Determination of the optical constants and thickness of a thin slightly absorbing film by ellipsometric measurement

On the basis of an analysis of the properties of space constructed in coordinates of the ellipsometric angles and and the thicknessd ₁ of a thin slightly absorbing film, a graphical method of determining its index of refraction, index of absorption and thickness is proposed and discussed. From the two ellipsometric measurements, either for two different angles of incidence or for two different surrounding media, it is in principle possible to determine the chosen parameters characterizing the thin slightly absorbing film. The graphical method, however, seems to be less accurate and very laborious. The calculation is therefore proposed for an automatic computer. The ellipsometric measurements were carried out on a SAAB computer, according to a program elaborated in Algol. The results obtained and the values computed for the optical constants and the thickness of the thin slightly absorbing film are in good agreement with those found independently.     

A method for determining the optical constants of an absorbing film entering into the composition of a layered system

A matrix method of calculating the refractive index and the absorption factor of an absorbing film entering into the composition of a multilayer thin-film system (for example, of the dielectric-metal-dielectric type) from the measured transmission and reflection spectra of the system is proposed. The method is based on solution of the matrix equation for the layered system by the iterative method of continuous differential descent. The method developed was applied to determine the optical constants of a real silver film in the composition of a three-layer energetically efficient titanium dioxide-silver-titanium dioxide coating.     

光学薄膜参数椭偏测量中的多变量误差分析

本文采用多变量的误差分析方法给出光学薄膜参数对于椭偏角ψ,反射率R,入射角和吸收薄膜厚度的误差因子公式。由此便可确定出光学参数的测量精度。本文还利用误差因子与薄膜折射率,薄膜厚度和入射角的关系曲线,讨论了最佳测量条件和测量结构的选取。并且指出,在同时确定两个或多个未知参数时,不能只由可测量量随某一个参数变化的灵敏来讨论和确定此参数的测量精度。     

Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layer

Various ellipsometric analyses have been derived to characterize the optical properties of a single-layer or a double-layer surface film overlaid on a substrate material. The general numerical technique is independent of the method (or methods) used in the series of ellipsometric measurements which provide the raw data. The convergence to unambiguously determined values of the unknown parameters is systematically carried out in the numerical search procedure. Selected examples are presented to illustrate the validity of various analyses and the possible usage of these analyses to optimize the experimental conditions and measurement methods.     

Generalized ellipsometry for biaxial absorbing materials: determination of crystal orientation and optical constants of Sb(2)S(3)

We demonstrate generalized ellipsometry for precise measurement of the principal indices of refraction, the extinction coefficients, and the orientations of the crystal a, b, and c axes of orthorhombic absorbing materials. Stibnite (Sb(2)S(3)) single crystals cut approximately parallel to (100), (010), (001), and (313) are studied at a representative wavelength of 589 nm. The (313) surface is sufficient for retrieval of all optical constants. The expected effects of surface over-layer formation are removed numerically. We propose generalized ellipsometry as a powerful tool for measurement of anisotropic optical function spectra of biaxial materials.     

膜层厚度对金属薄膜光学常数的影响

从麦克斯韦方程出发,可以得到超薄金属膜层光学常数n、k与其厚度有关系的理论依据。采用电阻热蒸发和电子束热蒸发的方法在K9玻璃基底上分别沉积了不同厚度的Cu膜、Cr膜、Ag膜,由椭偏法检测、Drude模型拟合,获得了不同厚度Cu膜、Cr膜、Ag膜光学常数n、k随波长λ的变化规律。超薄金属薄膜与块状金属的光学常数相差较大,随着薄膜厚度的增加,n、k值趋近于块状金属。通过对样品膜层吸收、色散特性的分析,发现连续金属薄膜在可见光波段对长波的吸收较大,而且相比于介质薄膜平均色散率高10mn～102nm量级。     

Convenient and inexpensive determination of optical constants and film thickness of blended organic thin film

This work presents the study of optical constants and film thickness of blended organic thin films, emphasizing on the modeling procedure with modified genetic algorithm aided by absorption or transmittance spectra of both pure materials and the blends. Taking the blending of copper phthalocyanine(Cu Pc) and fullerene(C60) as an example, a simple, convenient and low-cost method for the determination of the optical constants and film thickness of blended organic thin films was demonstrated. New scheme for optical modeling of blended organic thin film was proposed by introducing peak energies of Cody-Lorentz oscillators of the pure materials, which were determined by fitting the film absorption of pure materials. These oscillators of pure materials could be recognized in the transmittance spectrum of their blends, and were further used as the initial searching ranges in the simulation of blended films. As a result, the constraint bounds of the unknown parameters were significantly reduced and modeling efficiency as well as fitting accuracy was improved. For instance, the fitting of the transmittance curves of blended films with different blending ratios reached reliable results in comparison with extinction coefficients obtained from experiment.     

An envelope method for determination of the optical constants of absorptive films on absorptive substrates

A simple variant of the envelope method for deducing optical constants from the interference extrema of the front reflectivity, is extended to the case of an absorbing film on a strongly absorbing substrate. The envelope method is applied to the experimental spectra of SnTe epitaxial layers on metal substrates.     

A new spectroscopic method to get the optical constants of an absorbing material: The case of SrTiO3

To illustrate a previous paper (1) we compute the complex refractive index = n -jk of a SrTiO₃ single crystal plate cut persendicular to the axis, at =270 cm^–1 with a new spectroscopic method where the SrTiO₃ plate is covered with a thin Ge film. Irregular spaced interferences fringes lead to a direct determination of n and k at the minima and maxima. In the case of SrTiO₃ the results are in good agreement with Kramers-Kronid determinations made by Barker and Tinkham (2).     

IR spectra of the optical constants of an industrial high-pressure polyethylene film

The IR spectra of the real n(ν) and imaginary κ(ν) parts of the complex refractive index of an industrial high-pressure polyethylene film are measured by the methods of transmission and attenuated total reflectance spectroscopy in the range 700–750 cm^?1 taking into account the anisotropy and the structural inhomogeneity of the film over its thickness. It is proposed to use these spectra as the reference spectra for polyethylene films in the range around 720 cm^?1.     

The accuracies of photometric, polarimetric and ellipsometric methods for the optical constants of thin films

The inherent accuracies of various techniques for determining the optical constants of thin films have been assessed by computing the errors produced in n and k by known experimental errors in the optical functions being measured. The results are presented as arrays of error parallelograms in the n–k plane covering d/λ from 0.001 to 0.20 and θ from 5° to 85°.The largest regions of accuracy, in the form of annular quadrants, were obtained using the mixed photometric and polarimetric functions at small angles of incidence. Ellipsometry gives similar results at large angles of incidence but for photometry and for polarimetry the accurate regions were in the form of two lobes.The effects of errors in x and θ were also considered.     

椭偏精确测定透明衬底上吸收薄膜的厚度及光学常数

椭偏仪难以精确测量透明衬底上吸收薄膜光学常数的原因:1)衬底的背面反射光为非相干光, 它的存在会极大的增加拟合难度; 2)衬底光学常数(折射率和消光系数)的差异会影响测量的准确性, 而且会在吸收薄膜的光学常数中表现出来, 需要单独测量其光学常数; 3)厚度与光学常数之间呈现强烈的关联性. 针对以上三个问题, 选择石英玻璃、载玻片、盖玻片和普通浮法玻璃作为研究对象. 采用折射率匹配法消除上述衬底背面反射光的影响. 结果显示, 折射率匹配法能够有效消除折射率在1.43-1.64、波长范围为190-1700 nm波段的石英、浮法玻璃等透明衬底的背面反射光. 之后, 通过拟合椭偏参数ψ和垂直入射时的透过率T₀ 分别得到以上衬底的折射率和消光系数. 拟合得到的结果与文献报道的趋势一致. 最后, 采用椭偏参数和透过率同时拟合的方法(SE+T法)得到类金刚石薄膜(沉积在石英玻璃上)和非晶硅薄膜(沉积在载玻片、盖玻片上)光学常数和厚度的准确解.     

弱吸收基底上弱吸收薄膜的光学常数计算方法

采用一种相对简单而又精确的光度法来计算弱吸收基底上弱吸收薄膜的光学常数,为低损耗紫外薄膜的设计与实现提供了理论基础。采用JGS1型熔融石英基底,制备了MgF2与LaF3材料的单层膜,获得了JGS1型熔融石英基底及MgF2与LaF3薄膜的光学常数色散曲线。结果显示:在200 nm左右处,JGS1型熔融石英基底的吸收已经比较明显,消光系数在10-8量级,因此,应考虑基底的弱吸收,以提高薄膜光学常数的计算精度。     

The influence of the substrate on the optical constants of Al films

Attenuated total reflection (ATR) spectroscopy employing a prism and a dielectric spacer layer is used to determine the optical constants of vacuum deposited aluminium films. In the energy range of the 1.5 eV interband transition, a strong dependence of the optical constants on the material of the underlying layer is found. This dependence is attributed to structural effects in the Al film.     

弱吸收基底上弱吸收薄膜的光学常数计算方法

用一种相对简单而又精确的光度法来计算弱吸收基底上弱吸收薄膜的光学常数,为低损耗紫外薄膜的设计与实现提供了理论基础。采用JGS1型熔融石英基底,制备了MgF2与LaF3材料的单层膜,获得了JGS1型熔融石英基底及MgF2与LaF3薄膜的光学常数色散曲线。结果显示：在200 nm左右处,JGS1型熔融石英基底的吸收已经比较明显,消光系数在10-8量级,因此,应考虑基底的弱吸收,以提高薄膜光学常数的计算精度。     

A contribution to the determination of optical constants

A method is described for determining optical constants by means of a computer on the basis of intensity measurements and the computed results for a weakly absorbing substance in the form of a thin film are used to demonstrate the multiplevaluedness of the transmission-reflection measuring method.     

椭偏与光度法联用精确测定吸收薄膜的光学常数与厚度

介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法, 并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪（VASE）表征了250—1700 nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数. 关键词： 光学常数 光谱型椭偏仪 吸收薄膜 透射率     

椭偏与光度法联用精确测定吸收薄膜的光学常数与厚度

介绍了一种同时利用椭偏仪和分光光度计精确测量薄膜光学常数的方法, 并详细比较了该方法与使用单一椭偏仪拟合结果的可靠性.采用可变入射角光谱型椭偏仪（VASE）表征了250—1700 nm波段辉光放电法沉积的类金刚石薄膜,研究发现当仅用椭偏参数拟合时,由于厚度与折射率、消光系数的强烈相关性,无法得到吸收薄膜光学常数的准确解.如果加入分光光度计测得的透射率同时拟合,得到的结果具有很好的惟一性.该方法无需设定色散模型即可快速拟合出理想的结果,特别适合于确定透明衬底上较薄吸收膜的光学常数.