果发现：PCA和DFA均可以把癌细胞和正常细胞正确区分,对于单独光谱,DFA的效果更好一些。同时还发现同一个细胞中不同的光谱位置对PCA和DFA的区分度影响不是很大;PCA和DFA的图中还表明癌细胞的均匀度要比正常细胞的差。以上的研究均表明：激光镊子拉曼光谱可以成为区别正常鼻咽细胞和鼻咽癌细胞的有效手段。     

Femtosecond stimulated Raman scattering picosecond molecular thermometry in condensed phases

We demonstrate the capability of femtosecond stimulated Raman scattering (FSRS) data to measure the temperature of condensed matter at the molecular vibrational level. We report the temperature dependence of Raman loss to Raman gain ratios for low frequency modes (<300 cm(-1)) in a CaCO3 single crystal from cryogenic to room temperature, which is shown to be in agreement with theoretical predictions. We also report the measurements of nonequilibrium time evolution of mode specific vibrational temperatures in the CaCO3 single crystal to demonstrate that FSRS can measure temperature on picosecond time scales. Finally, we point out the unique origin of this temperature dependent anti-Stokes to Stokes ratio in stimulated Raman, which is not present in other coherent Raman spectroscopies. These measurements require no material dependent parameters or prior calibration.     

Superconducting gap in MgB(2): electronic Raman scattering measurements of single crystals

Polarization-resolved Raman scattering measurements were performed on MgB(2) single crystals to determine the magnitude, symmetry, and temperature dependence of the superconducting gap. A single sharp peak due to Cooper pair breaking appears in the electronic continuum below T(c), reaching a maximum Raman shift of 105 +/- 1 cm(-1) [2 Delta(0)/k(B)T(c) = 3.96 +/- 0.09] and showing up to 5 cm(-1) anisotropy between polarized and depolarized spectra. The temperature dependence of 2 Delta follows that predicted from BCS theory, while the anisotropy decreases with decreasing temperature. It is concluded that the Raman results are consistent with a slightly anisotropic s-wave gap in a conventional BCS superconductor.     

Polarized Raman mapping study of the microheterogeneity in 0.67PbMg1/3 Nb2/3O3‐0.33PbTiO3 single crystal

Polarized micro‐Raman spectroscopy was carried out on the (001) face of a 0.67PbMg_1/3Nb_2/3O₃‐33%PbTiO₃ (PMN‐33%PT) single crystal. The Raman images revealed the spatial variations of the intensity of the Raman bands, suggesting that the structure in the PMN‐33%PT single crystal varied from one micro‐area to another. When changing the polarization direction of the incident light with respect to the selected crystalline axes, the intensities of the Raman modes varied periodically. According to the Raman selection rules (RSRs), the angular dependences of the Raman modes indicated that the PMN‐33%PT single crystal is in the monoclinic phase. Furthermore, the color patterns in the Raman images were associated with the coexistence of the M_A‐ and M_C‐type monoclinic phases in the PMN‐33%PT single crystal. Our results provide useful information for understanding the microheterogeneity of the relaxor PMN‐xPT single crystals with compositions near the morphotropic phase boundary region. Copyright © 2010 John Wiley & Sons, Ltd.     

Proposal for the measuring molecular velocity vector with single-pulse coherent Raman spectroscopy

Methods for simultaneous measurements of more than one flow velocity component using coherent Raman spectroscopy are proposed. It is demonstrated that using a kilowatt broad-band probe pulse (3–30 GHz) along with a megawatt narrow-band pump pulse (～100 MHz), coherent Raman signal resulting from a single laser pulse is sufficient to produce a high-resolution Raman spectrum for a velocity measurement.     

Microstructure and magnetic properties of low-temperature sintered CoTi-substituted barium ferrite for LTCC application

In this article, the influences of the BaCu(B₂O₅) (BCB) additive on sintering behavior, structure and magnetic properties of iron deficient M-type barium ferrite Ba(CoTi)_xFe_11.8−2xO₁₉ (BaM) have been investigated. It is found that the maximum sintered densities of BaM change from 86% to 94% as the BCB content varies from 1 to 4 wt%. Single-phase BaM can be detected by the XRD analysis in the sample with 3 wt% BCB sintered at 900 °C, and the microstructure is hexagonal platelets with few intragranular pores. This is attributed to the formation of the BCB liquid phase. Meanwhile, the experimental results illuminate that the CoTi ions prefer to occupy the 4f2 and 2b sites and the magnetic properties depend on the amount of CoTi-substitution. In addition, the chemical compatibility between BaM and silver paste is also investigated; it can be seen that BaM is co-fired well with the silver paste and no other second phase is observed. Especially, the 3 wt% BCB-added Ba(CoTi)_0.9Fe₁₁O₁₉ sintered at 900 °C has good properties with the sintered density of 4.9 g/cm³, saturation magnetization of 49.7 emu/g and coercivity of 656.6 Oe. These results indicate that it is cost effective in the production of Low Temperature Co-fired Ceramics (LTCC) multilayer devices.     

Raman spectroscopy of carbon nanotubes

The use of Raman spectroscopy to reveal the remarkable structure and the unusual electronic and phonon properties of single wall carbon nanotubes (SWNTs) is reviewed comprehensively. The various types of Raman scattering processes relevant to carbon nanotubes are reviewed, and the theoretical foundations for these topics are presented. The most common experimental techniques used to probe carbon nanotubes are summarized, followed by a review of the novel experimental findings for each of the features in the first order and second order Raman spectra for single wall carbon nanotubes. These results are presented and discussed in connection with theoretical considerations. Raman spectra for bundles of SWNTs, for SWNTs surrounded by various common wrapping agents, and for isolated SWNTs at the single nanotube level are reviewed. Some of the current research challenges facing the field are briefly summarized.     

基于SiPM和TCMPC的时间分辨拉曼散射测量技术研究

报道了一种基于硅光电信增管(SiPM)的时间相关多光子计数(TCMPC)技术并将其应用于时间分辨拉曼散射测量。相比于常规基于光电倍增管(PMT)或单光子雪崩二极管(SPAD)的时间相关单光子(TCSPC)技术,由于SiPM可以分辨信号脉冲的具体光子数,基于SiPM的TCMPC技术消除了信号脉冲包含的光子数必须小于等于1的限制,光子计数效率提高了10倍以上,大大节省了测量时间。此外,多光子测量比单光子测量能够得到更好的时间分辨率,时间分辨拉曼散射系统的仪器响应函数(IRF)从单光子81.4 ps缩短至双光子59.7 ps,因而可以用更窄的时间门限抑制荧光本底等噪声对拉曼散射测量的影响。使用TCMPC技术测量CCl₄在0.5和1.5 p.e.两个不同光子数阈值的拉曼峰的峰本比,后者较高的光子数阈值能进一步降低SiPM暗计数噪声的影响,增加了拉曼信号测量的信噪比,测量得到的CCl₄ 459 cm-1拉曼峰的峰本比是前者的6.4倍。将所述新的拉曼散射测量技术与基于PMT和锁相放大器(LIA)的传统拉曼散射测量技术进行了比较研究,前者由于可以使用仅有数十皮秒的测量门限,可以有效抑制荧光、环境杂散光和SiPM暗计数等噪声的影响,所得光谱具有更好的峰本比,测得CCl₄的459 cm-1拉曼峰和Si的一阶拉曼峰的峰本比分别是后者的3.9倍和5.5倍。     

Raman spectrum study of 3.3'-diethylthiatri carbocyanine iodide

3.3'-Diethylthiatricarbocyanine iodide (DTTC) dye is an important infrared Raman probe molecule, and has received great attention in the past decades due to their potential applications in Raman imaging, single cell detection, and tumor marker. In the present work, ordinary Raman, surface enhanced Raman scattering (SERS), and theoretical Raman spectra were given to estimate the Raman spectrum of DTTC suspension. More specifically, the original gold nanospheres (60-nm diameter) and gold nanorods (NRs) were encoded with DTTC and stabilized with a layer of thiol-polyethylene glycol (PEG) as Raman reporter, and SERS data were obtained from the samples. Density functional theory (DFT) calculation was applied to calculate the optimized Raman spectra of DTTC water solvent on a B3LYP/6-31G level. Subsequently, the obtained experimental spectra from the DTTC were carefully compared with the theoretically calculated spectra. From the spectra comparation, good agreements were obtained between the theoretical and experimental results. This work will facilitate the development of ultrasensitive SERS probes for advanced biomedical applications.