L10-ordered high coercivity (FePt)Ag-C granular thin films for perpendicular recording

We report (FePt)Ag-C granular thin films for potential applications to ultrahigh density perpendicular recording media, that were processed by co-sputtering FePt, Ag, and C targets on MgO underlayer deposited on thermally oxidized Si substrates. (FePt)_1−xAg_x-yvol%C (0<x<0.2, 0<y<50) films were fabricated on oxidized silicon substrates with a 10 nm MgO interlayer at 450^oC. We found that the Ag additions improved the L1₀ ordering and the granular structure of the FePt-C films with the perpendicular coercivity ranging from 26 to 37 kOe for the particle size of 5-8 nm. The (FePt)_0.9Ag_0.1-50vol%C film showed the optimal magnetic properties as well as an appropriate granular morphology for recording media, i.e., average grain size of D_av=6.1 nm with the standard deviation of 1.8 nm.     

Microstructure and magnetic properties of nanocomposite FePt/MgO and FePt/Ag films

An in-plane magnetic anisotropy of FePt film is obtained in the MgO 5 nm/FePt t nm/MgO 5 nm films (where t=5, 10 and 20 nm). Both the in-plane coercivity (H_c∥) and the perpendicular magnetic anisotropy of FePt films are increased when introducing an Ag-capped layer instead of MgO-capped layer. An in-plane coercivity is 3154 Oe for the MgO 5 nm/FePt 10 nm/MgO 5 nm film, and it can be increased to 4846 Oe as a 5 nm Ag-capped layer instead of MgO-capped layer. The transmission electron microscopy (TEM)-energy disperse spectrum (EDS) analysis shows that the Ag mainly distributed at the grain boundary of FePt, that leads the increase of the grain boundary energy, which will enhance coercivity and perpendicular magnetic anisotropy of FePt film.     

Effect of annealing in an external magnetic field on the microstructure and magnetic properties of the Fe/FePt/Pt multilayer system

The effect of annealing in an external magnetic field applied perpendicular to the plane of the film on the kinetics of Ll ₀ phase transformation of the microstructure and the magnetic properties of the Fe(2 nm)/FePt(20 nm)/Pt(2 nm) multilayer system has been investigated. The relations between the hysteresis loop shape, magnetic correlation length, and structural disorders, which are characteristic of magnetic information carriers, have been analyzed. It has been found that the annealing of the Fe(2 nm)/FePt(20 nm)/Pt(2 nm) multilayer system at a temperature of 470°C in an external magnetic field of 3500 Oe, which is applied perpendicular to the film plane, leads to the formation of a face-centered tetragonal structure of the Ll ₀ phase in the FePt film, which is characterized by the high coercivity H _c , the (001) preferred texture, the magnetic anisotropy perpendicular to the film plane, small sizes of FePt grains in the film, and weak exchange coupling between the particles. The energy of the external magnetic field encourages the process of transformation of the FePt film into the Ll ₀ phase. Thus, a method has been developed for fabricating multilayer films based on the FePt Ll ₀ phase with the parameters necessary for information carrier materials with perpendicular-type magnetic recording.     

Effect of magnetic field annealing on microstructure and magnetic properties of FePt films

FePt (20 nm) films were annealed in a magnetic field (along the normal direction of the films) at a temperature around the Curie temperature of L1₀ FePt. The influence of magnetic filed annealing on texture and magnetic properties of FePt films were investigated. The results indicate that preferential (0 0 1) orientation and perpendicular anisotropy can be obtained in L1₀ FePt films by using magnetic field annealing around the Curie temperature of L1₀ FePt. This is one of the potential methods to obtain (0 0 1) orientation and thus to improve the perpendicular anisotropy in FePt films.     

Optimization of perpendicular magnetic anisotropy tips for high resolution magnetic force microscopy by micromagnetic simulations

Magnetic Force Microscopy (MFM) tip coated with perpendicular magnetic anisotropy film (PMA tip) is one of the choices for high resolution imaging at low scan height (SH), since it has negligible tip–sample interaction related to its stable magnetic state, sharp, and small tip stray field. In this work, detailed micromagnetic studies are carried out to understand the effect of geometrical and magnetic parameters including the cone angle θ of the PMA tip, intergrain exchange constant $A_{2}^{*}$ , saturation magnetization M _s and uniaxial crystalline anisotropy constant K ₁ of the tip coating on the MFM tip resolution. To evaluate the resolution performance of the optimized PMA tip, MFM images of high-density granular recording media and patterned media are simulated. We find that, for the PMA tip and its coating, a cone angle in a range of 36.9^° to 53.1^°, a saturation M _s of 700 emu/cm³, a large uniaxial crystalline anisotropy constant K ₁ (>4.9×10⁶ erg/cm³) and a high intergrain exchange constant $A_{2}^{*}$ of (0.3–1.0)×10^?6 erg/cm are optimized conditions for high resolution imaging. The optimized PMA tip has an excellent performance on imaging of high-density thin film media (bit size of 8×16 nm²) at low SH of 2–8 nm and bit pattern media with a pitch of 50 nm, edge-edge spacing of 5–15 nm at SH of 8–15 nm.     

Very high coercivities of top-layer diffusion Au/FePt thin films

The Au/FePt samples were prepared by depositing a gold cap layer at room temperature onto a fully ordered FePt layer, followed by an annealing at 800 °C for the purpose of interlayer diffusion. After the deposition of the gold layer and the high-temperature annealing, the gold atoms do not dissolve into the FePt Ll₀ lattice. Compared with the continuous FePt film, the TEM photos of the bilayer Au(60 nm)/FePt(60 nm) show a granular structure with FePt particles embedded in Au matrix. The coercivity of Au(60 nm)/FePt(60 nm) sample is 23.5 kOe, which is 85% larger than that of the FePt film without Au top layer. The enhancement in coercivity can be attributed to the formation of isolated structure of FePt ordered phase.     

磁控溅射方法制备垂直取向FePt/BN颗粒膜

用磁控溅射在热单晶MgO(100)基片上制备了［FePt/BN］多层膜，经真空热处理后，得到具有垂直取向L1₀-FePt/BN颗粒膜.X射线衍射结果和磁性测量的结果表明，［FePt(2nm)/BN(0.5nm)］₁₀和［FePt(1nm)/BN(0.25nm)］₂₀多层膜经700℃热处理1h后，均具有较好的(001)取向.［FePt(1nm)/BN(0.25nm)］₂₀垂直矫顽力达到522kA/m，剩磁比达到0.99，开关场分布S达到0.94，FePt晶粒平均尺寸约15—20nm，适合用于将来超高密度的垂直磁记录介质. 关键词： 磁控溅射 垂直磁记录 0-FePt/BN纳米颗粒膜')" href="#">L1₀-FePt/BN纳米颗粒膜     

Reactive ion etching of FePt using inductively coupled plasma

We propose a reactive ion etching (RIE) process of an L1₀-FePt film which is expected as one of the promising materials for the perpendicular magnetic recording media. The etching was carried out using an inductively coupled plasma (ICP) RIE system and an etching gas combination of CH₄/O₂/NH₃ was employed. The L1₀-FePt films were deposited on (1 0 0)-oriented MgO substrates using a magnetron sputtering system. The etching masks of Ti were patterned on the FePt films lithographically. The etch rates of ∼16 and ∼0 nm/min were obtained for the FePt film and the Ti mask, respectively. The atomic force microscopy (AFM) analyses provided the average roughness (R_a) value of 0.95 nm for the etched FePt surface, that is, a very flat etched surface was obtained. Those results show that the highly selective RIE process of L1₀-FePt was successfully realized in the present study.     

Nanocomposite L10 FePt–SiNx and FePt–SiNx–C films with large coercivity and small grain size on a TiN intermediate layer

FePt–SiN_x–C films with high coercivity, (001) texture and small grain size were obtained by co-sputtering FePt, Si₃N₄ and C on TiN/CrRu/glass substrate at 380 °C. Without C doping, FePt–SiN_x films with good perpendicular anisotropy and a single layer structure were obtained. However, the grain size was still too large and the grain isolation was poor. When C was doped into the FePt–SiN_x films, the out-of-plane coercivity increased due to the decrease of the exchange coupling. In addition, the grain size of the FePt films decreased, and well-separated FePt grains with uniform size were formed. The microstructure of [FePt–SiN_x 40 vol%]−20 vol% C films changed from a single layer structure to a multiple layer structure when the FePt thickness was increased from 4 to 10 nm. By optimizing the sputtering process, the [FePt (4 nm)–SiN_x 40 vol%]−20 vol% C (001) film with coercivity higher than 21.5 kOe, a single layer structure, and small average FePt grain size of 5.6 nm was obtained, which makes it suitable for ultrahigh density perpendicular recording.     

Use of film thickness and Cu additive to improve (0 0 1) texture in MgO/FePtCu(C) bilayers

A multilayer structure has been proposed that demonstrates improved (0 0 1) texture for FePt-based L1₀ perpendicular media. Achieving a strong perpendicular magnetic anisotropy requires aligning the L1₀ crystallographic c-axis along the film normal. The ordered L1₀ FePt structure is tetragonal with a c/a ratio close to 0.965. This makes discriminating between the three crystallographic variants ([1 0 0], [0 1 0], and the desired [0 0 1]) difficult. Alloying FePt with Cu to reduce the c/a ratio and using a multilayer approach to keep the magnetic layers thin results in a structure with an adjustable M_rt and a strong (0 0 1) texture (rocking curve widths around 2°). This is a remarkable improvement in texture from pure FePt multilayered films or monolithic FePt(X) films. The proposed [MgO(2 nm)/Fe_50−xPt₅₀Cu_x(5 nm)]_×n structure limits grain size in the vertical (perpendicular) direction albeit not in the plane of the film. Carbon can be added to the FePtCu layer to reduce the grain size with minimal degradation of the (0 0 1) orientation.     

The role of short exchange length in the magnetization processes of L10-ordered FePt perpendicular media

A three-dimensional micromagnetic model with non-uniform grain size distribution has been built up to study the magnetization process in FePt L1₀ perpendicular media. A 3D model of a single FePt magnetic grain is also set up for comparison. The high magneto-crystalline anisotropy K_u results in a short exchange length l_ex in FePt nanograins. Therefore a magnetic grain is divided into smaller grids on the order of l_ex. The simulated perpendicular and longitudinal loops are consistent with experiments, and it is explained why the measured perpendicular H_c is relatively smaller compared with the saturation field of the longitudinal loop in the FePt perpendicular medium.     

垂直取向FePt/Ag纳米颗粒薄膜的结构和磁性

用磁控溅射法在单晶MgO(100)基片上制备了［FePt 2 nm/Ag dnm］₁₀多层膜， 经真空热处理后，得到具有高矫顽力的垂直取向L1₀-FePt/Ag颗粒膜.x射线衍射结 果表明，在250 ℃的热基片上溅射，当Ag层厚度d=3—11 nm时，FePt颗粒具有很好的［001］取向，随着Ag层厚度的增加，FePt颗粒尺寸减小.［FePt 2 nm/Ag 9 nm］₁₀经过6 00 ℃真空热处理15 min后，颗粒大小仅约8 nm，垂直矫顽力达到692 kA/m.这种无磁耦合作用的颗粒膜，适合用作超高密度的垂直磁记录介质. 关键词： 磁控溅射 垂直磁记录 纳米颗粒膜 0-FePt/Ag')" href="#">L1₀-FePt/Ag     

Low-temperature deposition of L10 FePt films for ultra-high density magnetic recording

A method based on strain-induced phase transformation was used to lower the ordering temperature of FePt films. The strain resulted from the lattice mismatch between the FePt film and the substrate or underlayer favored the ordering. The relationships between the lattice mismatch, the ordering of FePt film, and the corresponding magnetic anisotropic constant were investigated. A critical lattice mismatch near 6.33% was believed to be most suitable for improving the chemical ordering of the FePt films. CrX (X=Ru, Mo, W, Ti) alloys with (2 0 0) texture was used to control the easy axis and ordering temperature of FePt films on glass substrate. Large uniaxial anisotropy constant K_u?1×10⁷ erg/cm³, good magnetic squareness (∼1) and FePt(0 0 1) texture (rocking curve −5°) were obtained at the temperature T_s?250 °C when using CrRu underlayer. The diffusion from overlying layers of Ag and Cu and an inserted Ag pinning layer were effective in reducing the exchange decoupling and changing the magnetization reversal. The media noise was effectively reduced and the SNR was remarkably enhanced when a 2 nm Ag was inserted.     

L1_0-FePt合金单层磁性薄膜的微磁学模拟

具有四方结构的L10-FePt合金因其具有高磁晶各向异性和良好的化学稳定性而成为超高密度薄膜磁记录介质的最佳选择.对实验制备得到的磁性能良好的垂直取向L10-FePt合金单层膜进行了微磁学分析.在传统微磁学模型的基础上,根据晶体的对称性,引入了四角磁晶各向异性能密度的唯象表达形式;又依据薄膜生长过程中晶格对称性的破坏,考虑了薄膜面内的应力,并引入了磁弹性能.以四角磁晶各向异性能和磁弹性能为重点,对L10-FePt合金单层膜的磁滞回线进行了详细的分析,并且用微磁学方法确定了薄膜面内应力的大小.     

Micromagnetic study of effect of tip-coating microstructure on the resolution of magnetic force microscopy

The properties of a magnetic force microscopy (MFM) tip are very important for high-resolution magnetic imaging. In this work, micromagnetic models of tips are set up to study the effect of tip-coating microstructure, especially the randomness of anisotropy on tip edge and tip end, on the resolution of MFM. The effective coating height and the resolution potential of tips with various microstructures and magnetic properties have been characterized by investigating the obtained signals from high-density continuous granular thin film disk media with a bit size of 8×16 nm² and bit-patterned media with a pattern period p of 50 nm. The magnetic moment distribution at the tip end should be perpendicular to the sample to realize a ‘magnetically sharp’ tip, which explains further the improved resolution in the recent experimental reports. Tips with well-controlled grain structure and magnetic anisotropy of coating materials can be applied to both high-density thin film disk media and bit-patterned media.     

Understanding magnetic properties of arrays of small FePt dots with perpendicular anisotropy

FePt dot arrays with dot size down to 15 nm are fabricated by film annealing and patterning. The array coercivity shows an increase with dot size decreasing from 100 to 30 nm, and a slight reduction for the 15 nm dot sample. Annealing these dot arrays at higher temperatures results in large enhancements in the coercivities, except the 15 nm dot array where the coercivity increases a little. Micromagnetic models of a 15 nm FePt dot with uniform and nonuniform edges of soft magnetic defects and with inside defects are calculated to reveal the microstructure origins of the dot magnetic properties. It is found that the volume fraction of the L1₀-phase FePt with perpendicular c-axis orientation is about 50% in the dot and the switching field distribution of the dot array can be influenced significantly by the defect arrangement in the dots.     

Microstructural and magnetic studies of L10 FePt–SiO2 nano-composite thin film with columnar structure for perpendicular magnetic recording

(Fe₅₀Pt₅₀)_100−x-(SiO₂)_x films (x=0–30 vol%) were grown on a textured Pt(0 0 1)/CrRu(0 0 2) bilayer at 420 °C using glass substrates. FePt(0 0 1) preferred orientation was obtained in the films. Interconnected microstructure with an average grain size of about 30 nm is observed in the binary FePt film. As SiO₂ is incorporated, it precipitates as particles are dispersed at FePt grain boundaries. When the content of SiO₂ is increased to 13 vol%, columnar FePt with (0 0 1) texture separated by SiO₂ is attained. The FePt columns have a length/radius ratio of 2:1. Additionally, the mean grain size is reduced to about 13 nm. The development of this well-isolated columnar structure leads to an enhancement in coercivity by about 44% from 210 to 315 kA/m. As the SiO₂ content exceeds 20 vol%, a significant ordering reduction is found accompanied by a transformation of preferred orientation from (0 0 1) to (2 0 0) and the columnar structure disappears, resulting in a drastic degradation in magnetism. The results of our study suggest that isolated columnar, grain refined, (0 0 1)-textured FePt film can be achieved via the fine control of SiO₂ content. This may provide useful information for the design of FePt perpendicular recording media.     

Magnetic anisotropy axis reorientation at ultrathin FePt films

Ultrathin FePt films (thickness between 1 nm and 5 nm) were studied for non‐volatile memories applications. The films were magnetron sputtered on monocrystalline MgO?001? substrates at 500 °C. The films are polycrystalline, except the 1 nm thick film which is not continuous. It is shown that films with thickness higher than 2.7 nm have L1₀ structure and perpendicular magnetic anisotropy, while a transition to in‐plane anisotropy occurs for thinner films. The out‐of‐plane coercivity drops from 16 kOe at the thicker film to 0.5 kOe at the thinner one.

Hysteresis cycles of FePt films as a function of film thickness.     

Improvement of magnetic properties and read/write characteristics in SmCo5 perpendicular thin films

An SmCo₅ alloy is a promising candidate for ultra-high density magnetic recording media because of its strong uniaxial magnetocrystalline anisotropy, whose constant, K_u, is more than 1.1×10⁸ erg/cm³. Recently, we successfully obtained high perpendicular magnetic anisotropy for a sputter-deposited SmCo₅ thin film by introducing a Cu/Ti dual underlayer. However, it is necessary to improve magnetic properties and read/write (R/W) characteristics for applying SmCo₅ thin films to perpendicular magnetic recording media. In this study, we focused on reduction of magnetic domain size and change of a magnetization reversal process of SmCo₅ perpendicular magnetic thin films by introducing carbon (C) atoms into the constituent Cu underlayer. The magnetic domain size became small and the ratio of coercivity (H_c) against magnetic anisotropy (H_k) which is an index of the magnetization reversal process was increased by adding C atoms. We also evaluated the R/W characteristics of SmCo₅ double-layered media including C atoms. The medium noise was decreased and signal-to-noise ratio increased by introducing the C. The addition of C into the Cu underlayer is effective for changing the magnetization reversal process, reducing medium noise and increasing SNR.     

Granular L10 FePt (0 0 1) thin films for Heat Assisted Magnetic Recording

Granular L1₀ FePt (0 0 1) thin films were deposited on a Si substrate with Ta/MgO underlayers by rf sputtering. The effects of in-situ heating temperatures (350-575 °C), pressures (2-40 mTorr), and sputtering powers (15-75 W) on texture and microstructure were investigated for the FePt films. We obtained films with grain densities approaching 50 teragrains per in.², grains sizes down to 2.2 nm with center-to-center spacing of 4.2 nm and coercivity of 24 kOe. The order parameters for the L1₀ FePt thin films were derived and calculated to be as high as 0.91. Although the grain size is small, the spacing between grains is too large for practical heat assisted magnetic recording media. To reach the desired results, we propose that layer-by-layer growth should be promoted in the FePt layer by inserting another underlayer that provides a better lattice match to L1₀ FePt.