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采用变焦液体透镜的共焦检测系统的设计与仿真 总被引:1,自引:0,他引:1
共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。 相似文献
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提出了一种基于斯托克斯(Stokes)参量测量的偏振共焦显微成像新方法。以斯托克斯参量、偏振度、相位差、方位角和椭率角等偏振参量作为成像物理量,通过系统集成方法将斯托克斯参量测量系统整合到共焦显微成像系统,通过共焦显微成像系统的显微物镜将激光聚焦到样品表面,而带有样品偏振信息的反射光进入斯托克斯参量测量系统进行偏振测量,把从斯托克斯参量测量系统中出射的4个斯托克斯光分别聚焦到4个点探测器进行光电探测,实现斯托克斯参量的共焦探测,同时获得同一物点的4个斯托克斯参量以及偏振度、相位差、方位角和椭率角等偏振参量。对样品进行二维扫描,获得不同物点的4个斯托克斯参量及其相关的偏振参量,利用计算机软件进行图像重建,从而获得样品的斯托克斯参量及其相关偏振参量的共焦显微图像。 相似文献
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针对复杂形貌样品微区化学成分难以表征的难题,研制了一套激光共焦诱导击穿光谱(LIBS)显微成像系统。该系统利用反射的连续激光构建高空间分辨的激光共焦显微系统,实现样品的精准定焦及三维形貌测量;利用共光路脉冲激光诱导激发等离子体光谱信号,实现样品微区全元素探测,进而实现具有高空间分辨、抗漂移特性的三维LIBS显微元素成像。实验表明,该系统可以实现横向分辨率为10μm的多元素图谱成像,系统光谱探测的合成不确定度为2.24%。该系统结合形貌信息和LIBS光谱信息实现三维图谱成像,为生物组织、微纳材料等复杂形貌样品的化学表征提供了新的有效途径。 相似文献
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激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。 相似文献
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《中国光学与应用光学文摘》2005,(2)
TH742.9 2005021541 扩展差动共焦显微系统量程范围的方法与措施=An ap- proach to expansion measurement range of heterodyne con- focal microscopy system[刊,中]/赵维谦(哈尔滨工业大学 超精密光电仪器工程研究所.黑龙江,哈尔滨(150001)), 邱丽荣…//光电子·激光.-2004,15(9).-1083-1087 为扩展差动共焦显微镜(HCMS)的测量量程范围,使 其满足三维微细结构和三维表面轮廓测量时的需求,基于 相似文献
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阶跃样品显微测量时,样品三维形貌本身丰富的阶跃信息极易受到噪声高频信号的干扰,如何在滤除噪声的同时保持三维形貌的阶跃特征,实现对样品表面三维形貌信息的高精度测量是一个重要研究问题。利用小波函数良好的空间域和频率域的局部化特性,针对阶跃型样品的特点选取Haar小波,并采用一种基于模平方的阈值处理方法对三维形貌信息小波去噪方法进行研究。将该方法应用在本课题组研制的激光差动共焦显微镜扫描台阶样品得到的三维高度轮廓中,去噪后测量样品高度与OLYMPUS共焦显微镜扫描结果相对比,误差为0.146 8 nm,满足三维形貌信息后续测量分析的要求,证明了算法的有效性。 相似文献
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激光干涉任意转角测量信号的获得及误差补偿技术 总被引:1,自引:0,他引:1
采用信号处理的方法对激光干涉测角系统的特性进行线性化处理,需要产生两路正交信号。采用空间互相垂直的两套干涉系统获得信号难免会使系统复杂、调整困难,因此提出了一种插值处理方法,可以利用测量得到的一路信号获得线性输出信号。输出信号的非线性误差较处理前大大减小了,但是无法满足高精度测量的要求。还提出了针对误差产生的原因进行的误差补偿技术。实验结果表明,提出的方法可以实现任意转角的高精度测量,光程差的测量误差小于±0 2μm,对应的转角测量误差为0 63″。 相似文献
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Camera calibration plays an important role in the field of machine vision applications. During the process of camera calibration, nonlinear optimization technique is crucial to obtain the best performance of camera parameters. Currently, the existing optimization method aims at minimizing the distance error between the detected image point and the calculated back-projected image point, based on 2D image pixels coordinate. However, the vision measurement process is conducted in 3D space while the optimization method generally adopted is carried out in 2D image plane. Moreover, the error criterion with respect to optimization and measurement is different. In other words, the equal pixel distance error in 2D image plane leads to diverse 3D metric distance error at different position before the camera. All the reasons mentioned above will cause accuracy decrease for 3D vision measurement. To solve the problem, a novel optimization method of camera parameters used for vision measurement is proposed. The presented method is devoted to minimizing the metric distance error between the calculated point and the real point in 3D measurement coordinate system. Comparatively, the initial camera parameters acquired through linear calibration are optimized through two different methods: one is the conventional method and the other is the novel method presented by this paper. Also, the calibration accuracy and measurement accuracy of the parameters obtained by the two methods are thoroughly analyzed and the choice of a suitable accuracy evaluation method is discussed. Simulative and real experiments to estimate the performance of the proposed method on test data are reported, and the results show that the proposed 3D optimization method is quite efficient to improve measurement accuracy compared with traditional method. It can meet the practical requirement of high precision in 3D vision metrology engineering. 相似文献
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宽光谱干涉显微术广泛应用于高精密检测领域,它测量样品形貌通常采用垂直扫描干涉术对亚微米至毫米级特征进行测量,以及相移干涉术对纳米级特征进行测量。其中,相移干涉术精度可达纳米级,但量程有限,高度变化对应的相位需限制在区间内。采用包裹相位展开算法可以扩展相移干涉术的量程,也仅适用于平滑表面,当高度起伏超出焦深或者光源相干长度的限定范围时,干涉条纹模糊或对比度丧失,所解算的结果将产生较大误差甚至错误。提出一种基于相位展开及拼接算法的高精度、大量程宽光谱干涉显微测量方法,以干涉条纹调制度量化条纹质量,条纹对比度高、成像清晰的区域对应调制度较高,定义当前焦面条纹调制度高于阈值的区域为理想区域,定义焦面条纹调制度低于阈值的区域为问题区域。以相位展开算法获得理想区域中的样品相位分布,问题区域的包裹相位不进行展开。使用微位移结构纵向移动物镜焦平面,选择合理的步长,使相邻焦面位置理想区域展开后的真实相位保持部分区域重合,根据重合区域的相位值均差可以实现不同焦面位置的高精度相位拼接,最终获得扩展量程的高精度真实相位结果,进而可以恢复样品完整的表面形貌分布。该算法通过对理想区域的筛选,避免了相位在问题区域展... 相似文献
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In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures. 相似文献
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Shih-Heng TungMing-Hsiang Shih 《Optics and Lasers in Engineering》2011,49(7):937-945
The traditional three-dimensional (3D) digital image measurement technique uses at least two images captured from different positions to determine the 3D coordinate of an object. One disadvantage of this method is that the mechanical and optical properties of the image capture devices are not fully identical, and the calibration procedure is quite complicated. This paper introduces a simplified 3D digital image correlation (DIC) method, in which only one image capture device is used. The theoretical measurement error equation is derived and experimentally verified. Experimental results show that distortion correction plays an important role in the improvement of measurement precision. After a radial distortion correction, the measurement precision of the object distance can reach 0.0043%. The optimal camera spacing should be set from 1/50 to 1/30 of the object distance, to obtain a satisfactory precision. 相似文献
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本文采用远场光斑法和光强法测量了石英单模光纤的数值孔径.实验结果表明,由光纤耦合条件不同导致的光斑形状变化,对数值孔径的测量影响不大,单模光纤的纤芯直径小,导致出射光存在较强的衍射现象,对数值孔径的测量造成较大的影响,无论采用光斑法还是光强法,需以衍射第1次极大为计算标准,尽量选择光斑中心为亮斑时测量其数值孔径.此外,... 相似文献