激光驻波场中Cr原子运动轨迹与汇聚沉积的分析

利用半经典模型，从铬原子在激光驻波场中的运动方程出发，通过数值解方法模拟了铬原子在驻波场中的运动轨迹，并分析了原子的纵向速度分布和准直程度及球差对沉积条纹结构的影响，同时也讨论了基片摆放位置对沉积条纹结构的影响，并通过实验得到了纳米光栅条纹结构. 关键词： 激光驻波场 原子沉积 运动轨迹 沉积分布     

中性钠原子在激光驻波场中的运动特性研究

基于半经典理论,分析了中性钠原子在激光驻波场中的受力特征,以此为基础分别对不同纵向运动速度和横向运动速度条件下中性钠原子的运动轨迹进行了仿真运算,得到了不同速度条件下中性钠原子的运动轨迹特征,基于累计算法进一步对不同速度条件下中性钠原子的沉积特性进行了仿真,当钠原子的纵向运动速度符合最可及速度(740 m/s)时,纳米沉积条纹的半高宽为2.78 nm,条纹对比度为38.5 ∶1,当纵向运动速度偏离最可及速度(350 m/s)时,纳米沉积条纹的半高宽为29.1 nm,其对比度下降为15 ∶1.而当中性钠原子 关键词： 原子光刻 激光驻波场 条纹半高宽 条纹对比度     

Observation of collimation and decollimation of an atomic beam in a misaligned standing wave

This paper reports an experimental study on the collimation and decollimation of an atomic beam in a misaligned standing wave, in which the effective detuning caused by the Doppler effect is affected by the longitudinal velocity of the atomic beam. The experiment shows that in a strong field with red detuning between laser field and atomic transition frequency, laser heating in a normal standing wave becomes laser cooling in a misaligned standing wave for an approriate misalignment angle. For blue detuning, laser cooling in a standing wave can also become laser heating in a misaligned standing wave for an appropriate condition. These results ca be used in controling atomic motion.     

The influence of divergence angle on the deposition of neutral chromium atoms using a laser standing wave

The characteristics of neutral chromium atoms in the standing wave field are discussed.Based on a semi-classical model,the motion equation of neutral atoms in the laser standing wave field is analyzed,and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam.The simulation results show that the full width at half maximum(FWHM) of the stripe is 2.75 nm and the contrast is 38.5:1 when the divergence angle equals 0 mrad,the FWHM is 24.1 nm and the contrast is 6.8:1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm,and the contrasts are 3.3:1 and 1.6:1 when the divergence angles equal 0.5 and 1.0 mrad,respectively.     

Simulation of Chromium Atom Deposition Pattern in a Gaussain Laser Standing Wave with Different Laser Power

One-dimensional deposition of a neutral chromium atomic beam focused by a near-resonant Gaussian standing- laser field is discussed by using a fourth-order Runge-Kutta type algorithm. The deposition pattern of neutral chromium atoms in a laser standing wave with different laser power is discussed and the simulation result shows that the full width at half maximum （FWHM） of a nanometer stripe is 115nm and the contrast is 2.5：1 with laser power 3.93mW; the FWHM is 0.8nm and the contrast is 27：1 with laser power 16mW, the optimal laser power; but with laser power increasing to 50mW, the nanometer structure forms multi-crests and the quality worsens quickly with increasing laser power.     

电子在激光驻波场中运动产生的太赫兹及X射线辐射研究

采用单电子模型和经典辐射理论分别对低能和高能电子在线偏振激光驻波场中的运动和辐射过程进行了研究. 结果表明: 垂直于激光电场方向入射的低速电子在激光驻波场中随着光强的增大, 逐渐从一维近周期运动演变为二维折叠运动, 并产生强的微米量级波长的太赫兹辐射; 高能电子垂直或者平行于激光电场方向入射到激光驻波场中, 都会产生波长在几个纳米的高频辐射; 低能电子与激光驻波场作用中, 激光强度影响着电子的运动形式、辐射频率以及辐射强度; 高能电子入射时, 激光强度影响了电子高频辐射的强度, 电子初始能量影响着辐射的频率; 电子能量越高, 产生的辐射频率越大. 研究表明可以由激光加速电子的方式得到不同能量的电子束, 并利用电子束在激光驻波场的辐射使之成为太赫兹和X射线波段的小型辐射源. 研究结果可以为实验研究和利用激光驻波场中的电子辐射提供依据.     

沟道效应作用下中性原子在激光驻波场中的沉积特性研究

基于半经典理论,建立了中性原子与激光驻波场相互作用的模型,分析了中性原子在激光驻波场沟道效应作用下运动轨迹及沉积特性,探讨了球差、色差和原子束发散角对沉积条纹的影响. 得到了上述三种影响因素下纳米光栅的半高宽分别为0.532,12.16,96.70 nm. 仿真结果表明,随着原子束发散角度的增加,沉积条纹的对比度将会下降,当原子束发散角分别为0.1 mard时,其对比度为85.2：1,发散角为0.3 mrad时,条纹对比度为5.33：1,而当发散角增加至0.5 mrad以上时,沉积条纹将会出现分裂现象,导致条纹的恶化. 关键词： 激光驻波场 纳米光栅 沟道效应     

量子模型分析激光驻波原子透镜的像差

采用量子模型对近共振激光驻波原子透镜会聚Cr原子束、形成纳米量级光栅结构的物理过程进行数值模拟。为提高原子透镜的成像质量,对各种像差,如衍射像差、球差、色差、及原子束发散角、原子磁支能级、原子同位素等因素引起的像差进行了理论分析。模拟结果表明,相比粒子光学模型,量子模型能更加精确地描述原子会聚结果,且能解释原子在驻波光场中的衍射现象。在各种像差中,原子束发散角是最主要的因素,其影响大于衍射像差、球差、色差。原子的磁支能级、同位素等因素对像差影响很小,可以忽略不计。激光冷却准直原子束的方法可以减小束发散角引起的像差,压缩原子速度Vz分布范围的方法可以减小色差。     

Analysis of Cr atom focusing deposition properties in the double half Gaussian standing wave field

The use of the dipole force on atoms is a new technology that is used to build nanostructures. In this way, a high quality standard nano-grating can be obtained. Based on the semi-classical model, the motion equation is investigated and the trajectories of atoms in double half Gaussian standing wave field are simulated. Compared with the Gaussian standing wave field, the double half Gaussian standing wave can well focus the Cr atoms. In order to obtain this kind of beam, a prism is designed and the experimental result shows that the beam is well generated.     

原子光刻中驻波场与基片距离的判定方法研究

原子光刻实验中, 激光驻波场能起到原子透镜的效果, 实现原子汇聚. 激光驻波场与沉积基片间的距离对形成纳米条纹结构的质量具有重要影响. 利用高斯光束传播规律, 提出了一种能够定量判断激光驻波场与沉积基片相对位置的实验方法. 该方法通过调节装载有凸透镜和反射镜的精密位移台改变驻波场距基片的距离, 利用光电探测器接收反射光强的变化, 将位移改变量转变为接收器的电压信号. 利用驻波场激光束光斑直径值, 实现准确定位驻波场与基片的距离. 对上述实验过程进行数值模拟, 数值计算的结果和实验结果高度符合. 该方法实现了准确定位驻波场距基片的距离, 为后续深入研究驻波场和基片间距离对沉积纳米条纹结构质量的影响提供实验基础.     

高斯激光驻波场沉积Na原子的量子理论分析

利用量子理论,通过CRANK-NICOLSON数值方法对23Na原子受激光驻波场作用的物理过程进行模拟.模拟结果表明:正失谐时,原子以λ/2为周期会聚在驻波光场中波节处.随着光势阱加深或原子纵向速度改变,原子会聚结果分别符合薄透镜、厚透镜及沟道化模型.厚透镜模型中,当原子纵向速度增加,原子密度峰位置沿z方向向后漂移,峰在z方向半高宽增加.当激光功率增加或激光束腰减小,会聚面上峰半高宽减小,对比度增加,峰值增加.     

Atom lithography with a cold, metastable neon beam

We study different aspects of atom lithography with metastable neon atoms. Proximity printing of stencil masks is used to test suitable resists that are sensitive to the internal energy of the atoms, including dodecanethiols on gold and octadecyltrichlorosilanes grown on a SiO₂ surface. As an example of patterning the atomic beam with laser light, we create parallel line structures on the surface with a periodicity of half the laser wavelength by locally de-exciting the atoms in a standing quenching wave. Received: 29 June 1999 / Revised version: 30 August 1999 / Published online: 10 November 1999     

Pulsed standing wave deflection of sodium atoms

We study the deflection of sodium atoms by a resonantly tuned pulsed standing wave of high field intensity. The effects of the phase fluctuations of the pulsed laser field on the momentum distribution of the deflected atoms are experimentally determined. The results are explained using a theoretical model based on the generalized density matrix formalism of two-level atoms. Received 23 November 1998 and Received in final form 27 January 1999     

Broadening of Cr nanostructures in laser-focused atomic deposition

This paper presents the experimental progress of laser-focused Cr atomic deposition and the experimental condition.The result is an accurate array of lines with a periodicity of 212.8±0.2 nm and mean full-width at half maximum as approximately 95 nm.Surface growth in laser-focused Cr atomic deposition is modeled and studied by kinetic Monte Carlo simulation including two events:the one is that atom trajectories in laser standing wave are simulated with the semiclassical equations of motion to obtain the deposition position;the other is that adatom diffuses by considering two major diffusion processes,namely,terrace diffusion and step-edge descending.Comparing with experimental results(Anderson W R,Bradley C C,McClelland J J and Celotta R J 1999 Phys.Rev.A 59 2476),it finds that the simulated trend of dependence on feature width is in agreement with the power of standing wave,the other two simulated trends are the same in the initial stage.These results demonstrate that some surface diffusion processes play important role in feature width broadening.Numerical result also shows that high incoming beam flux of atoms deposited redounds to decrease the distance between adatoms which can diffuse to minimize the feature width and enhance the contrast.     

激光驻波场形成Cr原子沉积纳米光栅的初步实验研究

利用激光驻波场会聚原子沉积纳米结构的技术可以用来研制纳米结构长度传递标准.当激光驻波场的频率大于原子的共振频率时，原子由于受到偶极力的作用将被会聚到驻波的波节处.采用了一种新的技术方案减小了实验对大的激光功率的要求.利用激光驻波场会聚准直性较好的Cr原子，并使其沉积在硅基片上形成纳米光栅结构.经原子力显微镜测试表明纳米光栅的周期为215 nm. 关键词： 激光偶极力 纳米计量 原子沉积 蓝失谐     

Growth of a Gaussian Laser Ripple on a Gaussian Beam in a Collisionless Magnetoplasma and its Effect on the Excitation of Ion-Acoustic Wave

This paper presents an investigation of the growth of a radially symmetrical ripple, superimposed on a Gaussian laser beam in a collisionless magnetoplasma. Here we have presented the effect of magnetic field and the intensity of the laser beam on the growth of ripple in some detail. The effect of presence of ripple on the excitation of an ion-acoustic wave is also investigated. Coupling of a weak ion-acoustic wave with main laser beam is through modified background density. Interesting feature of the analysis is that the combined effect of increased intensity of the laser beam and magnetic field is observed to suppress the growth of the ripple as well as the excitation of the ion-acoustic wave.     

冷原子穿越激光束的量子隧穿时间

原子通过激光冷却技术能够被制备在低温状态，这时冷原子云会展现出量子力学的波动性.研究了一束冷原子入射到一个蓝失谐的激光束上所表现出的量子力学隧穿效应.蓝失谐的激光束相对于冷原子而言等效于一个量子力学势垒.根据二能级模型，在理论上分析了具有内部结构的原子矢量物质波穿过激光束的量子力学反射与透射，特别是对原子穿越激光束所需的时间——量子隧穿时间进行了详细的研究.量子力学波动性使得冷原子穿越一个激光束时明显地展现出与经典粒子(热原子)不同的结果. 关键词： 冷原子 原子光学 量子隧穿     

一维原子刻蚀的数值模拟

通过直接的数值模拟，分析了原子束在激光驻波场下传播的动力学行为．估计了Cr原子沉积在基片上的焦点的大小，同时还发现一些实验参数会影响原子刻蚀的精度：如原子束的速度分布、激光的失谐量和激光束的直径等．     

Theoretical Analyses and ExperimentalDemonstration of Coherent Splittingof Atomic Wave Packet

1.IntroductionWiththerapiddevelopmentoftechniqueofthelasercoolingandtrappingofneutralatoms,theresearchesofatomicopticshavemaderemarkableprograseduringrecentyears,forexample,therealizationofBose-Einsteincondensation,thesuccessfulapplica-tionofatomiclensinlithographytechnique,andtheapplicationofatomicinterferometerinhighIyprecisemeasurementandsoon.AllofthesepredictthebrilliantprosPectofatomicoptics.EsPecially,thefieIdofatominterferometryhasenjoyedasurgeofinterestbecauseatomicinterferometerismu…     

Structure formation in atom lithography using geometric collimation

Atom lithography uses standing wave light fields as arrays of lenses to focus neutral atom beams into line patterns on a substrate. Laser cooled atom beams are commonly used, but an atom beam source with a small opening placed at a large distance from a substrate creates atom beams which are locally geometrically collimated on the substrate. These beams have local offset angles with respect to the substrate. We show that this affects the height, width, shape, and position of the created structures. We find that simulated effects are partially obscured in experiments by substrate-dependent diffusion of atoms, while scattering and interference just above the substrate limit the quality of the standing wave lens. We find that in atom lithography without laser cooling the atom beam source geometry is imaged onto the substrate by the standing wave lens. We therefore propose using structured atom beam sources to image more complex patterns on subwavelength scales in a massively parallel way.