Optical characterization of atmospheric‐pressure plasma needle

The atmospheric‐pressure plasma needle is a promising source that can be used efficiently for different industrial applications. A radio frequency (RF) (13.56 MHz) generator was used to generate a He–O₂/Ar mixture plasma. The ground‐state oxygen atomic density [O] was calculated as a function of discharge parameters by “actinometry”. The Ar‐I (2p₁ → 1s₂) line at 750 nm and the O‐I (³P → ³S) line at 844 nm were used to estimate the [O] atomic density. The rotational temperature T _R of He–O₂/Ar mixture was measured from the rotational levels of the “first negative system” (FNS) by using the “Boltzmann plot”. The effect of discharge parameters on the atomic oxygen density [O] and the gas temperature was monitored. These results show that [O] density increases with RF power and O₂ concentration, but decreases with the gas flow rate. Whereas the gas temperature increases with increase in the input RF power, it decreases with increase in the gas flow rate and O₂ concentration in the mixture. Since the [O] atomic density contributes to plasma‐based biomedical applications, the proposed optimum conditions for plasma‐based decontamination of heat‐sensitive materials in the present study are 0.6% oxygen, 500 sccm flow rate, and 26 W RF power.     

一种新型大气压毛细管介质阻挡放电冷等离子体射流技术

介绍一种结构设计简单、操作运行方便的新型毫米量级大气压冷等离子体射流发生技术.这种射流可以在大气压条件下，利用多种工作气体(如Ar,He,N₂)，通过毛细管介质阻挡放电(DBD)的方式实现.使用频率为33kHz，峰值电压为1—12kV的双向脉冲电源，利用Ar,He,N₂等工作气体，在毛细管内形成了稳定的冷等离子体射流.放电区域的光辐射空间分布利用商用CCD摄像机记录，从中研究放电形态和空间分布，观察到了在DBD区域的流动气体放电和在毛细管出口处形成的等离子体射流 关键词： 冷等离子体射流 毛细管介质阻挡放电 射流射程 射流激发温度     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

Thin-film deposition by combining plasma jet with spark discharge source at atmospheric pressure

This study demonstrates a method for the deposition of CuO_x thin films by combining atmospheric pressure plasma jet with spark discharge. In this type of discharge source, the bulk copper material of spark discharge electrodes plays the role of a precursor. Copper atoms and particles go through the physical processes of sputtering, evaporation, and further agglomeration and condensation in the plasma jet and on the substrate. The experiments were carried out with and without a combination of discharges. The material coated on the substrate was studied using a scanning electron microscope, Raman spectroscopy, and energy-dispersive X-ray spectroscopy. The characteristics of the set-up and plasma, such as I-V curves, optical emission spectra, and substrate temperature, were also measured. Copper electrodes were examined for erosion by a scanning electron microscope. The results demonstrate that deposits coated by combined discharge show denser and thicker films.     

Corona discharge as a temperature probe of atmospheric air microwave plasma jet

We developed and tested a new method for temperature measurements of near-LTE air plasmas at atmospheric pressure. This method is specifically suitable for plasmas at relatively low gas temperature (800–1700 K) with no appropriate radiation for direct spectroscopic temperature measurements. Corona discharge producing cold non-equilibrium plasma is employed as a source of excitation and is placed into the microwave plasma jet. The gas temperature of the microwave plasma jet is determined as the rotational temperature of N₂? produced in the corona discharge. The corona probe temperature measurement was tested by the use of a thermocouple. We found a fairly good agreement between the two methods after correcting the thermocouple measured temperatures for radiative losses. The corona probe method can be generally applied to determine the temperature of the near-LTE plasmas and contrary to the thermocouple it can be used for higher plasma temperatures and is not affected by radiative losses and problems of interaction with the microwave plasma and electromagnetic fields.     

���½����赲�ŵ���״������������

设计建立了同轴圆柱介质阻挡放电线状射流装置,并利用其实现了宽度为50mm的大尺度线状射流,并对射流长度随放电参数的变化进行了研究.研究发现,随气压、流量的增加,射流长度呈先增加后达到饱和;随激励电压的增加,射流长度增加.对氮气射流等离子体进行发射光谱诊断,表明氮气等离子体中主要是氮分子和少量氮原子,并利用光谱拟合得出射流的温度范围为290～350K.     

Surface cleaning of metal wire by atmospheric pressure plasma

In this study, the possible application of atmospheric pressure dielectric barrier discharge plasma for the annealing of metallic wire is examined and presented. The main purpose of the current study is to examine the surface cleaning effect for a cylindrical object by atmospheric pressure plasma. The experimental setup consists of a gas tank, plasma reactor, and power supply with control panel. The gas assists in the generation of plasma. Copper wire was used as an experimental cylindrical object. This copper wire was irradiated with the plasma, and the cleaning effect was confirmed. The result showed that it is possible to remove the tarnish which exists on the copper wire surface. The experiment reveals that atmospheric pressure plasma is usable for the surface cleaning of metal wire. However, it is necessary to examine the method for preventing oxidization of the copper wire.     

脉冲放电射流辅助射频辉光放电研究

通过实验研究了脉冲放电射流辅助下大气压氦气射频辉光放电的电学和光学特性。采用组合电极结构,在射频放电前段增加脉冲电极,脉冲放电产生的射流以等离子体子弹形式注入射频放电区域,主要研究脉冲射流辅助射频放电的电流电压曲线、最低放电维持电压、放电强度和空间结构时空分布。研究结果表明：等离子体子弹经过射频放电区域后,由于等离子体子弹引入的活性粒子,会使射频放电区域等离子体强度增强;而射频放电最低维持电压也从0.93 kV降低至0.43 kV。     

Determination of the Energy Flux of a Commercial Atmospheric‐Pressure Plasma Jet for Different Process Gases and Distances Between Nozzle Outlet and Substrate Surface

The energy flux of an atmospheric‐pressure plasma jet for surface treatment has been investigated by a calorimetric probe. Generally, the investigations exhibit that the main contributions of the total energy influx from the plasma to the substrate surface originate from the neutrals regarding high gas temperature coupled with a high gas flow. The use of nitrogen as process gas shows a higher energy flux compared to oxygen and air presumably caused by increased gas temperature as well as by higher molecule formation and recombination energy of N₂. Moreover, the lateral expansion of the plasma beam could be roughly determined by a spatially resolved analysis of the energy influx. A top part mounted on the nozzle, commonly used for the injection of additional precursor gases, showed a significant effect on the flow behavior and collision entailed relaxation of the excited plasma species leading to a restraining of the plasma jet. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Development of a new atmospheric pressure cold plasma jet generator and application in sterilization

This paper reports that a new plasma generator at atmospheric pressure, which is composed of two homocentric cylindrical all-metal tubes, successfully generates a cold plasma jet. The inside tube electrode is connected to ground, the outside tube electrode is connected to a high-voltage power supply, and a dielectric layer is covered on the outside tube electrode. When the reactor is operated by low-frequency (6 kHz--20 kHz) AC supply in atmospheric pressure and argon is steadily fed as a discharge gas through inside tube electrode, a cold plasma jet is blown out into air and the plasma gas temperature is only 25--30℃. The electric character of the discharge is studied by using digital real-time oscilloscope (TDS 200-Series), and the discharge is capacitive. Preliminary results are presented on the decontamination of E.colis bacteria and Bacillus subtilis bacteria by this plasma jet, and an optical emission analysis of the plasma jet is presented in this paper. The ozone concentration generated by the plasma jet is 1.0×10¹⁶cm^-3 which is acquired by using the ultraviolet absorption spectroscopy.     

The Radio Frequency Hollow Cathode Discharge Induced by the RF Discharge in the Plasma‐Jet Chemical Reactor

In the recent decade an RF driven, low‐pressure plasma reactor with supersonic plasma jet was developed (RPJ). This reactor was successfully used for deposition of thin films of various materials. The deposition of thin films indicates that the properties of the deposited films are dependent on the sputtering or reactive sputtering processes appearing inside the nozzle (hollow athode). The nozzle (hollow athode) fabricated of different kinds of materials and alloys works both as a cathode of the radio frequency (RF) hollow cathode discharge and as a nozzle for plasma jet channel generation as well. The RF hollow cathode discharge is a secondary discharge, which is induced by the primary RF plasma generated in the reactor chamber. The present paper deals with the experimental study of this RF hollow cathode discharge. The stress is laid on the investigation of the axial distribution of discharge parameters and sputtering processes inside the nozzle. On the base of experiments, the simple model of the axial distribution of the investigated RF hollow cathode discharge has been developed.     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明:s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置,以氩气作为工作气体,在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量,并对放电脉冲和放电功率进行了研究;利用发射光谱法对射流的等离子体参量进行了空间分辨测量,并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内,电流脉冲的个数和幅值呈现非对称的变化趋势;随着外加电压的增加,3种结构电极的放电功率从1.7 W逐渐增加到6.0 W;在相同的外加电压情况下,电极面积越小,等离子体射流的长度越长;3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间,并且随着气体流量的增加,各位置的电子激发温度总体上呈下降趋势,而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响;射流长度与电极面积有关;气体流量对电子激发温度和电子密度的空间分布起重要作用。     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明：s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

PECVD of Carbon Nanostructures in Hydrocarbon‐Based RF Plasmas

Different aspects of the plasma‐enhanced chemical vapor deposition of various carbon nanostructures in the ionized gas phase of high‐density, low‐temperature reactive plasmas of Ar+H₂+CH₄ gas mixtures are studied. The growth techniques, surface morphologies, densities and fluxes of major reactive species in the discharge, and effects of the transport of the plasma‐grown nanoparticles through the near‐substrate plasma sheath are examined. Possible growth precursors of the carbon nanostructures are also discussed. In particular, the experimental and numerical results indicate that it is likely that the aligned carbon nanotip structures are predominantly grown by the molecular and radical units, whereas the plasma‐grown nanoparticles are crucial components of polymorphous carbon films. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Cover Picture: Contrib. Plasma Phys. 4/2018

General scheme of the experimental setup of an atmospheric‐pressure RF‐driven Ar/H₂ plasma discharge with copper wire in tube, and the image of RF‐PJ with (a) C_H? =0 and (b) C_H? =2.4‰. Fig. 1 of the paper by Q.J. Guo et al.     

大气压冷等离子体射流研究进展

有许多种方法可用于在大气中产生等离子体射流,冷等离子体（离子温度在室温附近）射流即是其中的一种.近年来,人们发现氦气或其它惰性气体通过毛细管介质阻挡放电形成的冷等离子体射流具有类似子弹的传输特性,在有机材料表面改性、等离子体医学等领域获得了广泛的应用.通过专门设计的一系列实验,我们逐渐揭示了其产生机理,并深入研究了传输特性.文章简要介绍近年来我们所做的有关大气压冷等离子体的实验过程以及获得的一些重要结论.在对这种等离子体深入了解的基础上,作者还开发了一种新装置,该装置的最大特点是既利用了氦气在辅助放电方面的特性,又不消耗这种昂贵的资源;并且它还特别适合于在臭氧层修复、等离子体医学等方面的应用.     

Fabricating a reactive surface on the fibroin film by a room-temperature plasma jet array for biomolecule immobilization

A simple dielectric barrier discharge(DBD) jet array was designed with a liquid electrode and helium gas.The characteristics of the jet array discharge and the preliminary polymerization with acrylic acid(AA) monomer were presented.The plasma reactor can produce a cold jet array with a gas temperature lower than 315 K,using an applied discharge power between 6 W and 30 W(V dis × I dis).A silk fibroin film(SFF) was modified using the jet array and AA monomer,and the treated SFF samples were characterized by atomic force microscopy(AFM),scanning electron microscopy(SEM),Fourier transform infrared spectroscopy(FTIR),and contact angle(CA).The deposition rate of the poly acrylic acid(PAA) was able to reach 300 nm/min,and the surface roughness and energy increased with the AA flow rate.The FTIR results indicate that the modified SFF had more carboxyl groups(-COOH) than the original SFF.This latter characteristic allowed the modified SFF to immobilize more quantities of antimicrobial peptide(AP,LL-37) which inhibited the Escherichia coli(E.Coli) effectively.     

大气压氦气多路低温等离子体射流

为了研究大气压低温等离子体多路射流阵列的放电特性,设计一个实现7路低温等离子体射流的放电装置,采用单电极放电结构,在开放的大气环境下通入氦气。采用高压窄脉冲重复频率电源激励驱动该放电装置,电源脉冲宽度约230 ns,脉冲上升沿约为120 ns。在重复频率为500 Hz的条件下,通过高速摄影初步发现放电电流脉宽约为110 ns,且无反向放电。试验结果表明：平均射流长度随电压幅值增加而增加,在一定电压幅值时射流长度有达到饱和的趋势,这是由于射流通道尾部有空气进入,电压幅值已不再是主要原因;只有在合适的气体流量值时,才能够获得较长的平均射流长度,这是由于气体流量过大或过小时射流均不足以维持形成的放电通道;此外,中心电极放电射流长度受气体流量影响较大,气体流量在一定值时可以观察到中心电极有较长的射流,射流放电强度较弱,气体流量过大或过小时中心电极几乎无放电,这是由于四周电极更易形成放电射流,削弱了中心电极放电。 ,     

热等离子体射流温度与放电功率和气体流量的定标关系

利用氮系统的高温热力学函数C_p,m,结合热量计算公式及能量平衡关系,在理论上得到热平衡等离子体射流温度与放电功率和气体流量的定标关系。结果表明,该过程满足相似性原理,射流温度不是功率和流量的一般二元函数,而是比值P_eff/f 的一元函数。并对结果进行了相关的分析和讨论,为热等离子体的应用提供了参考数据。