Photoacid generating polymers based on sulfonyloxymaleimides and application as single-component resists

Three sulfonyloxymaleimides (RsOMI), N-(tosyloxy)maleimide (TsOMI), N-(methane-sulfonyloxy)maleimide (MsOMI), and N-(trifluoromethanesulfonyloxy)maleimide (TfOMI), have been synthesized and used to make novel photoacid generating polymers. The sulfonyloxymaleimides easily copolymerized with styrene derivatives to give high molecular weight polymers having an alternating structure of both monomer units. Terpolymers based on RsOMI and p-(tert-butyloxycarbonyloxy)styrene (t-BOCSt) were prepared for enhancing resist properties such as adhesion to substrates, solubility in aqueous alkaline solutions, or transparency in the deep-UV region. The RsOMI copolymers were found to produce corresponding sulfonic acids (RsOH), TsOH, MsOH, and TfOH, by deep-UV irradiation in the film state. Thus, the polymers having both the RsOMI and t-BOCSt units show the capability of a single-component, chemically amplified resist system in the deep-UV region without addition of any photoacid generator. Positive- and negative-tone images were obtained by exposure of the polymer films to deep-UV and post-exposure bake followed by development with organic solvents or aqueous alkaline solutions. © 1996 John Wiley & Sons, Inc.     

Negative‐type photosensitive poly(phenylene ether) based on poly(2,6‐dimethyl‐1,4‐phenylene ether), a crosslinker,and a photoacid generator

A negative‐type photosensitive poly(phenylene ether) (PSPPE) based on poly(2,6‐dimethyl‐1,4‐phenylene ether) (PPE), a novel crosslinker 4,4′‐methylene‐bis [2,6‐bis(methoxymethyl)phenol] (MBMP) having good compatibility with PPE, and diphenylidonium 9,10‐dimethoxy anthracene‐2‐sulfonate (DIAS) as a photoacid generator (PAG) has been developed. This resist consisting of PPE (73 wt %), MBMP (20 wt %) and DIAS (7 wt %) showed a high sensitivity (D_0.5) of 58 mJ/cm² and a contrast (γ_0.5) of 9.5 when it was exposed to i‐line (365 nm wavelength light), postexposure baked at 145 °C for 10 min, and developed with toluene at 25 °C. A fine negative image featuring 6 μm line‐and‐space pattern was obtained on the film exposed to 300 mJ/cm² of i‐line by a contact‐printed mode. The resulting polymer film cured at 300 °C for 1 h under nitrogen had a low dielectric constant (ε = 2.46) comparable to that of PPE and a higher T_g than that of PPE. In addition, the cured PSPPE film was pretty low water absorption (<0.05%) as same as PPE. © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 4949–4958, 2008     

Synthesis of photosensitive and thermosetting poly(phenylene ether) based on poly[2,6‐di(3‐methyl‐2‐butenyl)phenol‐co‐2,6‐dimethyl‐phenol] and a photoacid generator

A chemically amplified photosensitive and thermosetting polymer based on poly[2,6‐di(3‐methyl‐2‐butenyl)phenol (15 mol %)‐co‐2,6‐dimethylphenol (85 mol %)] ( 3c ) and a photoacid generator [(5‐propylsulfonyloxyimino‐5H‐thiophen‐2‐ylidene)‐(2‐methylphenyl)acetonitrile] was developed. Poly[2,6‐bis(3‐methyl‐2‐butenyl)phenol]‐co‐2,6‐dimethylphenol)] ( 3 ) with high molecular weights (number‐average molecular weight ～ 24,000) was prepared by the oxidative coupling copolymerization of 2,6‐di(3‐methyl‐2‐butenyl)phenol with 2,6‐dimethylphenol in the presence of copper(I) chloride and pyridine as the catalyst under a stream of oxygen. The structures of 3 were characterized with IR, ¹H NMR, and ¹³C NMR spectroscopy. 3 was crosslinked by a thermal treatment at 300 °C for 1 h under N₂. The 5% weight loss temperatures and glass‐transition temperatures of the cured copolymers reached around 420 °C in nitrogen and 300 °C, respectively. The average refractive index of the cured copolymer ( 3c ) film was 1.5452, from which the dielectric constant at 1 MHz was estimated to be 2.6. The resist showed a sensitivity of 35 mJ cm^?2 and a contrast of 1.6 when it was exposed to 436‐nm light, postexposure‐baked at 145 °C for 5 min, and developed with toluene at 25 °C. A fine negative image featuring 8‐μm line‐and‐space patterns was obtained on a film exposed to 100 mJ cm^?2 with 436‐nm light in the contact‐printed mode. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 43: 149–156, 2005     

Thermal conversion of poly(paraphenylene–vinylene) precursor films: XPS and ESR studies

The conversion of the precursor into poly(phenylene–vinylene) (PPV) was studied by means of photoelectron spectroscopy (XPS) and electron spin resonance (ESR) on precursor films synthesized from the polymerization of pxylene-tetrahydrophenium halides. The sulfonium precursor containing chlorine or bromine was thermally converted to PPV and analyzed in situ using the spectrometers. It was found by XPS analysis that both halide precursors were thermally converted into polymer in a range of 190–250°C but traces of bromine were still present at >300 °C in the precursor containing Br. Furthermore, a small amount of oxygen in a ketone structure was also present in fully converted films. The ESR results corroborated the XPS experiments, showing a progressive disappearance of the radical distribution related to sulfur sites in a comparable temperature range. A discussion of the conversion process is given in terms of the modification of the core level spectra from XPS and the g distributions from ESR experiments. © 1997 John Wiley & Sons, Ltd.     

Synthesis and dielectric properties of photoreactive polystyrene containing [1‐(3‐isopropenyl‐phenyl)‐1‐methyl‐ethyl]‐carbamate in the side chain

Novel polystyrene derivatives comprising [1‐(3‐isopropenyl‐phenyl)‐1‐methyl‐ethyl]‐carbamate in the side chain were synthesized as photoreactive copolymers. Poly(4‐vinylphenol) was made to react with 1‐(1‐isocyanato‐1‐methyl‐ethyl)‐3‐isopropenyl‐benzene (m‐TMI) and the unreacted hydroxyl groups were protected with acetyl chloride. The copolymers are highly sensitive to the radical photoinitiators that can be activated by irradiation of UV light (λ = 300–365 nm). FTIR spectroscopy was employed to monitor the structural changes in the copolymers exposed to UV irradiation. The dielectric properties of the copolymers were investigated by measuring the capacitance and calculating the permittivity as a function of frequency, along with the I–V characteristics. Their properties were compared with those of thermally crosslinkable poly(4‐vinylphenol) blended with poly(melamine‐co‐formaldehyde), which is frequently used as a dielectric layer in organic field‐effect transistors (OFETs). No significant dielectric dispersion was observed in the frequency range of 1 kHz–1 MHz. The dielectric constant was determined to be in the range of 4.2–6.0, which offers a potential for the application of these copolymers to OFET gate insulators. These soluble dielectrics exhibit good film uniformity and can also be patterned using a standard photolithographic technique. © 2008 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 46: 1710–1718, 2008     

“Living” free radical copolymerization of styrene and N-vinylcarbazole

Poly[styrene-co-(N-vinylcarbazole)] copolymers with controlled molecular weights and narrow polydispersities were synthesized by nitroxide-mediated “living” free radical copolymerization using an initiator/capping agent system consisting of benzoyl peroxide (BPO) and the stable nitroxyl radical 2,2,6,6-tetramethylpiperidine-N-oxyl (TEMPO). The copolymerization behaves in a “living” fashion and allows the synthesis of poly[styrene-co-(N-vinylcarbazole)]/polystyrene block copolymers via a controlled chain-extension reaction of the prepared copolymers with styrene.     

Water‐soluble poly(ethylene oxide)‐block‐poly(p‐phenylene vinylene) copolymer: Synthesis and characterization

Water‐soluble and photoluminescent block copolymers [poly(ethylene oxide)‐block‐poly(p‐phenylene vinylene) (PEO‐b‐PPV)] were synthesized, in two steps, by the addition of α‐halo‐α′‐alkylsulfinyl‐p‐xylene from activated poly(ethylene oxide) (PEO) chains in tetrahydrofuran at 25 °C. This copolymerization, which was derived from the Vanderzande poly(p‐phenylene vinylene) (PPV) synthesis, led to partly converted PEO‐b‐PPV block copolymers mixed with unreacted PEO chains. The yield, length, and composition of these added sequences depended on the experimental conditions, namely, the order of reagent addition, the nature of the monomers, and the addition of an extra base. The addition of lithium tert‐butoxide increased the length of the PPV precursor sequence and reduced spontaneous conversion. The conversion into PPV could be achieved in a second step by a thermal treatment. A spectral analysis of the reactive medium and the composition of the resulting polymers revealed new evidence for an anionic mechanism of the copolymerization process under our experimental conditions. Moreover, the photoluminescence yields were strongly dependant on the conjugation length and on the solvent, with a maximum (70%) in tetrahydrofuran and a minimum (<1%) in water. © 2005 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 43: 4337–4350, 2005     

Studies on molecular composite. II. Processing of molecular composites using copolymers consisting of a precursor of poly(p‐phenylene benzobisthiazole) and aromatic polyamide

The copolymerization of a precursor of poly(p‐phenylene benzobisthiazole) (PBZT) with aromatic polyamides was attempted. Two types of copolymers, randomlike and blocklike, which have different properties, were synthesized according to the copolymerization process. The copolymers were suitable for use as the reinforcing polymer in molecular composite because of the improved intermolecular hydrogen bridges between the matrix polymers, such as aromatic polyamides, and then could be converted to the PBZT copolymers by heat treatment of the molecular composite. In particular, the possibility that the fine phase structure of the molecular composite was maintained was shown, even after heat treatment at above the melting temperature of the thermoplastic matrix polymer, due to the use of a PBZT copolymer as the reinforcing polymer, introduced a fragment which had the same molecular structure as in the matrix polyamides. © 1999 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 37: 199–207, 1999     

ATRP of methyl methacrylate initiated with a bifunctional initiator bearing bromomethyl functional groups: Synthesis of the block and graft copolymers

This article reports the synthesis of the block and graft copolymers using peroxygen‐containing poly(methyl methacrylate) (poly‐MMA) as a macroinitiator that was prepared from the atom transfer radical polymerization (ATRP) of methyl methacrylate (MMA) in the presence of bis(4,4′‐bromomethyl benzoyl peroxide) (BBP). The effects of reaction temperatures on the ATRP system were studied in detail. Kinetic studies were carried out to investigate controlled ATRP for BBP/CuBr/bpy initiating system with MMA at 40 °C and free radical polymerization of styrene (S) at 80 °C. The plots of ln ([M_o]/[M_t]) versus reaction time are linear, corresponding to first‐order kinetics. Poly‐MMA initiators were used in the bulk polymerization of S to obtain poly (MMA‐b‐S) block copolymers. Poly‐MMA initiators containing undecomposed peroygen groups were used for the graft copolymerization of polybutadiene (PBd) and natural rubber (RSS‐3) to obtain crosslinked poly (MMA‐g‐PBd) and poly(MMA‐g‐RSS‐3) graft copolymers. Swelling ratio values (q_v) of the graft copolymers in CHCl₃ were calculated. The characterizations of the polymers were achieved by Fourier‐transform infrared spectroscopy (FTIR), ¹H‐nuclear magnetic resonance (¹H NMR), gel‐permeation chromatography (GPC), differential scanning calorimetry (DSC), thermogravimetric analysis, scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), and the fractional precipitation (γ) techniques. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 48: 1364–1373, 2010     

Synthesis of poly(vinylene arsine)s through the ring‐collapsed radical alternating copolymerization of an organoarsenic homocycle with aliphatic acetylenes and their properties

Poly(vinylene arsine)s with no aromatic substituent ([? CH?CR? AsMe? ]_n) were prepared through a radical alternating copolymerization of acetylenic compounds having an alkyl substituent with an organoarsenic homocycle as an arsenic‐atomic biradical equivalent. The radical reaction between 1‐octyne and pentamethylcyclopentaarsine, with a catalytic amount of 2,2′‐azobisisobutyronitrile without a solvent (60 °C, 10 h), produced the corresponding poly(vinylene arsine)s (45% yield). The copolymers obtained were soluble in tetrahydrofuran, chloroform, hexane, and so on. The copolymers were characterized with ¹H and ¹³C NMR spectra. The number‐average molecular weights of the copolymers were estimated with gel permeation chromatography (chloroform and polystyrene standards) to be 6500. The copolymers showed an emission property attributable to the n–π* transition in the main chain. Irradiation by an incandescent lamp of a mixture of 1‐octyne and 1 also produced poly(vinylene arsine)s. The conversion rate of 1‐octyne during the copolymerization with 2,2′‐azobisisobutyronitrile was measured with gas chromatography analysis and was found to be much slower than that of phenylacetylene. A radical terpolymerization of cyclo‐(AsMe)₅ with 1‐octyne and styrene was carried out to yield the terpolymer. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 42: 3604–3611, 2004     

Synthesis and characterization of biodegradable block copolymers of ϵ-caprolactone and D,L-lactide initiated by potassium poly(ethylene glycol)ate

Poly(D ,L -lactide)–poly(ϵ-caprolactone)–poly(ethylene glycol)–poly(ϵ-caprolactone)–poly(D ,L -lactide) block copolymer (PLA–PCL–PEG–PCL–PLA) was prepared by copolymerization of ϵ-caprolactone (ϵ-CL) and D ,L -lactide (D ,L -LA) initiated by potassium poly(ethylene glycol)ate in THF at 25°C. The copolymers with different composition were synthesized by adjusting the mole ratio of reaction mixture. The resulted copolymers were characterized by ¹H-NMR, ¹³C-NMR, IR, DSC, and GPC. Efforts to prepare copolymers with the corresponding structure of PCL–PLA–PEG–PLA–PCL and D ,L -lactide/ϵ-caprolactone random copolymers were not successful. © 1997 John Wiley & Sons, Inc.     

Novel temperature‐responsive water‐soluble copolymers based on 2‐hydroxyethylacrylate and vinyl butyl ether and their interactions with poly(carboxylic acids)

Novel water‐soluble amphiphilic copolymers have been synthesized by free radical copolymerization of 2‐hydroxyethylacrylate with vinyl butyl ether. In water these copolymers exhibit lower critical solution temperature, which depends on the content of hydrophobic vinyl butyl ether units. The interaction between these copolymers and poly(acrylic acid) or poly(methacrylic acid) in aqueous solutions results in formation of interpolymer complexes stabilized by hydrogen bonds and hydrophobic interactions. An increase in hydrophobicity of the copolymers leads to the enhancement of their complex formation ability with respect to poly(acrylic acid) and poly(methacrylic acid). Poly(methacrylic acid) forms stronger complexes with the copolymers when compared with poly(acrylic acid). The complexes exhibit dual sensitivity to pH‐ and temperature and this property may be easily adjusted regulating the strength of interaction. © 2005 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 44: 195–204, 2006     

Synthesis of semiaromatic polyimides from aromatic diamines containing adamantyl units and alicyclic dianhydrides

We prepared new semiaromatic polyimides from alicyclic dianhydrides and aromatic diamines containing adamantyl and biadamantyl units. Polycondensations were performed in 1‐methyl‐2‐pyrrolidinone at room temperature for 7 h and then 80 °C for 23 h, giving poly(amic acid)s with inherent viscosities up to 0.58 dL/g. Poly(amic acid)s were converted to corresponding poly(imide)s by thermal treatment. Poly(imide)s showed relatively high thermal stability (5% weight loss around 450 °C) and low dielectric constants (2.69–2.79). © 2003 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 42: 144–150, 2004     

Grafting of poly(styrene‐co‐p‐chloromethyl styrene) with ethyl methacrylate via atom transfer radical polymerization catalyzed by CuCl/1,2‐dipiperidinoethane

Poly(styrene‐graft‐ethyl methacrylate) graft copolymer was prepared by atom transfer radical polymerization (ATRP) with poly(styrene‐co‐p‐chloromethyl styrene)s in various compositions as macroinitiator in the presence of CuCl/1,2‐dipiperidinoethane at 130 °C in N,N‐dimethylformamide. Both macroinitiators and graft copolymers were characterized by elemental analysis, IR, ¹H and ¹³C NMR, and differential scanning calorimetry. 1,2‐Dipiperidinoethane was an effective ligand of CuCl for ATRP in the graft copolymerization. The controlled growth of the side chain provided the graft copolymers with polydispersities of 1.60–2.05 in the case of poly(styrene‐co‐p‐chloromethyl styrene) (62:38) macroinitiator. Thermal stabilities of poly(styrene‐graft‐ethyl methacrylate) graft copolymers were investigated by thermogravimetric analysis as compared with those of the macroinitiators. © 2003 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 41: 668–673, 2003     

Copolymerization of styrene with vinyltriethoxysilane and vinyltriacetoxysilane

Styrene was copolymerized in bulk with vinyltriethoxysilane at 80°C and vinyltriacetoxysilane at 60, 80, and 100°C with the use of benzoyl peroxide as an initiator at low conversions. Copolymer composition was determined from the silicon content and reactivity ratios were calculated by the conventional scheme of copolymerization. The low r₁ value (styrene) in the styrene-vinyltriacetoxysilane system (St–VTAS) as compared to styrene-vinyltriethoxysilane (St–VTES) copolymerization may be attributed to higher reactivity of VTAS towards the polystyryl radical. Further, in the St–VTAS system, r₁ tends to decrease with increasing polymerization temperature. The influence of silicon comonomer on properties of the copolymers (intrinsic viscosity, solubility, dielectric and thermal behavior) was studied.     

Poly(arylene sulfide)s by nucleophilic aromatic substitution polymerization of 2,7‐difluorothianthrene

Poly(thianthrene phenylene sulfide) and poly(thianthrene sulfide) have been prepared by nucleophilic aromatic substitution polymerization of the activated monomer 2,7‐difluorothianthrene with bis thiophenoxide and sulfide nucleophiles, respectively. The resulting polymers are thermally stable, amorphous materials that have been characterized by differential scanning calorimetry (DSC), thermogravimetric analysis (TGA), gel permeation chromatography (GPC), matrix‐assisted laser desorption/ionization‐time‐of‐flight (MALDI‐TOF) mass spectrometry, UV‐Vis spectroscopy, refractometry, and intrinsic viscosity (IV) measurements. The polymers produced exhibit 5% weight loss values approaching 500 °C in inert and air atmospheres and glass transition temperatures that range from 149 to 210 °C. Poly(thianthrene phenylene sulfide) with a number average molecular weight of 22,100 g/mol has been synthesized with an IV in DMPU of 0.62 dL/g at 30 °C. Creasable films of this polymer have been prepared by solvent casting and melt pressing at 250 °C. Films of poly(thianthrene phenylene sulfide) exhibit transparencies greater than 50% at wavelengths exceeding 400 nm and a high refractive index value of 1.692 at a wavelength of 633 nm, making the polymer interesting for optical applications. © 2009 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 47: 2453–2461, 2009     

Structure changes on polymer blends by means of phase growth on microheterophase surface

We have studied the structural changes on poly(2-hydroxyethyl methacrylate) (PHEMA)/polystyrene (PS) blends by means of phase growth of microheterophase pattern on a template surface composed of poly[2-hydroxyethyl methacrylate (HEMA)-g-styrene (S)] graft copolymer (lamellar shape). The PS macromonomer was synthesized by free radical polymerization of S monomer initiated by a functional initiator [2,2'-azobis(2-(2-imidazolin-2-yl)propane: VA-061] in the presence of a degradative chain transfer agent, followed by an end-capping reaction with p-chloromethylstyrene (CMS). Poly(HEMA-g-S) graft copolymers were prepared by free radical copolymerization of these vinylbenzyl-terminated PS macromonomers with HEMA comonomer.     

Copper catalyzed atom transfer radical copolymerization of glycidyl methacrylate and 2‐ethylhexyl acrylate

This investigation reports the atom transfer radical copolymerization (ATRcP) of glycidyl methacrylate (GMA) and 2‐ethylhexyl acrylate (EHA). Poly(glycidyl methacrylate) (PGMA) has easily transformable pendant oxirane group and poly(2‐ethylhexyl acrylate) (PEHA) has very low T_g. They are the important components of coating and adhesive materials. Copolymerization of GMA and EHA was carried out in bulk and in toluene at 70 °C at different molar feed ratios using CuCl as catalyst in combination with 2,2′‐bypyridine (bpy) as well as N,N,N′,N″,N″‐pentamethyl diethylenetriamine (PMDETA) as ligand. The molecular weight (M_n) and the polydispersity index (PDI) of the polymers were determined by GPC analysis. The molar composition of the copolymers was determined by ¹H NMR analysis. The reactivity ratios of GMA (r₁) and EHA (r₂) were determined using Finemann‐Ross and Kelen‐Tudos linearization methods and those had been compared with the literature values for conventional free radical copolymerization. The thermal properties of the copolymers were studied by DSC and TGA analysis. © 2009 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 47: 6526–6533, 2009     

A New Kind of Copolymerization of Styrene and p‐Quinodimethane Intermediates

A new kind of copolymerization between styrene and p‐quinodimethane intermediates was realized by adding styrene to a reaction performed via the typical chlorine precursor route toward the synthesis of poly(p‐phenylene vinylene) (PPV). The composition and structure of the obtained copolymers can be adjusted by the feed rate of the two monomers. The resulting copolymers show improved solubility and blue‐shifted photoluminescence as compared with the corresponding PPV derivative.     

Synthesis of poly(vinyl acetate)‐b‐polystyrene and poly(vinyl alcohol)‐b‐polystyrene copolymers by cobalt‐mediated radical polymerization

Well‐defined poly(vinyl acetate) macroinitiators, with the chains thus end‐capped by a cobalt complex, were synthesized by cobalt‐mediated radical polymerization and used to initiate styrene polymerization at 30 °C. Although the polymerization of the second block was not controlled, poly(vinyl acetate)‐b‐polystyrene copolymers were successfully prepared and converted into amphiphilic poly(vinyl alcohol)‐b‐polystyrene copolymers by the methanolysis of the ester functions of the poly(vinyl acetate) block. These poly(vinyl alcohol)‐b‐polystyrene copolymers self‐associated in water with the formation of nanocups, at least when the poly(vinyl alcohol) content was low enough. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 81–89, 2007