退火参数对熔石英透射波前和损伤阈值的影响

 采用高温退火技术去除熔石英元件表面由于CO2激光修复带来的残余应力,研究了退火环境对元件的表面污染,分析了不同退火温度（600～900 ℃）和保温时间（3～10 h）对于元件残余应力、透射波前、表面粗糙度和激光损伤阈值的影响。结果表明:在800 ℃以下,高温退火10 h可有效去除CO₂激光修复带来的残余应力,对元件的透射波前和表面粗糙度无明显影响;石英保护盒能有效减少退火环境对元件表面产生的污染,但仍有X射线光电子能谱检测不到的表面污染物存在;在退火后采用质量分数为1%的HF刻蚀15 min,激光损伤阈值可恢复,同时元件透射波前和表面粗糙度并无明显的增加。     

1.06μm连续激光照射下K9玻璃板的应力松驰破坏

 基于一维应力松弛模型和粘弹性本构关系,对1.06μm连续激光照射下K9玻璃板中的温升和应力作了计算,结果表明,由于应力松弛效应,激光停照后的冷却过程中产生的残余拉伸应力可达到玻璃的拉伸断裂强度阈值,而激光加热期间的最大压缩应力却小于压缩断裂强度要求。对3mm厚的K9玻璃板,由应力松弛引起破坏所要求的激光参数为946kWm^-2作用0.2s,因而应力松弛可能为1.06 μm连续激光大光斑照射下K9玻璃窗口损伤的主要模式。     

Influence of secondary treatment with CO_2 laser irradiation for mitigation site on fused silica surface

The ablation debris and raised rim, as well as residual stress and deep crater will be formed during the mitigation of damage site with a CO2 laser irradiation on fused silica surface, which greatly affects the laser damage resistance of optics. In this study, the experimental study combined with numerical simulation is utilized to investigate the effect of the secondary treatment on a mitigated site by CO_2 laser irradiation. The results indicate that the ablation debris and the raised rim can be completely eliminated and the depth of crater can be reduced. Notable results show that the residual stress of the mitigation site after treatment will reduce two-thirds of the original stress. Finally, the elimination and the controlling mechanism of secondary treatment on the debris and raised rim, as well as the reasons for changing the profile and stress are analyzed. The results can provide a reference for the optimization treatment of mitigation sites by CO_2 laser secondary treatment.     

熔石英表面损伤修复点的损伤概率

针对3个光斑尺寸的CO2激光辐照尺寸小于400 m损伤点后得到的修复点,从4个方面对损伤修复点经355 nm激光辐照后的损伤概率分别进行研究。结果表明,根据修复光斑尺寸或损伤点尺寸分别讨论修复点的损伤概率,更能反映修复点的抗激光损伤能力。通过分别讨论可以看出,采用小光斑CO2激光辐照损伤点或者修复尺寸小于200 m的损伤点,修复成功率超过90%。同时,可以通过损伤修复点的激光损伤阈值都服从正态分布的规律来预测修复点的损伤概率。     

Surface evolution and laser damage resistance of CO2 laser irradiated area of fused silica

A 10.6 μm CO₂ laser has been reported to effectively mitigate the laser damage growth of fused silica. Two zones of the laser irradiated area are defined in this work: the distorted zone and the laser affected zone. The parameters of the two zones are studied at different CO₂ laser beam sizes, irradiation times, and powers by microscopy, profilometry, and photoelastic method. The results show that the diameter of laser affected zone is almost completely determined by the laser beam size and the distorted zone is associated with the mitigation range of CO₂ laser beam. The diameter and depth of the distorted zone increase as the laser power and irradiation time increase. The depth grows exponentially depending on the irradiation time. The maximum residual stress discrepancy is located near the boundary of the laser affected zone. The laser damage resistance test results show that the distorted zone and the laser affected zone have a better damage resistance than the original substrate.     

激光钝化对熔石英修复后损伤性能影响的实验研究

采用10.6 μupm 的 CO₂激光, 对单次激光脉冲辐照修复熔石英存在的烧蚀采用大光斑钝化去除. 经过辐照修复的区域置于前表面测试初始损伤阈值, 结果表明调制造成的损伤得到了一定程度的抑制; 辐照区域置于后表面修复后 熔石英的初始损伤阈值超过了基底的初始损伤阈值. 实验观察到了应力分布外扩, 同时明显减弱. 对损伤增长的测试说明, 经过激光熔融辐照后的损伤点, 当应力释放以后, 损伤扩展初期表现出指数增长趋势, 后期随着辐照次数的增加, 损伤增长不再明显, 并且趋于恒定值.     

抑制损伤发展的CO_2激光修复技术及机理研究

熔石英表面激光损伤发展问题一直制约着激光器的运行通量。采用CO2激光在线熔融修复损伤点,修复后形成一个光滑的高斯坑,去除了损伤点中的裂纹,平滑了凹凸不平的表面,并且在紫外脉冲激光作用下,修复斑再次产生损伤的阈值高于熔石英元件的损伤生长阈值。因此CO2熔融修复技术能有效地抑制损伤发展。通过分析CO2激光作用下熔石英表面的温度分布,讨论修复坑的形成过程,确定激光参数对修复效果的影响,为寻找最佳修复参数提供理论基础。同时利用原子力显微镜(AFM)、轮廓仪细致分析损伤点和修复斑的微细结构,采用有限差分时域方法计算损伤点和修复斑周围的光强分布,探索消除裂纹和平滑表面对抑制损伤生长的作用。     

CO2激光扫描辐照修复熔石英表面损伤

采用振镜系统结合10.6 m的CO2激光,对熔石英表面损伤点进行辐照,成功地修复了直径500 m的大尺寸损伤点,损伤修复后表面无烧蚀残留,损伤内部完全愈合,无气泡和残余裂纹。和定点修复方式相比,这种修复具有修复尺度大、面形影响区域小、应力分布范围小的优势。80%扫描辐照修复的损伤点的初始损伤阈值恢复甚至超过了基底的初始损伤阈值。     

CO2激光局域辐照对熔石英损伤特性的影响

研究了CO₂激光局域辐照对熔石英损伤特性的影响, 发现当辐照中心温度较低时(1139 K), 辐照对损伤阈值没有明显影响, 但辐照中心温度较高时(1638 K), 辐照对损伤阈值有明显的影响, 损伤阈值随距离辐照中心间距的增大而减小, 在残余应力产生光程差最大处附近, 损伤阈值降到最小, 随着与辐照中心间距的进一步增加, 损伤阈值略有上升. 对导致此现象的原因做了分析. 由于残余应力的存在, 在辐照中心发生再损伤产生的裂纹后, 裂纹先沿径向扩展, 在残余应力产生光程差最大处附近, 裂纹转而向切向扩展, 这可能与径向和环向张应力随半径的变化有关. 在采用热处理炉退火消除残余应力时, 必须注意元件的洁净处理, 否则退火会出现析晶现象, 对损伤阈值和透射率造成不良影响. 关键词： 2激光局域辐照')" href="#">CO₂激光局域辐照 熔石英 损伤特性     

脉冲CO2激光辐照K9玻璃的热力效应分析

利用有限元法对脉冲CO2激光辐照K9玻璃样品中的温度和应力分布进行了数值分析。对半径为20mm、厚为2mm的圆盘样品的计算结果表明,K9玻璃的损伤由环向应力控制,体损伤先于面损伤产生,且光斑半径和脉冲数目对损伤闽值有较大的影响,在激光光斑半径为5mm,脉宽为10肛s的条件下K9玻璃的单脉冲CO2激光的损伤闽值为0．5J,相应的能量密度为0．637 J／cm^2。损伤闽值随光斑半径的增大而增大,随脉冲数目的增加而变小。讨论了样品半径和厚度对损伤结果的影响,结果表明样品半径在10-20mm范围内所产生的拉伸应力较小。     

CO2激光对熔石英表面小尺寸损伤的修复

 利用10.6 μm的CO₂激光对不同直径的点状损伤和不同宽度的划痕进行了修复。经过波长351 nm的紫外激光考核发现,对于直径小于80 μm的点状损伤和对于宽度小于40 μm的划痕,随着损伤点尺寸和划痕宽度的增加,修复后阈值提高程度逐渐降低。划痕的宽度在达到40 μm以后修复效果非常微弱。修复过程中,由于作用时间较短及温度分布不均产生了热应力导致样片损伤以后产生径向裂痕,后续的紫外激光会使裂痕明显扩展。当样品被置于高温退火炉内退火3 h以后,应力导致开裂的现象得到了解决。     

Residual stress relaxation in the core of optical fiber by CO(2) laser irradiation

We observed residual stress relaxation by CO(2) laser irradiation in the cores of optical fibers by direct stress measurement. It was demonstrated that the mechanical stress was fully relaxed by CO(2) laser irradiation and that the remaining stress in the core was thermal stress that was due to a mismatch of the thermal expansion coefficients of the fiber core and cladding. The net core stresses after relaxation were 17, 68, and 203 MPa in Ge-B-codoped fibers drawn at 0.53, 1.38, and 3.48 N, respectively. Changes in the refractive indices of the cores as a result of residual stress relaxation were also estimated.     

CO2激光预处理对熔石英表面影响的实验研究

为研究CO2激光预处理参数对熔石英基片表面的影响,采用波长为10．6μm,重复频率为100Hz的CO2激光对完好的熔石英基片进行单点单次辐照处理。实验发现,对于不同的修复程度,面形变化不完全相同,损伤斑的形貌也各不相同。实验得到了适合修复的参数范围,并研究了修复对于材料粗糙度和疏水性的影响。对中度修复的取样点表面的局部粗糙度进行了统计,发现预处理过程中的污染沉积物在一定范围存在。在此基础上对污染的影响范围分布规律进行了统计。     

K9玻璃在脉冲CO_2激光作用下的热应力分析

根据已建立的理论模型,计算得到了K9玻璃受脉冲CO_2激光辐照时产生的热应力分布,研究了热应力的时间特征,在分析样品尺寸对损伤结果影响的基础上,提出了K9玻璃抗激光损伤的最佳半径。结果表明:K9玻璃产生的热应力损伤主要由环向应力控制,热应力以热冲击波的形式在样品内传播,大小随时间变化而来回振荡,且激光脉冲结束后比激光作用时间内产生的热应力要大。这说明若样品在激光加热期间产生的热应力不足以造成材料破坏,则有可能会在其后的冷却过程中产生更大的热应力,材料将会在冷却过程中发生破裂。根据样品参数对损伤结果的影响,进一步验证了K9玻璃抗激光损伤最佳半径的通用性。     

离子辅助沉积大口径传输反射镜面形控制研究

 针对大型激光系统中光束质量低和波前畸变等特点,采用离子辅助电子束蒸发技术成功实现对多层膜残余应力的精确控制。通过分析氧化铪、氧化硅单层膜残余应力变化规律,研究了离子源束压、束流参量对膜层折射率、残余应力性质及大小的影响。540 mm×340 mm×60 mm规格大口径传输反射镜面形PV值达到0.5λ(λ=632 nm),小光束损伤测试情况下,样品元件的损伤阈值大于30 J/cm2(N-on-1,1 064 nm,5 ns),利用该技术制备的大口径传输反射镜已获得成功应用。     

Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films

Zirconium dioxide (ZrO₂) thin films were deposited on BK7 glass substrates by the electron beam evaporation method. A continuous wave CO₂ laser was used to anneal the ZrO₂ thin films to investigate whether beneficial changes could be produced. After annealing at different laser scanning speeds by CO₂ laser, weak absorption of the coatings was measured by the surface thermal lensing (STL) technique, and then laser-induced damage threshold (LIDT) was also determined. It was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. The LIDT of the ZrO₂ coatings decreased greatly when the laser scanning speeds were below some value. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. The influences of post-deposition CO₂ laser annealing on the structural and mechanical properties of the films have also been investigated by X-ray diffraction and ZYGO interferometer. It was found that the microstructure of the ZrO₂ films did not change. The residual stress in ZrO₂ films showed a tendency from tensile to compressive after CO₂ laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. The residual stress may be mitigated to some extent at proper treatment parameters.     

高重频CO_2激光损伤HgCdTe晶体的数值分析

针对CO2激光作用下HgCdTe晶体的损伤问题进行了数值分析。首先,建立了高重频CO2激光损伤Hg0.784Cd0.216Te晶体的三维热传导物理模型;然后,利用有限元方法计算了单脉冲和高重频CO2激光作用下,Hg0.784Cd0.216Te晶体的损伤阈值;最后,分析了激光重频以及辐照时间对晶体损伤阈值的影响。研究结果表明:单脉冲激光辐照下,晶体的损伤阈值为64.5 J/cm2;高重频(f>1 kHz)激光辐照下,激光重频的改变对晶体损伤阈值的影响较小,损伤阈值应由平均功率密度表征,且与辐照时间密切相关;辐照时间的增加,可以有效地减小晶体的损伤阈值,当激光辐照功率密度<1.95 kW/cm2时,不会发生晶体损伤。研究结果对高重频CO2激光在激光加工以及激光防护的应用方面具有指导意义。     

Two localized CO₂ laser treatment methods for mitigation of UV damage growth in fused silica

Two methods:high-power,short-time,single-shot irradiation(Method A) and low-power,long-time,multi-shot irradiation(Method B) are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO2 laser.To verify the mitigation effect of the two methods,the laser induced damage thresholds(LIDTs) of the mitigated sites are tested with a 355-nm,6.4-ns Nd:YAG laser,and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd:YLF laser.The mitigated damaged sites treated with the two methods have almost the same LIDTs,which can recover to the level of pristine material.Compared with Method A,Method B produces mitigated sites with low crater depth and weak light modulation.In addition,there is no raised rim or re-deposited debris formed around the crater edge for Method B.Theoretical calculation is utilized to evaluate the central temperature of the CO2 laser beam irradiated zone and the radius of the crater.It is indicated that the calculated results are consistent with the experimental results.     

Effect of Laser Irradiation on Optical Properties and Damage Threshold of Nd:Glass

Journal of Russian Laser Research - We investigate the effects of 10.6 μm CO2 laser irradiation and 572 nm dye laser irradiation on optical properties and laser damage threshold of Nd:glass....     

激光辐照引起的材料温度场和热应力场的瞬态分布

 光电探测器吸收激光后的温升以及因温升造成的各种现象,致使探测器遭受到不同程度的损伤。利用热弹性理论对CO2激光器辐照K9玻璃材料进行研究,建立激光辐照材料温升及热应力分布二维平面模型,通过解析计算得到由激光辐照半导体材料引起的温度场和应力场的瞬态分布。研究表明, K9玻璃材料的激光辐照损伤阀值与辐照时间和光斑半径相关。在同一条件下,造成的热应力损伤阀值较熔融损伤的低,故K9玻璃材料的破坏形态为热应力破坏。