Molecular identification of Asian lacquers from different trees using Py‐GC/MS and ToF‐SIMS

Traditional Asian lacquers are natural products with highly valued properties, including beauty, gloss, and durability. Pyrolysis‐gas chromatography/mass spectrometry is the technique of choice to study insoluble polymeric lacquer films. In the present study, pyrolysis‐gas chromatography/mass spectrometry results showed that the pyrolysis products of lacquer films were different for all of the studied trees, with urushiol derivatives detected in Toxicodendron vernicifluum from China, Japan, and Korea; laccol in Toxicodendron succedaneum from Vietnam; and thitsiol in Gluta usitata from Myanmar. Time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) was also used to characterize the Asian lacquers, avoiding the time‐consuming and destructive processes of other techniques. The ToF‐SIMS spectra provided structural characterization of a series of urushiol, laccol, and thitsiol derivatives for T vernicifluum from China, Japan, and Korea; T succedaneum from Vietnam; and G usitata from Myanmar, respectively. To differentiate the ToF‐SIMS results for the different Asian lacquer films, principal component analysis was used because it can extract differences in the spectra and indicate what peaks are responsible for these differences. The results indicate that lacquer films from different lacquer trees can be very different. Therefore, ToF‐SIMS with principal component analysis is suitable for the characterization and differentiation of Asian lacquer films in cultural heritage applications.     

ToF‐SIMS study of 1‐dodecanethiol adsorption on Au,Ag, Cu and Pt surfaces

Time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) has been used to perform a chemical analysis of long‐chain thiol (CH₃(CH₂)₁₁SH)‐treated gold, silver, copper and platinum surfaces. All the mass peaks from positive and negative ion spectra within the range m/z = 0–2000 u are studied. ToF‐SIMS data revealed that on gold, silver and copper substrates 1‐dodecanethiol form dense standing‐up phases, but on platinum being a catalytically active substrate, we were able to identify also surface‐aligned parallel lying molecules in addition to a standing thiolate layer. Our study shows that when ToF‐SIMS spectra are analyzed, not only the existence of oligomers but also metal + hydrocarbon fragments give information about the order of SAM. Copyright © 2008 John Wiley & Sons, Ltd.     

Investigation of block depth distribution in PS‐b‐PMMA block copolymer using ultra‐low‐energy cesium sputtering in ToF‐SIMS

Directed self‐assembly of block copolymers (BCPs) is a promising candidate for next generation nanolithography. In order to validate a given pattern, the lateral and in‐depth distributions of the blocks should be well characterized; for the latter, time‐of‐flight (ToF) SIMS is a particularly well‐adapted technique. Here, we use an ION‐TOF ToF‐SIMS V in negative mode to provide qualitative information on the in‐depth organization of polystyrene‐b‐polymethylmethacrylate (PS‐b‐PMMA) BCP thin films. Using low‐energy Cs⁺ sputtering and Bi₃⁺ as the analysis ions, PS and PMMA homopolymer films are first analyzed in order to identify the characteristic secondary ions for each block. PS‐b‐PMMA BCPs are then characterized showing that self‐assembled nanodomains are clearly observed after annealing. We also demonstrate that the ToF‐SIMS technique is able to distinguish between the different morphologies of BCP investigated in this work (lamellae, spheres or cylinders). ToF‐SIMS characterization on BCP is in good agreement with XPS analysis performed on the same samples. Copyright © 2013 John Wiley & Sons, Ltd.     

Mitigating dead‐time effects during multivariate analysis of ToF‐SIMS spectral images

ToF‐SIMS spectra are formed by bombarding a surface with a pulse of primary ions and detecting the resultant ionized surface species using a time‐of‐flight mass spectrometer. Typically, the detector is a time‐to‐digital converter. Once an ion is detected using such detectors, the detector becomes insensitive to the arrival of additional ions for a period termed as the (detector) dead‐time. Under commonly used ToF‐SIMS data acquisition conditions, the time interval over which ions arising from a single chemical species reach the detector is on the order of the detector dead‐time. Thus, only the first ion reaching the detector at any given mass is counted. The event registered by the data acquisition system, then, is the arrival of one or more ions at the detector. This behavior causes ToF‐SIMS data to violate, in the general case, the assumption of linear additivity that underlies many multivariate statistical analysis techniques. In this article, we show that high‐mass‐resolution ToF‐SIMS spectral‐image data follow a generalized linear model, and we propose a data transformation and scaling procedure that enables such data sets to be successfully analyzed using standard methods of multivariate image analysis. Copyright © 2008 John Wiley & Sons, Ltd.     

Investigation of Asian lacquer films using ToF‐SIMS and complementary analytical techniques

Lacquer has been used in Asian countries for thousands of years as a natural coating material owing to its durable, adhesive, decorative, and protective properties. Protection and restoration of lacquer‐coated cultural remains has become an important subject, and identification of the lacquer types in old lacquer‐wares has also become very important for conservation and restoration research. This paper provides identification of several molecular species of vegetal‐source Asian lacquers with the aim of providing a methodology for application in the field of cultural heritage. Several chemical markers of the vegetal species in Asian lacquers were identified using a methodology consistent with the sampling restrictions required for cultural‐heritage objects. Surface analytical methods such as time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS), X‐ray photoelectron spectroscopy, and Fourier transform infrared spectroscopy were used to characterize Korean, Chinese, and Vietnamese lacquers; avoiding time‐consuming and destructive extraction processes. These ToF‐SIMS results provided the structural characterization of a series of catechol derivatives. The ToF‐SIMS spectra of Rhus vernicifera from Korea and China, and Rhus succedanea from Vietnam indicated a series of urushiol and laccol repeat units, respectively, in the mass range of m/z 0–1800. Because of its sensitivity, specificity, and speed of analysis, the ToF‐SIMS technique can be used to investigate cultural lacquer‐coated treasures as well as to discriminate among different Asian lacquer coatings or binding mediums for the conservation or restoration of lacquer‐ware. Copyright © 2016 John Wiley & Sons, Ltd.     

How does soaking wood in various pH buffers impact ToF‐SIMS spectra?

During the production of biofuels and/or bioproducts, wood and other lignocellulosic materials are frequently exposed to buffers during enzyme treatments. Buffer pH varies according to the activity profiles of the enzyme(s) used. Time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) is an increasingly valuable analytical tool for the surface analysis of lignocellulosic solids, allowing for characterization of the lignin and polysaccharides at the surface, along with other components such as protein and inorganic salts. Despite the use of ToF‐SIMS to characterize dilute acid and alkali pretreatments of wood, the exposure of wood to buffers of intermediate pH range has not been studied as it relates to ToF‐SIMS analysis. This leads to the question: “How does soaking wood in various pH buffers impact ToF‐SIMS spectra?” Accordingly, a softwood (spruce) and hardwood (birch) were soaked in universal buffers ranging from pH 5 to 10, and then positive ion ToF‐SIMS spectra were acquired from the washed wood. Deacetylation was evident for both wood species above pH 8. Additionally, at higher pH, birch ToF‐SIMS spectra revealed a relative loss in polysaccharide peaks attributed to hemicellulose and an increase in lignin peaks. This study provides a basis for understanding the pH‐dependent alteration of wood solids in aqueous solution, which is important for understanding the controls in enzyme treatments.     

Identifying and minimizing buffer interferences in ToF‐SIMS analyses of lignocellulose

Time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) has demonstrated applicability to the analysis of lignocellulosic samples including pulp, paper, plants, and wood. One such application is to use ToF‐SIMS as a tool for detecting the activity of enzymes applied to degrade or modify plant biomass. The use of buffers for pH control of these enzymatic reactions can pose problems due to the nature of the ToF‐SIMS measurement. Specifically, inorganic species (e.g. salts) from buffer components could introduce several concerns for quantitative or semi‐quantitative ToF‐SIMS analysis. First, salts can produce additional peaks in the mass spectra, which may overlap with lignocellulose peaks of interest (mass interference). Second, salts can alter the chemical environment, or ‘matrix’, altering the ionization probability of lignocellulose‐related secondary ions during the sputtering mechanism of the ToF‐SIMS measurement (matrix effects). Third, salts may physically coat the lignocellulose surface, decreasing the signal from the lignocellulose, causing poor signal‐to‐noise in the analysis. The current work presents a simple approach for identifying interferences due to buffers, using both principal component analysis (PCA) and previously established lignocellulose‐relevant peak ratios. Furthermore, a simple acetic acid rinsing protocol is compared to distilled water rinsing and is evaluated and for its effectiveness in removing buffer‐related salts. The data shows that briefly rinsing lignocellulose samples in dilute acetic acid can be effective in restoring the validity of lignocellulose composition interpretations using ToF‐SIMS. Copyright © 2014 John Wiley & Sons, Ltd.     

Quantitative analysis of styrene‐pentafluorostyrene random copolymers by ToF‐SIMS and XPS

Poly(styrene) (PS), poly(2,3,4,5,6‐pentafluorostyrene) (5FPS) and their random copolymers were prepared by bulk radical polymerization. The spin‐cast polymer films of these polymers were analyzed using X‐ray photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). The surface and bulk compositions of these copolymers were found to be same, implying that surface segregation did not occur. The detailed analysis of ToF‐SIMS spectra indicated that the ion fragmentation mechanism is similar for both PS and 5FPS. ToF‐SIMS quantitative analysis using absolute peak intensity showed that the SIMS intensities of positive styrene fragments, particularly C₇H₇⁺, in the copolymers are higher than the intensities expected from a linear combination of PS and 5FPS, while the SIMS intensities of positive pentafluorostyrene fragments are smaller than expected. These results indicated the presence of matrix effects in ion formation process. However, the quantitative approach using relative peak intensity showed that ion intensity ratios are linearly proportional to the copolymer mole ratio when the characteristic ions of PS and 5FPS are selected. This suggests that quantitative analysis is still possible in this copolymer system. Copyright © 2005 John Wiley & Sons, Ltd.     

Differentiating diterpene resin acids using ToF‐SIMS and principal component analysis: new tools for assessing the geochemistry of amber

Amber is a polymerized plant resin having remarkable preservation potential in the geological record. Numerous analytical techniques have been applied to the study of amber organic chemistry in order to extract paleobotanical information. However, only exploratory work has been conducted using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS), despite its immense potential due to the high mass resolution and range that can be analyzed concurrently. Detailed assessments of ion fragmentation patterns are prerequisite, given that amber is comprised of a challenging range of terpenoids, carboxylic acids, alcohols, and associated esters. In recent work, we demonstrated the applicability and efficiency of ToF‐SIMS as a tool to investigate amber chemical composition. However, only two diterpene resin acid standards were considered in this preliminary study, namely abietic acid and communic acid. We now extend this work by documenting the ToF‐SIMS spectra of ten additional diterpene resin acids and ask whether ToF‐SIMS analysis can distinguish subtle differences within a larger set of diterpenoids. Both positive and negative ToF‐SIMS spectra were produced, although negative polarity appears particularly promising for differentiating diterpene resin acids. Principal component analysis (PCA) was used to distill the data and verified that purified diterpenes have distinct ToF‐SIMS spectra that can be applied to amber chemotaxonomy as well as to the analysis of modern resins of known botanical origin. While this work is pertinent to the study of the composition and histories of ambers, the mass spectra of the 12 diterpene standards could prove valuable to any system where diterpenoid chemistry plays a role. Copyright © 2014 John Wiley & Sons, Ltd.     

Effects of Ar‐ and Ar/O2‐plasma‐treated amorphous and crystalline polymer surfaces revealed by ToF‐SIMS and principal component analysis

The effects of argon (Ar) and a mixture of Ar and oxgyen(Ar/O₂) plasmas on amorphous and semi‐crystalline poly(bisphenol A hexane ether) thin films were investigated by time‐of‐flight secondary ion mass spectroscopy (ToF‐SIMS) and principal component analysis (PCA). PCA results of the ToF‐SIMS spectra indicate that an Ar/O₂ plasma produced less physical sputtering and had a higher chemical reactivity than did an Ar plasma, regardless of whether an amorphous or a crystalline surface was involved. However, the chemical differences between the Ar‐ and Ar/O₂‐plasma‐treated semi‐crystalline films were much smaller. The observed results can be explained by the higher resistance of the polymer crystalline regions to physical sputtering and chemical etching. Copyright © 2013 John Wiley & Sons, Ltd.     

Multivariate statistical analysis of non‐mass‐selected ToF‐SIMS data

Cluster LMIGs are now regarded as the standard primary ion guns on time‐of‐flight secondary ion mass spectrometers (ToF‐SIMS). The ToF‐SIMS analyst typically selects a bombarding species (cluster size and charge) to be used for material analysis. Using standard data collection protocols where the analyst uses only a single primary bombarding species, only a fraction of the ion‐beam current generated by the LMIG is used. In this work, we demonstrate for the first time that it is possible to perform ToF‐SIMS analysis when all of the primary ion intensity (clusters) are used; we refer to this new data analysis mode as non‐mass‐selected (NMS) analysis. Since each of the bombarding species has a different mass‐to‐charge ratio, they strike the sample at different times, and as a result, each of the bombarding species generates a spectrum. The resulting NMS ToF‐SIMS spectrum contains contributions from each of the bombarding species that are shifted in time. NMS spectra are incredibly complicated and would be difficult, if not impossible, to analyze using univariate methodology. We will demonstrate that automated multivariate statistical analysis (MVSA) tools are capable of rapidly converting the complicated NMS data sets into a handful of chemical components (represented by both spectra and images) that are easier to interpret since each component spectrum represents a unique and simpler chemistry. Copyright © 2008 John Wiley & Sons, Ltd.     

Time‐of‐flight SIMS characterization of hydrolysed organofunctional and non‐organofunctional silanes deposited on Al,Zn and Al–43.4Zn–1.6Si alloy‐coated steel

In this paper Al, Zn and Al–43.4Zn–1.6Si (AlZn) alloy‐coated steel have been treated with the organofunctional silane γ‐mercaptopropyltrimethoxysilane (γ‐MPS) and the non‐organofunctional silane 1,2‐bis(triethoxysilyl)ethane (BTSE). Also, a two‐step treatment of metal substrates was performed: the metal substrates were treated with the BTSE silane followed by a γ‐MPS treatment. The influence of metal substrate and the pH value of the silane film properties were investigated using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). The results show that the BTSE silane is fully hydrolysed but the γ‐MPS silane is not. The presence of negative ions of the type HSi_xO_y^? indicates that both types of silane films are highly cross‐linked via Si–O–Si bonds. The two‐step treatment gave a γ‐MPS silane layer on top of the BTSE silane layer but the thickness of the total silane film become thinner than for a single BTSE film, indicating that some of the BTSE is dissolved during the γ‐MPS deposition step. Furthermore, the ToF‐SIMS results show that the thiol group of the γ‐MPS silane is oxidized. Finally, no major influence, either in the positive or the negative mass spectra, from the different metal substrates could be detected for the silane films investigated. Copyright © 2003 John Wiley & Sons, Ltd.     

Surface studies of halloysite nanotubes by XPS and ToF‐SIMS

This report provides detailed experimental results of thermal and surface characterization on untreated and surface‐treated halloysite nanotubes (HNTs) obtained from two geographic areas. Surface characterization techniques, including XPS and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) were used. ToF‐SIMS surface analysis experiments were performed with both atomic and cluster ion beams. Higher ion yields and more high‐mass ions were obtained with the cluster ion beams. Static ToF‐SIMS spectra were analyzed with principal component analysis (PCA). Morphological diversities were observed in the samples although they mainly contained tubular structures. Thermogravimetric data indicated that aqueous hydrogen peroxide solution could remove inorganic salt impurities, such as alkali metal salts. The amount of grafting of benzalkonium chloride of HNT surface was determined by thermogravimetic analysis. PCA of ToF‐SIMS spectra could distinguish the samples mined from different geographical locations as well as among surface‐treated and untreated samples. Copyright © 2010 John Wiley & Sons, Ltd.     

Repair of defects created by Ar+ sputtering on graphite surface by annealing as confirmed using ToF‐SIMS and XPS

Defects were created on the surface of highly oriented pyrolytic graphite (HOPG) by sputtering with an Ar⁺ ion beam, then characterized using X‐ray photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) at 500°C. In the XPS C1s spectrum of the sputtered HOPG, a sp³ carbon peak appeared at 285.3 eV, representing surface defects. In addition, 2 sets of peaks, the C_x⁻ and C_xH⁻ ion series (where x = 1, 2, 3...), were identified in the ToF‐SIMS negative ion spectrum. In the positive ion spectrum, a series of C_xH₂^+• ions indicating defects was observed. Annealing of the sputtered samples under Ar was conducted at different temperatures. The XPS and ToF‐SIMS spectra of the sputtered HOPG after 800°C annealing were observed to be similar to the spectra of the fresh HOPG. The sp³ carbon peak had disappeared from the C1s spectrum, and the normalized intensities of the C_xH⁻ and C_xH₂^+• ions had decreased. These results indicate that defects created by sputtering on the surface of HOPG can be repaired by high‐temperature annealing.     

Cationization of dendritic macromolecule adsorbates on metals studied by time‐of‐flight secondary ion mass spectrometry

Time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) was utilized to study dendritic macromolecules with various architectures, such as dendrons, dendrimers and hyperbranched polyesters prepared from bis‐(hydroxymethyl)propionic acid (Bis‐MPA) and a series of hyperbranched polyethers based on 3‐ethyl‐3(hydroxymethyl)oxetane. The measurements were performed on spin‐coated thin films of the branched molecules (D) onto silicon, chemically etched copper foil and silver‐coated wafers. They showed weak signatures of molecular ions by proton capture (D + H)⁺ in the high mass range of the spectra (m/z > 400). On the contrary, cationization of the intact molecules with alkali or transition metal ions such as Na⁺, Cu⁺ or Ag⁺ was observed. High‐intensity quasi‐molecular ions (D + M)⁺ (with M = Na⁺, Cu⁺ or Ag⁺) allowed the studied polymers to be identified. The whole molecular species were observed for Bis‐MPA dendrons and dendrimers up to 3000 Da for hydroxyl or acetonide‐terminated derivatives. The success of the so‐called cationization experiments with metal substrates compared with analysis of molecular adsorbates on silicon is highlighted. The ToF‐SIMS sensitivity appeared useful to provide information about the molecular end‐groups or to highlight incomplete reaction occurring during some deprotection step of the synthesis. Only uncationized fragments of low masses were detected for the hyperbranched polyesters. This result suggested the effect of molecular asymmetry and/or flattening of the molecules on the substrates, which hampered the molecule lift‐off efficiency. Nevertheless, the hyperbranched polyethers were characterized based on the peak distribution of intensities, which allowed estimation of their molecular weight average. This work was intended to illustrate the capabilities of ToF‐SIMS to analyse dendritic polymers on surfaces. Copyright © 2003 John Wiley & Sons, Ltd.     

Development of an automated in situ fracture stage for a ToF‐SIMS system

The design philosophy and implementation of an ultra high vacuum (UHV), PC controlled, automated in situ fracture stage for a surface analysis system is described. ToF‐SIMS spectra are shown to illustrate the improvement in spectral quality obtained from micro‐compact tension (CT) tests of polymer matrix fracture surfaces produced using the fracture stage in UHV compared to those obtained from a sample tested at air. This system is flexible in that by changing the capacity of the load cell it is possible to reduce or increase maximum loads as the specimen type and material demands. The stage has been designed with instrumental flexibility in mind, utilising commercial SEM‐stub type sample mounts, and can thus be used for AES/SAM and XPS investigations, as well as ToF‐SIMS analysis, in the authors' laboratory. Copyright © 2008 John Wiley & Sons, Ltd.     

TOF‐SIMS matrix effects in mixed organic layers in Ar cluster ion depth profiles

Matrix effects are crucial for analyses using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) in terms of quantitative analysis, depth profiling and imaging. It is often difficult to predict how co‐existing materials will influence each other before such analysis. However, matrix effects need to be curtailed in order to assume the appropriate amount of a target material in a sample. First, matrix effects on different types of organic mixed samples, including a sample composed of Irganox 1010 and Irganox 1098 (MMK sample) and another composed of Irganox 1010 and Fmoc‐pentafluoro‐L‐phenylalanine (MMF sample), were observed utilizing ToF‐SIMS and the dependence of the secondary ion polarity of the matrix effects on the same sample was evaluated. Next, the correction method for the ToF‐SIMS matrix effects proposed by Shard et al. was applied to a comparison of the positive secondary ion results to the negative ones. The matrix effects on the positive ion data in both samples were different from those on the negative ion data. The matrix effect correction method worked effectively on both the negative and positive depth profiles. Copyright © 2017 John Wiley & Sons, Ltd.     

Hydroxylation of the silica in microfabricated thin layer chromatography plates as probed by time‐of‐flight secondary ion mass spectrometry and diffuse reflectance infrared Fourier transform spectroscopy

Microfabricated silica thin layer chromatography (TLC) plates have previously been prepared on patterned carbon nanotube forests. The high temperatures used in their fabrication reduce the number of hydroxyl groups on their surfaces. Fortunately, silica can be rehydroxylated. In diffuse reflectance infrared Fourier transform spectroscopy (DRIFT), a silanol peak below 3740 cm^?1 indicates a well‐hydroxylated silica surface that is fit for chromatography. Hydroxylations of our materials with HF are so effective that it is not possible to discern the position of this peak. In contrast, this signal is discernable when the plates are treated with NH₄OH. To find a more convenient method for studying the surfaces of TLC plates, time‐of‐flight secondary ion mass spectroscopy (ToF‐SIMS) was considered. ToF‐SIMS is advantageous because multiple microfabricated TLC plates must be scraped to obtain enough silica for one DRIFT analysis, while static SIMS can be performed on very small regions (500 × 500 µm² or less) of individual plates. Ratios of the SiOH⁺ and Si⁺ ToF‐SIMS signals for microfabricated TLC plates correlated well with ~3740 cm^?1 silanol peaks from DRIFT. Thus, SIMS allows direct analysis of all of our treated and untreated plates, including those hydroxylated with HF. The best hydroxylation condition for HF, which was better than any studied for NH₄OH, was around 150 ppm at room temperature. The best hydroxylation condition for NH₄OH was 50 °C for 72 h. ToF‐SIMS versus DRIFT results of commercial TLC plates were also obtained and evaluated. Copyright © 2014 John Wiley & Sons, Ltd.     

A ToF‐SIMS investigation of a buried polymer/polymer interface exposed by ultra‐low‐angle microtomy

The interfacial region of a model multilayer coating system on an aluminium substrate has been investigated by high‐resolution time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). Employing ultra‐low‐angle microtomy (ULAM), the interface between a poly(vinylidene difluoride) (PVdF)‐based topcoat and a poly(urethane) (PU)‐based primer ‘buried’ >20 µm below the PVdF topcoat's air/coating surface was exposed. Imaging ToF‐SIMS and subsequent post‐processing extraction of mass spectra of the ULAM‐exposed interface region and of the PVdF topcoat and PU primer bulks indicates that the material composition of the polymer/polymer interface region is substantially different to that of the bulk PVdF and PU coatings. Analysis of the negative ion mass spectra obtained from the PVdF/PU interface reveals the presence of a methacrylate‐based component or additive at the interface region. Reviewing the topcoat and primer coating formulations reveals that the PVdF topcoat formulation contains methyl methacrylate (MMA)–ethyl acrylate (EA) acrylic co‐polymer components. Negative ion ToF‐SIMS analysis of an acrylic co‐polymer confirms that it is these components that are observed at the PVdF/PU interface. Post‐processing extraction of ToF‐SIMS images based on the major ions of the MMA–EA co‐polymers reveals that these components are observed in high concentration at the extremities of the PVdF coating, i.e. at the polymer/polymer interface, but are also observed to be distributed evenly throughout the bulk of the PVdF topcoat. These findings confirm that a fraction of the MMA–EA acrylic co‐polymers in the formulation segregate to the topcoat/primer interface where they enhance the adhesive properties exhibited by the PVdF topcoat towards the underlying PU primer substrate. Copyright © 2004 John Wiley & Sons, Ltd.     

ToF‐SIMS studies of nanoporous PMSSQ materials: kinetics and reactions in the processing of low‐K dielectrics for ULSI applications

Detailed investigations of spin‐on polymethylsilsesquioxane (PMSSQ)‐based low‐K materials were carried out by means of time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) to identify the reaction kinetics and mechanisms occurring during the manufacturing of nanoporous dielectrics for ULSI applications. Analysis of the static SIMS fingerprints led to the identification of key species related to the PMSSQ oligomers, as well to the observation of features related to the initial functionality of the precursor materials. The intensity variations of the key species with thermal curing reveal the polymerization kinetics of the dielectric precursors. In addition, thermal decomposition and volatilization of the polymethylmethacrylate–dimethylaminoethylmethacrylate copolymer (PMMA‐co‐DMAEMA) porogen was established based on the detection of fragments related to the different moieties of the copolymer molecule. Porogen degradation takes place via cleavage of the DMAEMA co‐monomer at low temperature, followed by volatilization of the residual PMMA‐enriched polymer upon annealing at higher temperature. Several complementary phenomena occurring during the formation of these complex systems can be evaluated by ToF‐SIMS, revealing major features crucial to materials development and the manufacturing of novel low‐dielectric‐constant (K) dielectrics. Copyright © 2004 John Wiley & Sons, Ltd.