Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

This paper proposes an optical method for measuring small displacements using the surface plasmon resonance (SPR) heterodyne interferometry. A heterodyne light beam reflected by a mirror passes through a hemisphere glass and then enters into a surface plasmon resonance apparatus at the resonant angle. A small displacement of the mirror will introduce a phase-difference variation between p- and s-polarizations of the light emerging from the SPR apparatus. The phase-difference variation can be precisely measured with the heterodyne interferometric technique, and the associated displacement can be estimated. The feasibility of this method was verified by experiment, and the displacement measurement resolution of about 1.4 nm over a traveling range of 6 μm was achieved. Our method of measurement has the merits of both common-path interferometry and heterodyne interferometry.     

Linearization methods of laser interferometers for pico/nano positioning stages

Presented work introduces methods for improving linearity of a heterodyne laser interferometer system. The heterodyne configuration exhibits high potential in demanding applications, like pico/nano positioning. Those applications require superior accuracy, more difficult to obtain in a homodyne configuration of the laser interferometer. The homodyne setup is more susceptible to external light, variation of DC offset and higher noises, especially the 1/f noise. Those issues are filtered out in the heterodyne configuration. The main disadvantage of heterodyne setup are higher measurement nonlinearities. In this paper there are first introduced sources of nonlinearities and their impact on the overall accuracy. According to those findings there are proposed techniques to eliminate error caused by parasite beams, i.e. nonlinearities. Presented method is based on digital signal processing and is reliable and easy to use. In the shown approach the nonlinearities correction is completely automatic. Such system is applicable for X/Y positioning stages. Presented configuration of the laser interferometer is able to track the displacement with 100 pm resolution up to 7 m/s of translation velocity. The resolution can be improved to 10 pm by limitation of maximal velocity. In the paper there is confirmed that errors caused by nonlinearities are in range of ±0.6 nm. Achieved accuracy is comparable to capacitance gauges with presented laser interferometer having much better dynamic range.     

High resolution temperature insensitive interrogation technique for FBG sensors

In this letter, we propose a high resolution temperature insensitive interrogation technique for FBG sensors where one FBG acts as an edge filter to interrogate a separate FBG sensor. A high resolution of better than 5 με in strain measurement range from 0 to 1100 με and the best resolution of better than 1 με were verified by experiments. An error of only ±2.2 με is achieved over a temperature range from 15 to 50 °C, indicating that this strain interrogation technique is temperature insensitive. Using an altered system configuration, the temperature was also measured simultaneously with a resolution better than 0.2 °C.     

Three-dimensional high-resolution acoustic imaging of the sub-seabed

Chirp sub-bottom profilers are marine acoustic devices that use a known and repeatable frequency-modulated source signature to produce vertical seismic reflection cross-sections of the sub-seabed. Here a 3D Chirp system is described that operates in the frequency range of 1.5-13 kHz, to produce a three-dimensional image of the sub-seabed, with typical penetration of 10-30 m and decimetric horizontal and vertical resolution. The system design incorporates a rigid frame that contains the Chirp source array together with 60 receiver elements, with positioning provided by an integrated real-time-kinematic (RTK) global positioning system (GPS). The system can be surface towed from a small survey vessel and can be applied to targets of marine geological, engineering, archaeological and defence interest. Data acquisition and processing are described for a case study which images a buried engineering structure in the Port of Southampton.     

3D high-resolution acoustic imaging of the sub-seabed

Chirp sub-bottom profilers are marine acoustic devices that use a known and repeatable frequency-modulated source signature to produce vertical seismic reflection cross-sections of the sub-seabed. Here a 3D Chirp system is described that operates in the frequency range of 1.5-13 kHz, to produce a three-dimensional image of the sub-seabed, with typical penetration of 10-30 m and decimetric horizontal and vertical resolution. The system design incorporates a rigid frame that contains the Chirp source array together with 60 receiver elements, with positioning provided by an integrated real-time-kinematic (RTK) global positioning system (GPS). The system can be surface towed from a small survey vessel and can be applied to targets of marine geological, engineering, archaeological and defence interest. Data acquisition and processing are described for a case study which images a buried engineering structure in the Port of Southampton.     

A combined multiple-SLED broadband light source at 1300 nm for high resolution optical coherence tomography

We demonstrate a compact, inexpensive, and reliable fiber-coupled light source with broad bandwidth and sufficient power at 1300 nm for high resolution optical coherence tomography (OCT) imaging in real-time applications. By combining four superluminescent diodes (SLEDs) with different central wavelengths, the light source has a bandwidth of 145 nm centered at 1325 nm with over 10 mW of power. OCT images of an excised stage 30 embryonic chick heart acquired with our combined SLED light source (<5 μm axial resolution in tissue) are compared with images obtained with a single SLED source (∼10 μm axial resolution in tissue). The high resolution OCT system with the combined SLED light source provides better image quality (smaller speckle noise) and a greater ability to observe fine structures in the embryonic heart.     

Heterodyne interferometer for displacement measurement with amplitude quadrature and noise suppression

The high precision displacement measurement in nanoscale is crucial to many applications. We present a heterodyne interferometry with differential phase to amplitude conversion scheme for displacement measurement in nanoscale. In this approach, the differential phase introduced by the displacement is converted into the amplitudes of heterodyne signals in quadrature. Meanwhile, the heterodyne signals in phase quadrature are also achieved so that the displacement can be determined from the amplitude ratio of the quadrature signals, and the direction of displacement can be determined from the phase quadrature. Since the differential phase to quadrature amplitude conversion is achieved through the optical addition and subtraction by polarization tuning, which are based on differential detection concept. Thus the proposed method benefits from the features of differential detection with common phase noise and correlated amplitude noise rejection and that of quadrature detection with real time and wide dynamic range of phase measurement. To demonstrate the capability of proposed method in differential phase measurement, we measure the displacement drove by a commercially available PZT pusher and found close agreement between the experiment and the theory. The experimental evidence of noise suppression is also found with spectral measurements, which demonstrates the resolution of displacement measurement at 60 pm and minimum detectable differential phase of 5.6 × 10⁻⁶ rad/ over 50 kHz.     

High-resolution spectroscopy using interleaved 100 GHz optical frequency comb scanned by phase modulator

A high-resolution spectroscopy technique is proposed with an optical phase modulator combined with an interleaved optical frequency comb. The optical phase modulator and a frequency-locked laser light guarantee a spectral resolution less than 1 MHz on an absolute frequency axis. A wide measurement frequency range was realized using a 25 GHz optical frequency comb lying over a 4 THz frequency region. An extraction of single tooth intensity from the comb was realized by a heterodyne technique with a frequency-tunable laser used as a local oscillator. Also, the 25 GHz optical frequency comb was interleaved to generate four 100-GHz combs for removing the crosstalk from the 25 GHz neighboring sidebands in the teeth. This proposed spectroscopy technique was experimentally demonstrated with a resonator of less than 1 MHz linewidth and a H¹³C¹⁴N gas cell. Thus, a measurement frequency range higher than 4 THz (1530 nm-1560 nm) was confirmed with an effective spectral resolution 100 kHz order. In addition, the characteristics of the proposed system were compared with those of the previous system with a single-sideband (SSB) optical modulator.     

Performance of Brillouin optical time domain reflectometer with erbium doped fiber amplifier

The performance of Brillouin optical time domain reflectometry (BOTDR) affected by different pump power and direction of erbium doped fiber amplifier (EDFA) is experimentally demonstrated. A temperature error of 0.5 °C and spatial resolution of 10 m is obtained over 80 km sensing fiber with EDFA. The temperature resolution and dynamic range of BOTDR with backward pumped EDFA is better than forward pumped EDFA. Within the range of pump power, the resolution of BOTDR can be improved by increasing pump power.     

Folded resonator-dual polarization competition laser displacement sensor

The existing so-called “dual polarization competition laser displacement sensor” applies a cat’s eye resonator. The resonator could be disarranged when the cat’s eye reflector (CER) swings slightly with the rod of the slide rail in measuring the procedure and droops due to its deadweight in long-time operation. This influences the stability of the sensor significantly. In this paper, a novel cat’s eye folded resonator was built, based on which our system named “folded resonator-dual polarization competition laser displacement sensor” was set up. It has a high resolution of λ/16 (39.6 nm) and large measurement range of up to 17 mm. The misalignment sensitivities of traditional cat’s eye resonator and the folded one are both analyzed; and comprehensive experiments are carried out, through which a conclusion can be drawn out that the maximal adjusting angle and the maximal cross displacement of the CER in folded resonator are both about 5 times of those in cat’s eye cavity. Furthermore, the measurement results from this new sensor prove its high stability.     

Demonstration of a no-moving-parts axial scanning confocal microscope using liquid crystal optics

For the first time, to the best of authors’ knowledge, a no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter liquid crystal (LC) lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 μm range with a measured 3-dB axial resolution of 3.1 μm using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide (InP) twin square optical waveguide sample with a 10.2 μm waveguide pitch and 2.3 μm height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three-dimensional (3D) imaging and profiling applications.     

Fabry-Perot interference-based fiber-optic sensor for small displacement measurement

A simple fiber-optic sensor based on Fabry-Perot interference for small displacement measurement is investigated both theoretically and experimentally. A broadband light source is coupled into a Fabry-Perot cavity formed by the surfaces of a sensing fiber end and the measured object. The interference signals from the cavity are reflected back into the same fiber. A small displacement via changes in cavity length can be obtained by measuring the wavenumber spacing of the interference fringes. The experimental data meet with the theoretical values very well. Given the light source bandwidth of 40 nm and the initial distance of 30 μm, the proposed displacement sensing system could achieve high resolution measurement of 16 nm.     

A liquid lens-based broadband variable fiber optical attenuator

To the best of our knowledge, proposed is the first variable fiber optical attenuator (VFOA) using an electronically controlled variable focus liquid lens. The approach uses the changes in the radius of curvature of the liquid lens edge to enable an electronically controlled optical wedge that produces a varying beam tilt angle. In effect, changing beam tilt within a single mode fiber (SMF) lens free space coupling assembly leads to a polarization independent broadband VFOA design. The demonstrated VFOA experiment shows broadband operation over the 1530-1560 nm C-Band with a 40 dB dynamic range, <0.5 dB resolution, 0.3 dB polarization dependant loss, 4.3 dB fiber-to-fiber optical loss, 3 dB optical bandwidth from 1510 nm to 1700 nm, and switching time of <100 ms. Applications for this VFOA include use in hand held test and measurement equipment.     

Real-time optical imaging and tracking of micron-sized particles

We report real-time imaging and dynamics monitoring of micrometer predefined and random sized particles by time-space-wavelength mapping technology using a single-detector. Experimentally, we demonstrate real-time line imaging of a 5 μm polystyrene microsphere, glass powder particles and patterns such as fingerprints with up to 5 μm resolution at 1 line/50 ns capture rate. By using the same setup, real-time displacement tracking of micrometer-size glass particles with 50 ns temporal resolution and up to 5 μm spatial resolution is achieved. We also show that existing correlation spectroscopy algorithms can be adopted to extract dynamic information in a complex environment.     

Ultrasonic actuators for nanometre positioning

This paper deals with ultrasonic motors based on bimodal plate vibrations and their application to nanometre resolution stepper positioning systems. The concept of a linear ultrasonic motor drive capable of nanometric steps, long-range travel and reversible controlled motion is presented. The motor concept developed is based on the superposition of a longitudinal and bending vibrations of a rectangular resonator. The ultrasonic motor model based on system identification via discrete observations and prediction has been developed for control applications. The control algorithm for ultrasonic motors has been developed and theoretical investigations have been made. The open loop positioning system with designed stepper ultrasonic drive produced 10 nm resolution and 5% displacement repeatability. The system with computer controlled position feedback has shown 0.3 micron positioning accuracy over the 100 mm positioning range.     

Design and experiments on a wide range fiber Bragg grating sensor for health monitoring of coal mines

The tunnel collapse problem of coal mine is very common and its damage is very serious. It also seriously endangers people's lives and property safety. At present, a variety of instruments are used for tunnel roof structure health monitoring in most of the coal mines at home and abroad. In this paper, a displacement sensor using optical fiber grating technology was designed, which could be used to prevent the problem of coal mine tunnel collapse by monitoring the coal mine tunnel roof displacement. Firstly, finite element analysis was demonstrated to simulate the stress and displacement of coal mine tunnel roof to determine where to install the sensor. Then the characteristics of the fiber Bragg grating sensor were analyzed in detail and the sensor structure was designed according to the actual requirements in the coal mine. At last, the feasibility of the whole system was experimentally verified. The cross-sensitivity of the temperature and displacement issue with FBG sensors could be eliminated by using matched pairs of FBG. The measuring range of 50 mm and the measurement resolution up to 0.06 mm could be obtained with the proposed sensor.     

Simultaneous strain and temperature measurement based on a photonic crystal fiber modal-interference interacting with a long period fiber grating

An alternative all-fiber sensor for simultaneous strain and temperature measurement based on a photonic crystal fiber (PCF) spliced between single-mode fibers cascaded with a long period grating (LPG) is proposed. By collapsing the air holes at two splicing regions along the PCF, a simple but effective modal-interference (MI) is occurred between the core and cladding modes of the PCF. Due to the different responses on the changes of strain and temperature on the MI and the cascaded LPG, the strain and temperature can be measured simultaneously. Experimental results show that the sensing resolution of 9.1 με in strain measurement is experimentally achieved over a range of 2640 με, while the temperature sensing resolution is 0.27 °C within a range of 30-100 °C.     

Design and vibration control of a notch-based compliant stage for display panel inspection applications

Both fast positioning and eliminating relative vibration between automatic optical inspection devices and the associated workpieces are critical for enhancing the throughput of product inspection. Both goals can be achieved by proper control of the stage where the camera is mounted. In this work, a one-dimensional compliant stage, consist of a notch-based structure and a mechanical amplifier, is designed and controlled for fulfilling the above mentioned goals. Essential finite element simulation and structural testing are performed to further characterize the structure and to obtain the system dynamics for controller design. The fundamental natural frequency of the designed stage is approximately 410 Hz and a displacement amplification ratio of 1.21 is achieved. The stage is actuated by a PI-843.40 piezoelectric actuator and the motion is monitored by an ASP-10-CTR capacitance probe. The entire signal acquisition and control are performed under a NI LabView environment using a NI cRIO-9014 FPGA real time controller, where both PID and sliding motion controllers are implemented. The results indicate that a close loop bandwidth of 12 Hz or 29 Hz and a steady state resolution of 50 nm can be achieved after PID or sliding mode control. With such a response, the motion induced vibration may be suppressed for subsequent automatic optical inspection and other applications such as coordinate measurement systems.     

Simultaneous measurement of strain and temperature based on a fiber Bragg grating combined with a high-birefringence fiber loop mirror

We present an all-fiber sensor for simultaneous measurement of temperature and strain. The sensing head is formed by introducing a fiber Bragg grating into a high-birefringence fiber loop mirror that acts as a Mach-Zehnder interferometer for temperature and strain discrimination. A sensing resolution of ±1 °C in temperature and ±21 με in strain has been experimentally achieved over a temperature range of 60 °C and strain range of 600 με.     

Fabrication and scanning tunneling microscopy studies of the Si(1 1 1)-(√31 × √31)-In surface

We report on the fabrication of single phase of the Si(1 1 1)-(√31 × √31)-In reconstruction surface, observed by scanning tunneling microscopy (STM) at room temperature. By depositing specific amounts of indium atoms while heating the Si(1 1 1)-(7 × 7) substrate at a critical temperature, the single phase of Si(1 1 1)-(√31 × √31)-In surfaces could be routinely obtained over the whole surface with large domains. This procedure is certified by our high-resolution STM images in the range of 5-700 nm. Besides, the high resolution STM images of the Si(1 1 1)-(√31 × √31)-In surface were also presented.