激光主动照明光学系统设计

为提高跟踪测量系统对暗弱目标的探测能力,设计一套自动化激光主动照明光学系统,对跟踪测量视场范围进行主动辅助照明。该系统在0.2~5 km距离处的照明直径均为10 m,计算出其在-20℃及+45℃的温度调焦量,照明仿真结果表明系统照明不均匀性15%。通过研究系统像差对照明均匀性的影响,以及对设计的调光组进行分析,得到调光组移动量与照明距离之间的理论关系,表明自动调节调光组位置即可实现不同照明距离处的均匀照明。设计和分析结果表明,该主动照明系统能够自动调节调光组位置,实现跟踪测量视场内的均匀照明,有利于跟踪测量系统对于暗弱目标的探测。     

大视场光学系统像面照度均匀性优化

为提高大视场光学系统像面照度的均匀性,从理论上分析了光学系统像面照度的影响因素,提出使用中心遮拦产生的轴外斜光束截面积与轴上光束截面积之比对像面照度进行优化的思路。以理想系统建立数学模型,得到了中心圆形遮拦影响下不同视场角光束截面积比值的变化规律,并分析了遮拦对调制传递函数(MTF)的影响。进一步提出采用Zemax与Matlab软件动态数据交换(DDE)进行像面照度自动计算优化的方法。以某焦距56mm,相对孔径=1/5.6,视场角2ω=80°的航测镜头为例进行了优化,通过在光学系统第5表面上增加半径为4.384mm的中心遮拦,像面照度的不均匀性由优化前的22.3%降低至3.5%,均匀性明显改善。在优化实例中讨论了MTF曲线的变化,指出采用中心遮拦后的传函指标仍满足CCD探测器成像使用要求。     

临界照明光学系统设计新方法的研究及应用

在光电检测系统中,照明系统的优劣与成像质量息息相关,照明系统的设计方法直接影响到最终照明系统设计的成败。提出了一种综合设计分析和模拟仿真的交互式设计方法,不仅提高了照明系统设计的直观性、可靠性和快速性,而且保证了其设计制造的经济性。以运用该方法设计的两种照明系统为例阐明了该方法的特点。     

光学仪器照明CAD软件设计

设计了一套照明CAD软件用于实现对光学仪器中照明光路照度分布模拟.对该照明CAD系统的光线追迹与光照度计算方法进行了理论探讨,其中在光照度计算方法中引入了线性同余组合发生器,大大提高了模拟的真实性.运用该软件对实际照明光路进行了分析,分析结果表明该软件获得了需要的照度分布模拟图,能较好地满足用户要求.     

基于VB的照明专用CAD软件设计

根据点光源和线光源基本模型与光线追迹理论,借助前台开发工具(Visual Basic6.0)和后台开发工具(Microsoft Office Access)开发了一套照明专用CAD软件。该软件既能成功模拟光线追迹,又能借助后台数据库进行光源模型选取、典型结构选取和打印报表等。可满足光学设计人员的需求。     

照明系统中点光源的光照度分布分析

简要分析了照明光学系统与成像光学系统的区别。介绍了目前光学设计软件的分类。运用一个具体的照明光学系统分析了点光源的光照度分布分析软件的特性。     

玻尔兹曼分布的计算机模拟

利用Lennard—Jonee,分子相互作用模型模拟气体分子在重力场中的分布,展现分子运动的过程和分布形态,说明重力场中分子分布由分子问频繁的碰撞所决定而与分子速率和位置的初态分布无关,。零势能”处的数密度no也并非常数,它不仅与分子质量m有关,而且还与温度T有关。此外,模拟也揭示了玻尔兹曼分布律是对大量粒子而言的统计规律。     

极紫外投影光刻光学系统

极紫外光刻（EUVL）是半导体工业实现32～16nm技术节点的候选技术,而极紫外曝光光学系统是EUVL的核心部件,它主要由照明系统和微缩投影物镜组成。本文介绍了国内外现有的EUVL实验样机及其系统参数特性;总结了EUVL光学系统设计原则,分别综述了EUVL投影光学系统和照明光学系统的设计要求;描述了EUVL投影曝光系统及照明系统的设计方法;重点讨论了适用于22nm节点的EUVL非球面六镜投影光学系统,指出了改善EUVL照明均匀性的方法。     

自适应光学系统的数值模拟：噪音和探测误差的效应

噪音和探测误差是影响自适应光学系统性能的三个主要因素之一。噪音和探测误差使哈特曼－夏克（Hartmann-Shack)波前传感器所测得的华斜量产生误差,进而影响整个自适应光学系统的性能,建立了对噪声和探测误差对哈特曼－夏克波前传感器的影响进行数值模拟的理论模型,编制了计算程序,与已有的激光大气传输与自适应光学系统的计算程序相衔接,进行了模拟计算,对有限的离散采样,读出噪音和光子噪音的效应作了数值模拟研究,获得了一些对于实际的自适应光学系统的最佳设计有价值的结果。     

大口径、长焦距光学系统杂光系数、渐晕系数、像面照度均匀性等参数的测试

叙述一种用于测试大口径、长焦距光学系统杂光系数、渐晕系数、像面照度均匀性等光学参数的检测方法。     

推导圆孔夫琅禾费衍射光强分布的一种简便方法

由一维单缝衍射的振幅分布公式简便推导求得了圆孔夫琅禾费衍射的振幅及光强分布,并利用Mathematica通用数学软件对光强分布进行亮度模拟,从而得到相应的计算机衍射模拟图像.     

利用散斑图像测量表面粗糙度的计算机模拟及实验

从菲涅耳-基尔霍夫衍射公式出发推导出了粗糙面近场衍射方程。通过对观察面散斑光强统计特性的分析,提出了采用镜射光强分量法测量表面粗糙度的思想。为验证该方法的有效性,首先用计算机模拟产生具有不同统计特性的随机表面,然后对由随机表面产生的散斑场及其光强分布进行计算。计算结果表明,与传统的散斑对比度法相比,散斑镜射光强分量法测量弱粗糙表面粗糙度具有更大的适用范围和更高的测量精度,克服了散斑对比度法易受表面横向相关长度影响的缺点。通过实验对计算机模拟结果进行了验证。     

一种照相机成像平面照度均匀度检测系统

在讨论了照相机成像平面照度均匀度的影响因素的基础上 ,介绍了一种可在单片机的控制下 ,通过GaAsP光电二极管线阵扫描、A/D转换、测量结果输出等环节实现的照相机整机像面照度均匀度自动检测系统 ,并给出了该系统的测试结果。     

熔石英亚表面缺陷附近光强分布的数值模拟

 熔石英亚表面缺陷对光场的调制是导致激光辐照场破坏的主要因素。采用有限元方法对熔石英亚表面缺陷（平面和锥形划痕）周围的光强分布进行了数值模拟。结果表明：划痕形状、几何尺寸、方位角、光的入射角等是影响划痕周围光强分布的主要因素;前表面划痕对光强的增强效果比后表面弱;在理想形状的划痕截面和表面同时发生内全反射时,平面划痕周围的光强增强效果明显。锥形划痕周围的光强分布为正确解释交叉划痕的夹角平分线附近的损伤提供了理论依据。     

Signal intensity enhancement of μ-LIF by using ultra-thin laser sheet illumination and aqueous mixture with ethanol/methanol for micro-channel applications

Measurement of concentration distributions of suspended particles in a micro-channel is one of the most crucial necessities in the area of Lab-on-a-chip to be used for various bio-chemical applications. One most feasible way to measure the concentration field in the micro-channel is using μ-LIF (micro-scale laser-induced fluorescence) method. However, an accurate concentration field at a given cross-plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra-thin laser sheet beam having 5 μm thickness using a micro-focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal-to-noise ratio and considerably reduce the depth uncertainty.Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water (95%) and ethanol (EtOH)/methanol (MeOH) (5%) mixture. To reduce the rms errors resulting from the CCD electronic noise and other sources, an expansion of grid size was attempted from 1×1 to 3×3 or 5×5 pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.     

熔石英亚表面缺陷附近光强分布的数值模拟

熔石英亚表面缺陷对光场的调制是导致激光辐照场破坏的主要因素。采用有限元方法对熔石英亚表面缺陷（平面和锥形划痕）周围的光强分布进行了数值模拟。结果表明：划痕形状、几何尺寸、方位角、光的入射角等是影响划痕周围光强分布的主要因素;前表面划痕对光强的增强效果比后表面弱;在理想形状的划痕截面和表面同时发生内全反射时,平面划痕周围的光强增强效果明显。锥形划痕周围的光强分布为正确解释交叉划痕的夹角平分线附近的损伤提供了理论依据。     

A telescope illumination system for a wide-field endoscope

Endoscopic illumination systems conduct light down a built-in fibre-optic bundle to illuminate the object. Many modern endoscopes employ wide-field imaging optical systems and therefore require an illuminating beam of large divergence. This is commonly provided by placing a strong diverging lens at the far end of the fibre bundle, but it results in a poor uniformity of illumination in the object space. This paper describes the design of a telescopic illumination system to overcome this problem.     

Optimum projection pattern generation for grey-level coded structured light illumination systems

Structured light illumination (SLI) systems are well-established optical inspection techniques for noncontact 3D surface measurements. A common technique is multi-frequency sinusoidal SLI that obtains the phase map at various fringe periods in order to estimate the absolute phase, and hence, the 3D surface information. Nevertheless, multi-frequency SLI systems employ multiple measurement planes (e.g. four phase shifted frames) to obtain the phase at a given fringe period. It is therefore an age old challenge to obtain the absolute surface information using fewer measurement frames. Grey level (GL) coding techniques have been developed as an attempt to reduce the number of planes needed, because a spatio-temporal GL sequence employing p discrete grey-levels and m frames has the potential to unwrap up to p^m fringes. Nevertheless, one major disadvantage of GL based SLI techniques is that there are often errors near the border of each stripe, because an ideal stepwise intensity change cannot be measured. If the step-change in intensity is a single discrete grey-level unit, this problem can usually be overcome by applying an appropriate threshold. However, severe errors occur if the intensity change at the border of the stripe exceeds several discrete grey-level units. In this work, an optimum GL based technique is presented that generates a series of projection patterns with a minimal gradient in the intensity. It is shown that when using this technique, the errors near the border of the stripes can be significantly reduced. This improvement is achieved with the choice generated patterns, and does not involve additional hardware or special post-processing techniques. The performance of that method is validated using both simulations and experiments. The reported technique is generic, works with an arbitrary number of frames, and can employ an arbitrary number of grey-levels.     

LCD投影系统光学引擎的计算机仿真分析

光学引擎是决定LCD投影系统色度、光度品质的核心部件之一。根据投影系统光学引擎的结构特点，结合色度学原理，利用光路追踪法编制了光学引擎的色度、光度仿真分析软件。仿真分析软件具有双向功能：对引擎的光学系统可进行色度光度计算，并可根据色度、光度指标优化光学引擎结构。将仿真与实际的光学引擎进行了对比实验，得到多组投影视场的色坐标对比数据，最后用软件优化了一个光学引擎，得到该引擎结构的优化数据。实验结果表明：该软件可提高光学引擎的设计效率。