用偏振法测薄膜的折射率

测量薄膜的折射率有多种方法,用椭圆偏振仪测量,精度较高,但方法繁复;用布儒斯特角法测量,方法简便,但精度较低。本文介绍用偏振法来测量薄膜的折射率,其实验原理简单,使用常用仪器即可达到一定的测量精度。     

利用泄漏波导测量低折射率薄膜的折射率和厚度

根据泄漏波导原理对K_9玻璃基板上的冰晶石薄膜进行折射率测量,达到的精度为1×10~(-4),与真实波导的情况相似。文中讨论了利用添加高折射率薄层减小待测薄膜的最小厚度的可能性。文中还利用光电方法观察反射光中暗条纹的方法判别波导的激发,并测出了冰晶石薄膜在4500到6500范围内的折射率。     

利用布儒斯特角测定透明薄膜的折射率

本文以光波在分层媒质中的传播理论及布儒斯特角原理为基础讨论了均匀媒质薄膜的折射率测量，为均匀媒质薄膜折射率的测量提供了一种简单的方法。     

酞菁钴薄膜的折射率及吸收特性

通过真空镀法在单晶硅片上制备了酞菁钴薄膜，在波长扫描和入射角可变全自动椭圆偏振光谱仪上研究了ＣｏＰｃ薄膜的椭偏光谱并分析了其电子结构。     

渐变折射率介质中光线路径的数值计算

从理论上分析了渐变折射率介质中光线传播的规律,建立了光线路径的数值计算方法。     

决定介质折射率因素的经典计算

就介质折射率的物理意义首先从理论上作了说明,然后从经典概念出发对介质折射率的表达式作了推导,指出了决定介质折射率的因素,即组成介质的原子结构、原子种类、每一个原子周围电子分布的情况及辐射的频率。通过理论计算和实验数值的对比表明,所推导出的结论及相关的计算方式是正确的,对介质折射率的研究和在特殊领域对折射率有一定要求的材料的制备具有一定的指导意义。     

用YAG激光制备类金刚石薄膜及其光学折射率研究

用高功率的Ｎｄ＾３＋：ＹＡＧ脉冲激光轰击真空室内的石墨靶，形成激光等离子体雾状物质，在硅衬底上沉积形成类金刚石薄膜，用椭圆偏振光谱法测量不同衬底温度下制备的系列样品的厚度和折射率，发现随着衬底温度的升高，薄膜的厚度减小而的折射率增大，这种可以控制折射率米化的薄膜，可能为光学增透增反膜的制备提供一种新方法。     

Determination of thin film refractive index and thickness by means of film phase thickness

A new approach for determination of refractive index dispersion n(λ) (the real part of the complex refractive index) and thickness d of thin films of negligible absorption and weak dispersion is proposed. The calculation procedure is based on determination of the phase thickness of the film in the spectral region of measured transmittance data. All points of measured spectra are included in the calculations. Barium titanate thin films are investigated in the spectral region 0.38–0.78 μm and their n(λ) and d are calculated. The approach is validated using Swanepoel’s method and it is found to be applicable for relatively thin films when measured transmittance spectra have one minimum and one maximum only.      

PECVD制备光学薄膜材料折射率控制技术

渐变折射率光学薄膜用途广泛,PECVD技术在制备渐变折射率光学薄膜方面具有独特的优点。通过控制不同反应气体配比变化,分析了反应气体配比变化与所制备的薄膜折射率、消光系数和沉积速率之间的关系,讨论了薄膜折射率、消光系数和沉积速率变化的原因,研制了折射率可控的氟氧化硅(SiOxFy)、氮氧化硅(SiOxNy)、氮化硅(SixNy)等薄膜材料,获取了折射率在1.33~2.06之间的光学薄膜材料。     

特定折射率材料及光学薄膜制备

根据太阳电池阵激光防护膜性能优化的需要,应用离子辅助电子束双源共蒸工艺方法制备了优化设计所需的特定折射率的薄膜材料并用于制备激光防护膜。测试结果显示:用该工艺方法制备的掺杂材料薄膜的折射率n=1.75,与优化设计所需数值相符;激光防护膜性能优良,太阳辐射能透过率提高6%以上,实现了对该激光防护膜性能的进一步优化。为了使该双源共蒸方法适于大面积薄膜的制备,应用均匀性挡板技术来提高该方法制备大面积薄膜的膜厚均匀性,使制备的掺杂材料薄膜在口径为400 mm时的不均匀性小于2.1%。该双源共蒸方法制备工艺简单、可靠,适于实际工程应用。薄膜性能测试结果与理论优化结果相符,达到预期优化目标。     

Determination of refractive indices and thickness of absorbing crystalline thin films by using prism coupler

Abstract

An improved method has been implemented to study the refection of optical plane waves from anisotropic and absorbing films. The refection from anisotropic non-absorbing films and from isotropic non-absorbing films can be shown as some special cases. The method in this paper can be applied to almost all kinds of materials involved in optical films and integrated optics studies. Guided waves in the anisotropic and absorbing waveguides are determined, and the prism coupler method is employed to determine refractive indices and thickness of the anisotropic and absorbing films. The results show that when we only couple light beams into films with small effective indices, the effect of the absorption can be neglected.     

Determination of refractive indices and thickness of absorbing crystalline thin films by using prism coupler

An improved method has been implemented to study the refection of optical plane waves from anisotropic and absorbing films. The refection from anisotropic non-absorbing films and from isotropic non-absorbing films can be shown as some special cases. The method in this paper can be applied to almost all kinds of materials involved in optical films and integrated optics studies. Guided waves in the anisotropic and absorbing waveguides are determined, and the prism coupler method is employed to determine refractive indices and thickness of the anisotropic and absorbing films. The results show that when we only couple light beams into films with small effective indices, the effect of the absorption can be neglected.     

Interdiffusion in vacuum-deposited dielectric thin films

The observation of interdiffusion imperfection in vacuum-deposited optical thin films is reported. We measured the diffusion lengths of interdiffusion in dielectric thin films of typical combinations of coating materials (TiO₂–SiO₂ and TiO₂–MgF₂) by analyzing the atomic concentration data along the depth obtained with X-ray photoelectron spectroscopy technique. The resultant diffusion lengths in the deposited layers of dielectric coating materials are not small, hence the effects of interdiffusion should be taken into account in the design of optical filters.     

Dewetting of thin polymer films

We study the dewetting of thin polymer films deposited on slippery substrate. Recent experiments on these systems have revealed many unexpected features. We develop here a model that takes into account the rheological properties of polymer melts, focussing on two dewetting geometries (the receding of a straight edge, and the opening of a hole). We show that the friction law associated with the slippage between the film and the substrate has a direct influence on the dewetting dynamic. In addition, we demonstrate that residual stresses, which can be stored in the films due to their viscoelasticity, are a source of destabilization for polymer films, and accelerate the dewetting process.     

PECVD技术制备多波段渐变减反膜

介绍了利用傅里叶变化法设计多波段渐变减反膜的原理和方法,研究了采用该方法设计多波段减反膜时Q函数的优选流程,给出了最优Q函数。设计优化得到了在350~5000nm波段范围平均透过率大于90%的多层渐变减反膜系结构,并采用等离子体增强化学气相沉积(PECVD)技术完成了样片的制备。实验结果表明,镀制的样片在350~5000nm波段范围的平均透过率为90.55%,满足光谱特性的要求。     

测定新月形薄透镜折射率和曲率半径的简单方法

介绍了新月形薄透镜距测定中观察到的球面反射成像及折－反－折成像，指出利用这一现象可较好地测定其折射率及前后表面的曲率半径。