掺杂对GaN晶体力学性能影响的研究

对GaN单晶力学性能的研究有助于解决其在生长、加工和器件应用中的开裂问题。本文围绕掺杂对GaN单晶力学性能的影响,通过纳米压痕法测试了不同掺杂类型(非掺、Si掺和Fe掺)GaN单晶的弹性模量和硬度,测试结果表明掺杂对GaN单晶的硬度有重要影响。Si掺、Fe掺GaN较非掺样品硬度有所提升,用重掺杂的氨热GaN单晶作为对照,也证明了这一结论。通过高分辨X射线衍射分析和原子力显微镜表征实验发现,晶体结晶质量、接触面积等因素对GaN单晶硬度的影响较小。对GaN表面纳米压痕滑移带长度和晶体晶格常数进行测试,结果表明,掺杂影响GaN单晶硬度的主要原因是缺陷对GaN位错增殖、滑移的阻碍作用和掺杂引起的GaN晶格常数的变化。     

LPE生长GaN的不同极性面的光学性质

极化效应会导致GaN基发光器件的效率降低,因此关于非极性和半极性GaN单晶的研究受到了广泛关注.为了进一步探究不同极性GaN的发光特性和杂质掺入的内在机理,本文利用钠助熔剂法侧向生长出的不同极性面的GaN单晶作为研究对象,对比了不同极性面的光学性质及杂质掺入特点,讨论了黄光带(YL)峰的起源及其影响因素.首先利用阴极荧...     

Oxygen and hydrogen profiles and electrical properties of unintentionally doped gallium nitride grown by hydride vapor phase epitaxy

Commercially available hydride vapor phase epitaxy gallium nitride (GaN) is characterized with the aim to correlate the oxygen and hydrogen secondary ion mass spectrometry profiles of a GaN wafer with the electrical properties of the sample. A GaN layer model, including doping profile and mobility, is derived, utilizing electrical (capacitance–voltage, Hall), structural (high resolution X‐ray diffraction) and optical (polarized infrared spectroscopy) methods. Oxygen and hydrogen are easily incorporated during hydride vapor phase epitaxy growth of GaN. Oxygen is an n‐type dopant in GaN, whereas hydrogen may passivate some of the donors. Electrical and optical properties correlate with a low defect concentration top GaN layer and a high defect concentration GaN interlayer.     

Evidence of free carrier concentration gradient along the c-axis for undoped GaN single crystals

Results of measurements of infrared reflectivity and micro-Raman scattering on the undoped GaN high pressure grown single crystals are reported. These crystals have usually a high electron concentration due to unintentional doping by oxygen. We show, by the shift of the plasma edge (infrared reflectivity measurements), that the free electron concentration is always higher on the (0 0 0  )N face of the GaN single crystal than on the (0 0 0 1)Ga face. In order to determine the profile of the free carrier concentration, we performed transverse micro-Raman scattering measurements along the (0 0 0 1) c-axis of the crystal with spatial resolution of 1 μm. Micro-Raman experiments give a quantitative information on the free carrier concentration via the longitudinal optical phonon–plasmon (LPP) coupling modes. Thus, by studying the behavior of the LPP mode along the c-axis, we found the presence of a gradient of free electrons. We suppose that this gradient of electrons is due to the gradient of the main electron donor, in undoped GaN single crystals, i.e. oxygen impurity. We propose a growth model which explains qualitatively the incorporation of oxygen during the growth of GaN crystal under high pressure of nitrogen.     

Microstructure and cathodoluminescence study of GaN nanowires without/with P‐doping

In this work, P‐doped GaN nanowires were synthesized in a co‐deposition CVD process and the effects of P‐doping on the microstructure and cathodoluminescence (CL) of GaN nanowires were studied in details. SEM observation and CL measurments demonstrated that P‐doping has led to a rough morphology evolution and a depression of the band‐gap emission of GaN nanowires, whereas the visible emission of GaN nanowires was obviously enhanced. Finally, the corresponding morphology transition and optical properties of GaN nanowires with P‐doping were discussed. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Efficiency optimization of p-type doping in GaN:Mg layers grown by molecular-beam epitaxy

The Mg-doping efficiency in GaN layers grown by molecular-beam epitaxy has been studied as a function of the growth temperature, the growth rate, and the Mg beam flux. The Mg cell temperature window for efficient p-type doping is rather narrow, being limited by the GaN n-type background doping density (lower limit) and by the Mg surface coverage that, beyond a threshold, induces a layer polarity inversion (N-polarity), leading to a reduction of the Mg incorporation (upper limit). An increase of the growth temperature avoids this polarity inversion, but the Mg flux must be increased to compensate the strong desorption rate. Thus, a trade-off between both temperatures has to be reached. A reduction of the growth rate has a strong effect on the p-type doping level, yielding up to 7×10¹⁷ holes/cm³ for a total Mg concentration of 1×10¹⁹ cm⁻³. This high Mg concentration does not seem to generate Mg-related defects or deep traps.     

Differences in nucleation and properties of InN islands formed using two different deposition procedures

The initial stages of metalorganic chemical vapor deposition of InN have been investigated using two different growth procedures: growth of InN over a GaN buffer layer in one continuous run and growth of InN on a pre-deposited GaN template. While the growth conditions and material quality of the GaN underlying layers are nominally the same, characterization by AFM, X-ray diffraction and PL spectroscopy reveals significantly different material properties of InN islands formed using the two procedures and suggests a different path of evolution during the initial stages of growth. In particular, InN islands grown on a pre-deposited GaN template seem to nucleate directly on the GaN template and are 5 times larger in volume and 2 times lower in surface density as compared with InN growth in one continuous run with the GaN underlying layer. Our studies suggest that the Ga incorporation into the InN during the growth on a GaN buffer layer in one continuous run plays a significant role in altering InN growth mechanisms and material properties.     

GGA+U方法研究C与Ti掺杂GaN的电子结构和光学性质

作为一种优良的半导体材料,GaN所具有的宽禁带导致其只能吸收可见光中的紫光,因此如何增加GaN材料对可见光的利用率是一个值得研究的问题,掺杂是解决这个问题常用的手段。本文利用第一性原理的方法对本征GaN,C单掺、Ti单掺、C-Ti共掺GaN四种体系的电子结构和光学性质做了计算和分析,结果表明:掺杂后的体系都具有良好的稳定性;掺杂后各体系的体积均增大,说明杂质的引入使体系晶格发生畸变,对光生空穴-电子对的分离有促进作用,进而提高材料的光催化性能;杂质元素的引入使体系能级发生劈裂,电子跃迁更加容易;掺杂后各体系的介电函数虚部主峰均向低能区移动,吸收谱均红移至可见光区域,其中共掺体系在蓝绿光区域的吸收系数最大,由此可以推测C-Ti共掺有助于提高GaN的光催化性能。     

Compensation effect of Mg-doped a- and c-plane GaN films grown by metalorganic vapor phase epitaxy

The electrical and optical properties of Mg-doped a- and c-plane GaN films grown by metalorganic vapor phase epitaxy were systematically investigated. The photoluminescence spectra of Mg-doped a- and c-plane GaN films exhibit strong emissions related to deep donors when Mg doping concentrations are above 1×10²⁰ cm⁻³ and 5×10¹⁹ cm⁻³, respectively. The electrical properties also indicate the existence of compensating donors because the hole concentration decreases at such high Mg doping concentrations. In addition, we estimated the N_D/N_A compensation ratio of a- and c-plane GaN by variable-temperature Hall effect measurement. The obtained results indicate that the compensation effect of the Mg-doped a-plane GaN films is lower than that of the Mg-doped c-plane GaN films.     

Homoepitaxial growth and electrical characterization of GaN-based Schottky and light-emitting diodes

Homoepitaxial growth of GaN epilayers on free-standing hydride vapor phase epitaxy (HVPE) GaN substrates offered a better control over surface morphology, defect density, and doping concentration compared to conventional heteroepitaxial growth. The FWHM of the (0 0 0 2) X-ray diffraction (XRD) rocking curve from homoepitaxial GaN was measured to be as low as 79 arcsec, much smaller than 230 arcsec for GaN grown on sapphire. Schottky diodes grown on GaN substrates exhibited sharper breakdown characteristics and much lower reverse leakage than diodes on sapphire. However, the homoepitaxial devices had poor scalability due to the presence of yield-killing defects originating from the substrate surface. Vertical InGaN/GaN light-emitting diodes (LEDs) on GaN substrates showed reduced series resistance and reverse leakage compared to lateral LEDs on sapphire. Wafer mapping demonstrated that the distribution of leaky homoepitaxial devices correlated well with that of macroscopic defects in the GaN substrates.     

Fabrication of a freestanding GaN layer by direct growth on a ZnO template using hydride vapor phase epitaxy

A new hydride vapor phase epitaxy (HVPE)-based approach for the fabrication of freestanding GaN (FS-GaN) substrates was investigated. For the direct formation of low-temperature GaN (LT-GaN) layers, the growth parameters were optimized: the polarity of ZnO, the growth temperature, and the V/III ratio. The FS-GaN layer was achieved by gas etching in an HVPE reactor. A fingerprint of Zn out-diffusion was detected in the photoluminescence measurements, especially for the thin (80 μm) FS-GaN film; however, a thicker film (400 μm) was effectively reduced by optimization of GaN growth.     

MOVPE Growth and Characterisation of Zn‐Doped (GaIn)P Layers with Respect to Surface Structure and Ordering

(GaIn)P grown on (001)GaAs substrates by metal‐organic vapour phase epitaxy (MOVPE) is highly ordered material. In this work the effect of Zn doping on the epitaxial crystal growth, the ordering behaviour and the surface morphology is investigated. Zn‐doped (GaIn)P layers, grown with phosphine (PH₃), tertiarybutylphosphine (TBP) and ditertiarybutylphosphine (DitBuPH) as phosphorous precursors, reveal a strong drop of the binary growth rate of InP r_InP with increasing Zn/III ratio, whereas r_GaP remains nearly constant. The Zn doping efficiency and the ordering behaviour are observed to be dependent on the misorientation of the substrates. Finally, the surface morphology as a function of the different parameters was analysed by atomic force microscopy (AFM), and no considerable change of the growth mechanism was found for Zn‐doped layers in comparison to undoped layers.     

锌离子掺杂HA晶须形成过程及其热稳定性能研究

锌离子掺杂羟基磷灰石(HA)不仅影响HA的晶体结构和微观形貌,还影响材料的热稳定性和生物学性能。本文采用水热合成法制备了锌离子掺杂HA(Zn-HA)晶须,通过XRD、FTIR和SEM等测定和研究了Zn-HA的晶体结构、形成过程、结晶形貌和热稳定性。结果表明,Zn²⁺掺杂量<5%时,可获得单相Zn-HA晶须;当Zn²⁺掺量为5%时,合成产物中开始有少量的CaZn₂(PO₄)₂·2H₂O杂质相生成;当增加至8%时,开始有明显的Zn(PO₃)₂杂质峰出现。随水热合成温度的增加,溶液的OH^-不断释放,伴随HA晶核的形成和生长,还有极少量的CaZn₂(PO₄)₂·2H₂O和Ca₃(PO₄)₂杂质相,并通过溶解再沉淀生成Zn-HA。当Zn     

Effects of dimethylhydrazine on Zn, C, and H doping of GaP

Surfactants are beginning to be used during vapor-phase growth to provide control of the materials characteristics of epitaxial layers. This paper reports the effects of utilizing N, from pyrolysis of dimethylhydrazine (DMHy), as a surfactant during the organometallic vapor-phase epitaxial growth of GaP. Nitrogen is isoelectronic with the group V host element; thus, it generates no free carriers. Additionally, due to its small size, N is strongly rejected from the solid, so little incorporation is expected. This is confirmed by the determination of the very low N distribution coefficient (3.2×10⁻⁵). Using secondary ion mass spectroscopy analysis, we observe an increase in the distribution coefficient of the acceptor Zn when DMHy is added during growth, resulting in an increase in the doping efficiency by nearly an order of magnitude. Furthermore, the Zn doping efficiency increases linearly with the amount of DMHy added during growth over the range of partial pressures from 2.83×10⁻⁴ to 2.20×10⁻³ atm. The increase of doping for Zn is believed to be mainly a N surfactant effect. The addition of DMHy also leads to increases in both H and C incorporation. The concentrations of both are linear functions of DMHy concentration. Both H and C incorporation most likely arise mainly from pyrolysis of the DMHy. We propose a simple mechanism for the surfactant effect due to an increase in the Zn incorporation coefficients at the step edge induced by the presence of N (and probably H) on the surface.     

基于钠助熔剂法的GaN单晶生长研究进展

宽禁带氮化镓(GaN)材料以其独特的性质和应用前景成为国内外研究的热点,高质量GaN单晶衬底的制备是获得性能优异的光电子器件和功率器件的基础。钠助熔剂法生长条件温和,易获得高质量、大尺寸的GaN单晶,是一种具有广阔商业化前景的GaN单晶生长方法。钠助熔剂法自20世纪90年代末期被发明以来,经过20多年的发展,钠助熔剂法生长的晶体在尺寸与质量上都取得了长足的进步。本文从晶体生长原理和关键工艺(籽晶选择、温度梯度以及添加剂)等方面综述了钠助熔剂法生长GaN单晶研究进展,并对其面临的挑战和未来发展趋势进行了展望。     

AlN buffer layer growth for GaN epitaxy on (1 1 1) Si: Al or N first?

AlN is generally used as buffer layer for the epitaxial growth of GaN on Si(1 1 1) substrate. In this work, we specifically address the relationship between the way the AlN growth is initiated on the Si(1 1 1) surface and the overall properties of the final GaN epitaxial layer. The growth is performed by molecular beam epitaxy with ammonia (NH₃) as nitrogen source. Two procedures have been compared: exposing the Si surface first to NH₃ or Al. The AlN nucleation is followed in real-time by reflection high-energy electron diffraction and critical stages are also investigated in real space using scanning tunnelling microscopy and transmission electron microscopy. Atomic force microscopy, X-ray diffraction and photoluminescence are also used to assess the properties of the final GaN epitaxial layer. It is shown that best results in terms of GaN overall properties are obtained when the growth is initiated by exposing the Si(1 1 1) surface to NH₃ first. This is mainly due to the fact that almost an order of magnitude decrease of the dislocation density is obtained.     

Zinc oxide – analogue of GaN with new perspective possibilities

Zinc oxide due to specific electrical, optical and acoustic properties is the important semiconductor material, which has many various applications. There is growing interest in ZnO due to its potential applicability for optoelectronic devices such as light‐emitting diodes, laser diodes and detectors for UV wavelength range. ZnO properties are very close to those of widely recognized semiconductor GaN. The band gap of ZnO (3.37 eV) is close to that of GaN (3.39 eV) but ZnO exciton binding energy (60 meV) is twice larger than that of GaN (28 meV). Optically pumped UV lasing have been demonstrated at room temperature using high textured ZnO films. The excitonic gain close to 300 cm^–1 was achieved. ZnO thin films are expected to have higher quantum efficiency in UV semiconductor laser than GaN. The physical properties of ZnO are considered. PEMOCVD technology was used to deposit piezoelectric and highly transparent electroconductive ZnO films. Their properties are discussed. The experiments on polycrystalline ZnO films deposited by RF magnetron sputtering at different partial pressure of oxygen are presented. AFM images were studied in tapping mode for deposited films. The investigated films were dielectric ones and had optical transparency within 65‐85% at thickness in the interval 0.2‐0.6 μm. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

In原子替位位置对新型正交GaN影响的第一性原理研究

铟(In)原子替位位置对开发新型正交GaN的储氢材料具有重要意义。当前关于In原子替位位置对正交GaN材料的影响研究相对薄弱。本文基于第一性原理研究了不同In原子替位位置下InGaN材料的形成能、电子结构、弹性特性和力学稳定性。结果表明,通常情况下间隔三个原子的In原子替位位置的形成能最小且该体系最易形成。在相同的掺杂情况下,该结构的InGaN材料也具有较大的带隙宽度以及较小的弹性模量、体积模量、剪切模量与弹性模量,这意味着其抗压能力、抗剪切应力的能力较弱,韧性以及硬度较低。此外,声子谱计算结果表明,间隔三个原子的InGaN材料在环境压力下也具有良好的力学稳定性。本研究为正交GaN的新型储氢超材料的研究提供了理论依据。     

Effect of growth parameters on the properties of GaN : Zn epilayers

The vapor-phase HCl/Ga/NH₃ method for deposition of GaN : Zn epilayers on sapphire substrates has been investigated to determine the dependence of epilayer resistivity, cathodoluminescence, and surface quality on the growth parameters. Both nucleation and control of the epilayer properties have been significantly improved by introducing HCl directly into the deposition zone in addition to the HCl that passes over the Ga source to produce GaCl. The effect of annealing on the stability of undoped layers and on the cathololuminescence of Zn-doped layers has also been investigated. Electroluminescent devices with reproducible properties have been obtained by growing structures consisting of an undoped n⁺ layer, a Zn-doped n-type layer, and a very thin, Zn-doped, high-resistivity layer whose growth parameters determine the emission wavelength and electroluminescence efficiency.     

Hydride vapor phase epitaxy of GaN boules using high growth rates

The boule-like growth of GaN in a vertical AIXTRON HVPE reactor was studied. Extrinsic factors like properties of the starting substrate and fundamental growth parameters especially the vapor gas composition at the surface have crucial impact on the formation of inverse pyramidal defects. The partial pressure of GaCl strongly affects defect formation, in-plane strain, and crystalline quality. Optimized growth conditions resulted in growth rates of 300–500 μm/h. GaN layers with thicknesses of 2.6 and of 5.8 mm were grown at rates above 300 μm/h. The threading dislocation density reduces with an inverse proportionality to the GaN layer thickness. Thus, it is demonstrated that growth rates above 300 μm/h are promising for GaN boule growth.