共查询到19条相似文献,搜索用时 187 毫秒
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传统激光光束质量测量方法在CCD相机靶面前激光光路上加装可调衰减模块,对激光光束进行衰减。但该方法受限于CCD相机像元尺寸限制,难以进行高精度测量。为此该文提出了一种滚轮狭缝式激光光束质量评价方法,在测量时采用狭缝滚轮上的扫描狭缝直接扫描被测激光光束,使用InGaAs探测器配合聚焦透镜进行测量。经过与电机同轴的高精度增量式编码器确保采集位置与采集数据同步,扫描频率根据被测激光脉冲频率和光斑的直径范围可进行调整,该方法对光斑空间采样分辨率优于1 μm。实验结果表明,采用该方法测得的激光M2因子数值与被测激光器提供数值一致,测量不确定度小于10%。 相似文献
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针对激光惯性约束聚变实验中的靶丸等微球表面缺陷的真实高度测量问题,为解决现有测量方法存在的缺陷跃变处2π整数倍相位缺失问题,提出一种基于垂直扫描白光干涉技术的零位显微干涉测量方法。该方法采用白光球面零位干涉思想,通过垂直扫描球面干涉获取全视场白光干涉图,然后运用七步移相算法及蝙蝠翼校正算法实现靶丸表面缺陷的形貌计算,最后将白光干涉测量法与激光干涉测量法进行对比实验。结果表明,白光干涉法能够有效解决激光干涉法在缺陷跃变处的2π整数倍相位缺失问题,实现靶丸表面缺陷的真实高度测量,从而扩展靶丸类微球表面缺陷的测量范围。 相似文献
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子孔径拼接检测非球面时调整误差的补偿 总被引:1,自引:0,他引:1
针对在子孔径拼接测量非球面的过程中干涉仪与待测非球面相对位置存在的对准误差,提出了一种基于模式搜索迭代算法的调整误差补偿方法。该方法可以很好地从测量的子孔径相位数据中消除由拼接测量位置没有对准带来的调整误差,实现多个子孔径的精确拼接。对该方法的基本原理和实现步骤进行了分析和研究,建立了子孔径拼接测量的调整误差补偿模型。对口径为230 mm×141 mm的离轴碳化硅非球面反射镜进行了调整误差补偿和相位数据拼接,得到了精确的全口径面形分布。作为验证,对待测非球面进行了零位补偿检测,结果显示两种测试方法的面形PV值和RMS值的相对偏差仅为0.57%和2.74%。 相似文献
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用AFM轮廓仪测量了ICF靶丸3个相互正交方向上的表面高度数据。分析了测量数据的误差来源,给出了消除表面异常扰动和偏心距两类误差的方法和原始数据预处理步骤,采用最小二乘法评定了靶丸球度。给出了靶丸表面形貌一维功率谱估计计算方法和表面粗糙度的计算方法。 相似文献
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矩形靶标测试CCD相机调制传递函数的研究 总被引:1,自引:0,他引:1
利用矩形靶标测量CCD相机的整机调制传递函数时,由于靶标与CCD像元之间存在初始角度误差与初始位置误差,实验测得的调制传递函数小于CCD相机实际调制传递函数。根据调制传递函数的定义,模拟CCD对具有初始角度误差与初始位置误差的矩形靶标成像,推导出了CCD像元的亮度分布公式,从而给出了调制度与初始角度误差和初始位置误差的关系,并分别对具有初始角度差、初始位置差的情况进行分析。最后利用像元间的亮度差推导出计算初始角度误差的理论公式并进行了仿真验证。 相似文献
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In this study, a novel approach to a measuring methodology and calibration method for an optical non-contact scanning probe system is proposed and verified by experiments. The optical probe consists of a line laser diode and two charge-coupled device (CCD) cameras and is placed on a computer numerical control (CNC) machine to measure the workpiece profiles. A space mapping method using the least-squares algorithm is presented for the probe calibration and profile measurement. This method provides a simple and accurate calculation of the relationship between the real space plane and its related image space plane in a CCD camera. A transparent grid with regularly spaced nodal points is used to construct the space mapping function. The space coordinate of an object can be obtained from its image in the CCD camera via the mapping function. The measured profile data are smoothed by the B-spline blending function and can be transferred to a CAD/CAM package for industrial applications. Experimental results show that this technique can determine the 3-D profile of an object with an accuracy of 60 μm. 相似文献
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In the paper machine vision, laser interferometer and coordinate measuring machine (CMM) are combined to develop a vision inspection system. The measurement capability of the developed system is investigated by measuring the distances between the lines on a standard line scale. The vision camera is used to replace the probe of the CMM to take the images of the interested lines on a line scale at two different positions. Meanwhile, the displacement of the CCD camera is measured using laser interferometer. Using subpixel edge localization and outlier-excluding least-squares regression, the distance between two interested lines is computed under an image plane coordinate system. By adding the displacement of the CCD camera measured using laser interferometer, the line space can be determined. Experiments have been performed repeatedly to measure the line space on the 1.00 and 300.0 mm line scales. Results indicate that the measured data only have a little fluctuation and are close to those obtained by the NML (National Measurement Laboratory, Taiwan). 相似文献
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A quick and efficient technique for a charge-coupled device (CCD)-based profilometric measurement system is proposed and verified by experiment. When a laser stripe is projected onto an object, the deformed laser line image is detected by a CCD camera with subpixel resolution and is automatically transferred to its space position using a least-squares mapping algorithm. Measurements are executed on each separate surface of a three-dimensional object and the multi-surface data are integrated through a process of coordinate transformation. Large arrays of data points are acquired on each surface by means of a scanning mechanism. Because the measuring data from each laser stripe position can provide two-dimensional information concerning the surface contour, the laser stripe and the CCD camera are integrated into a measurement system for obtaining the entire three-dimensional information. Theoretical analysis shows that this technique can determine the three-dimensional profile of an object with an accuracy below 0.2 mm. 相似文献
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Straightness Measurement Using Laser Diode and CCD Camera 总被引:4,自引:0,他引:4
HAO Qun ZHAO Yang LI Dacheng CAO Mang 《Chinese Journal of Lasers》1999,8(3):215-220
1IntroductionInmanufactureandasembleofmodernmachinesandinstruments,anindispensablerequirementisthecontrolofformandpositionero... 相似文献
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This paper focuses on measuring straightness of large-scale dimension by using laser diode fiber alignment, diffraction imaging technique and a CCD camera. In this method, we use a laser diode fiber alignment beam as the datum reference of straightness, deviation of the measured from this datum, can be detected by a CCD camera directly. Also a novel image processing algorithm is presented. The experiment result shows that the measurement range of L (m), the measurement accuracy of the system is 3+2.3×10-6L(\mm). 相似文献
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In consideration of the complexity and the high cost of the dual CCD intersection vertical target when it is used indoor. A novel measuring principle of one linear array CCD camera vertical target is presented. One low-power semiconductor sector-like laser with projection board is used to be the lamp-house of the CCD camera. The detection light screen of the CCD camera and the laser lamp-house are adjusted to same plane. When the projectile through the detection light screen, it blocks the part light of the laser and leaves a shadow of projectile on the board. The shadow and its coordinate are acquired and calculated by the CCD camera and computer, and the projectile coordinate of X and Y can be gotten through image processing and further calculation. The measuring principle and the formulas are given, and the measuring error is analyzed. The result indicates that the coordinate error of X and Y less than 1.5 and 2.2 mm, respectively, when the detection light screens is 1 m × 1 m, The principle presented has the advantages that measurement principle is simple, low cost and easy engineering. 相似文献
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设计并开发了光纤扫描式激光光斑测量仪。光纤探头采用逐行扫描的方式对激光光斑进行扫描,采集的光信号经能量转换、数据采集,最终传输到电脑,再由软件绘制出光斑图像。针对于大口径、脉冲激光光斑的测量提出了一种快速扫描的方案,并在此基础上计算分析了仪器的测量精度和测量时间这两个重要参数。与CCD摄像法进行了对比实验研究,结果表明:相对于CCD摄像法会受到接收屏的散射及成像系统误差带来的影响;此设备采用直接测量的手段,能够更加准确地获得光斑的实际尺寸以及光斑能量的空间分布。应用该仪器成功地进行了聚焦光束传输质量的测量。 相似文献