Understanding delamination in microelectronic devices using AES,XPS and chemometrics

The recent development of XPS instrumentation with near‐micron spatial resolution has advanced the capability of elemental and chemical‐state imaging accompanied by small‐area analysis (down to 15 µm). In this paper, the combined use of X‐ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) at enhanced spatial resolution is shown to have significantly improved the understanding of interfacial delamination and related problems encountered in the production of electronic devices in the field of microelectronics. An example of the application of surface analysis for ITO/Mo adhesion problems will be presented. The mathematical procedure using principal component analysis (PCA) in the reduction of noise in XPS images will also be described. The dramatic improvements in the image contrast and chemical component determination from multispectral image data sets will be presented. This study is intended to explore the contributions given by advanced surface analysis tools to solve real‐world problems. Copyright © 2007 John Wiley & Sons, Ltd.     

Use of local rank‐based spatial information for resolution of spectroscopic images

Spectroscopic images are singular chemical measurements that enclose chemical and spatial information about samples. Resolution of spectroscopic images is focused on the recovery of the pure spectra and distribution maps of the image constituents from the sole raw spectroscopic measurement. In image resolution, constraints are generally limited to non‐negativity and the spatial information is generally not used. Local rank analysis methods have been adapted to describe the local spatial complexity of an image, providing specific pixel information. This local rank information combined with reference spectral information allows the identification of absent compounds in pixels with low compound overlap. The introduction of this information in the resolution process under the form of constraints helps to increase the performance of the resolution method and to decrease the ambiguity linked to the final solutions. Copyright © 2008 John Wiley & Sons, Ltd.     

Frequency-dependent alternating-current scanning electrochemical microscopy (4D AC-SECM) for local visualisation of corrosion sites

For a better understanding of the initiation of localised corrosion, there is a need for analytical tools that are capable of imaging corrosion pits and precursor sites with high spatial resolution and sensitivity. The lateral electrochemical contrast in alternating-current scanning electrochemical microscopy (AC-SECM) has been found to be highly dependent on the frequency of the applied alternating voltage. In order to be able to obtain data with optimum contrast and high resolution, the AC frequency is swept in a full spectrum at each point in space instead of performing spatially resolved measurements at one fixed perturbation frequency. In doing so, four-dimensional data sets are acquired (4D AC-SECM). Here, we describe the instrument set-up and modus operandi, along with the first results from the imaging of corroding surfaces. Corrosion precursor sites and local defects in protective organic coatings, as well as an actively corroding pit on 304 stainless steel, have been successfully visualised. Since the lateral electrochemical contrast in these images varies with the perturbation frequency, the proposed approach constitutes an indispensable tool for obtaining optimum electrochemical contrast.     

Constraining shape smoothness in multivariate curve resolution–alternating least squares

The resolution of complex multicomponent hyperspectral images with multivariate curve resolution–alternating least squares is mainly performed by using a limited number of constraints on the pure constituent distribution maps, such as non‐negativity or local constraints. This work proposes a constraint that works with the spatial information of the whole image and has been given the name shape smoothness constraint. Contrary to local constraints, shape smoothness constraint imposes a global character on the distribution map pattern. It uses two‐dimensional P‐splines to enforce smoothness of the global spatial features of the distribution maps generated within the alternating least squares procedure. This allows revealing main pattern(s) in the spatial data leaving high‐frequency signals, corresponding to fine‐scale structures in the image. This approach has been successfully applied on several simulated examples where imposing shape smoothness resulted in the recovery of the correct pattern for the image objects, which in turn provided more accurate distribution maps and spectral profiles. It was also shown that when information about the smoothness of the pattern(s) of the image constituents holds, the constraint can be a flexible and robust alternative for the resolution of real hyperspectral imaging data. Copyright © 2015 John Wiley & Sons, Ltd.     

Denoising and multivariate analysis of time‐of‐flight SIMS images

Time‐of‐flight SIMS (ToF‐SIMS) imaging offers a modality for simultaneously visualizing the spatial distribution of different surface species. However, the utility of ToF‐SIMS datasets may be limited by their large size, degraded mass resolution and low ion counts per pixel. Through denoising and multivariate image analysis, regions of similar chemistries may be differentiated more readily in ToF‐SIMS image data. Three established denoising algorithms—down‐binning, boxcar and wavelet filtering—were applied to ToF‐SIMS images of different surface geometries and chemistries. The effect of these filters on the performance of principal component analysis (PCA) was evaluated in terms of the capture of important chemical image features in the principal component score images, the quality of the principal component score images and the ability of the principal components to explain the chemistries responsible for the image contrast. All filtering methods were found to improve the performance of PCA for all image datasets studied by improving capture of image features and producing principal component score images of higher quality than the unfiltered ion images. The loadings for filtered and unfiltered PCA models described the regions of chemical contrast by identifying peaks defining the regions of different surface chemistry. Down‐binning the images to increase pixel size and signal was the most effective technique to improve PCA performance. Copyright © 2003 John Wiley & Sons, Ltd.     

Image fusion combining SEM and ToF‐SIMS images

Image fusion allows for the combination of an image containing chemical information but low spatial resolution with a high‐spatial resolution image having little to no chemical information. The resulting hybrid image retains all the information from the chemically relevant original image, with improved spatial resolution allowing for visual inspection of the spatial correlations. In this research, images were obtained from two sample test grids: one of a copper electron microscope grid with a letter ‘A’ in the center (referred to below as the ‘A‐grid’), and the other a Tantalum and Silicon test grid from Cameca that had an inscribed letter ‘C’ (referred to below as the ‘Cameca grid’). These were obtained using scanning electron microscopy (SEM) and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). Image fusion was implemented with the Munechika algorithm. The edge resolution of the resulting hybrid image was calculated compared with the edge resolution obtained for both the individual ToF‐SIMS and SEM images. The challenges of combining complimentary datasets from different instrumental analytical methods are discussed as well as the advantages of having a hybrid image. The distance across the edge for hybrid images of the A‐Grid and the Cameca grid were determined to be 21 µm and 8 µm, respectively. When these values were compared to the original ToF‐SIMS, SEM and optical microscopy measurements, the fused image had a spatial resolution nearly equal to that obtained in the SEM image for both samples. Copyright © 2014 John Wiley & Sons, Ltd.     

Mathematical topographical correction of XPS images using multivariate statistical methods

For rough heterogeneous samples, the contrast observed in XPS images may result from both changes in elemental or chemical composition and sample topography. Background image acquisition and subtraction are frequently utilized to minimize topographical effects so that images represent concentration variations in the sample. This procedure may significantly increase the data acquisition time. Multivariate statistical methods can assist in resolving topographical and chemical information from multispectral XPS images. Principal component analysis (PCA) is one method for identification of the highest correlation/variation between the images. Topography, which is common to all of the images, will be resolved in the first most significant component. The score of this component contains spatial information about the topography of the surface, whereas the loading is a quantitative representation of the topography contribution to each elemental/chemical image. The simple‐to‐use self‐modelling mixture analysis (Simplisma) method is a pure variable method that searches for the source of most differences in the data and therefore has the potential to distinguish between chemical and topographical phases in images. The mathematical background correction scheme is developed and validated by comparing results to the experimental background correction for samples with differing degrees of topography. Copyright © 2004 John Wiley & Sons, Ltd.     

Matrix pre‐coated targets for high throughput MALDI imaging of proteins

We have developed matrix pre‐coated targets for imaging proteins in thin tissue sections by matrix‐assisted laser desorption/ionization mass spectrometry. Gold covered microscope slides were coated with sinapinic acid (SA) in batches in advance and were shown to be stable for over 6 months when kept in the dark. The sample preparation protocol using these SA pre‐coated targets involves treatment with diisopropylethylamine (DIEA)‐H₂O vapor, transforming the matrix layer to a viscous ionic liquid. This SA‐DIEA ionic liquid layer extracts proteins and other analytes from tissue sections that are thaw mounted to this target. DIEA is removed by the immersion of the target into diluted acetic acid, allowing SA to co‐crystallize with extracted analytes directly on the target. Ion images (3–70 kDa) of sections of mouse brain and rat kidney at spatial resolution down to 10 µm were obtained. Use of pre‐coated slides greatly reduces sample preparation time for matrix‐assisted laser desorption/ionization imaging while providing high throughput, low cost and high spatial resolution images. Copyright © 2014 John Wiley & Sons, Ltd.     

Surface characterization of CuSn thin films deposited by RF co‐sputtering method

CuSn thin films were deposited by the radio‐frequency (RF) magnetron co‐sputtering method on Si(100) with Cu and Sn metal targets with various RF powers. The thickness of the films was fixed at 200 ± 10 nm. The synthesized CuSn thin films mainly consisted of Cu₂₀Sn₆ and Cu₃₉Sn₁₁ phases, which was revealed by an X‐ray diffraction (XRD) study. The high‐resolution Cu 2p XPS and Cu LMM Auger electron spectra indicate that metallic Cu oxidized to Cu⁺ and Cu²⁺ as the RF power on Cu target increased. The atomic ratios of Sn⁰ and Sn⁴⁺ decreased, while that of Sn²⁺ increased with increasing RF power on the Cu target. The polar surface free energy (SFE) component has a different tendency in comparison with the total SFE and the dispersive SFE component. The dispersive SFE component was the dominating contributing factor to the total SFE compared with the polar SFE. Copyright © 2016 John Wiley & Sons, Ltd.     

Subdiffraction‐Resolution Fluorescence Microscopy of Myosin–Actin Motility

Subdiffraction‐resolution imaging by subsequent localization of single photoswitchable molecules can achieve a spatial resolution in the range of ～20 nm with moderate excitation intensities, but have so far been too slow for imaging faster dynamics in biology. Herein, we introduce a novel approach for video‐like subdiffraction microscopy based on rapid and reversible photoswitching of commercially available organic carbocyanine fluorophores. With the present concept, we demonstrate in vitro studies on the motility of fluorophore‐labeled actin filaments along myosin II. Actin filaments were densely labeled with carbocyanine fluorophores, and the gliding velocity adjusted by the concentration of ATP. At imaging frame rates of ～100 Hz, only 100 consecutive frames are sufficient to generate a single high‐resolution image of moving actin filaments with a lateral resolution of ～30 nm. A video‐like sequence is generated from individual reconstructed images by additionally applying a sliding window algorithm. We measured velocities of individual actin filaments of up to ～0.18 μm s^?1, observed strong bending and disruption of filaments as well as locally immobile fragments.     

Comparison of a new high‐resolution monolithic column with core‐shell and fully porous columns for the analysis of retinol and α‐tocopherol in human serum and breast milk by ultra‐high‐performance liquid chromatography†

The reduction of analysis time, cost, and improvement of separation efficiency are the main requirements in the development of high‐throughput assay methods in bioanalysis. It can be achieved either by ultra‐high‐performance liquid chromatography (UHPLC) using stationary phases with small particles (<2 μm) at high back pressures or by using opposite direction—monolithic stationary phases with low back pressures. The application of new types of monolithic stationary phases for UHPLC is a novel idea combining these two different paths. The aim of this work was to test the recently introduced second‐generation of monolithic column Chromolith® HighResolution for UHPLC analysis of liposoluble vitamins in comparison with core‐shell and fully porous sub‐2 μm columns with different particle sizes, column lengths, and shapes. The separation efficiency, peak shape, resolution, time of analysis, consumption of mobile phase, and lifetime of columns were calculated and compared. The main purpose of the study was to find a new, not only economical option of separation of liposoluble vitamins for routine practice.     

Direct imaging of single cells and tissue at sub‐cellular spatial resolution using transmission geometry MALDI MS

The need of cellular and sub‐cellular spatial resolution in laser desorption ionization (LDI)/matrix‐assisted LDI (MALDI) imaging mass spectrometry (IMS) necessitates micron and sub‐micron laser spot sizes at biologically relevant sensitivities, introducing significant challenges for MS technology. To this end, we have developed a transmission geometry vacuum ion source that allows the laser beam to irradiate the back side of the sample. This arrangement obviates the mechanical/ion optic complications in the source by completely separating the optical lens and ion optic structures. We have experimentally demonstrated the viability of transmission geometry MALDI MS for imaging biological tissues and cells with sub‐cellular spatial resolution. Furthermore, we demonstrate that in conjunction with new sample preparation protocols, the sensitivity of this instrument is sufficient to obtain molecular images at sub‐micron spatial resolution. Copyright © 2012 John Wiley & Sons, Ltd.     

Model‐free multivariate curve resolution combined with model‐based kinetics: algorithm and applications

Multivariate curve resolution techniques are powerful tools to extract from sequences of spectra of a chemical reaction system the number of independent chemical components, their associated spectra, and the concentration profiles in time. Usually, these solutions are not unique because of the so‐called rotational ambiguity. In the present work, we reduce the non‐uniqueness by enforcing the consistency of the computed concentration profiles with a given kinetic model. Traditionally, the kinetic modeling is realized in a separate step, which follows the multivariate curve resolution procedure. In contrast to this, we consider a hybrid approach that combines the model‐free curve resolution technique with the model‐based kinetic modeling in an overall optimization. For a two‐component model problem, the range of possible solutions is analyzed, and its reduction to a single, unique solution by means of the hybrid kinetic modeling is shown. The algorithm reduces the rotational ambiguity and improves the quality of the kinetic fitting. Numerical results are also presented for a multi‐component catalytic reaction system that obeys the Michaelis–Menten kinetics. Copyright © 2012 John Wiley & Sons, Ltd.     

Correlative mass spectrometry imaging,applying time‐of‐flight secondary ion mass spectrometry and atmospheric pressure matrix‐assisted laser desorption/ionization to a single tissue section

Rationale

Mass spectrometry imaging (MSI) is a powerful tool for mapping the surface of a sample. Time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) and atmospheric pressure matrix‐assisted laser desorption/ionization (AP‐MALDI) offer complementary capabilities. Here, we present a workflow to apply both techniques to a single tissue section and combine the resulting data for the example of human colon cancer tissue.

Methods

Following cryo‐sectioning, images were acquired using the high spatial resolution (1 μm pixel size) provided by TOF‐SIMS. The same section was then coated with a para‐nitroaniline matrix and images were acquired using AP‐MALDI coupled to an Orbitrap mass spectrometer, offering high mass resolution, high mass accuracy and tandem mass spectrometry (MS/MS) capabilities. Datasets provided by both mass spectrometers were converted into the open and vendor‐independent imzML file format and processed with the open‐source software MSiReader.

Results

The TOF‐SIMS and AP‐MALDI mass spectra show strong signals of fatty acids, cholesterol, phosphatidylcholine and sphingomyelin. We showed a high correlation between the fatty acid ions detected with TOF‐SIMS in negative ion mode and the phosphatidylcholine ions detected with AP‐MALDI in positive ion mode using a similar setting for visualization. Histological staining on the same section allowed the identification of the anatomical structures and their correlation with the ion images.

Conclusions

This multimodal approach using two MSI platforms shows an excellent complementarity for the localization and identification of lipids. The spatial resolution of both systems is at or close to cellular dimensions, and thus spatial correlation can only be obtained if the same tissue section is analyzed sequentially. Data processing based on imzML allows a real correlation of the imaging datasets provided by these two technologies and opens the way for a more complete molecular view of the anatomical structures of biological tissues.

     

Real‐Time Nanomicroscopy via Three‐Dimensional Single‐Particle Tracking

We developed a new method for real‐time, three‐dimensional tracking of fluorescent particles. The instrument is based on a laser‐scanning confocal microscope where the focus of the laser beam is scanned or orbited around the particle. Two confocal pinholes are used to simultaneously monitor regions immediately above and below the particle and a feedback loop is used to keep the orbit centered on the particle. For moderate count rates, this system can track particles with 15 nm spatial resolution in the lateral dimensions and 50 nm in the axial dimension at a temporal resolution of 32 ms. To investigate the interaction of the tracked particles with cellular components, we have combined our orbital tracking microscope with a dual‐color, wide‐field setup. Dual‐color fluorescence wide‐field images are recorded simultaneously in the same image plane as the particle being tracked. The functionality of the system was demonstrated by tracking fluorescent‐labeled artificial viruses in tubulin‐eGFP expressing HUH7 cells. The resulting trajectories can be used to investigate the microtubule network with super resolution.     

Chemical Imaging of Monolayers on Metal Surfaces: Applications in Corrosion,Catalysis, and Self‐Assembled Monolayers

In situ techniques are indispensable to understanding many topics in surface chemistry. As a consequence, several spectroscopic methods have been developed to provide molecular‐level information that only spectroscopy can supply. However, as important as this information is, it is just as critical to realize that nearly all surfaces under investigation have spatial heterogeneities of the order of nanometers to millimeters; thus, spatial analysis is very important to the overall interpretation. This Minireview focuses on a few of the recent developments in spectroscopic techniques that can provide spatial, spectroscopic, and in situ information. These techniques include photo‐electron microscopy, infrared and Raman imaging, and nonlinear optical imaging vibrational spectroscopy as applied to topics in corrosion, catalysis and self‐assembled monolayers.     

Performance evaluation of a miniature laser ablation time‐of‐flight mass spectrometer designed for in situ investigations in planetary space research

Key performance features of a miniature laser ablation time‐of‐flight mass spectrometer designed for in situ investigations of the chemical composition of planetary surfaces are presented. This mass spectrometer is well suited for elemental and isotopic analysis of raw solid materials with high sensitivity and high spatial resolution. In this study, ultraviolet laser radiation with irradiances suitable for ablation (< 1 GW/cm²) is used to achieve stable ion formation and low sample consumption. In comparison to our previous laser ablation studies at infrared wavelengths, several improvements to the experimental setup have been made, which allow accurate control over the experimental conditions and good reproducibility of measurements. Current performance evaluations indicate significant improvements to several instrumental figures of merit. Calibration of the mass scale is performed within a mass accuracy (Δm/m) in the range of 100 ppm, and a typical mass resolution (m/Δm) ~600 is achieved at the lead mass peaks. At lower laser irradiances, the mass resolution is better, about (m/Δm) ~900 for lead, and limited by the laser pulse duration of 3 ns. The effective dynamic range of the instrument was enhanced from about 6 decades determined in previous study up to more than 8 decades at present. Current studies show high sensitivity in detection of both metallic and non‐metallic elements. Their abundance down to tens of ppb can be measured together with their isotopic patterns. Due to strict control of the experimental parameters, e.g. laser characteristics, ion‐optical parameters and sample position, by computer control, measurements can be performed with high reproducibility. Copyright © 2012 John Wiley & Sons, Ltd.     

Quantification and methodology issues in multivariate analysis of ToF‐SIMS data for mixed organic systems

Multivariate methods, such as principal component analysis (PCA) and multivariate curve resolution (MCR), are often employed to aid the analysis of large complex data sets such as time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) images. There is, however, much confusion over the most appropriate choice of method for any given application and the effects of data preprocessing, which is exacerbated by the confusing terminologies and the use of jargon in this field. In the present study, a simple model system consisting of a ToF‐SIMS image of an immiscible polymer blend is used to evaluate PCA and MCR in the accurate identification, localisation and quantification of the phase‐separated polymer domains, using four data preprocessing methods (no scaling, normalisation, variance scaling and Poisson scaling). This highlights significant issues and challenges in the quantitative multivariate analysis of mixed organic systems, including the discrimination of chemically significant features from experimental noise, the resolution of weak chemical contributions and potential bias introduced by data preprocessing. Multivariate analysis using Poisson scaling, identified as the most suitable data preprocessing method for both PCA and MCR, demonstrates a marked improvement upon traditional (manual) analysis and provides valuable additional information that is difficult to detect using traditional analysis. Using these results, we present recommendations for the optimum use of multivariate analysis by analysts and provide guidance on selecting the most appropriate methods. Confusing terminology is also clarified. © Crown copyright 2008. Reproduced with the permission of Her Majesty's Stationery Office. Published by John Wiley & Sons, Ltd.     

Imaging Nanometre‐Sized Hot Spots on Smooth Au Films with High‐Resolution Tip‐Enhanced Luminescence and Raman Near‐Field Optical Microscopy

A novel near‐field optical microscope based on a parabolic mirror is used for recording high‐resolution tip‐enhanced photoluminescence (PL) and Raman images with unprecedented sensitivity and contrast. The measurements reveal small islands on the Au surface with dimensions of only a few nanometres with locally enhanced Au PL. These islands appear as nanometre‐sized hot spots in tip‐enhanced Raman microscopy when benzotriazole molecules adsorbed on the Au surface serve as local sensors for the optical field. The spectra show that localized plasmons are the cause of both the locally enhanced Au PL and enhanced Raman scattering. This finding suggests that the dispersive background in the surface‐enhanced Raman spectra can be explained simply by the enhanced Au PL in the gap. Furthermore, our results show that the surface flatness must be better than 1 nm, to provide an optically homogeneous substrate for near‐field enhanced PL and Raman spectroscopy.     

High mass and spatial resolution mass spectrometry imaging of Nicolas Poussin painting cross section by cluster TOF‐SIMS

Time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) imaging using cluster primary ion beams is used for the identification of the pigments in the painting of Rebecca and Eliezer at the Well by Nicolas Poussin. The combination of the high mass resolution of the technique with a sub‐micrometer spatial resolution offered by a delayed extraction of the secondary ions, together with the possibility to simultaneously identifying both minerals and organics, has proved to be the method of choice for the study of the stratigraphy of a paint cross section. The chemical compositions of small grains are shown with the help of a thorough processing of the data, with images of specific ions, mass spectra extracted from small regions of interest, and profiles drawn along the different painting layers. Copyright © 2016 John Wiley & Sons, Ltd.