Transmission measurement of three-dimension profile based on infrared-light interference technology with wafer compensation

A new method of three-dimension profile measurement is proposed based on infrared-light interference technology, which is extended from visible-light region to infrared-light region for white-light scanning interferometry. Microstructure with two steps of different heights is used to be demonstrative sample to prove the property of designed system based on linnik-type interferometric microscope with phase-stepping algorithm. Three-dimension profile and step height can be obtained accurately with GaAs wafer transmission compensation and are highly consistent with the results that obtained from the famous commercial instrument MSA 400. The novel method has widely potential applications in the field of MEMS, such as reconstructing the internal profile of encapsulation devices and analyzing the quality evaluation of bonding interface based on semiconductor materials.     

Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si

White-light scanning interferometry is extended from the visible-light region to the infrared-light region to measure the three-dimensional (3D) topography of components. An infrared-light interference system based on a linnik-type interferometric microscope is developed according to the principle of transmission of semiconductor materials in the infrared-light region. The 3D topography is measured using the components covered with a Si or GaAs wafer based on a phase-stepping algorithm. The 3D topography can be obtained accurately and relative step heights can be determined within an error less than 3% compared with the instrument MSA 400, a well-known commercially available apparatus used in the field of 3D topography measurement.     

点阵列标定模板图像特征点提取方法

在摄像机标定过程中,提取标定模板图像特征点的精度是影响摄像机内外参数标定精度的重要因素。本文根据条纹投影三维轮廓测量实验系统的要求制作了点阵列标定模板,在图像处理边缘理论的基础上,以圆的解析特性为依据,采用坐标转换思想,引进圆系描述点、圆对应关系,运用统计学理论,提出提取点阵列标定模板图像特征点的新方法,并通过实验验证了该方法的正确性和可行性。为下一步的摄像机内外参数求解做了铺垫。     

CCD摄像机交汇测量目标脱靶量布站分析

分析线列CCD摄像机交汇测量的原理,以空间虚拟的光电靶代替实特靶来实现对弹丸目标脱靶量的实时获取。在分析了CCD摄像机测你精度与布站方式等影响交汇测量精度的因素后,对光电靶面上不同位置点的CCD摄像机交汇坐标测量精度进行了计算,给出测量精度与布站的关系。     

多台线列CCD相机组合交汇目标脱靶量测量

提出一种新的测量方法 ,在两台线列CCD相机不能满足大尺寸光电靶面的测量需要时 ,由多台线列CCD相机组合交汇测量 ,并给出了两种不同的布站方式。在分析了测量精度的数学模型后 ,分别计算了两种布站方式的光电靶面上不同位置点的交汇测量精度。根据精度分析并结合测量条件 ,给出了适合实际测量条件的最优布站方式     

采用二元光学元件的三维轮廓测量方法

提出了采用二元光学元件(BOE)进行三维形貌测量的新方法。设计二元光学元件产生空间二维点阵结构光,经物面调制后的点阵信息被相机一次获取,利用三角测量法得到物体的三维空间坐标。按该方法处理得到的结果与实际物体的形貌特征吻合。结果表明,按该测量系统具有便捷式功能,适用于三维照相等应用领域。     

利用线阵CCD自动测量航空相机镜头的焦距

提出了一种以线阵CCD固态传感器取代读数显微镜的航空相机镜头焦距测量系统。论述了系统的工作原理、软件和硬件的设计及系统的测量误差。结果表明 ,利用线阵固态图像传感器取代读数显微镜 ,把特定物体经透镜成像的大小转换为电信号的脉宽 ,并利用计算机技术自动处理测量数据 ,从根本上克服了用读数显微镜进行测量的缺陷 ,实现了航空相机镜头焦距的实时精确地在线测量     

合肥光源基于同步光的测量与研究

介绍了合肥光源同步光测量系统, 包括条纹相机系统、快速光电测量束团长度系统、束团横向截面测量系统和光位置测量系统. 利用条纹相机系统和快速光电测量束团长度系统进行了束团长度测量和束团伸长效应的研究. 利用束流截面测量系统进行了六极铁对横向不稳定性抑制效果和横向反馈系统反馈效果的测量研究. 光位置测量系统采用丝型光位置检测器和自行研制了对数处理器, 用于测量光源点的束流位置和角度.     

东方超环(EAST)装置中等离子体边界锂杂质的碰撞-辐射模型

在东方超环(EAST)装置中,由于大量锂化壁处理的使用,切向可见光摄像机拍摄到等离子体边界通常存在一条由锂(Li)杂质形成的绿色发光带.本文基于EAST边界等离子体参数条件,基于碰撞-辐射模型给出由已知边界等离子体状态推算Li绿光光强的空间分布的具体方法,并针对简化后的一维径向分布问题,收集、处理OPEN-ADAS数据库的数据,采用软件Mathematica 10.4.1编写相应的数值计算程序,分别输入EAST工作于低约束(L)与高约束(H)模时获得的两组边界电子温度、密度分布数据,给出并分析比较了利用该模型的计算结果.此项工作对于未来建立通过测量及反演边界锂杂质特征谱线强度的空间分布来重构边界等离子体状态的全新技术和研究存在三维磁场扰动条件下的边界等离子体行为均具有重要的理论参考价值.     

EAST 装置边缘局域模细丝宽度的高速CCD可见光相机系统诊断

利用高速CCD 可见光相机系统研究了EAST 上的边缘局域模(ELMs)细丝动力学特性。采用Tsai 两步标定法对CCD 相机进行标定,以实现将CCD 图像坐标转换为真实空间坐标。选取CCD 图像中与边缘局域模细丝垂直方向上的图像灰度值,绘制了灰度分布图。灰度分布图中的一个凸起的尖峰代表了一条边缘局域模细丝结构,细丝的位置坐标由尖峰顶点确定。运用Sobel 边缘检测算子检测细丝边缘轮廓,从而得到细丝的宽度。通过对边缘局域模细丝宽度特性的分析,发现边缘局域模细丝在从最外层封闭磁面向外传播的过程中宽度不断减小。这表明细丝在向外传播的过程中其能量和粒子不断耗散。I-型边缘局域模的细丝宽度比III-型边缘局域模细丝的宽度更大。     

Phase-coded aperture for optical imaging

For the optical spectrum region, we describe a novel phase-coded aperture imaging system that can be used in a computational imaging camera. The optical design includes a phase-only screen followed by a detector array. A specific diffraction pattern forms at the detector array when the wavefront from a point source object passes through the phase screen. Since diffraction effects cannot be ignored in the optical regime, an iterative phase retrieval method is used to calculate the phase coded screen. Correlation type processing can be applied for the image recovery. Computer simulation results are presented to illustrate the excellent imaging performance of this camera.     

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The high speed CCD visible-light camera system has been installed to detect the dynamic characteristics of ELMs filaments on EAST tokamak. In order to convert the CCD video imaging coordinates into real space coordinates, the CCD system has calibrated using Tsai’s two-stage calibration technique. A raised spike in the grayscale profile, drawn by selecting the grayscale value of the image in the vertical direction of the ELMs filament in the CCD image, represents an ELMs filament structure whose positional coordinates are determined by the apex of the spike. The Sobel edge detection operator was used to examine the edge profile of the filament to obtain the width of the filament. By analyzing the characteristics of the filament width of the ELMs, it is found that the width of ELMs filaments continuously decreases outward from the outermost magnetic surface. This indicates that the filaments continue to dissipate energy and particles as they propagate outward. The width of filaments of Type-I ELMs is greater than that of Type-III ELMs.     

Detection Schemes for Optical-Coherence-Domain Imaging of Biological Tissues

Optical coherence tomography (OCT) is a novel imaging modality based on low-coherence interferometry. This paper summarizes some of our latest work on the development of OCT where we have taken two approaches. In the first approach we have developed a phase-drift-suppression method for stable heterodyne detection in the presence of phase fluctuations. In the second approach we have concentrated on the development of two-dimensional heterodyne detection techniques for real-time imaging. A novel detection scheme has been proposed, which enables parallel heterodyne detection with a commercially available imager such as a charge-coupled-device camera. Meanwhile, a non-scanning OCT system configuration based on off-axis interferometry is being studied. Using a newly developed angular-dispersion imaging scheme, we show that the axial reflectance profile in OCT measurement can be detected instantaneously with a sensor array.     

同步光成像方法对加速器储存环束流的测量

利用可见光波段的同步光直接成像对北京正负电子对撞机二期工程（BEPCⅡ）储存环束流的横向截面尺寸进行了测量,对可见光直接成像方法的光路搭建注意事项进行了详细说明,并详细阐述了此测量方法对光路放大倍数的精确测量及过程,同时对可能产生的随机误差和系统误差提出了处理方法,利用点扩散函数（PSF）对成像过程中产生的衍射误差进行了处理,这些处理方法对其他测量系统如X射线小孔成像也适用,并将测量结果与可见光空间干涉方法测量结果进行了对比,且符合很好。     

强流短脉冲电子束束剖面的时间分辨测量

 介绍了一套基于切伦科夫辐射的、用于强流短脉冲电子束束剖面测量的装置。装置利用扫描相机记录背面打毛的石英玻璃薄片中产生的切伦科夫光信号。使用该装置，在中国工程物理研究院流体物理研究所的2MeV注入器上进行了切伦科夫光的验证实验和时间分辨的束剖面测量实验。分析表明，测量系统的时间分辨率和空间分辨率分别为1.75ns和0.74mm。     

神龙一号参数测量用高速两分幅相机

采用长焦距镜头的后工作空间全口径分光原理,利用门控型像增强器、CCD相机、基于大规模可编程集成电路的高速快门控制触发系统等部件,研制了具有较高时间分辨能力和高灵敏度的两分幅高速相机,并在此基础上建立了束参数的高速测量系统。两分幅相机的最高快门速度约3 ns,幅间间隔时间则具有以0.5 ns的步进进行调节的能力;快门时间及幅间间隔时间可以分别独立调节,最大可到1 s;同时具有较好的线性度和空间响应的均匀性,等效背景噪声低到约5 electronspixel-1s-1,并且分幅相机灵敏度调节范围大。该系统一次可以拍摄两幅图像,图像阵列可达到1 0241 024,满足神龙一号的各种测量要求。     

合肥光源新的束团截面及发射度测量系统的研制

介绍了合肥光源储存环紫外光束团截面及束流发射度测量系统. 本系统采用光学探测, 由光学成像和图像采集处理两大部分组成. 光学成像部分利用光学成像将中心波长366.1nm紫外光1:1成像于CCD探测器上. 图像采集处理部分将CCD探测器采集的视频信号由电缆输出到图像采集卡进行图像采集, 然后由LabVIEW程序进行数据处理获得束团截面尺寸以及束流发射度和耦合度, 最后给出了实验结果.     

Diagnostics for first plasma study on EAST tokamak

The first plasma was obtained in the EAST on September 26th, 2006. Single-null (SN) and double-null (DN) diverted plasmas were achieved successfully in the EAST tokamak on January 22nd, 2007. The employed plasma diagnostics for first plasma study of EAST are as follows: a vertical one-channel far-infrared (FIR) hydrogen cyanide (HCN) laser interferometer for measuring the line average density, a 10-channel soft X-ray array for intensity measurement, a 16-channel heterodyne Electron Cyclotron Emission (ECE) for measuring the electron temperature profile, a 8-channel XUV bolometer array to measure plasma radiation losses, a 3-channel hard X-ray array for intensity measurement, an electromagnetic measurement system, a 35-channel Hα radiation array, 20 probes for divertor plasma, a one-channel visible bremsstrahlung emission, an impurity optical spectrum measurement system and two optical spectroscopic multi-channel analyzers (OMA). The first experimental results of diagnostic systems are summarized in this Letter.     

一维时空分辨x射线辐射功率测量系统

采用狭逢、红光闪烁体、光纤阵列、条纹相机、像增强器等元件组成x射线辐射功率时空分辨测量系统，该系统具有对x射线能量响应平坦，可有效屏蔽本底光干扰的优点，在喷气Z pinch实验中成功获得内爆等离子体x射线辐射的轴向分布图像.文中对系统结构、参数和使用情况进行了介绍，对测量结果进行了讨论. 关键词： Z pinch x射线 时空分辨 图像     

Double-exposure heterodyne imaging for observing line-of-sight deformation

An optical heterodyne array imaging system is described for double-exposure interferometric measurement of objects that change because of stress or vibration. The signal measurement and processing approach is summarized, and the method is demonstrated in the laboratory. An advantage of this technique over other electronic interferometric imaging methods is that complex exposures are created with digital phase and amplitude values at each image pixel. In addition, measurement of object deformation does not require time synchronization between the camera exposure time, or laser pulse time, and object vibration frequency.