非晶/微晶两相硅薄膜电池的计算机模拟

在对不同晶相比硅薄膜的实验研究的基础上，利用有效介质理论估算了这种两相材料的光吸 收系数、迁移率寿命乘积及带隙宽度等参量，计算机模拟了不同结晶比硅薄膜电池的伏安特 性及光谱响应；结果为随着本征层微晶成分的增多，电池的开路电压逐渐减小，短路电流逐 渐增大，本征层的最佳厚度逐渐增大，填充因子有降低的趋势，电池的效率随晶相比的增大 而减小. 电池的光谱响应曲线表明，随晶相比的增大电池的长波响应明显提高. 根据这些模 拟结果，分析讨论了在考虑Lambertian背反射的情况下，非晶/微晶叠层电池的底电池采用 晶相比为40％—50％的两相硅薄膜材料做本征层是最佳选择. 关键词： 两相硅薄膜 太阳能电池 计算机模拟     

Boron-doped nanocrystalline silicon thin films for solar cells

This article reports on the structural, electronic, and optical properties of boron-doped hydrogenated nanocrystalline silicon (nc-Si:H) thin films. The films were deposited by plasma-enhanced chemical vapour deposition (PECVD) at a substrate temperature of 150 °C. Crystalline volume fraction and dark conductivity of the films were determined as a function of trimethylboron-to-silane flow ratio. Optical constants of doped and undoped nc-Si:H were obtained from transmission and reflection spectra. By employing p⁺ nc-Si:H as a window layer combined with a p′ a-SiC buffer layer, a-Si:H-based p-p′-i-n solar cells on ZnO:Al-coated glass substrates were fabricated. Device characteristics were obtained from current-voltage and spectral-response measurements.     

High performance a-Si solar cells and new fabrication methods for a-Si solar cells

The super chamber, a separated UHV reaction-chamber system has been developed. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.As a new material, amorphous superlattice-structure films were fabricated by the photo-CVD method for the first time. Superlattice structure p-layer a-Si solar cells were fabricated, and a conversion efficiency of 10.5% was obtained.For the fabrication of integrated type a-Si solar cell modules, a laser pattering method was investigated. A thermal analysis of the multilayer structure was done. It was confirmed that selective scribing for a-Si, TCO and metal film is possible by controlling the laser power density. Recently developed a-Si solar power generation systems and a-Si solar cell roofing tiles are also described.     

非晶Si1-x Gex:H薄膜太阳能电池研究

运用AMPS- ID程序研究了a-SiC:H/a-Si1-rGer:H/a-Si:H薄膜太阳能电池的光电特性.分析了a-SiC:H/a-Si1-xGes:H/a-Si:H薄膜太阳能电池短路电流、断路电压、填充因子和光电转化效率随Ge成分(或含量)x和a-Si1-sGes:H层厚度的变化.计算结果表明x=0.1和a-Si1-xGex:H厚度h=340 nm时,转化效率达到最大值 9.19％.另外,讨论了各种因素对太阳能电池性能的影响.     

非晶Si1-xGex:H薄膜太阳能电池研究

The AMPS-ID program is used to investigate electrical and optical properties of the thin film solar cell of a-SiC:H/a-Si1-xGex:H/a-Si:H. The short circuit current density, open circuit voltage, fill factor and efficiency of the solar cell are investigated. The efficiency of the solar cell is 9.19% as thickness of a-Si1-xGex:H is 340 nm with Ge content x=0.1. In addition, we also discuss the factors which affect solar cell efficiency.     

钙钛矿/硅叠层太阳电池中平面a-Si:H/c-Si异质结底电池的钝化优化及性能提高

最近,旋涂法制备的钙钛矿/平面硅异质结高效叠层太阳电池引起人们广泛关注,主要原因是相比于绒面硅衬底制备的钙钛矿/硅叠层太阳电池,其制备工艺简单、制备成本低且效率高.对于平面a-Si:H/c-Si异质结电池, a-Si:H/c-Si界面的良好钝化是获得高转换效率的关键,进而决定了钙钛矿/硅异质结叠层太阳电池的性能.本文主要从硅片表面处理、a-Si:H钝化层和P型发射极等方面展开研究,通过对硅片表面的氢氟酸(HF)浸泡时间和氢等离子体预处理气体流量、a-Si:H钝化层沉积参数、钝化层与P型发射极(I/P)界面富氢等离子体处理的综合调控,获得了相应的优化工艺参数.对比研究了p-a-Si:H和p-nc-Si:H两种缓冲层材料对I/P界面的影响,其中高电导、宽带隙的p-nc-Si:H缓冲层既能够降低I/P界面的缺陷态,又可以增强P型发射层的暗电导率,提高了前表面场效应钝化效果.通过上述优化,制备出最佳的P-type emitter layer/aSi:H(i)/c-Si/a-Si:H(i)/N-type layer (inip)结构样品的少子寿命与implied-Voc分别达到2855μs和709 mV,表现出良好的钝化效果.应用于平面a-Si:H/c-Si异质结太阳电池,转换效率达到18.76%,其中开路电压达到681.5 mV,相对于未优化的电池提升了34.3 mV.将上述平面a-Si:H/c-Si异质结太阳电池作为底电池,对应的钙钛矿/硅异质结叠层太阳电池的开路电压达到1780 mV,转换效率达到21.24%,证明了上述工艺优化能够有效地改善叠层太阳电池中的硅异质结底电池的钝化及电池性能.     

利用快速退火法从非晶硅薄膜中生长纳米硅晶粒

报道了一种从非晶硅薄膜中生长纳米硅晶粒的方法。含氢非晶硅薄膜经过快速热退火处理后，用拉曼散射和X射线衍射技术对样品进行分析。实验结果表明：纳米硅晶粒不但能在非晶硅薄膜中形成，而且所形成的纳米硅晶粒的大小随着热退火过程中升温快慢而变化。在升温过程中，若单位时间内温度变化量较大（－100℃/s），则所形成纳米硅粒较小（1．6－15nm）； 若单位时间内温度变化量较低（－1℃/s），则纳米硅粒较大（23－46nm）。根据晶体生长理论和计算机模拟，讨论了升温快慢与所形成的纳米硅颗粒大小的关系。     

Microstructure and lateral conductivity control of hydrogenated nanocrystalline silicon oxide and its application in a-Si:H/a-SiGe:H tandem solar cells

Phosphorous-doped hydrogenated nanocrystalline silicon oxide(n-nc-SiO_x:H) films are prepared via radio frequency plasma enhanced chemical vapor deposition(RF-PECVD). Increasing deposition power during n-nc-SiO_x:H film growth process can enhance the formation of nanocrystalline and obtain a uniform microstructure of n-nc-SiO_x:H film. In addition,in 20 s interval before increasing the deposition power, high density small grains are formed in amorphous SiO_x matrix with higher crystalline volume fraction(I_c) and have a lower lateral conductivity. This uniform microstructure indicates that the higher Ic can leads to better vertical conductivity, lower refractive index, wider optical band-gap. It improves the back reflection in a-Si:H/a-SiGe:H tandem solar cells acting as an n-nc-SiO_x:H back reflector prepared by the gradient power during deposition. Compared with the sample with SiO_x back reflector, with a constant power used in deposition process,the sample with gradient power SiO_x back reflector can enhance the total short-circuit current density(Jsc) and the initial efficiency of a-Si:H/a-SiGe:H tandem solar cells by 8.3% and 15.5%, respectively.     

Semiconductor laser crystallization of a-Si:H on conducting tin-oxide-coated glass for solar cell and display applications

Semiconductor laser (=805 nm) crystallization of hydrogenated amorphous silicon (a-Si:H) deposited on a low-cost fluoride-doped tin-oxide-coated glass substrate is demonstrated. X-ray diffraction confirms that the structure of the polycrystalline silicon thus formed shows (111), (220), and (311) peaks. A sharp Raman peak at 520 cm^-1 further confirms the crystallization. Atomic force microscope images of a Secco-etched laser-treated sample reveal the granular structure of the poly-Si. Grains as big as 10 times the film thickness are readily obtained and sample as thick as 5000 Å is easily crystallized. The method can be extended to films with a thickness of several microns. PACS 42.55.Px; 42.62.Cf; 81.05.Gc     

Simulation of daytime variations in the characteristics of a-Si:H solar cells

The time dependences of the key characteristic of a-Si:H solar cells over daylight hours are theoretically simulated. The model is used to calculate the time dependences for an arbitrary geographic latitude in the interval 30°–60° and arbitrary day of the year. The calculated results are illustrated for a geographic latitude of 45° and equinox. The relative variations in the characteristics of the a-Si:H solar cells are valid with a relatively high accuracy for the solar cells based on alternative semiconductors provided that their efficiency ranges form 7 to 20%.     

a-Si:H薄膜及MWECR-CVD制备技术

文章回顾了a—Si：H薄膜的发展历程，并介绍了其近10年的研究状况、为提高a—Si：H薄膜的沉积速度，还重点介绍了一种新的微波电子回旋共振等离子体CVD(MWECR—CVD)技术，该技术的特点是：不含电极，可避免电极溅射造成的污染；等离子区离子密度高，对硅烷能高度分解，从而可显著提高薄膜生长速率；改变磁场位形和结构，可改变等离子体分布及轰击基片离子的能量，文章还分析了其制备a—Si：H薄膜存在的问题，提出了今后的研究方向。     

微量掺碳nc-SiC:H薄膜用于p-i-n太阳电池的窗口层

采用等离子增强化学气相沉积方法(PECVD)制备了微量掺碳的p型纳米非晶硅碳薄膜(p-nc-SiC：H)，反应气体为硅烷和甲烷，掺杂气体采用硼烷，沉积温度分别采用333K，353K和373K.测量结果表明随着沉积温度增加和碳含量的增加，薄膜的光学带隙增加；薄膜具有较宽的带隙和较高的电导率，同时有较低的激活能(0.06eV).Raman和XRD测量结果表明薄膜存在纳米晶.优化的p型纳米非晶硅碳薄膜作为非晶硅p-i-n太阳电池的窗口层，使得太阳电池的开路电压达到0.94V. 关键词： 光学带隙 纳米硅 薄膜 太阳能电池     

Three dimensional a-Si:H thin-film solar cells with silver nano-rod back electrodes

We present three dimensional (3-D) amorphous silicon (a-Si:H) thin-film solar cells with silver nano-rods as back electrodes, which are fabricated by low cost nano imprint lithography (NIL). After conformal deposition of thin metal and semiconductor layers, we can achieve a dome-shaped geometry, which is shown to be effective in reducing the reflectance at the front surface due to the graded refractive index effect. In addition, the enhancement of the diffused reflectance over a broad wavelength in this dome-shaped geometry provides light trapping due to the increase in the effective light propagation length. Using this 3-D solar cell, we achieved 54% increase in short circuit current density and 45% increase in the conversion efficiency compared to the control cells with flat Ag surfaces. This 3-D structure can be also used for improving light harvesting in various photovoltaic devices regardless of materials and structures.     

Microstructure evolution of room-temperature-sputtered ITO films suitable for silicon heterojunction solar cells

Thickness influence on structural, optical and electrical properties of sputtered indium tin oxide (ITO) with thickness ranging from 60 up to 430 nm films has been studied. At the increase of the film thickness crystallinity degree and grain size increased, whereas tensile structural distortion as well as resistivity decreased. It was observed that a microstructure evolution takes place: the initial amorphous layer evolved in polycrystalline phase, with a grain–subgrain surface morphology. Carrier concentration increased at the increase of the film thickness and a general relationship between electrical characteristics and structural distortion has been found. In thinner films larger tensile distortion allowed to include larger amount of interstitial O and/or Sn atoms in the lattice. An appreciable impact of the thickness was also observed on electro-optical properties in terms of changes in energy gap, resistivity and optical absorption. Silicon heterojunction solar cells have been produced and J_sc as high as 33.0 mA/cm² has been obtained.     

Light induced microstructure transformation in a-Si：H films

A series of a-Si:H films are deposited by hot wire assisted microwave electron cyclotron resonant chemical vapour deposition (HW-MWECR-CVD), subsequently exposed under simulated illumination for three hours. This paper studies the microstructure change during illumination by Fourier Transformation Infrared (FTIR) spectra. There are two typical transformation tendencies of microstructure after illumination. It proposes a model of light induced structural change based on the experimental results. It is found that all samples follow the same mechanism during illumination, and intrinsic structure of samples affect the total H content.     

非晶/微晶相变域硅薄膜及其太阳能电池

采用甚高频等离子体增强化学气相沉积（VHF-PECVD）法，成功制备出从非晶到微晶过渡区 域的硅薄膜. 样品的微结构、光电特性及光致变化的测量结果表明这些处于相变域的硅薄膜 兼具非晶硅优良的光电性质和微晶硅的稳定性. 用这种两相结构的材料作为本征层制备了p- i-n太阳能电池，并测量了其稳定性. 结果在AM15(100mW/cm²) 的光强下曝光 800—5000min后，开路电压略有升高，转换效率仅衰退了29%. 关键词： 相变域硅薄膜 光电特性 太阳能电池     

Superstrate p-i-n a-Si:H solar cells on textured ZnO:Al front transparent conduction oxide

Superstrate p-i-n amorphous silicon thin-film (a-Si:H) solar cells are prepared on SnO₂:F and ZnO:Al transparent conducting oxides (TCOs) in order to see the effect of TCO/p-layers on a-Si:H solar cell operation. The solar cells prepared on textured ZnO:Al have higher open circuit voltage V_oc than cells prepared on SnO₂:F. The presence of a thin microcrystalline p-type silicon layer (μc-Si:H) between ZnO:Al and p a-SiC:H plays a major role by causing an improvement in the fill factor as well as in V_oc of a-Si:H solar cells prepared on ZnO:Al TCO. Without any treatment of the p-i interface, we could obtain a high V_oc of 994 mV while keeping the fill factor (72.7%) and short circuit current density J_sc at the same level as for the cells on SnO₂:F TCO. This high V_oc value can be attributed to modification in the current transport in this region due to creation of a potential barrier.