19.5nm极紫外反射镜的研制

介绍了一种用于太阳观测19.5nm极紫外多层膜的研究工作。利用软件对规整的Mo/Si膜系结构进行了优化,拓宽了反射带宽,提高了积分反射率。采用双离子束溅射技术,时间控厚,成功制备了该反射镜。通过同步辐射反射率计测试表明,峰值反射率27.5%,均匀性在1%以内,已初步达到预设要求。     

Spectral-purity-enhancing layer for multilayer mirrors

We demonstrate, both theoretically and experimentally, that special spectral-purity-enhancing multilayer mirror systems can be designed and fabricated to substantially reduce the level of out-of-band radiation expected in an extreme ultraviolet lithographic tool. A first proof of principle of applying such spectral-purity-enhancement layers showed reduced out-of-band reflectance by a factor of five, while the in-band reflectance is only 4.5% (absolute) less than for a standard capped multilayer.     

极紫外多层膜技术研究进展

在极紫外波段,任何材料都表现出极强的吸收特性,因此,采用多层膜实现高反射率是构建正入射式光学系统的唯一途径。本文总结了极紫外多层膜的发展进程,叙述了制备极紫外多层膜的关键技术(磁控溅射、电子束蒸发、离子束溅射)以及它们涉及的相关设备。由于多层膜反射式光学元件主要应用于极紫外光刻与极紫外天文观测,文中重点讨论了极紫外光刻系统对多层膜性能的要求,镀膜过程中的面形精度和热稳定性等问题;同时介绍了极紫外天文观测中使用的多层膜的特点,特别讨论了多层膜光栅的制备技术和亟待解决的问题。     

Si adhesion interlayer effects in hydrogen passivated Si/W soft X-ray multilayer mirrors

The use of hydrogen passivation of the silicon layers in Si/W soft X-ray reflective multilayer mirrors is investigated. Standard passivation, corresponding to Si:H/W structures, led to reduced growth properties of the W layers. The additional use of atomically thin Si adhesion layers, corresponding to Si:H/Si/W, led to improved growth and increased soft X-ray reflectivity. The effects taking place at the interfaces are analysed by bright field planar TEM and in situ X-ray reflectivity, and are described in terms of interface and surface energies, with quantitatively analysis of intermixing, materials density, and geometrical optical effects.     

Coupled mode analysis of in-plane channel drop filters with resonant mirrors

A channel drop filter system that consists of two waveguides and three cavities is studied. One cavity couples with both waveguides, while the other two work as resonant mirrors to reflect the selected channel back into the system. The operation of this configuration is analyzed, using coupled mode theory. The conditions to achieve 100% in-plane channel transfer are derived. A method to suppress the side lobes of reflection and backward drop is also proposed. The direct coupling between the cavities is not required. The analysis is verified by two-dimensional finite difference time domain simulations in 2D hexagonal photonic crystals.     

Study for dual-function EUV multilayer mirror

Studying the distribution of He⁺ in Earth's plasmasphere by detecting its resonantly scattered emission at 304 Å will record the structure and dynamics of the cold plasma in Earth's plasmasphere on a global scale. EUV imaging systems usually utilizes near-normal incidence optics including multilayer mirror and filter. In this paper, the space condition of the Earth's plasmasphere to confirm the expected performance of mirror were analyzed. In order to achieve higher response at 304 Å and reduce 584 Å radiation for the optical system, a new multilayer coating of Mo/Si with UO₂ was developed. Based on optical constants of Mo, Si and UO₂, we used a simplest method to compute the reflectance of this new multilayer mirror range from 100 to 584 Å. The results show the desirable thickness of UO₂ is 17 Å, and the multilayer mirror has a high reflectance of 26.10% at 304 Å and a low reflectance of 0.52% at 584 Å.     

多层膜软X光反射镜的研制

本文介绍了镍-碳多层膜软X光反射镜的设计与制造方法,特别是膜厚监控法.用俄歇谱仪分析了一个样品的剖面情况;对一些样品在1.54(?)的衍射特性和在软X光区的反射率进行了测量并与理论计算结果作了比较.     

Laboratory-scale mirrors for submillimeter wavelengths

A machining procedure based on an elementary concept has been applied successfully to produce metal mirrors suitable for submillimeter wavelengths. Ninety-degree off-axis paraboloidal or ellipsoidal mirror sections may be cut from brass or aluminum by means of a series of predetermined increments on a conventional laboratory lathe. Paraboloidal mirrors with low f-numbers (f/2) made by this technique have been used with good results as part of the collecting optics of a submillimeter-wave heterodyne radiometer.     

Optimization of platinum-carbon multilayer mirrors for hard X-ray optics

The design of hard X-ray optics for astrophysical technology is one of the key technologies for investigating active galaxies and clusters of galaxies. In the present paper, we have optimized multilayer mirrors of platinum-carbon layer pairs for the hard X-ray region at different grazing angles. The Luus-Jaakola optimization procedure has been implemented for the global optimization of multialyer mirrors. With this algorithm it is not necessary to specify initially the number of layers present in a design.     

Multiple spectral window mirrors based on Fibonacci chains of dielectric layers

The unique properties of one-dimensional (1D) Fibonacci chains of dielectric layers are experimentally demonstrated and exploited for the design of new mirrors with multiple reflection spectral windows. The new mirror structures are simple, straightforward to make and enable a wide variety of multiple spectral window device performance to be achieved. By changing the thickness of the layers or the order of the Fibonacci chain, tens or even hundreds of windows can be obtained with the same approximate reflectivity over a very broad spectral region. These mirrors have numerous applications in photonics and optoelectronics.     

Alloy-ceramic oxide multilayer mirrors for water-window soft x rays

Alloy-ceramic oxide multilayers of Ni(80)Nb(20)- MgO with 3.56-nm period have been made by use of the pulsed-laser deposition technique and characterized by means of grazing-incidence x-ray reflectivity. The interface roughness was found to be only ~0.35 nm at the two interfaces, Ni(80)Nb(20)- MgO and MgO-Ni(80)Nb(20), leading to a peak reflectivity of ~38% at the first order. The atomic structure in the two individual layers, Ni(80)Nb(20) and MgO, is found to be amorphous, in agreement with the deposition conditions. These multilayers can be used as mirrors for soft x rays in the angular range 18 degrees to 39 degrees , depending on the actual wavelength of radiation in the water-window region.     

Development of laser deposited multilayer zone plate structures for soft X-ray radiation

As a novel approach, the combination of pulsed laser deposition and focused ion beam was applied to fabricate different types of multilayer zone plate structures for soft X-ray applications. For this purpose, high quality non-periodic ZrO₂/Ti multilayers were deposited by pulsed laser deposition on planar Si substrates and on rotating steel wires with layer thicknesses according to the Fresnel zone plate law. Linear focusing optics were fabricated by cutting slices out of the multilayers by focused ion beam and placing them directly over pinholes within Si₃N₄ substrates. Additionally, it was shown that laser deposition of depth-graded multilayers on a wire is also a promising way for building up multilayer zone plates with point focus. First experiments using a table-top X-ray source based on a laser-induced plasma show that the determined focal length and spatial resolution of the fabricated multilayer Laue lens corresponds to the designed optic.     

Computer simulation of blistering in multilayer mirrors for EUV lithography

Progress in extreme UV lithography depends on the quality of multilayer radiation collecting mirrors (made of Mo/Si), in which radiation damage can cause porosity. Accumulation of bulk defects (blisters) is represented by the model of the first order phase transition at a fluctuation stage. Computer simulation of defect distribution functions depending on the sizes and arrangement in layers allows the determination of possible ways for the properties of the layer material properties to deteriorate.     

Co/Ti金属磁性多层膜的激光布里渊散射研究(英文)

在室温下利用直流磁控溅射法制备出了具有不同Co层厚度的 [Co(dConm) /Ti(dTinm) ]n 金属磁性多层膜 (其中dCoanddTi是Co和Ti的厚度 ,n薄膜调制周期数 )。在 30 0K下用X射线衍射法 (XRD)和布里渊散射方法研究了Co层厚度分别为dCo=1 ,2 ,2 5 ,3 5nm ,Ti层厚度为dTi=2 5nm的Co/Ti多层膜。XRD的结果所示在Co/Ti多层膜中Co层厚度超过 2 5nm ,其结构类似块材Co的多晶结构。对比之下 ,Co/Ti多层膜中Co层厚度低于 2 5nm ,其XRD衍射峰随Co层厚度减少变的峰形加宽 ,衍射峰的强度减少 ,峰位移动和消失。在Co/Ti多层膜中自旋波的布里渊散射结果表明 :在Co/Ti多层膜中 ,对于dCo>2 5nm磁性呈铁磁性耦合 ,在dCo≤ 2 5nm时 ,其呈反铁磁性耦合。除表面自旋波外 ,在呈反铁磁性耦合的材料中观测到了两个有体特征的自旋波 ,而在呈铁磁耦合的材料中只观测到一个有体特征的自旋波。     

校正空间分块镜复位误差所需的最少自由度的确定

可收展式分块镜共相位成像技术是实现光学系统超大口径、超高分辨率成像的关键技术。分块镜复位误差会引起各子镜之间的共相位误差和整个拼接镜面的面形误差。合理确定校正分块镜复位误差所需的自由度具有非常重要的意义。计算机仿真分析了分块镜的复位误差对拼接镜面面形误差的影响。结果表明,所需的校正自由度的个数不仅与展开机构的复位精度有关,而且与分块镜镜面的几何参数有关。     

碳纤维复合材料制造轻质量空间光学反射镜

用碳纤维复合材料制造空间光学镜面结构是满足空间光学反射镜轻量化轻型要求的途径之一,概要介绍国际上将碳纤维复合材料用于光学镜面中的现有技术水平、发展趋势及国内现状。利用有限元法,通过对复合材料层合板铺层设计制造出小口径(260mm)反射镜加以实验验证其光学性能以及稳定性,研究碳纤维复合材料用于光学镜面有可能达到的精度以及尚需解决的问题。     

Characteristics of ZnO-Cu-ZnO multilayer films on copper layer properties

ZnO/Cu/ZnO multilayers on glass with different copper layer thickness were prepared by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. Different optimization procedure were used for good transparent conductive film. Several analytical tools such as spectrophotometer, scanning electron microscope (SEM), four point probes were used to explore the causes of the changes in electrical and optical properties. The sheet resistance of the structure was severely influenced by the deposition condition of both top ZnO and intermediate Cu layer. Effect of substrate temperature and annealing treatment on ZnO and Cu layer was analyzed. A sheet resistance of 10 Ω/sq and transmittance over 85% at 580 nm wavelength was achieved and could be reproduced by controlling the preparation process parameter. The results of an optimization condition of both oxide layers and metallic Cu layers are illustrated.     

Multipass systems with mirrors of different radii

The general equations of a multipass system using mirrors of different radii are reported. By using these solutions, a geometrical calculation of the fundamental gaussian mode for the open resonator can be obtained. This result is equal to that obtained taking account of diffraction effects.     

原子反射镜及其应用

原子反射镜是人们从事原子光学实验研究的重要器件之一.本文将简单综述采用冷原子磁、光操控技术发展起来的诸如消逝波原子反射镜、半高斯光束原子反射镜、周期性磁化的磁带反射镜、周期性排列的永久磁铁反射镜和载流导线磁反射镜等各种原子反射镜的基本原理、实验方案及其最新进展,并就原子反射镜在原子光学实验中的应用作一简单介绍.     

Molybdenum-strontium multilayer mirrors for the 8-12-nm extreme-ultraviolet wavelength region

Mo-Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6 degrees ) reflectance of 23.0% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo-Sr multilayers were unsuccessful.