非晶Si1-x Gex:H薄膜太阳能电池研究

运用AMPS- ID程序研究了a-SiC:H/a-Si1-rGer:H/a-Si:H薄膜太阳能电池的光电特性.分析了a-SiC:H/a-Si1-xGes:H/a-Si:H薄膜太阳能电池短路电流、断路电压、填充因子和光电转化效率随Ge成分(或含量)x和a-Si1-sGes:H层厚度的变化.计算结果表明x=0.1和a-Si1-xGex:H厚度h=340 nm时,转化效率达到最大值 9.19％.另外,讨论了各种因素对太阳能电池性能的影响.     

非晶态异质结构a-Si:H/a-SiN_x:H和a-Si:H,a-SiN_x:H薄膜的应力研究

实验发现在一定Si—H键浓度下,相对于平坦的硅衬底而言,在其上沉积的a-Si:H薄膜具有压缩应力,a-SiN_x:H薄膜具有伸张应力。当a-Si:H和a-SiN_x:H层厚度比近似于1:2时,硅衬底上生长的a-Si:H/a-SiN_x:H/c-Si样品,弯曲最小,并能保持很长时间。文中还给出了应力随退火变化的情况,并对实验结果进行了讨论。     

MWECR CVD等离子体系统梯度磁场对沉积a-Si:H薄膜特性研究

分别研究了磁场线圈电流为115.2和137.7A以及137.7A并在加热台下加放SmCo永磁体的方法，来改变单磁场线圈分散场MWECR CVD系统等离子体室及沉积室磁场形貌.用洛伦兹拟合定量地得到了三种磁场形貌的磁场梯度.研究了磁场梯度对沉积a-Si:H薄膜性能的影响.研究表明：在衬底附近，高的磁场梯度可以获得高的沉积速率；在温度不很高时，高的磁场梯度可得到光敏性较好的a-Si:H薄膜. 关键词： 梯度磁场 洛伦兹拟合 a-Si:H薄膜 MWECR CVD系统     

非晶态异质结构a-Si:H/a-SiNx:H和a-Si:H,a-SiNx:H薄膜的应力研究

实验发现在一定Si—H键浓度下,相对于平坦的硅衬底而言,在其上沉积的a-Si:H薄膜具有压缩应力,a-SiN_x:H薄膜具有伸张应力。当a-Si:H和a-SiN_x:H层厚度比近似于1:2时,硅衬底上生长的a-Si:H/a-SiN_x:H/c-Si样品,弯曲最小,并能保持很长时间。文中还给出了应力随退火变化的情况,并对实验结果进行了讨论。 关键词：     

异质结太阳电池中非晶钝化层的分光椭偏分析

采用分光椭偏(SE)测试技术研究晶体硅(c-Si)异质结太阳电池用氢化非晶硅(a-Si:H)薄膜钝化层的性能。采用有效媒介理论为基础进行分层多相拟合,研究了a-Si:H/c-Si界面层内部的缺陷散射周期(St)、a-Si:H体内孔隙率以及薄膜介电函数峰值随基底温度的变化规律。通过与傅里叶红外转换光谱计算得到的微结构数据对比,发现界面层的St与薄膜内部Si H和Si H2含量相关。依据高分辨率透射电镜(TEM)下呈现的形貌特征、有效少子寿命和异质结的implied开路电压等参数的辅助证明,确定SE技术作为一种有效的光学表征手段,能准确快速地判断a-Si:H对c-Si表面的钝化性能,继而定量给出适合晶体硅异质结太阳电池高质量a-Si:H钝化层生长的最优参数。     

基于反射和透射光谱的氢化非晶硅薄膜厚度及光学常量计算

采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅（a-Si:H）薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数|通过拟合薄膜透射光谱干涉极大值和极小值的包络线来确定薄膜折射率和厚度的初始值,并利用干涉极值公式进一步优化薄膜的厚度值和折射率|利用柯西公式对得到的薄膜折射率进行拟合,给出了a-Si:H薄膜的色散关系曲线.为了验证该方法确定的薄膜厚度和光学常量的可靠性,将理论计算得到的透射光谱与实验数据进行了比较,结果显示两条曲线基本重合,可见这是确定a-Si:H薄膜厚度及光学常量的一种有效方法.     

a-Si:H/a-SiN_x:H超晶格薄膜的光学性质

本文介绍,当a-SiN_x:H层的厚度一定,a-Si:H层的厚度不同时,a-Si:H/a-SiN_x:H超晶格薄膜的光吸收系数、光学禁带宽度以及折射率随之变化的规律。     

非晶半导体光致发光的温度依赖关系

研究了a-Si:H,a-Si:H,F,a-Si:H,Cl以及a-Si:H,Cl,O等非晶硅薄膜光致发光的温度依赖关系。测量了各种样品的无辐射跃迁激活能ε,并试图寻求激活能ε与样品的制备条件和结构之间的关系;同时从发光强度的温度相关性确定了带尾态密度分布参数T0,以及T0与发光光谱形状之间的关系。并将实验结果与瞬态光电导的数据进行了比较。     

a-Si:H/a-SiNx:H超晶格薄膜光致发光性质的研究

本文报道了a-Si:H/a-SiNx:H超晶格薄膜光致发光某些性质的研究。实验发现,这种超晶格薄膜光致发光的强度和峰值能量随交替层a-Si:H厚度,测量温度及光照时间等而变化。同时还发现,在阴、阳两极上,利用GD法沉积的样品,发光强度和峰值能量也有所不同。文中对这些实验结果作了初步解释。     

a-Si:H/a-SiNx:H超晶格薄膜的光学性质

本文介绍,当a-SiN_x:H层的厚度一定,a-Si:H层的厚度不同时,a-Si:H/a-SiN_x:H超晶格薄膜的光吸收系数、光学禁带宽度以及折射率随之变化的规律。 关键词：     

Thickness dependence of X-ray absorption and photoemission in Fe thin films on Si(0 0 1)

To investigate the initial growth of Fe films on Si(0 0 1) and the Fe/Si interface, Fe films at various thicknesses have been systematically studied by soft X-ray absorption spectroscopy (XAS) and X-ray photoemission spectroscopy (XPS). The Fe L edge XAS spectrum shows a strong thickness dependence with broader line-width for thinner films. Detailed analysis of the Fe absorption signal as a function of the thickness shows that the broad linewidth of Fe L edge XAS spectra is mostly contributed by the first Fe layer at the Fe/Si interface. In contrast to XAS, Fe 2p photoemission spectra for these films are identical. However, valence band photoemission also shows a strong thickness dependence. Comparing the valence band photoemission spectra of the thin Fe/Si(0 0 1) films with that of pure Si and the thickest Fe film, the difference spectra at all thicknesses show almost identical shape indicating the same origin: the Fe/Si interface. Thus, it is mainly the first Fe layer at Fe/Si layer that is reactive with the Si substrate changing its electronic structure.     

Effect of doping on structural,optical and electrical properties of nanostructure ZnO films deposited onto a-Si:H/Si heterojunction

We investigated the structural; optical and electrical properties of ZnO thin films as the n-type semiconductor for silicon a-Si:H/Si heterojunction photodiodes. The ZnO film forms the front contact of the super-strata solar cell and has to exhibit good electrical (high conductivity) and optical (high transmittance) properties. In this paper we focused our attention on the influence of doping on device performance. The results show that the X-ray diffraction (XRD) spectra revealed a preferred orientation of the crystallites along c-axis. SEM images show that all films display a granular, polycrystalline morphology and the ZnO:Al exhibits a better grain uniformity. The transmittance of the doped films was found to be higher when compared to undoped ZnO. A low resistivity of the order of 2.8 × 10⁻⁴ Ω cm is obtained for ZnO:Al using 0.4 M concentration of zinc acetate. The photoluminescence (PL) spectra exhibit a blue band with two peaks centered at 442 nm (2.80 eV) and 490 nm (2.53 eV). It is noted that after doping the ZnO films a shift of the band by 22 nm (0.15 eV) is recorded and a high luminescence occurs when using Al as a dopant. Dark I–V curves of ZnO/a-Si:H/Si structure showed large difference, which means there is a kind of barrier to current flow between ZnO and a-Si:H layer. Doping films was applied and the turn-on voltages are around 0.6 V. Under reverse bias, the current of the ZnO/a-Si:H/Si heterojunction is larger than that of ZnO:Al/a-Si:H/Si. The improvement with ZnO:Al is attributed to a higher number of generated carriers in the nanostructure (due to the higher transmittance and a higher luminescence) that increases the probability of collisions.     

γ射线辐照对a-SiC:H薄膜结构与特性的影响

 采用射频（13.56 MHz）反应溅射方法制备a-SiC:H 薄膜，并将其在空气中进行高能γ射线(平均为1.25 MeV)辐照，5个样品的吸收剂量分别为0，2×10⁴，4×10⁴，6×10⁴，8×10⁴ Gy。采用拉曼及红外光谱对薄膜的结构进行表征,得到了其结构与特性的变化规律。研究与分析表明：随样品吸收剂量的增加，陷入空穴中的电子会被激发，a-SiC:H薄膜中的SiC成份增加，电阻率变小，数量级为105Ω·cm；薄膜存在结晶化的趋势,其主要原因在于由Si－O－Si键断裂而产生的Si取代膜中C－C键中的C而形成晶态SiC，在此过程中出现了Si－O－Si键及a-SiC:H的减少，晶态SiC的增加。经γ射线辐照后薄膜的氢含量降低，折射率从5.19增大到5.53，辐照后薄膜的透过率均低于原膜的透过率。在500~2 300 cm^-1(对应波长为20.00~5.29 μm)波段内，a-SiC:H薄膜存在一定的增透作用。     

Amorphous silicon carbide thin films doped with P or B for the photoelectrochemical water splitting devices

Photoelectrochemical water splitting devices require semiconductor photoelectrode material fulfilling a number of primary requirements such as band gap, band edge alignment and corrosion resistance to electrolyte. Amorphous silicon carbide films, undoped and doped (P or B), were deposited on Si substrates by PECVD technology. The concentration of elements in the films was determined by RBS and ERD analytical method. Raman spectroscopy study of the SiC films were performed by using a Raman microscope and chemical compositions were analyzed by FTIR, before and after immersion of samples to aqueous pH 2.0 and pH 1.0 sulphuric acid electrolyte. Electrical properties of SiC films before and after immersion of samples to aqueous pH 2.0 and pH 1.0 sulphuric acid electrolyte were studied by measurement of the I–V characteristics on structure Al/SiC/Si/Al. Differences between Raman spectra, FTIR spectra and I–V characteristics before and after immersion to electrolyte are discussed.     

Influence of substrate bias voltage on the microstructure of nc-SiOx:H film

Amorphous silicon oxide containing nanocrystalline silicon grain(nc-SiO_x:H) films are prepared by a plasmaenhanced chemical vapor deposition technique at different negative substrate bias voltages.The influence of the bias voltage applied to the substrate on the microstructure is investigated.The analysis of x-ray diffraction spectra evidences the in situ growth of nanocrystalline Si.The grain size can be well controlled by varying the substrate bias voltage,and the largest size is obtained at 60 V.Fourier transform infrared spectra studies on the microstructure evolutions of the nc-SiO_x:H films suggest that the absorption peak intensities,which are related to the defect densities,can be well controlled.It can be attributed to the fact that the negative bias voltage provides a useful way to change the energies of the particles in the deposition process,which can provide sufficient driving force for the diffusion and movement for the species on the growing surface and effectively passivate the dangling bonds.Also the larger grain size and lower band gap,which will result in better photosensitivity,can also be obtained with a moderate substrate bias voltage of 60 V.     

Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system

Intrinsic hydrogenated microcrystalline silicon (\muc-Si:H) films have been prepared by hot-wire-assisted microwave electron-cyclotron-resonance chemical vapour deposition (HW-MWECR-CVD) under different deposition conditions. Fourier-transform infrared spectra and Raman spectra were measured. Optical band gap was determined by Tauc plots, and experiments of photo-induced degradation were performed. It was observed that hydrogen dilution plays a more essential role than substrate temperature in microcrystalline transformation at low temperatures. Crystalline volume fraction and mean grain size in the films increase with the dilution ratio (R=H₂/(H₂+SiH₄)). With the rise of crystallinity in the films, the optical band gap tends to become narrower while the hydrogen content and photo-induced degradation decrease dramatically. The samples, were identified as \mu c-Si:H films, by calculating the optical band gap. It is considered that hydrogen dilution has an effect on reducing the crystallization activation energy of the material, which promotes the heterogeneous solid-state phase transition characterized by the Johnson--Mehl--Avrami (JMA) equation. The films with the needed structure can be prepared by balancing deposition and crystallization through controlling process parameters.     

Influence of surface properties on the structure of granular silver films and excitation of localized plasmons

Granular silver films deposited on a thin insulating film of amorphous hydrogenated carbon (a-C:H) and transparent conducting electrode (polycrystalline indium tin oxide (ITO) layer) have been investigated by spectroscopy and microscopy methods. The extinction spectra of silver films on the surface of these materials are found to be significantly different. An annealing of silver films causes a blue shift of the peak of plasmon resonance band in the spectrum of silver nanoparticles: by 16 nm on the a-C:H surface and by 94 nm on the ITO surface. Silver films on the surface of a-C:H films are characterized by a narrower band in the extinction spectrum, which is peaked at 446 nm. The changes observed in the optical density of Ag films are related to the change in size and area of nanoparticles. The results of spectral studies of Ag films are in agreement with the data on the nanostructure obtained by scanning electron microscopy and statistical image processing. The spectra of granular silver films are shown to correlate well with the nanoparticle distribution function over the film area.     

Quantitative analysis of hydrogen in amorphous silicon using Raman scattering spectroscopy

Hydrogenated amorphous silicon (a‐Si:H) films were studied using infrared and Raman spectroscopy. We have experimentally found that ratios of Raman scattering cross‐sections for Si–H to Si–Si bonds and for Si–H₂ to Si–Si bonds are equal to 0.65 ± 0.07 and 0.25 ± 0.03, respectively. It allows to measure the concentration of hydrogen in a‐Si:H films. The developed approach can be applied for in situ control of hydrogen in a‐Si:H films and also suitable for thin a‐Si:H films on substrates that are opaque in infrared spectral region. Copyright © 2013 John Wiley & Sons, Ltd.     

Mn掺杂对ZnO薄膜结构及发光性能的影响

利用脉冲激光沉积的方法在Si衬底上生长出了c轴高度取向的Mn掺杂ZnO薄膜.X射线衍射表明所有样品都具有纤锌矿结构,没有发现其它相,随着掺杂量的增加,c轴晶格常数增大.原子力显微镜结果显示:Mn的掺杂引起了ZnO薄膜表面粗糙度的变化.由光致发光谱发现,在387 nm附近出现了由于近带边自由激子复合引起的紫外峰,还有以4...     

Co:BaTiO3/Si(100)纳米复合薄膜制备、微结构及其紫外光电子能谱研究

采用脉冲激光气相沉积(PLD)方法,在Si(100)晶面上制备了Co:BaTiO₃纳米复合薄膜.采用X射线衍射(XRD)结合透射电镜(TEM)方法研究了两种厚度Co:BaTiO₃纳米复合薄膜的晶体结构,当薄膜厚度约为30 nm时,薄膜为单一择优取向;当薄膜厚度约为100nm时,薄膜呈多晶结构.原子力显微镜(AFM)分析表明,当膜厚为30nm时,薄膜呈现明显的方形晶粒.采用紫外光电子能谱(UPS)研究了Co的价态和Co:BaTiO₃纳米复合薄 关键词： 3')" href="#">BaTiO₃ 纳米复合薄膜 紫外光电子能谱