The characterization of capacitive micromachined ultrasonic transducers in air

Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. They exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz, when driven from a standard ultrasonic voltage source. Experiments are described using 1 mm square devices in air, operating in both pitch-catch and pulse-echo modes. The dependence on d.c. bias voltage is examined, together with calibration measurements using 1/8 in. microphones. The radiated beam profile, and the farfield directivity pattern, have been measured for both broad bandwidth and one-burst excitation, using a scanned miniature receiver. A 16 element square array is also presented, which has been used to measure the beam cross-sections from a focussed source.     

Radiated fields of capacitive micromachined ultrasonic transducers in air

This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs. The good agreement between theory and experiment indicates that the devices can be approximated to plane piston radiators. The fields of multiple elements driven in phase on the same silicon substrate are presented, where again comparison is made to theory. The results indicate that individual elements are unaffected by radiation through the silicon substrate from adjacent devices. It will also be demonstrated that it is possible to use the knowledge of these fields to develop air-coupled ultrasonic surface imaging systems.     

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

A multiscale model for array of capacitive micromachined ultrasonic transducers

A model is developed for studying the acoustic behavior of a cMUT array. This model is based on separate calculations of the terms describing the behavior of a single cMUT on one hand, and those corresponding to acoustic mutual coupling on the other hand. The terms are combined into an equivalent circuit with matrix terms which displays only one degree of freedom per cell. This approach allows the simulation of several dozen cMUTs considered individually with a very short computer time. A Finite Difference model is used for the simulation of an isolated cell radiating acoustic energy and the determination of its equivalent electromechanical circuit. It is shown for various mutual coupling situations that the coupling between cells can be correctly approximated using a very simple mutual impedance term. The model is compared with experimental results, using a set of different cMUT configurations. Experimental results were obtained with electrical impedancemetry and laser interferometry techniques performed in fluid immersion.     

Modelling of the radiated field from multi-element capacitive micromachined ultrasonic transducers

This paper presents results from a theoretical model of the ultrasonic fields radiated by a 3x3 assembly of capacitive micromachined ultrasonic transducer (cMUT) sources on the same silicon substrate. These predictions have, for the first time, been compared directly to the fields measured experimentally using a scanned miniature detector. This work indicates that there is minimal cross-coupling between source elements, and demonstrates that it is possible to predict successfully the field characteristics of various geometries of such cMUT elements, with a view to the development of future imaging systems.     

Structural health monitoring using polymer-based capacitive micromachined ultrasonic transducers (CMUTs)

Transducers based on a capacitive micromachined ultrasonic transducer (CMUT) design have been fabricated using a rapid prototyping technique. This results in a device that is constructed principally from polymers, in a process which is simple and inexpensive. The resultant devices can be attached to the surfaces of solids. Their peak sensitivity is in the 80–100 kHz range, making them ideal for applications such as acoustic emission and structural health monitoring. Good low frequency sensitivity leads to applications in vibration monitoring.     

空气耦合电容式微超声换能器设计

建立了空气耦合电容式微超声换能器(CMUT)的理论方法,分析CMUT各个结构参数对其性能参数的影响。根据理论分析结果结合无损检测应用背景设计了一个由16个阵元构成的CMUT阵列,并采用SOI晶圆键合工艺制作。该阵列每个阵元包含16个圆形CMUT敏感单元,敏感单元的半径400μm,中心频率230 kHz。建立CMUT发射和接收瞬态仿真模型分别得到CMUT发射声压和接收灵敏度与激励电压的关系,并通过实验测试验证该仿真模型的准确性。最后通过实验对CMUT与商用压电空耦超声换能器的性能进行对比,实验结果表明CMUT的发射声压和接收灵敏度与商用换能器达到相同数量级,并且能够成功激发和接收铝合金板中A_0模态Lamb波。     

PSpice modeling of capacitive microfabricated ultrasonic transducers

Capacitive microfabricated ultrasonic transducers (cMUTs) are the newest and potentially the most promising devices to convert electrical into acoustic signals and vice-versa. These devices are based on the capacitance modulation of a microcondenser which is obtained by microfabrication onto a silicon substrate. The aim of this paper is to describe a PSpice model of the cMUT, based on an analytical distributed model previously reported (IEEE Trans. UFFC 49 (2) (2002) 159-168), which can be used to simulate the performances of a general ultrasound system, either in frequency or time domain. The PSpice model consists of a capacitor with a parallel resistor, which represent the static capacitance and the loss and bias resistances of the transducer, respectively, plus two quadrupoles (GLAPLACE) modeling the mechanical impedance of the membranes and the radiation impedance of the medium. The usefulness of a PSpice model is the possibility to simulate and optimize the cMUT transducers in transmission and reception, along with driving and receiving electronics, in a general ultrasound system. Experimental measurements on a 5 MHz cMUT operating in pulse-echo are in good agreement with model predictions.     

Medical imaging using capacitive micromachined ultrasonic transducer arrays

We are investigating the use of capacitive micromachined ultrasonic transducers (cMUT's) for use in medical imaging. We propose an ultrasound probe architecture designed to provide volumetric ultrasound imaging from within an endoscope channel. A complete automated experimental system has been implemented for testing the imaging performance of cMUT arrays. This PC-based system includes custom-designed circuit boards, a software interface, and resolution test phantoms. We have already fabricated 1D and 2D cMUT arrays, and tested the pulse-echo imaging characteristics of 1D arrays. Beamforming and image formation algorithms that aim to reduce the complexity of data acquisition hardware are tested via numerical simulations and using real data acquired from our system.     

Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage. The major design novelty is the isolation posts in the vacuum cavities of the CMUT cells instead of full-coverage insulation layers in conventional CMUTs. This eliminates the contact voltage drifting due to charging caused by the insulation layer, and enables repeatable CMUT operation in the post-contact regime. Ultrasonic tests of the CMUTs with isolation posts (PostCMUTs) in air (electrical input impedance and capacitance vs. bias voltage) and immersion (transmission and reception) indicate acoustic performance similar to that obtained from conventional CMUTs while no undesired side effects of this new design is observed.     

The effects of membrane metallization in capacitive microfabricated ultrasonic transducers

The mechanical effects of the metal layer on the membranes of capacitive micromachined ultrasonic transducers (CMUTs) are analyzed in this paper by means of finite element simulations. The influence of electrode size and thickness on the electrostatic behavior of the single CMUT cell, including diaphragm displacement, cell capacitance, and collapse voltage, is explored. The effect on device sensitivity is investigated through the transformation factor of the cell, that is computed by FEM and compared with the parallel plate model prediction. It is found that for a non-negligible electrode thickness, as in the majority of fabricated devices, both the static and dynamic performance of the cell can be affected in a significant way. Thus, the effects of membrane metallization must be taken into account in CMUT design and optimization.     

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: Capability and limitations

The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design considerations that we have presented putting a low cost, highly accessible means of making cMUT devices into the hands of academic and industrial researchers.     

面向电容式微机械超声换能器器件的32通道收发 电路设计与测试*

针对以电容式微机械超声换能器(CMUT)阵列为探头的超声成像系统,设计了一种兼具现场可编程门阵列(FPGA)控制、脉冲驱动以及微弱电流信号检测功能的电路。利用FPGA产生64路控制信号,控制脉冲信号的频率、脉冲个数、占空比等参数;脉冲电路在FPGA以及直流电压的控制下,产生32路脉冲信号;接收电路通过跨阻放大结构实现32路电流信号检测;32通道收发电路利用脉冲产生芯片内自带的T/R开关进行高压隔离。通过搭建测试平台,对收发电路功能及一致性进行测试,并连接CMUT进行自发自收测试。测试结果表明,32通道收发电路具有良好的一致性,电路可以实现基于CMUT阵列的32通道超声信号的发射,检测回波信号,并对CMUT器件的带宽进行测试。电路具有功能完善,结构稳定的优点,为基于CMUT阵列的超声成像系统的应用提供了硬件支持。     

Piezoelectrically actuated flextensional micromachined ultrasound transducers

This paper presents novel micromachined two-dimensional array piezoelectrically actuated flextensional transducers that can be used to generate sound in air or water. Micromachining techniques to fabricate these devices are also presented. Individual unimorph array elements consist of a thin piezoelectric annular disk and a thin, fully clamped, circular plate. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz with 0.15 microm/V peak displacement. The devices have a range of operating resonance frequencies starting from 450 kHz up to 4.5 MHz. Such an array could be combined with on-board driving and addressing circuitry for different applications.     

Optimization of ultrasonic transducers

The so-called KLM-model for ultrasonic transducers is employed to optimize transducer design. Some new performance characteristics are defined which change monotonically with design parameters. These characteristics are based on the area of the envelope of the echo waveform produced by the transducer and of the corresponding amplitude spectrum. The efficiency of the transducer is defined by the round trip energy factor. The performance characteristics are used in a composite performance measure, which is then employed as a criterion in the optimization procedure. Two transducers are investigated: for medical imaging purposes and for spectral analysis of clinical echograms. The influence of electrical matching, backing impedance, matching layer impedance, bond line thickness and series induction on the optimized transducers is investigated.     

Ferroelectret non-contact ultrasonic transducers

Dielectric and electromechanical properties of the cellular polypropylene ferroelectret films (EMFIT), combining strong piezoelectric response with a low density and softness, evidence their high potential for the air-coupled ultrasonic applications. The disadvantage of the low coupling factor is compensated by the extremely low acoustic impedance, which provides excellent matching to air and promises efficient sound transmission through the air–transducer interface. The influence of the electrodes on the electromechanical properties was investigated. Electron beam evaporation technology was adapted to the EMFIT films, and films with both-sided Au and Al electrodes were prepared without reducing or suppressing of the electromechanical properties. Finally, prototype transducers based on the EMFIT films were developed. In spite of the simple construction and absence of matching layers, high sensitivity of the EMFIT transducers was proved in the air-coupled ultrasonic experiment. Amplitude and delay time scanned images of the polyethylene step wedge with holes, obtained in both pulse-echo and transmission modes, demonstrate that non-contact ultrasonic imaging and testing with EMFIT transducers is possible. PACS 43.35.+d; 43.38.+n; 43.35.Zc; 43.38.-p     

Model-based optimization of ultrasonic transducers

Numerical simulation and automated optimization of Langevin-type ultrasonic transducers are investigated. These kind of transducers are standard components in various applications of high-power ultrasonics such as ultrasonic cleaning and chemical processing. Vibration of the transducer is simulated numerically by standard finite element method and the dimensions and shape parameters of a transducer are optimized with respect to different criteria. The novelty value of this work is the combination of the simulation model and the optimization problem by efficient automatic differentiation techniques. The capabilities of this approach are demonstrated with practical test cases in which various aspects of the operation of a transducer are improved.     

面向水下应用的电容式微机械超声换能器*

电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。     

High-frequency broadband transducers of ultrasonic oscillations

The amplitude-frequency responses (AFRs) of ultrasonic oscillation transducers based on piezoelectric lithium iodate crystals of hexagonal modification and on magnetic soft ferrite powders are experimentally studied. The possibility to control the efficiency of magnetostriction powder transducers (MPTs) by variation in the value and orientation of the external magnetic field is shown. Results of measurements of the transformation efficiency for ferrites of various chemical compositions are presented.     

Comparative study of wide-band ultrasonic transducers

The relative performance of several types of ultrasonic transducer are assessed using reproducible acoustic transients generated from Q-switched Nd:YAG laser pulses incident on an aluminium alloy sample. A laser interferometer, a capacitance transducer, two types of electromagnetic acoustic transducers (EMATs), and a broad-band piezoelectric transducer are examined as detectors. The comparison includes a study of their rise-times, and typical signal-to-noise ratios. In the case of the interferometer and capacitance transducer, displacement measurements are shown to be highly consistent with theory.