Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source

The dynamics of debris from the laser-produced tin (Sn) plasma was investigated for an extreme ultraviolet light source in order to establish the guideline for the optimum design of a mitigation system, such as a mass-limited target. The dissemination of the Sn atoms from the different shapes of a wire and a mass-limited droplet target were investigated using the laser-induced fluorescence (LIF) imaging method. The Sn droplet targets with a diameter in the range of 5 to 17 μm were prepared by a new droplet generating technique using a pulsed laser. There was a large difference in the angular distribution of Sn atoms in the plane parallel and perpendicular to the wire axis, indicating the curvature of the target surface governed the angular distribution of the ablated species. The spatial distributions of Sn atoms from the droplet targets were similar to those from the curved surface of the wire targets. The ablation dynamics of the droplet observed by a high-speed imaging camera is also discussed.     

EUV and fast ion emission from cryogenic liquid jet target laser-generated plasma

A liquid jet of either nitrogen or argon of 20 μm diameter was exposed to intense laser fields with pulse durations between 70 fs and 250 ps, leading to intensities of 10¹⁶ W cm^-2 and 10¹³ W cm^-2, respectively. The emission of extreme UV light and soft X-rays shows the characteristic lines of hydrogen-like nitrogen and carbon-like argon. For nitrogen the emitted photon flux at 250 ps was about two orders of magnitude higher than for 70 fs pulses. A weak dependence on the laser polarization with respect to the liquid jet axis was found. The kinetic energy of the emitted ions easily exceeded 100 keV for nitrogen and 200 keV for argon for a pulse duration close to 2 ps. Received: 21 August 2000 / Revised version: 20 December 2000 / Published online: 22 March 2001     

Highly resolved EUV beam-foil spectra of silicon

Spectra of foil-excited ions at tandem energies in the EUV region show many unclassified lines. In order to provide a basis for term analysis, high resolution spectra of Si are taken using a ruled 600 l/mm grating in 3^rd diffraction order and two holographic gratings of 1,200 l/mm resp. 3,600 l/mm in first diffraction order. With the latter grating the resolution power of a 2.2 m grazing-incidence monochromator is sufficient to measure fine-structure splittings of inter-shell transitions of O VI–O VIII and Si X–Si XII in the wavelength rangeλ < 20 nm. The performance of the gratings is demonstrated.     

Double electric layer influence on dynamic of EUV radiation from plasma of high-current pulse diode in tin vapor

Generation of high-power pulses of extreme ultraviolet radiation from multi-charged tin plasma is of great interest to many applications. We studied the electric potential distribution in the discharge gap in kind of the electric double layer and its effect on the extreme ultraviolet generation. The local plasma heating by electron beam, formed in the double layer, leads to generation of peak radiation pulses and as a result to an increase in the radiation power.     

Laser-induced modification of composite Cu-C nanosized particles synthesized using a pulsed electrical discharge in a liquid

Composite copper-containing carbon nanosized structures were synthesized in the plasma of a pulsed electrical discharge, initiated between two graphite electrodes in an aqueous copper chloride solution. We studied the effect of laser radiation on the morphology of the nanoparticles formed, whose properties we studied by optical absorption spectroscopy and transmission electron microscopy. We discuss the mechanisms for nanoparticle formation in a discharge submerged in a liquid, and the possibilities for laser-induced modification of the nanoparticles. We estimated the temperature of the nanoparticles when exposed to laser radiation pulses. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 3, pp. 372–378, May–June, 2008.     

Optical emission spectra from microwave oxygen plasma produced by surfatron discharge

This paper is devoted to a systematic study of the production of molecular and atomic ions and excited atoms in a microwave oxygen plasma generated by surfatron in a quartz tube (i.d. 6 mm). The content of O ₂ ⁺ , O⁺ and O is measured, using the optical emission spectroscopy, in a wide range of oxygen pressures (from 3.5 Pa to 10² Pa) and microwaves powers (from about 30 W to 300 W) delivered into the plasma. It is shown that the content of individual species O2⁺, O⁺ and O strongly depends on the conditions, particularly operating pressurep and the microwave powerP, under which plasma is created. It means that the chemical reactivity of microwave plasma also strongly depends onp andP. It is of great importance for many practical applications, e.g. for a reproducible production of thin films with prescribed properties.The authors wish to express their thanks to the Grant Agency of Academy of Sciences of the Czech Republic for the support of this research. This work was done under Academy of Sciences Grant No. 11020.     

Laser-induced plasma by two-color excitation

With a superposition of a nanosecond infrared-laser pulse and its second harmonic, the threshold of plasma formation in gasses as well as the energy transfer efficiency from the laser field to the plasma can be significantly improved in comparison to purely monochromatic radiation. We present experimental results in air at pressures between 0.4 and 3 bar; in this pressure range, the threshold energy for the superposition is reduced by ≈30% as compared to that of pure infrared radiation, while the energy transfer slope efficiency is equal to the IR efficiency at high pressures and somewhat less at lower pressures. Possible mechanisms responsible for this effect are discussed.     

Laser-induced pattern formation in liquid sulfur

Liquid sulfur is a well-known liquid which exhibits a polymerization transition at T_p=159 °C. Recently, it was found from our experiments that such a transition can be induced below T_p through laser illumination and that an iridescent pattern appears under strong illumination with a pulsed laser of more than 60 mJ/cm² pulse. It is proposed that the visible change in iridescence is due to a macroscopic reconstruction of laser-generated polymers and that a laser-induced phase transition takes place from a freely expanded polymer phase to an ordered polymer phase when increasing the laser illumination. To further examine this possibility, the time variation of the iridescent pattern has been fully investigated using a macro lens, a polarized microscope and an optical microscope. In an analysis of the iridescent pattern, a rapid decrease in the area was observed after an initial slow decrease, suggesting a type of phase transition. Results from the observation of a quenched sulfur sample with a polarized microscope gave evidence that the iridescent region consists of polymers. Through observation of the liquid with a microscope, a striped pattern with micrometer sized spacing was noted in the iridescent pattern. A drastic color change was observed in the pattern from its generation to its disappearance. Sample thickness dependence of the pattern was also observed. These results were well explained by assuming the self-arrangement of laser-generated colloidal polymers.     

Influence of plasma discharge operating regime and laser beam intensity on optogalvanic spectra

The optogalvanic (OG) spectrum — over the tuning range of R 6G dye (568 nm to 605 nm) — of a Pr/Ne discharge tube is studied. The positive OG signals are approximately two orders of magnitude larger than the negative OG signals. The magnitude of the signals depend mainly on the operating regime of the discharge. Specifically, operation of the discharge in the abnormal glow regime leads to an enhancement in the negative OG signals. The operating point on theV-I characteristic of the discharge should be stipulated. To study the variation of the OG signal with the intensity of the laser beam two OG signals, of different polarities, were examined. We observed that with respect to positive OG signals, there is a trend towards pumping saturation. A minimum threshold of 0.3 kW laser power is required to generate negative OG signals. For the same attenuation in the laser beam there is a ten times more efficient reduction in the negative OG signals than in the case of positive OG signals. This confirms the important role of metastable atoms in the conduction in gas discharges.The hypothesis that negative OG signals can be obtained only abnormal glow regime needs more experimental data. The required study of the temporal variation in the OG signal with increase in the discharge current is being carried out and the results are to be published.     

Spectroscopic diagnostics for an electrical discharge plasma in a liquid

We conducted spectroscopic studies of an electrical discharge plasma in a liquid, used for synthesis of nanosized particles of metals and their compounds. From the intensity ratio of the copper lines, we estimated the electron temperature, and from the Stark broadening of the hydrogen lines H _α we determined the electron density in the electrical discharge plasma. Information about the concentration of copper atoms in the discharge was obtained from analysis of the spectra in the region of resonance lines of copper. We carried out a comparative analysis of the plasma parameters for spark and arc discharges in water, ethanol, and air. Based on the equation of state for an ideal plasma, taking into account the Debye correction, we estimated the pressure in the plasma channel.     

燃烧产物组成激光诱导荧光光谱的测量

对激光诱导荧光（LIF）光谱技术在燃烧过程中的应用进行研究，介绍测量燃烧过程中常见自由基OH和NO的LIF光谱的实验方案，以及采用激光诱导荧光光谱技术测量小分子荧光光谱的方法，利用YAG激光器、染料激光器、CO2激光器、光谱仪、ICCD等设备对燃烧产物中常见小分子自由基OH和NO进行了测量，从实验中得到了自由基OH和NO的荧光光谱。实验结果表明，荧光光谱与激发波长无关，但是激发波长改变后，荧光强度因离开最佳波长而有所下降，这符合分子荧光光谱的特征。与其他光谱技术相比，激光诱导荧光光谱技术具有极高的选择性和灵敏度。     

Laser-induced fluorescence measurements of velocity within a Hall discharge

The results of a study of laser-induced fluorescence velocimetry of neutral and singly ionized xenon in the plume and interior portions of the acceleration channel of a Hall thruster plasma discharge operating at powers ranging from 250 to 725 W are described. Axial ion and neutral velocity profiles for four discharge voltage conditions (100 V, 160 V, 200 V, 250 V) are measured as are radial ion velocity profiles in the near-field plume. Ion velocity measurements of axial velocity both inside and outside the thruster as well as radial velocity measurements outside the thruster are performed using laser-induced fluorescence with nonresonant signal detection on the xenon ion 5d[4]_7/2–6p[3]_5/2 excitation transition while monitoring the signal from the 6s[2]_3/2–6p[3]_5/2transition. Neutral axial velocity measurements are similarly performed in the interior of the Hall thruster using the 6s[3/2]⁰ ₂–6p[3/2]₂transition with resonance fluorescence collection. Optical access to the interior of the Hall thruster is provided by a 1-mm-wide axial slot in the insulator outer wall. While the majority of the ion velocity measurements used partially saturated fluorescence to improve the signal-to-noise ratio, one radial trace of the ion transition was taken in the linear fluorescence region and yields a xenon ion translational temperature between 400 and 800 K at a location 13 mm into the plume. Received: 27 September 2000 / Revised version: 2 March 2001 / Published online: 9 May 2001     

Laser-induced coherent modulation of solid and liquid surfaces

The interaction of a single spatially coherent, polarized laser beam with an interface possessing microscopic roughness leads to inhomogeneous energy deposition due to the interference between the incident beam and scattered interface fields. At high intensities this can lead to spatially periodic melting or vaporization of solid or liquid layers, and temporary or permanent modification of the interface. We review our experimental and theoretical work and discuss the detailed electrodynamics, spatial spectra, surface structure and temporal growth characteristics of this phenomenon.     

Laser-induced thermohydrodynamic effects in thin liquid membranes

Thermocapillary effects are produced in liquid membranes suspended from rigid contours by heating with a 1 mW, focused laser beam. This induces pits with diameter 0.1 mm and lifetime 1 h after termination of heating. Self-modulation of the reflected and transmitted laser beams is reported.     

Laser-induced cavities and solitons in overcritical hydrogen plasma

A picosecond CO₂ laser was used successfully in a number of experiments exploring advanced methods of particle acceleration [1]. Proton acceleration from gas-jet plasma exemplifies another advantage of employing the increase in laser wavelength from the optical to the mid-IR region. Recent theoretical- and experimental-studies of ion acceleration from laser-generated plasma point to better ways to control the ion beam’s energy when plasma approaches the critical density. Studying this regime with solid-state lasers is problematic due to the dearth of plasma sources at the critical electron density ∼10²¹ cm⁻³, corresponding to laser wavelength λ = 1 μm. CO₂ laser offers a solution. The CO₂ laser’s 10 μm wavelength shifts the critical plasma density to 10¹⁹ cm⁻³, a value attainable with gas jets. Capitalizing on this approach, we focused a circular polarized 1-TW CO₂ laser beam onto a hydrogen gas jet and observed a monoenergetic proton beam in the 1–2 MeV range. Simultaneously, we optically probed the laser/plasma interaction region with visible light, revealing holes bored by radiation pressure, as well as quasi-stationary soliton-like plasma formations. Our findings from 2D PIC simulations agree with experimental results and aid in their interpretation.     

Optimization of EUV radiation yield from laser-produced plasma

We optimize the conversion of laser energy into extreme ultraviolet (EUV) radiation by tailoring the laser parameters for a laser-produced plasma generated from 20 μm diameter water droplets. It is shown that mass-limited targets require careful adaption of laser-pulse energy and laser-pulse duration separately, rather than laser intensity, which seems to be adequate for bulk targets. The optimal pulse duration scales with the droplet radius, and the optimal pulse energy with the droplet volume. With optimized parameters, we obtain a conversion efficiency of 0.23% in 4π and 2.5% bandwidth for 13 nm radiation, the future EUV lithography light. Received: 16 July 2001 / Revised version: 25 September 2001 / Published online: 7 November 2001     

Laser-induced fluorescent measurements of magnetic field contoursin a low-pressure discharge

Faraday rotation of a laser beam and emission spectroscopy to resolve Zeeman splitting provide information about the plasma magnetic field, integrated along the line of sight. Information about the local magnetic field strength can be obtained using a dye laser tuned off the center of an atomic or ionic transition by an amount δλ_z. If the absorption linewidth of the transition probed is less than the Zeeman splitting, only those atoms/ions residing in a magnetic field where the Zeeman splitting is δλ_z will resonantly absorb energy from the laser and fluoresce. The feasibility of this magnetic field contour technique was studied in a low-pressure neon discharge. A conductor insulated from the discharge generated a large magnetic field in the discharge free of the Stark broadening effects associated with large plasma currents. The laser-induced fluorescence (LIF) intensity profile measured along the laser beams had peaks at those spatial locations where local magnetic fields, inferred from the conductor current, agreed with the Zeeman shifted wavelength of the laser     

Auto-cleaning of deposited tin debris in a laser-produced plasma extreme ultraviolet source by using a liquid jet target containing tin chloride

We have demonstrated auto-cleaning of deposited tin debris produced in a laser-plasma extreme ultraviolet (EUV) source by using a liquid jet target containing tin chloride solution. The use of double laser pulse irradiation improved the EUV conversion efficiency of 1.1%, which was 3.3 times as large as that obtained with single laser pulse irradiation. At an appropriate concentration of tin chloride, the amount of deposited debris was balanced out with that of sputtered and/or etched debris, resulting in a thickness of deposited debris less than 1 nm after 40?000 laser pulse irradiations.     

Laser-induced deposition of hetero-metallic structures from liquid phase

Laser-induced chemical-liquid phase deposition of hetero-metallic (Gu-Cr) structures is demonstrated for the first time. The deposition of hetero-metallic structures is of special interest thanks to wider range of properties as compared to pure metals. The deposition was realized from the electrolyte solution based on copper sulphate and potassium dichromate. The focused beam of the continuous wave Ar⁺ laser generated in the multiwave regime was used for the structures precipitation. The chemical processes resulting in Cu-Cr structures deposition are analyzed emphasizing some features typical for laser-assisted methods.