强飞秒激光烧蚀石英玻璃的超快时间分辨光学诊断

采用超快时间分辨的光学诊断技术对飞秒激光脉冲烧蚀石英玻璃的动态过程进行了实验研究.首先,对烧蚀过程中石英玻璃外部的物质喷射进行了数字全息记录,获得了不同延迟时间下探测光的二维相位差分布图,并由此推断出了喷射物的成分和结构.此外,对石英玻璃内部的现象进行了时间分辨阴影图记录,从阴影图中观察到了石英玻璃内部的两个应力波的演化过程.这两个应力波与目标靶外部的两次物质喷射相关. 关键词： 脉冲数字全息 飞秒激光烧蚀 超快时间分辨 应力波     

飞秒脉冲烧蚀单晶硅的超快动力学

利用基于Pump-probe系统的超快时间分辨阴影图的方法,研究了空气中飞秒激光烧蚀单晶硅的动力学过程。实验采用脉宽为50 fs、平均能量密度约35 J/cm2的单脉冲激光烧蚀单晶硅,获取飞秒激光烧蚀单晶硅过程中等离子体和冲击波的形成和发展过程的时间分辨阴影图。实验结果表明：飞秒激光烧蚀单晶硅导致其表面物质喷发的过程是不连续的,分为明显的两次喷发过程。这表明飞秒激光与单晶硅作用的过程中,在不同的时间段可能由不同的机制主导,在前期可能是多光子电离为主,在后期可能是由多光子效应和雪崩效应共同作用。研究还发现,延迟时间较长时,冲击波形状发生畸变。     

Physical mechanism of silicon ablation with long nanosecond laser pulses at 1064 nm through time-resolved observation

Nanosecond (ns) laser ablation can provide a competitive solution for silicon micromachining in many applications. However, most of the previous studies focus on ns lasers at visible or ultraviolet (UV) wavelengths. The research is very limited for ns lasers at infrared (e.g., 1064 nm) wavelengths (which often have the advantage of much lower cost per unit average output power), and the research is even less if the ns laser also has a long pulse duration on the order of ∼100 ns. In this paper, time-resolved observation using an ICCD (intensified charge-coupled device) camera has been performed to understand the physical mechanism of silicon ablation by 200-ns and 1064-nm laser pulses. This kind of work has been rarely reported in the literature. The research shows that for the studied conditions, material removal in laser silicon ablation is realized through surface vaporization followed by liquid ejection that occurs at a delay time of around 200-300 ns. The propagation speed is on the order of ∼1000 m/s for laser-induced plasma (ionized vapor) front, while it is on the order of ∼100 m/s or smaller for the front of ejected liquid. It has also been found that the liquid ejection is very unlikely due to phase explosion, and its exact underlying physical mechanism requires further investigations.     

Drilling enhancement by nanosecond-nanosecond collinear dual-pulse laser ablation of titanium in vacuum

Laser ablation of titanium in vacuum was performed using single- and dual-pulse regime in order to study crater formation. Crater profiles were analyzed by optical microscopy. It was found that the repetition-rate plays an important role in a process of laser ablation. The drilling is most effective for the highest repetition-rate. For the same total number of laser pulses clear drilling enhancement was achieved by dual-pulse regime of ablation in comparison to single-pulse regime. The strongest ablation rate in dual-pulse regime was achieved for the delay time between the pulses τ = 370 ns. Results are discussed in terms of decreased ablation threshold due to continuous heating of the target during the experiment.     

大气环境下飞秒激光对铝靶烧蚀过程的研究

利用时间分辨的光阴影成像技术研究了在大气环境下飞秒激光烧蚀铝靶的动态过程. 在入射激光能量为4 mJ, 激光光斑超过1 mm时, 激光烧蚀区表面物质以近似平面冲击波形式向外喷射; 在同样激光能量下、激光光斑较小时(约0.6 mm), 激光烧蚀区以近似半球型冲击波形式向外喷射. 当激光能量比较大时(7 mJ), 发现空气的电离对于激光烧蚀靶材有着重要影响. 在光轴附近烧蚀产生的喷射物具有额外的柱状和半圆型的结构, 叠加在平面冲击波结构上.     

SF6中氧化铝环氧复合材料的纳秒脉冲闪络特性

氧化铝掺杂环氧树脂复合材料在电力绝缘设备中应用广泛,然而人们对其在纳秒脉冲下的绝缘性能研究较少,这限制了它在指导脉冲功率装置中的应用。为探究其在纳秒脉冲下的沿面绝缘性能,对氧化铝掺杂环氧树脂复合材料在前沿数十ns快脉冲电压下的闪络特性进行了研究,结果显示,其闪络电场较纯环氧有较大提高,闪络电压符合韦伯分布。实验表明,闪络电压随电压上升率的增加而显著增加,从5.8 kV/ns时的108 kV上升到20.5 kV/ns时的226 kV,增幅超过1倍。闪络时延随电压上升率的上升呈现“先快速下降、后趋于平缓”的趋势。在试样闪络通道表面观测到明显的碳化现象,说明实验中的闪络放电对复合材料有破坏性影响。     

Material response during nanosecond laser induced breakdown inside of the exit surface of fused silica

The material response following nanosecond, UV laser induced breakdown inside of the exit surface of fused silica is investigated using multimodal time resolved microscopy. The study spans up to about 75 ns delay from the onset of material modification during the laser pulse through the observation of material ejection. A number of distinct processes were identified, including: a) the onset of optical absorption in the material arising from the buildup of an electronic excitation, b) the expansion of the hot modified region (plasma) along the surface and inside the bulk, c) the formation of radial and circumferential cracks, d) the swelling of the affected region on the surface and, e) the onset of ejection of material clusters at about 30 ns delay and its progression to a well‐defined jet by about 75 ns delay. Limited theoretical modeling is used to aid the interpretation of the data.     

fs/ns dual-pulse LIBS analytic survey for copper-based alloys

The quantitative analytic capability of a fs/ns dual-pulse Laser-Induced Breakdown Spectroscopy technique, based on the orthogonal reheating of a fs-laser ablation plume by a ns-laser pulse, is presented. In this work, it is shown how the effect played by the delay times between the two laser beams can vary the analytical response of this dual-pulse LIBS configuration. In order to address this task, the Sn, Pb and Zn calibration curves of five certified copper-based samples have been investigated. These calibration curves have been obtained, in air at atmospheric pressure, by integrating the emission data collected in two different inter-pulse delay zones, one in the delay interval of 1-41 μs, the other within the range of 46-196 μs. For drawing the species calibration curves, the emission intensities of the considered Pb(I), Sn(I) and Zn(I) electronic transitions have been normalized with a non-resonant Cu(I) emission line. The experimental results have shown that, by varying the inter-pulse delay between the two laser beams, complementary analytical results can be induced. By considering at once all data acquired within the inter-pulse delay time of 1-196 μs, this hypothesis has been strengthened. The calibration curves obtained in this way are characterized by excellent linear regression coefficients (0.988-0.999) despite of the large Sn, Pb and Zn compositional variation of the targets employed. The results presented reveal, for the first time, that, by taking into account the role played by the inter-pulse delay time between the two laser beams, the fs/ns dual-pulse LIBS configuration here used can be improved and provide very good opportunities for performing quantitative analysis of copper-based alloys.     

液相基质中微量金属元素Pb的激光诱导击穿光谱研究

通过单脉冲激光诱导击穿光谱技术（LIBS）,测定了Pb（NO3）2水溶液中微量重金属元素Pb的LIBS光谱。实验研究溶液中Pb元素的LIBS光谱信号的时间（300ns-1300ns）演化特性,得到了本实验的优化实验条件,光谱探测相对激光的延时为800ns,单脉冲激光能量35mJ。在最佳实验条件下测定Pb微量元素的LIBS定标曲线,计算得到LIBS用于Pb(NO3)2溶液中痕量金属元素分析的检测限为177ppm。     

超短脉冲激光烧蚀石墨产生的喷射物的时间分辨发射光谱研究

本文使用不同激光能流(18 J/cm²–115 J/cm²)和脉冲宽度(50 fs–4 ps)的超短脉冲激光在真空中(4×10^-4 Pa)烧蚀高定向热解石墨. 通过测量烧蚀喷射物的时间分辨发射光谱研究喷射物的超快时间演化. 在喷射物发射光谱中, 观察到了C₂基团的天鹅带光谱系统, 416 nm附近C₁₅基团的由电子能级¹Σ_u⁺ 和¹Σ_g⁺之间的振动跃迁产生的光谱峰以及连续谱. 50 fs, 115 J/cm²的脉冲激光烧蚀产生的喷射物的连续谱的强度衰减分为快速下降和慢速下降两个阶段(以20 ns时间延迟为分界). 这表明连续谱是由两种不同的组分贡献的. 快速下降阶段, 连续谱主要由碳等离子体通过韧致辐射产生; 慢速下降阶段, 连续谱主要由烧蚀后期产生的大颗粒碳簇的热辐射贡献. 实验结果还揭示了激光能流的提高, 会明显增加喷射物中碳等离子体和激发态C₂的含量, 但对质量稍大的C₁₅的影响较小; 此外, 50 fs脉冲激光烧蚀产生的连续谱的存在时间会随着激光能流的减小而增大, 这说明低能流更有利于在烧蚀后期产生碳簇. 脉宽主要影响喷射物连续谱的时间演化. 4 ps脉冲激光烧蚀产生的连续谱的整个时间演化过程明显慢于50 fs脉冲产生的连续谱.     

Investigation of plumes produced by material ablation with two time-delayed femtosecond laser pulses

We experimentally investigated and herewith reported the results of laser ablation of copper and gold with two time-delayed femtosecond laser pulses at 800 nm in vacuum. The ablation plume dynamic was monitored by fast plume imaging and time- and space-resolved optical emission spectroscopy. Optical microscopy was used to follow the ablation depth as a function of the delay between the two laser pulses. Nanoparticles deposition on mica substrates was analysed by atomic force microscopy.We estimate roughly the plume's atomization degree - that is the mass fraction of atomized material over the total ablated mass - from the relative intensities of radiation emitted from atoms and nanoparticles. It is shown that the atomization degree depends critically on the time delay between both laser pulses and on the characteristic time of electron-lattice relaxation. The increase of the atomization degree is accompanied by the decrease of the ablation depth. Atomic force microscopy measurements confirm the partial atomization of nanoparticles, as the analyses of particle deposition on mica substrates show a large decrease of the number of nanoparticles for large delay between the two pulses.     

Spectral measurements of incipient plasma temperature and electron number density during laser ablation of aluminum in air

Plasmas generated during incipient laser ablation of aluminum in air were studied using emission spectroscopy. A plasma emission model was developed, invoking one-dimensional radiative transfer, to describe the observed emission spectra, while taking into account the effects of continuum radiation. Theoretical spectra were calculated and compared to experimental spectra in the range 387–406 nm. Satisfactory agreement was found between the experimental and predicted spectra, especially at delay times of 30–200 ns, thus providing plasma temperatures and electron number densities as functions of delay time and laser irradiance (1.8–8.0 GW/cm²). In general, both the plasma temperature and electron number density rise at greater laser irradiances but drop at increasing delay times, with a more rapid drop for delay times less than 60 ns. PACS 42.62.Fi; 52.25.-b     

自触发紫外预电离开关脉冲击穿时延抖动影响因素及改进方法

研究了一种自触发紫外预电离开关击穿时延抖动特性的影响因素,结果表明:触发间隙电容放电阶段起预电离作用时,预电离注入时刻开关电场是开关时延抖动的决定性因素,提高工作系数和采用逸出功更低的电极材料对降低开关在脉冲峰值附近击穿时的时延抖动效果有限。提出的改进方法为:减小开关均压电阻阻值,显著延长触发间隙的有效燃弧时间,消除预电离注入时间及抖动的影响。采用改进方法时可以使开关在工作电压300～800 kV、前沿100 ns、180 ns的脉冲峰值附近击穿时的时延抖动分别小于1.3 ns、2.8 ns。     

纳秒激光烧蚀冲量耦合数值模拟

为研究激光烧蚀靶产生冲量过程和机理, 建立了一个复杂的一维热传导和流体动力学模型. 以空间碎片常见材料Al为例, 用建立的模型数值计算了纳秒脉宽激光烧蚀靶产生的冲量及冲量耦合系数随时间变化情况. 数值结果和已有的实验数据符合的较好. 数值计算表明: 激光脉冲时间内, 靶获得的冲量随时间迅速增加, 在脉冲时间结束后, 冲量变化随时间趋于稳定; 在冲量耦合过程中, 烧蚀等离子体向真空膨胀, 羽流尺度逐渐增大, 同时吸收入射激光能量, 导致激光与靶耦合的能量降低. 关键词： 激光烧蚀 冲量耦合 等离子体     

Femtosecond uv excimer laser ablation

Experiments on the ablation of polymethylmethacrylate (PMMA) with 300 fs uv excimer laser pulses at 248 nm are reported for the first time. With these ultrashort pulses, ablation can be done at fluences up to five times lower than the threshold fluence for 16 ns ablation of PMMA, and the surface morphology is improved, also for several other materials. A model for ablation is proposed, assuming a non-constant absorption coefficient _eff depending on the degree of incubation of the irradiated material and the intensity of the incoming excimer laser pulse. The agreement between our model and our experimental observations is excellent for 16 ns excimer laser pulses, also predicting perfectly the shape of a pulse transmitted through a thin PMMA sample under high fluence irradiation. Qualitative agreement for 300 fs excimer laser pulses is obtained so far.     

基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.     

Influence of laser fluence and irradiation timing of F2 laser on ablation properties of fused silica in F2-KrF excimer laser multi-wavelength excitation process

A collinear irradiation system of F₂ and KrF excimer lasers for high-quality and high-efficiency ablation of hard materials by the F₂ and KrF excimer lasers’ multi-wavelength excitation process has been developed. This system achieves well-defined micropatterning of fused silica with little thermal influence and little debris deposition. In addition, the dependence of ablation rate on various conditions such as laser fluence, irradiation timing of each laser beam, and pulse number is examined to investigate the role of the F₂ laser in this process. The multi-wavelength excitation effect is strongly affected by the irradiation timing, and an extremely high ablation rate of over 30 nm/pulse is obtained between -10 ns and 10 ns of the delay time of F₂ laser irradiation. The KrF excimer laser ablation threshold decreases and its effective absorption coefficient increases with increasing F₂ laser fluence. Moreover, the ablation rate shows a linear increase with the logarithm of KrF excimer laser fluence when the F₂ laser is simultaneously irradiated, while single KrF excimer laser ablation shows a nonlinear increase. The ablation mechanism is discussed based on these results. Received: 16 July 2001 / Accepted: 27 July 2001 / Published online: 2 October 2001     

激光触发伪火花开关的研究

通过等离子体建模仿真及物理实验结合的方式验证了激光触发伪火花开关的可行性。分别使用波长266 nm和532 nm的激光,对激光触发伪火花开关的最低激光触发能量、阳极着火延迟时间和时间跳动三项参数进行测试。在非聚焦模式下,仅调整激光能量,测得开关在波长266 nm激光触发下,最低触发能量为15 mJ,该触发能量下,阳极着火延迟时间约为340 ns,时间跳动约为40 ns;在波长532 nm激光触发下,最低触发能量为83 mJ,该触发能量下,阳极着火延迟时间约为420 ns,时间跳动约为60 ns。在维持实验平台不变的情况下,仅对入射激光进行聚焦,测得波长266 nm激光触发下,最低触发能量为4 mJ,当触发能量8 mJ时,阳极着火延迟时间190 ns,开关时间跳动小于1 ns;波长532 nm激光触发下,最低触发能量为6 mJ,当激光触发能量为8 mJ时,阳极着火延迟时间240 ns,开关时间跳动小于1 ns。     

Effects of pulse energy ratios on plasma characteristics of dual-pulse fiber-optic laser-induced breakdown spectroscopy

Laser-induced plasmas of dual-pulse fiber-optic laser-induced breakdown spectroscopy with different pulse energy ratios are studied by using the optical emission spectroscopy(OES)and fast imaging.The energy of the two laser pulses is independently adjusted within 0–30 m J with the total energy fixed at 30 m J.The inter-pulse delay remains 450 ns constantly.As the energy share of the first pulse increases,a similar bimodal variation trend of line intensities is observed.The two peaks are obtained at the point where the first pulse is half or twice of the second one,and the maximum spectral enhancement is at the first peak.The bimodal variation trend is induced by the change in the dominated mechanism of dual-pulse excitation with the trough between the two peaks caused by the weak coupling between the two mechanisms.By increasing the first pulse energy,there is a transition from the ablation enhancement dominance near the first peak to the plasma reheating dominance near the second peak.The calculations of plasma temperature and electron number density are consistent with the bimodal trend,which have the values of 17024.47 K,2.75×10¹⁷cm;and 12215.93 K,1.17×10¹⁷cm;at a time delay of 550 ns.In addition,the difference between the two peaks decreases with time delay.With the increase in the first pulse energy share,the plasma morphology undergoes a transformation from hemispherical to shiny-dot and to oblate-cylinder structure during the second laser irradiation from the recorded images by using an intensified charge-coupled device(ICCD)camera.Correspondingly,the peak expansion distance of the plasma front first decreases significantly from 1.99 mm in the single-pulse case to 1.34 mm at 12/18(dominated by ablation enhancement)and then increases slightly with increasing the plasma reheating effect.The variations in plasma dynamics verify that the change of pulse energy ratios leads to a transformation in the dual-pulse excitation mechanism.     

Laser ablation of copper based alloys by single and double pulse laser induced breakdown spectroscopy

Single and double pulse laser induced breakdown spectroscopy was applied to the analysis of copper based alloys samples, in order to investigate the material ablation process under two different experimental conditions. An Nd:YAG laser, emitting at the fundamental wavelength (1064 nm) for a fixed value of total energy with the same pulse width, has been used for both set-up configurations. Certified samples of copper based alloys were examined in order to investigate the effect of their different compositions on the ablation process efficiency. The craters produced by the laser on the samples surfaces were measured by a contact profilometer in order to evaluate the mass of ablated material. In this respect the differences in behaviour of the single and the double pulse ablation for Laser Induced Breakdown Spectroscopy (LIBS), respectively, have been considered. The dependence, under the same experimental conditions, of the LIBS background emission of the different ablated masses of the material has also been investigated, by looking for normalization algorithms for quantitative data reduction.The behaviour of some peculiar intensity ratios, suitable for building calibration curves, has been studied in order to evaluate the trend in fractionated evaporation on going from the single pulse to the double pulse technique. PACS 52.70.-m; 52.50.Jm; 42.62.Fi