Optimization of a schottky barrier mixer diode in the submillimeter wave region

We have designed a mixer Schottky barrier diode (SBD) for use in the submillimeter wave region with a structure optimized for minimum noise temperature. The dependence of mixer noise temperature upon thickness and doping density of the epitaxial layer and diode diameter of SBDs was simulated within the framework of existing theories. Special care was taken to formulate the SBD current-voltage and capacitance-voltage relations in a way that correctly describes the behavior of real SBDs.     

60Co γ-射线辐照对肖特基二极管1/f噪声的影响

在肖特基二极管(Schottky barrier diode,SBD)辐照损伤机理和总剂量效应分析的基础上,利用1/f噪声的迁移率涨落和载流子数涨落模型,深入研究辐照损伤对器件1/f噪声的影响. 研究结果表明,辐照诱生新的界面态,改变界面态密度分布,进而调制了肖特基势垒高度,增大表面复合速度是引起器件性能退化主要原因,也是1/f噪声剧烈增加的主要原因. 正因为如此,噪声与器件退化存在相关性,即噪声拟合参数B越大,偏离标准值越多,器件可靠性越差,抗辐照 关键词： 肖特基二极管 f噪声')" href="#">1/f噪声 60Co γ射线')" href="#">⁶⁰Co γ射线 界面态     

静电放电对功率肖特基二极管I-V及低频噪声特性的影响

本文基于人体放电模型分别对肖特基势垒二极管的阴极和阳极进行同一电压脉冲下的多次放电, 利用热电子发射理论、1/f噪声的迁移率涨落模型和白噪声理论, 分别深入研究静电放电损伤对器件I-V和低频噪声的影响. 结果表明, 静电放电作用于肖特基二极管阴极时损伤更严重, 噪声参量变化率更大. 随着放电次数的增加, 正向特性无变化, 反向电流总体增大, 偶有减小; 而正向和反向 1/f噪声均增大. 鉴于噪声与应力条件下器件内部产生的缺陷与损伤有关, 且更敏感, 故可将低频噪声特性用作肖特基二极管的静电放电损伤灵敏表征工具.     

Study of the Correlation between Low-Frequency Noise and the Current-Voltage Characteristic of a GaAs Schottky-Barrier Diode

Correlation between low-frequency (1/f) noise and the current-voltage (I-V) characteristic of a beam-lead GaAs Schottky-barrier diode (SBD) is studied. It is shown that the ideality factor n of the I-V characteristic (and its increase) in the current range 10^-4-10^-3 A has the maximum correlation (the correlation coefficient k_cor>0.9) with low-frequenvy noise measured at the same currents at frequencies 8-10 KHz, i.e., n is most sensitive to the series resistance of an SBD. At the same time, the values of n in the 10^-6-10^-5 A range usually do not exceed 1.1 and do not show correlation with low-frequency noise. The correlation is explained predominantly by the barrier-height nonuniformity over the Schottky-barrier contact.     

High frequency doubling efficiency THz GaAs Schottky barrier diode based on inverted trapezoidal epitaxial cross-section structure

A high-performance terahertz Schottky barrier diode (SBD) with an inverted trapezoidal epitaxial cross-sectional structure featuring high varactor characteristics and reverse breakdown characteristics is reported in this paper. Inductively coupled plasma dry etching and dissolution wet etching are used to define the profile of the epitaxial layer, by which the voltage-dependent variation trend of the thickness of the metal-semiconductor contact depletion layer is modified. The simulation of the inverted trapezoidal epitaxial cross-section SBD is also conducted to explain the physical mechanism of the electric field and space charge region area. Compared with the normal structure, the grading coefficient M increases from 0.47 to 0.52, and the capacitance modulation ratio (C_max/C_min) increases from 6.70 to 7.61. The inverted trapezoidal epitaxial cross-section structure is a promising approach to improve the variable-capacity ratio by eliminating the accumulation of charge at the Schottky electrode edge. A 190 GHz frequency doubler based on the inverted trapezoidal epitaxial cross-section SBD also shows a doubling efficiency of 35% compared to that 30% of a normal SBD.     

Experimental investigation of Schottky barrier diodes as nonlinear elements in 800-nm-wavelength region

We report the results of experimental investigations of nonlinear properties of InP, GaAs and InGaAs Schottky barrier diodes (SBD) in the near-infrared range (800 nm). The results of our previous and present work show that SBD have a unique broadband spectral sensitivity (from the millimeter to the visible range). As video detectors the GaAs-SBD proved to be the most sensitive among the other diodes, but they concede to the InP-SBD as frequency mixer–multipliers in spite of their higher cut-off frequency. The higher efficiency of the InP-SBD in a mixer–multiplier mode is supposedly connected with the bulk nonlinearity properties of indium phosphide, lower noise and lower time constants, characterizing the charge-carrier energy growth in an electric field and its relaxation. We found that the optimal operation conditions for SBD suppose not only the optimal electric regime (applying a defined bias or a defined radiation source power) but also the optimal mutual orientation of a laser radiation polarization, a contacting wire (playing the role of an antenna) and a laser beam. PACS 07.57.Kp; 42.65.Ky; 42.79.Nv     

GaN基肖特基势垒二极管结构优化研究进展

作为宽禁带半导体器件,GaN基肖特基势垒二极管(SBD)有耐高压、耐高温、导通电阻小等优良特性,这使得它在电力电子等领域有广泛应用。本文首先综述了SBD发展要解决的问题;然后,介绍了GaN SBD结构、工作原理及结构优化研究进展;接下来,总结了AlGaN/GaN SBD结构、工作原理及结构优化研究进展,并着重从AlGaN/GaN SBD的外延片结构、肖特基电极结构以及边缘终端结构等角度,阐述了这些结构的优化对AlGaN/GaN SBD性能的影响;最后,对器件进一步的发展方向进行了展望。     

Low-noise millimeter- and submillimeter-wave receivers

A review of the current state in the development of receivers with an extremely low noise level in the short-wave part of the millimeter (mm) and submillimeter (submm)-wave bands is presented. A superheterodyne with a mixer at the input remains the main type of such receivers. The mixers using superconductor-insulator-superconductor (SIS) tunnel contacts and having noise temperatures very close to the quantum limit dominate at frequencies of up to ~1 THz. At the higher frequencies, the best results were obtained with hot-electron bolometers as mixers where the strong dependence of the semiconductor resistance on the temperature T_c is employed. Examples of the SIS receivers and cooled Schottky-barrier diode (SBD) receivers developed at the Institute of Applied Physics of the Russian Academy of Sciences are slightly inferior to SIS receivers in noise temperature but are useful for many applications. The prospects of low-noise reception in the mm and submm-wave bands, in particular the prospects of using integrated receivers and multipath systems, are discussed. Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 41, No. 11, pp. 1424–1447, November, 1998.     

具有部分超结的新型SiC SBD特性分析

提出了一种具有部分超结（super junction, SJ）结构的新型SiC肖特基二极管,命名为SiC Semi-SJ-SBD结构,通过将常规SBD耐压区分为常规耐压区和超结耐压区来减小导通电阻,改善正向特性.利用二维器件模拟软件MEDICI仿真分析,研究了不同超结深度和厚度时击穿电压(V_B)和比导通电阻(R_on-sp),与常规结构的SBD比较得出,半超结结构可以明显改善SiC肖特基二极管特性,并得到优化的设计方案,选择超结宽度2< 关键词： SiC肖特基二极管 super junction 导通电阻 击穿电压     

Series resistance calculation for the Metal-Insulator-Semiconductor Schottky barrier diodes

An accurate way of determining the series resistance R_s of Schottky Barrier Diodes (SBDs) with and without the interfacial oxide layer using forward current-voltage (I–V) characteristics is discussed both theoretically and experimentally by taking into account the applied voltage drop across the interfacial layerV _i. For the experimental discussion, the forward biasI–V characteristics of the SBDs with and without the oxide layer fabricated by LEC (the Liquid-Encapsulated Czochralski) GaAs were performed. The SBD without the oxide layer was fabricated to confirm a novel calculation method. For the theoretical discussion, an expression ofV _i was obtained by considering effects of the layer thickness and the interface state density parameters on forward biasI–V of the SBDs. The valueR _s of the SBD with interfacial oxide layer was seen to be larger than that of the SBD without the interfacial oxide layer due to contribution of this layer to the series resistance. According to the obtained theoretical formula, the value ofV _i for the SBD with the oxide layer was calculated and it was subtracted from the applied voltage values V and then the value ofR _s was recalculated. Thus, it has been shown that this new value ofR _s is in much closer agreement with that determined for the SBD without the oxide layer as predicted. Furthermore, the curves of the interface states energy distribution of each sample are determined. It was concluded that the shape of the density distribution curve and order of magnitude of the density of the interface states in the considered energy range are in close agreement with those obtained by others for Au/n-GaAs Schottky diodes by Schottky capacitance spectroscopy.     

High energy electron radiation effect on Ni and Ti/4H-SiCSchottky barrier diode at room temperature

This paper reports that Ni and Ti/4H-SiC Schottky barrier diodes (SBDs) were fabricated and irradiated with 1~MeV electrons up to a dose of 3.43×10¹⁴~e/cm². After radiation, the Schottky barrier height φ _B of the Ni/4H-SiC SBD increased from 1.20~eV to 1.21~eV, but decreased from 0.95~eV to 0.94~eV for the Ti/4H-SiC SBD. The degradation of φ _B could be explained by interface states of changed Schottky contacts. The on-state resistance R_S of both diodes increased with the dose, which can be ascribed to the radiation defects. The reverse current of the Ni/4H-SiC SBD slightly increased, but for the Ti/4H-SiC SBD it basically remained the same. At room temperature, φ _B of the diodes recovered completely after one week, and the R_S partly recovered.     

Investigation of the structural and electrical properties of air-annealed ruthenium thin films on 6H–SiC at different temperatures

Ruthenium (Ru) Schottky contacts and thin films on n-type 6H–SiC were fabricated and characterised by physical and electrical methods. The characterisation was done after annealing the samples in air at various temperatures. Rutherford backscattering spectroscopy (RBS) analysis of the thin films indicated the oxidation of Ru after annealing at a temperature of 400 °C, and interdiffusion of Ru and Si at the Ru–6H–SiC interface at 500 °C. XRD analysis of the thin films indicated the formation of RuO₂ and RuSi in Ru–6H–SiC after annealing at a temperature of 600 °C. The formation of the oxide was also corroborated by Raman spectroscopy. The ideality factor of the Schottky barrier diodes (SBD) was seen to generally decrease with annealing temperature. The series resistance increased astronomically after annealing at 700 °C, which was an indication that the SBD had broken down. The failure mechanism of the SBD is attributed to deep inter-diffusions of Ru and Si at the Ru–6H–SiC interface as evidenced by the RBS of the thin films.     

ZnO薄膜肖特基二极管的研制

采用直流反应磁控溅射的方法,在Al/Si(100)衬底上沉积了ZnO晶体薄膜.利用Al和Pt作为与ZnO接触的欧姆电极与肖特基电极,制作了ZnO薄膜肖特基二极管.X射线衍射测试结果表明ZnO薄膜具有高度的c轴择优取向.原子力显微分析表明:样品表面光洁平整,晶粒尺寸约100nm,扩展电阻分析表明ZnO薄膜的厚度为0.4μm,载流子浓度为1.8×1015 cm-3,此后的霍尔测试证实了这一结果并说明ZnO的导电类型为n型.室温下的I-V测试显示ZnO肖特基二极管具有明显的整流特性.Pt与n型ZnO接触的势垒高度为0.54eV.文中的ZnO肖特基二极管为首次研制的原型器件,其性能可以通过器件结构与制作工艺的进一步优化而得到改善.     

Degradation of β-Ga_2O_3 Schottky barrier diode under swift heavy ion irradiation

The electrical characteristics and microstructures of β-Ga_2 O_3 Schottky barrier diode(SBD) devices irradiated with swift heavy ions(2096 Me V Ta ions) have been studied. It was found that β-Ga_2 O_3 SBD devices showed the reliability degradation after irradiation, including turn-on voltage Von, on-resistance Ron, ideality factor n, and the reverse leakage current density Jr. In addition, the carrier concentration of the drift layer was decreased significantly and the calculated carrier removal rates were 5 × 10~6–1.3 × 10~7 cm~(-1). Latent tracks induced by swift heavy ions were observed visually in the whole β-Ga_2 O_3 matrix. Furthermore, crystal structure of tracks was amorphized completely. The latent tracks induced by Ta ions bombardments were found to be the reason for the decrease in carrier mobility and carrier concentration. Eventually,these defects caused the degradation of electrical characteristics of the devices. In terms of the carrier removal rates, theβ-Ga_2 O_3 SBD devices were more sensitive to swift heavy ions irradiation than Si C and Ga N devices.     

0.34 THz无线通信收发前端

描述了一种基于肖特基二极管技术的0.34 THz无线通信收发前端。该前端采用超外差结构,由0.34 THz谐波混频器、0.17 THz本振8倍频链和偏置电路组成。0.34 THz谐波混频器基于反向并联肖特基二极管,可以实现信号的上变频发射和下变频低噪声检测。0.17 THz本振8倍频链由三级二倍频及驱动放大链路组成,可将20~22.5 GHz信号倍频至0.16~0.18 THz,为混频器提供5~10 dBm左右的本振信号。实验测试结果表明:该前端用于信号发射时,在0.34 THz频点的饱和输出功率为-14.58 dBm;用于信号检测时,最低单边带(SSB)变频损耗为10.0 dB,3 dB中频带宽约30 GHz。限于测试条件,未能测试前端接收噪声温度,仿真得到的双边带噪声温度数值低于1000 K。在该前端基础上,完成了首次基于16QAM 数字调制体制的0.34 THz无线通信实验,传输速率达3 Gb/s。     

Lateral β-Ga2O3 Schottky barrier diode fabricated on (-201) single crystal substrate and its temperature-dependent current-voltage characteristics

Lateral β-Ga₂O₃ Schottky barrier diodes (SBDs) each are fabricated on an unintentionally doped (-201) n-type β-Ga₂O₃ single crystal substrate by designing L-shaped electrodes. By introducing sidewall electrodes on both sides of the conductive channel, the SBD demonstrates a high current density of 223 mA/mm and low specific on-resistance of 4.7 mΩ ·cm². Temperature-dependent performance is studied and the Schottky barrier height is extracted to be in a range between 1.3 eV and 1.35 eV at temperatures ranging from 20 ℃ to 150 ℃. These results suggest that the lateral β-Ga₂O₃ SBD has a tremendous potential for future power electronic applications.     

氮化镓基蓝光发光二极管伽马辐照的1/f噪声表征

通过电离辐照对氮化镓基蓝光发光二极管器件有源区光/暗电流产生机制的研究, 建立了电离辐照减小发光二极管有效输出功率电学模型.通过电离辐照对氮化镓基蓝光发光 二极管器件有源区1/f噪声影响机制的研究, 建立了电离辐照增大发光二极管1/f噪声的相关性模型.在I < 1 μA 的小注入区,空间电荷区的复合电流随辐照剂量的增加而增加. 同时, 随着电离辐照产生缺陷的增加, 1/f噪声幅度增大. 在 I> 1 mA 的大注入条件下, 由于串联电阻的影响占主导地位,表面复合速率和电流随辐照剂量的增加而增加.同时, 随着电离辐照产生缺陷的增加, 1/f噪声幅度增大.根据辐照前后电流电压试验结果噪声测试结论, 证实了实验结论与理论推导结果的一致性. 在1 μA < I < 5×10^-5 A 的中值电流情况下, 由于高能载流子散射相关的迁移率涨落与辐照新增缺陷引起的载流子数涨落竞争机制, 随着辐照剂量增大, 1/f噪声在频域变化没有明显规律. 但是, 通过1/f噪声时域多尺度熵复杂度分析方法, 得出随着辐照剂量增大, 1/f噪声时域多尺度熵复杂度的结果. 最终证实1/f噪声幅度可以敏感地反映小注入和大注入情况下氮化镓基蓝光发光二极管电离辐照的可靠性. 噪声幅值越大, 则说明辐照感应N_it越高, 暗电流相关的复合电流越大, 光电流相关的扩散电流比例减少, 使得器件发光效率、光输出功率等性能参数下降, 继而影响器件可靠性, 造成失效率显著增大. 1/f噪声时域多尺度熵复杂度可以敏感地反映中值电流情况下氮 化镓基蓝光发光二极管的电离辐照可靠性.多尺度熵复杂度越大, 则说明辐照感应越多, 复合电流越大,器件可靠性越差.本文结论提供了一种基于 1/f噪声的氮化镓基蓝光发光二极管电离辐照可靠性表征方法. 关键词： f噪声')" href="#">1/f噪声 电离辐照 氮化镓基蓝光发光二极管     

Swift heavy ion induced capacitance and dielectric properties of Ni/n-GaAs Schottky diode

The in-situ capacitance and dielectric properties of 25 MeV C⁴⁺ ion irradiated Ni/n-GaAs Schottky barrier diode (SBD) were studied at 100 kHz in the fluence range 5 × 10¹⁰ – 5 × 10¹³ ions/cm². The investigation shows reduction in capacitance and charge density with increase in ion fluence. Consequent changes were observed in other related parameters like conductance, dielectric constant, dielectric loss, loss tangent and electrical modulus. The results were interpreted in terms of generation of swift heavy ion induced acceptor trap states by electronic energy loss mechanism. Besides, the switch over characteristics of depletion to inversion regions in the CV plot reveals minority carrier recombination centers also. The dispersion and relaxation peaks observed in bias dependent dielectric plots were ascribed to the polarization and relaxation mechanism due to the interfacial trap states. The traps and recombination centers were found to alter the barrier characteristics of the fabricated SBD depending upon the ion fluence.     

基于Ritz-Galerkin方法的太赫兹二极管检波器非线性分析

肖特基二极管检波器是太赫兹ASK/OOK通信系统的关键器件之一, 为了更好地分析肖特基二极管检波器的非线性特性, 从检波器的电路模型出发, 基于Ritz-Galerkin方法, 建立了检波器非线性特性的理论分析模型。并利用模型对检波器输出信号强度和灵敏度作了理论预测, 表明该理论模型能够精确预测检波器的非线性特性。最后利用该理论模型研究了输入信号强度、负载阻抗和外界温度对0.34 THz肖特基二极管检波器非线性特性的影响。结果表明随着功率的增加, 检波器由平方率区渐变至线性区只在特定条件下才成立, 在实际条件下很容易出现高阶效应。     

‘Best-case’ noise performance of feedback interferometers, potential for micromachine applications

We present a theoretical analysis of the noise performance of phase measuring feedback interferometers. We first analyse the operation of this kind of instrument and note that under certain circumstances bistability can occur. The bistable region should be avoided if possible when using feedback interferometry for high-accuracy measurement with low-input powers, as it can give rise to very high-noise levels. We then go on to investigate the effects of shot noise (on the interferometer output signal) and thermal noise (in the feedback loop), and relate these to the phase measurement accuracy of the interferometer. A ‘best-case’ calculation indicates that phase noise of about 0.005λ is possible at input powers in the nanowatt region. In practice, we expect that noise levels will be higher than predicted (particularly at high-input powers) due to the effects of vibration and air turbulence.