微型差动式共焦自聚焦光聚焦探测系统

为解决微小内轮廓尺寸为代表的微小尺寸的非接触式超精密测量问题，提出了将自聚焦透镜体积小的特点与共焦显微技术的高分辨率和绝对位置跟踪特性相结合的差动式自聚焦共焦微型显微技术的光探测技术，建立了相应的传感系统，介绍了系统的工作原理和构成，自聚焦透镜测头直径为1mm，两个探测器差动设置，不但消除了光源的光强漂移和探测器的电子漂移产生的共模噪声，提高了测量信噪比，而且有效地提高了系统的轴向分辨率，初步实验表明，系统轴向分辨率在倾斜率小于20度的范围内可达5nm。     

基于CCD虚拟针孔探测的双轴共焦显微技术

双轴共焦显微技术具有独特的非共轴结构,与传统单轴共焦显微技术相比可利用较低数值孔径物镜实现较高的轴向分辨力,且具有工作距离大、信噪比高等优势。对基于CCD虚拟针孔(VPH)探测的双轴共焦显微成像系统的空间分辨特性进行了理论分析,并构建了相应的实验系统,对其轴向响应进行了实验验证。实验中照明物镜NAi=0.117,采集物镜NAc=0.106,θ=45°,得出系统轴向半高宽(FWHM)为2.63μm,比同等参数(NA=0.117)下单轴共焦显微系统的轴向FWHM高出约20倍。     

An optical system incorporating gradient-index lens for confocal inspection

A differential confocal measurement system features high lateral resolution and depth-discriminated sections. In comparison with conventional lens, gradient-index lens is lighter in weight, smaller in volume and easy to couple. In order to facilitate the measurement of a small irregular surface in a limited space, a small optical inspection system is presented, which combines the high axial resolution and absolute position tracking capability of a differential confocal microscopy and the compact design of gradient-index lens, and uses gradient-index lens to obtain a small detector of 1 mm in diameter. The operating principle and construction of the measurement system are detailed. The differential design of the two detectors eliminates both the fluctuation of light source and the electronic noise from probes, and increases the axial resolution as well.     

应用共焦显微镜原理测量倾斜工程表面

用基尔霍夫衍射公式分析反射式共焦光路 ,得到了被测件有一定倾斜角度表面的共焦轴向响应理论模型。由菲涅耳衍射近似公式得到的共焦轴向响应特性只是它的理论模型的一个特例。同时 ,对接收端采用差动连接的共焦测量的聚焦瞄准信号进行了分析 ,得到了表面倾斜角对聚焦瞄准信号影响的关系。应用共焦实验系统及差动测量系统对具有不同倾角的块规斜面的轴向响应信号进行了测量。理论模型的数值分析与实验结果相吻合。用差动共焦光学系统作为瞄准传感器、用电容传感器进行位移监测 ,对倾角为 10°的角规的斜面进行测量 ,得到分辨率小于 2 0nm的表面形貌图。     

差动共焦显微成像高稳定三维扫描技术与系统

激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。     

Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures.     

Dual-axes confocal microscopy with post-objective scanning and low-coherence heterodyne detection

We present a dual-axes confocal microscope that employs postobjective scanning and low-coherence heterodyne detection to collect vertical cross-sectional images from biological tissue with high axial resolution, reduced noise from scattered light, deep tissue penetration, and a large dynamic range. This architecture can be scaled down to millimeter dimensions with microelectromechanical systems technology for performance of in vivo optical biopsy.     

共焦显微镜三维轮廓快速测量方法及其误差分析

共焦显微术在生物学及工程应用中已成为一种有效的测量、观察方法。本文针对共 焦显微三维测量系统提出了一种高精度快速算法,并进行了误差分析与计算机仿真。对实际 共焦三维测量系统的设计具有重要意义。     

微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

一种实现共焦显微镜空间微分成像的新方法

提出了一种实现共焦显微镜空间微分成像的新方法。为了获得空间微分图像,首先利用时间分辨技术结合互补调制技术,获得两束相位相反的调制光,然后利用这两束相位相反的调制光结合共焦扫描技术,实现共焦显微镜的空间微分成像。实验表明:这种空间微分技术可以准确实现共焦显微镜的空间微分成像,从而获得成像物体的边缘轮廓和实现边缘增强。     

Experimental investigation of fibre-optical confocal scanning microscopy: Including a comparison with pinhole detection

Reported in this paper are the experimental results on fibre-optical confocal scanning microscopy (FOCSM). We have performed various measurements in the FOCSM involving axial responses, edge responses, signal levels and interference axial responses in order to demonstrate the differences in confocal scanning imaging between using optical fibres and using pinholes. Experimentally measured results are compared with our theoretical predictions, revealing good agreements. It is shown convincingly that the FOCSM is a purely coherent imaging system as predicted in our previous theory.     

激光分光瞳共焦显微镜系统研制

为了满足生物类等样品对大工作距和高分辨率共焦显微镜的需求,将分光瞳技术与激光共焦显微技术结合应用到成像系统上。阐述了激光分光瞳共焦显微成像原理,首次成功搭建了相应的显微镜成像测量系统。理论分析和实验表明:分光瞳共焦显微技术独特的非共轴结构使系统的轴向分辨力是相同数值孔径物镜单轴系统的3倍以上,对理论高度为100nm的台阶样品进行成像测试,得到的样品三维形貌,成像质量良好。     

光栅尺测长式激光差动共焦曲率半径测量系统

为了增强高精度曲率半径测量仪器的抗环境干扰能力,满足现场使用需求,研制了一套基于光栅尺测长的激光差动共焦曲率半径测量系统。该系统利用差动共焦轴向光强响应曲线的过零点对应系统物镜聚焦焦点这一特性,对被测样品的猫眼位置及共焦位置进行精确瞄准定位,并借助光栅尺测长得到透镜猫眼位置与共焦位置之间的距离,实现曲率半径的测量。实验表明,该系统相对测量精度优于510-6,满足高精度曲率半径测量的精度需求。     

Imaging theory of nonlinear second harmonic and third harmonic generations in confocal microscopy

ItisreportedrecentlythatnonlinearopticalphenomenonofSHGandTHGhasbeenobservedinmanybiologicaltissues[16].SHGandTHGhavebeenusedtoperformthethree-dimensionalimaginginlivingtissuesandhaveattractedmuchattentionrecently.TherearemanyadvantagesofusingSHGandTHGtoperformthethree-dimensionalimaginginlivingtissues,suchasnoninvasiveandnophotobleaching,inadditiontotheimagingpropertiesofmulti-photonfluorescenceimaging[7—9].Firstly,unlikeinthesingle-andmulti-photonfluorescenceprocesses,onlyvirtualstat…     

测量表面倾角对差动共焦瞄准信号影响分析

普通共焦显微镜的轴向响应特性,因受到被测量表面的倾斜角影响引从而起轴向响应特性变化,而应用差动共焦光学系统对超精密加工的表面进行瞄准测量时,差动系统的瞄准信号也受到影响,并进而影响到测量系统对加工表面的测量精度及分辨特性。通过对差动共焦测量系统输出信号理论模型的分析得出被测量面的倾斜角变化不影响差动共焦输出信号零点位置;倾角在一定范围内变化时不影响瞄准测量分辨力的结论,并给出了实验分析结果。     

An optical technique for remote focusing in microscopy

We describe the theory of a new method of optical refocusing that is particularly relevant for confocal and multiphoton microscopy systems. This method avoids the spherical aberration that is common to other optical refocusing systems. We show that aberration-free refocusing can be achieved over an axial scan range of 70 μm for a 1.4 NA objective lens. As refocusing is implemented remotely from the specimen, this method enables high axial scan speeds without mechanical interference between the objective lens and the specimen.     

A lateral differential confocal microscopy for accurate detection and localization of edge contours

Common path noise and disturbance in light source and ambient lighting affect detection accuracy of edge contours greatly in optical microscopy. In order to solve this problem, a lateral differential confocal microscopy is proposed based on principle of lateral difference and confocal microscopy. The approach proposed uses confocal dual-receiving light path arrangement and real-time heterodyne subtraction of two signals with lateral offsets by a differential detector to improve the system′s accuracy and detection sensitivity. Theoretical analyses have been presented. In addition, a simple prototype system has been built based on theoretical analyses. Related experiments have been performed under laboratory conditions. Different from former image processing methods, common path noise and additive disturbance in light source and ambient lighting are eliminated before they are recorded. Theoretical analyses and experimental results indicate a more accurate and sensitive result.     

基于双边拟合的高稳定性共焦拉曼光谱定焦方法

共焦拉曼光谱技术可实现定量、无损、无需标记的样品微区“分子结构特征和物质组成信息”成像,被广泛应用于生物医学、物理化学以及材料科学等领域。由于共焦拉曼系统采用“点”激发和“点”探测的探测机制,且拉曼散射光谱信号微弱,导致成像所需时间可长达数小时甚至数十小时;测量过程中系统极易受环境变化、空气扰动等因素影响产生漂移,造成被测样品离焦,从而导致成像质量不稳定。针对现有共焦拉曼系统对样品定焦能力不足、样品易产生离焦误差、系统漂移大等问题,本文提出了一种基于双边拟合的高稳定性共焦拉曼光谱定焦方法。该方法首先对共焦拉曼光谱强度轴向响应曲线两侧对样品离焦敏感的数据区间分别进行线性拟合,得到两条拟合直线方程;然后,将所得的两条直线方程相减得到新的差分直线;最后,通过差分直线的过零点位置确定系统焦平面位置,实现了被测样品的高精度定焦,消除了离焦对系统测量结果的影响。以单晶硅表面同一位置,轴向扫描步距100 nm,进行60次重复定焦实验,实验获得的重复定焦极差为80.2 nm,说明系统具有良好的抗漂移能力。对周期5 μm的竖条栅格标准原子力台阶样品进行拉曼mapping成像测试,结果表明在长时间的成像过程中,和无定焦功能的图像相比,该方法获得的竖条栅格图像更清晰、边缘更锐利、信噪比较好。仿真分析和实验结果表明：提出的基于双边拟合共焦拉曼光谱探测方法可以提高系统的定焦准确度,抑制干扰因素导致的系统离焦对成像质量的影响,进而确保了系统探测的稳定性和成像分辨力,是一种自动定焦、抗漂移的拉曼光谱成像方法。     

Determination of one‐dimensional spherically aberrated point spread function in depth profiling by confocal Raman microscopy

We present a simple experiment that allows the complete and direct characterization of the point spread function (PSF) in refraction‐aberrated depth profiling experiments with confocal Raman microscopy. We used a wedge‐shaped solid polymer film to induce refraction aberrations on the response of an infinitesimally thin Raman scatterer, represented by a polished silicon wafer. The system, with the film pasted on top of the Si wafer, was probed by a depth slicing technique under a dry‐optics configuration. Post‐acquisition processing of the Si and polymer intensity maps allowed the reconstruction of the axial PSF spatially resolved each 1 µm or less in the z‐axis and for virtually continuous values of focusing depth. In agreement with theory, we found that PSF broadens asymmetrically with focusing depth, with a marked shift in the focus point. From the shape of PSF, we obtained values of depth resolution within the film that confirm that axial discrimination is not drastically deteriorated, as suggested by previous works, and that confocal aperture effectively reduces the collection volume even under severe refraction interference. Copyright © 2013 John Wiley & Sons, Ltd.     

基于矢量衍射理论的相位型光瞳滤波器设计

根据矢量衍射理论,提出了一种设计纯相位型光瞳滤波器的新方法根据该方法所设计的滤波器主要应用于采用高数值孔径显微物镜的成像系统对点扩散函数中的指数因子进行二次近似处理后,可以得到超分辨参量与滤波器参量的近似关系式以三区相位型滤波器为例,讨论了该近似关系式的有效性给出一个设计实例,根据所要求的超分辨性能要求设计滤波器.模拟结果表明,该滤波器达到了设计要求,最后利用共焦系统点扩散函数的乘积特性,大大减弱了旁瓣的影响.