共查询到17条相似文献,搜索用时 62 毫秒
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针对只需单次曝光的菲涅尔波带片器件,给出了结合电子束光刻和热压印光刻进行大规模复制的完整工艺路线,即首先采用电子束光刻制作热压印模版,之后用热压印光刻进行波带片的大规模复制,所制得的波带片图形的最外环宽度为250 nm,直径为196μm,环数为196环.初步实验结果表明,这种方法具有很好的重复性和易用性,且可以进行低成本波带片的精确复制. 相似文献
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为了减小纳米压印光刻胶与模板间的接触黏附力,合成了一种无氟抗粘巯基一烯纳米压印光刻胶。以A,A,A’-三(4-羟苯基)-1-乙基-4-异丙苯(TPA)和溴丙烯为原料,采用相转移催化法制备了一种功能性单体A,A,A’-三(4-丙烯基苯基醚)-1-乙基-4-异丙苯(TPAE),并将其按特定配比与三羟甲基丙烷三(3-巯基丙酸酯)和光引发剂配制成纳米压印光刻胶。实时傅里叶红外光谱(FT-IR)分析表明,当辐射剂量为200mJ/cm^2时,双键的转化率为78.0%,巯基的转化率为78.1%。胶膜的去离子水接触角为90°。纳米压印光刻胶脱模后的图形结构规整,保真度高,具有良好的脱模性能。 相似文献
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R.Pelzer P.Lindner T.Glinsner B.Vratzov C.Gourgon S.Landist P.Kettner C.Schaefer 《电子工业专用设备》2004,33(7):3-9
纳米压印光刻技术已被证实是纳米尺寸大面积结构复制的最有前途的下一代技术之一。这种速度快、成本低的方法成为生物化学、μ级流化学、μ-TAS和通信器件制造以及纳米尺寸范围内广泛应用的一种日渐重要的方法,如生物医学、纳米流体学、纳米光学应用、数据存储等领域。由于标准光刻系统的波长限制、巨大的开发工作量、以及高昂的工艺和设备成本,纳米压印光刻技术可能成为主流IC产业中一种真正富有竞争性方法。对细小到亚10nm范围内的极小复制结构,纳米压印技术没有物理极限。从几种纳米压印光刻技术中选择两种前景广阔的方法——热压印光刻(HEL)和紫外压印光刻(UV-NIL)技术给予介绍。两种技术对各种各样的材料以及全部作图的衬底大批量生产提供了快速印制。重点介绍了HEL和UV-NIL两种技术的结果。全片压印尺寸达200mm直径,图形分辨力高,拓展到纳米尺寸范围。 相似文献
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以苯甲醚为溶剂,采用旋涂法制备PMMA(聚甲基丙烯酸甲酯)转移层膜。当PMMA的质量分数为5%、旋涂速度为2000~6000r/min时,转移层膜的厚度为90~150nm,粗糙度为0.3nm,可满足纳米压印要求。采用接触角测量仪测试计算出PMMA、PS转移层膜的表面能,并通过转移层膜与压印胶之间的粘附功和界面张力的计算,评价了PMMA、PS和Si片对压印胶的润湿和粘附性能。结果表明,PMMA膜可改善压印胶在基片上的润湿铺展性能和粘附性能,而PS膜虽能改善基片的润湿铺展性能,却不利于压印胶的粘附。 相似文献
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纳米压印技术因其成本低、产量高的优点广受关注,而开发可适用于纳米压印的压印胶成为该工艺的关键。合成了一种硅含量高的单体三(三甲基硅氧基)甲基丙烯酰氧丙基硅烷(TRIS),制备了一种新型紫外纳米压印用含硅丙烯酸酯型压印胶,用四点弯曲实验机和接触角测试仪表征了压印胶与模板的黏附性能,研究了配方组成对模板黏附性能的影响,优化得到了抗黏附性能优异的配方。压印实验结果表明,该压印胶与模板分离时无粘连。AFM与SEM测试结果表明,压印胶上复制得到了线宽149 nm、周期298 nm、深宽比为1的纳米光栅图形,图形结构完整。 相似文献
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Saman Safari Dinachali Mohammad S. M. Saifullah Ramakrishnan Ganesan Eng San Thian Chaobin He 《Advanced functional materials》2013,23(17):2201-2211
Direct patterning of oxides using thermal nanoimprint lithography is performed using either the sol‐gel or methacrylate route. The sol‐gel method results in resists with long shelf‐life, but with high surface energy and a considerable amount of solvent that affects the quality of imprinting. The methacrylate route, which is limited to certain oxides, produces polymerizable resists, leading to low surface energy, but suffers from the shorter shelf‐life of precursors. By combining the benignant elements from both these routes, a universal method of direct thermal nanoimprinting of oxides is demonstrated using precursors produced by reacting an alkoxide with a polymerizable chelating agent such as 2‐(methacryloyloxy)ethyl acetoacetate (MAEAA). MAEAA possesses β‐ketoester, which results in the formation of environmentally stable, chelated alkoxide with long shelf‐life, and methacrylate groups, which provide a reactive monomer pendant for in situ copolymerization with a cross‐linker during imprinting. Polymerization leads to trapping of cations, lowering of surface energy, strengthening of imprints, which enables easy and clean demolding over 1 cm × 2 cm patterned area with ≈100% yield. Heat‐treatment of imprints gives amorphous/crystalline oxide patterns. This alliance between two routes enables the successful imprinting of numerous oxides including Al2O3, Ga2O3, In2O3, Y2O3, B2O3, TiO2, SnO2, ZrO2, GeO2, HfO2, Nb2O5, Ta2O5, V2O5, and WO3. 相似文献
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纳米压印是一种理想的光刻技术,它具有生产率和分辨率高的特点。脱模过程中,粘连限制了图形的精确转移,因此,抗粘连成为纳米压印技术需要解决的关键问题。氟化自组装单分子层是一种被广泛应用的抗粘连涂层,介绍和分析了其在耐热性和降解方面的最新研究进展。介绍了类金刚石碳膜、在光刻胶上喷涂脱模剂和含氟表面活化剂在纳米压印抗粘连研究上的进展,分析了这些方法所存在的问题及纳米压印抗粘连的发展趋势。 相似文献
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超材料吸收器的高吸收率源于表面金属颗粒与介质层之间产生的局域等离激元共振以及由金属颗粒--介质层--金属反射层构成的微腔所导致的共振吸收。其吸收特性与金属颗粒的尺寸、形貌和介质层的材料和厚度密切相关。设计优化了一个在近红外波段1.2 μm处具有近完美吸收的超材料吸收器。以该设计为蓝图,利用纳米压印技术制备了一系列具有不同介质层厚度的器件,并利用红外反射谱定量研究了这些器件的吸收特性。实验结果证实,用纳米压印技术制备的超材料器件具有工艺可靠性好、加工精度高等优点。实验测得的吸收率变化趋势与理论预期相符,吸收率较高。 相似文献
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Vaibhav Gupta Swagato Sarkar Olha Aftenieva Takuya Tsuda Labeesh Kumar Daniel Schletz Johannes Schultz Anton Kiriy Andreas Fery Nicolas Vogel Tobias A. F. König 《Advanced functional materials》2021,31(36):2105054
Imprint lithography has emerged as a reliable, reproducible, and rapid method for patterning colloidal nanostructures. As a promising alternative to top-down lithographic approaches, the fabrication of nanodevices has thus become effective and straightforward. In this study, a fusion of interference lithography (IL) and nanosphere imprint lithography on various target substrates ranging from carbon film on transmission electron microscope grid to inorganic and dopable polymer semiconductor is reported. 1D plasmonic photonic crystals are printed with 75% yield on the centimeter scale using colloidal ink and an IL-produced polydimethylsiloxane stamp. Atomically smooth facet, single-crystalline, and monodisperse colloidal building blocks of gold (Au) nanoparticles are used to print 1D plasmonic grating on top of a titanium dioxide (TiO2) slab waveguide, producing waveguide-plasmon polariton modes with superior 10 nm spectral line-width. Plasmon-induced hot electrons are confirmed via two-terminal current measurements with increased photoresponsivity under guiding conditions. The fabricated hybrid structure with Au/TiO2 heterojunction enhances photocatalytic processes like degradation of methyl orange (MO) dye molecules using the generated hot electrons. This simple colloidal printing technique demonstrated on silicon, glass, Au film, and naphthalenediimide polymer thus marks an important milestone for large-scale implementation in optoelectronic devices. 相似文献
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HyungJun LimKee-Bong Choi GeeHong KimSooYeon Park JiHyeong RyuJaeJong Lee 《Microelectronic Engineering》2011,88(8):2017-2020
This paper proposes a new concept of a RNIL (roller nanoimprint lithography) system. The system does not require the roll stamp that is necessary in the conventional RNIL system, and it easily transfers patterns from a hard stamp to a flexible substrate. Generally, hard stamps such as Si wafers are of a circular shape. While imprinting with a hard stamp using the RNIL system, the pressing force of the press roller in the system varies as the length of the contact line between the circular-type hard stamp and the roller changes. In this study, the contact force profile is presented and is then implemented. Micro- and nano-scale patterns are transferred from Si stamps onto thin and flexible PC (polycarbonate) substrates. Then performance of the system is the evaluated by SEM images. 相似文献