F等离子体处理增强型及耗尽型AlGaN/GaN HEMT集成的D触发器

耗尽型和F等离子体处理增强型高电子迁移率晶体管（HEMT）被集成在同一圆片上。增强型/耗尽型 HEMT反向器、与非门以及D触发器等直接耦合场效应晶体管逻辑电路被制作在AlGaN/GaN异质结上。D触发器在GaN体系中首次被实现。在电源电压为2伏的条件下,增强型/耗尽型反向器显示输出逻辑摆幅为1.7伏,逻辑低噪声容限为0.49伏,逻辑高噪声容限为0.83伏。与非门和D触发器的功能正确,证实了GaN基数字电路的发展潜力。     

Monolithically integrated enhancement/depletion-mode AIGaN/GaN HEMT D flip-flop using fluorine plasma treatment

Depletion-mode and enhancement-mode AlGaN/GaN HEMTs using fluorine plasma treatment were integrated on one wafer. Direct-coupled FET logic circuits, such as an E/D HEMT inverter, NAND gate and D flip-flop, were fabricated on an AlGaN/GaN heterostructure. The D flip-flop and NAND gate are demonstrated in a GaN system for the first time. The dual-gate AlGaN/GaN E-HEMT substitutes two single-gate E-HEMTs for simplifying the NAND gate and shrinking the area, integrating with a conventional AlGaN/GaN D-HEMT and demonstrating a NAND gate. E/D-mode D flip-flop was fabricated by integrating the inverters and the NAND gate on the AlGaN/GaN heterostructure. At a supply voltage of 2 V, the E/D inverter shows an output logic swing of 1.7 V, a logic-low noise margin of 0.49 V and a logic-high noise margin of 0.83 V. The NAND gate and D flip-flop showed correct logic function demonstrating promising potential for GaN-based digital ICs.     

F等离子体处理增强型及耗尽型AlGaN/GaN HEMT集成SRAM单元电路和电平转换电路

我们设计并且制备了GaN基增强型/耗尽型（E/D 模）直接耦合6管静态随机存取存储器（SRAM）单元电路和电平转换电路。利用氟等离子处理工艺,使用适中的AlGaN势垒层厚度异质结材料,增强型和耗尽型铝镓氮/氮化镓 HEMTs被集成在了同一个晶片上。六管SRAM单元由对称的两个E/D模反相器和增强型开关管组成。在1V的工作电压下,SRAM单元电路的输出高电平和低电平分别为0.95V和0.07V。电平转换电路的工作电压为+6V和-6V,通过4个串联的镍-铝镓氮/氮化镓肖特基二极管使电压降低。通过轮流控制电平转换电路的两个反相器模块的开关状态,电平转换电路输出两路电压,分别为-0.5V和-5V。电平转换器的翻转电压为0.76V。SRAM单元电路和电平转换电路都能正确地工作,展现了氮化镓基E/D模数字和模拟集成电路的潜力。提出了几条设计上的考虑,以避免阈值电压的漂移对电路工作造成的影响。     

Effects of the fluorine plasma treatment on low-density drain AlGaN/GaN HEMT

Low-density drain high-electron mobility transistors (LDD-HEMTs) with different F^- plasma treatment were investigated by simulations and experiments. The LDD region was performed by introducing negatively charged fluorine ions, which modified the surface field distribution on the drain side of the HEMT, and the enhancement of breakdown voltage were achieved. With the increased fluorine plasma treatment power and LDD region length, the breakdown voltage can be maximumly improved by 70%, and no severe reductions on output current and transconductance were observed. To confirm the temperature stability of the devices, annealing experiments were carried out at 400℃ for 2 min in ambient N₂. Moreover, the gate leakage current and breakdown voltage before and after annealing were compared and analyzed, respectively.     

F注入AlGaN/GaN增强型HEMT

The fabrication of enhancement-mode AlGaN/GaN HEMTs by fluorine plasma treatment on sapphire substrates is reported. A new method is used to fabricate devices with different fluorine plasma RF power treatments on one wafer to avoid differences between different wafers. The plasma-treated gate regions of devices treated with different fluorine plasma RF powers were separately opened by a step-and-repeat system. The properties of these devices are compared and analyzed. The devices with 150 W fluorine plasma treatment power and with 0.6 μm gate-length exhibited a threshold voltage of 0.57 V, a maximum drain current of 501 mA/mm, a maximum transconductance of 210 mS/mm, a current gain cutoff frequency of 19.4 GHz and a maximum oscillation frequency of 26 GHz. An excessive fluorine plasma treatment power of 250 W results in a small maximum drain current, which can be attributed to the implantation of fluorine plasma in the channel.     

Enhancement-mode AlGaN/GaN HEMTs fabricated by fluorine plasma treatment

The fabrication of enhancement-mode A1GaN/GaN HEMTs by fluorine plasma treatment on sapphire substrates is reported. A new method is used to fabricate devices with different fluorine plasma RF power treatments on one wafer to avoid differences between different wafers. The plasma-treated gate regions of devices treated with different fluorine plasma RF powers were separately opened by a step-and-repeat system. The properties of these devices are compared and analyzed. The devices with 150 W fluorine plasma treatment power and with 0.6μm gate-length exhibited a threshold voltage of 0.57 V, a maximum drain current of 501 mA/mm, a maximumtransconductance of 210 m S/mm, a current gain cutoff frequency of 19.4 GHz and a maximum oscillation frequency of 26 GHz. An excessive fluorine plasma treatment power of 250 W results in a small maximum drain current, which can be attributed to the implantation of fluorine plasma in the channel.     

AlGaN/GaN double-channel HEMT

The fabrication of AlGaN/GaN double-channel high electron mobility transistors on sapphire substrates is reported. Two carrier channels are formed in an AlGaN/GaN/AlGaN/GaN multilayer structure. The DC performance of the resulting double-channel HEMT shows a wider high transconductance region compared with single-channel HEMT. Simulations provide an explanation for the influence of the double-channel on the high transconductance region. The buffer trap is suggested to be related to the wide region of high transconductance. The RF characteristics are also studied.     

AlGaN/GaN double-channel HEMT

正The fabrication of AlGaN/GaN double-channel high electron mobility transistors on sapphire substrates is reported.Two carrier channels are formed in an AlGaN/GaN/AlGaN/GaN multilayer structure.The DC performance of the resulting double-channel HEMT shows a wider high transconductance region compared with single-channel HEMT. Simulations provide an explanation for the influence of the double-channel on the high transconductance region.The buffer trap is suggested to be related to the wide region of high transconductance.The RF characteristics are also studied.     

A high-performance enhancement-mode AlGaN/GaN HEMT

An enhancement-mode AlGaN/GaN HEMT with a threshold voltage of 0.35 V was fabricated by fluorine plasma treatment.The enhancement-mode device demonstrates high-performance DC characteristics with a saturation current density of 667 mA/mm at a gate bias of 4 V and a peak transconductance of 201 mS/mm at a gate bias of 0.8 V.The current-gain cut-off frequency and the maximum oscillation frequency of the enhancement-mode device with a gate length of μm are 10.3 GHz and 12.5 GHz,respectively,which is comparable with the depletion-mode device.A numerical simulation supported by SIMS results was employed to give a reasonable explanation that the fluorine ions act as an acceptor trap center in the barrier layer.     

高性能的增强型AlGaN/GaN HEMT

采用氟离子处理的方法实现了阈值电压0.35V的增强型AlGaN/GaN HEMT 器件。该器件展示了高性能直流特性,最大饱和电流 667mA/mm,器件的峰值跨导达到203ms/mm。 1μm栅长电流增益截止频率和最大振荡截止频率分别为10.3GHz和12.5GHz,并且小信号特性在器件氟离子处理后并没有出现衰退。最后,采用SIMS的实验结果辅助进行了数值仿真,对氟离子在势垒层中起受主缺陷的理论给出了合理的解释。     

AlGaN/GaN HEMT器件的研制

介绍了AlGaN/GaNHEMT器件的研制及室温下器件特性的测试.漏源欧姆接触采用Ti/Al/Pt/Au ,肖特基结金属为Pt/Au .器件栅长为1μm ,获得的最大跨导为12 0mS/mm ,最大的漏源饱和电流密度为0 95A/mm .     

AlGaN/GaN HEMT中电场分布的ATLAS模拟

用Silvaco的ATLAS软件模拟了栅场板参数对AlGaN/GaN HEMT中电场分布的影响.模拟结果表明,场板的加入改变了器件中电势的分布情况,降低了栅边缘处的电场峰值,改善了器件的击穿特性;场板长度(LFP,length of field plate)、场板与势垒层间的介质层厚度t等对电场的分布影响很大.随着LFP的增大、t的减小,栅边缘处的电场峰值Epeak1明显下降,对提高器件的耐压非常有利.通过对相同器件结构处于不同漏压下的情况进行模拟,发现当器件处于高压下时,场板的分压作用更加明显,说明场板结构更适合于制备用作电力开关器件的高击穿电压AlGaN/GaN HEMT.     

基于AlGaN/GaN HEMT的X波段内匹配功率合成放大器的设计

利用内匹配和功率合成技术设计了X波段AlGaN/GaN HEMT功率合成放大器.电路包含有四个AlGaN/GaN HEMT和制作在Al2O3陶瓷基片上的输入输出匹配电路.在偏置条件VDS=30 V,IDS=700 mA时8 GHz测出连续波饱和输出功率达到Pat=40 dBm(10 W),最大PAE=37.44%,线性增益9 dB.     

Ka波段AlGaN/GaN HEMT栅结构仿真研究

为了研究适合Ka波段AlGaN/GaN HEMT的栅结构尺寸,借助二维器件仿真软件Silvaco Atlas,在完善仿真模型的基础上研究了Γ型栅各部分对AlGaN/GaN HEMT特性的影响,包括栅长与短沟道效应的关系、栅与沟道距离对短沟道效应和饱和漏电流的影响,以及栅金属厚度对fmax,栅场板对fT、fmax和内部电场的影响。根据典型器件结构和材料参数的仿真表明,为了提高频率并减轻短沟道效应,栅长应取0.15～0.25μm;减小栅与沟道的距离可略微改善短沟道效应,但会明显降低器件的饱和漏电流,综合考虑栅调制能力、饱和漏电流、短沟道效应三个方面,栅与沟道距离应取10～20nm;为了提高fmax,栅金属厚度应大于0.4μm;缩小栅场板长度可有效提高器件的频率,兼顾Ka波段应用和提高击穿电压,栅场板长度应在0.3～0.4μm左右。仿真得出的器件性能随结构参数的变化趋势以及尺寸数据对于Ka波段AlGaN/GaN HEMT的研究具有参考意义。     

一个8 GHz基于AlGaN/GaN HEMT的内匹配电路

论述了一个在8 GHz下基于AlGaN/GaN HEMT功率放大器HMIC的设计、制备与测试.该电路包含了1个10×100 μm的AlGaN/GaN HEMT和输入输出匹配电路.在偏置条件为VDS=40 V、IDS=0.16 A时输出连续波饱和功率在8 GHz达到36.5 dBm(4.5 W),PAE为60%,线性增益10 dB;在偏置条件为VDS=30 V、IDS=0.19 A时输出连续波饱和功率在8 GHz达到35.6 dBm(3.6 W),PAE为47%,线性增益9 dB.     

Hydrogen sensors based on AlGaN/AlN/GaN HEMT

Pt/AlGaN/AlN/GaN high electron mobility transistors (HEMT) were fabricated and characterized for hydrogen sensing. Pt and Ti/Al/Ni/Au metals were evaporated to form the Schottky contact and the ohmic contact, respectively. The sensors can be operated in either the field effect transistor (FET) mode or the Schottky diode mode. Current changes and time dependence of the sensors under the FET and diode modes were compared. When the sensor was operated in the FET mode, the sensor can have larger current change of 8 mA, but its sensitivity is only about 0.2. In the diode mode, the current change was very small under the reverse bias but it increased greatly and gradually saturated at 0.8 mA under the forward bias. The sensor had much higher sensitivity when operated in the diode mode than in the FET mode. The oxygen in the air could accelerate the desorption of the hydrogen and the recovery of the sensor.     

Numerical Explanation of Slow Transients in an AlGaN/GaN HEMT

观察了AlGaN/GaN HEMT器件在短期应力后不同栅偏置下的一组漏极电流瞬态,发现瞬态的时间常数随栅偏压变化很小,据此判断这组瞬态由电子陷阱的释放引起.为了验证这个判断,采用数值仿真手段计算了上述瞬态.分别考虑了在器件中不同空间位置的电子陷阱,分析了应力和瞬态中相应的陷阱行为,对比和解释了仿真曲线与测量结果的异同.基于上述讨论,提出测量的瞬态可能是表面深陷阱和GaN层体陷阱的综合作用的结果.     

4H-SiC衬底AlGaN/GaN高电子迁移率晶体管的研制

报道了在4H-SiC衬底上AlGaN/GaN高电子迁移率晶体管(HEMT)的研制和室温特性测试结果.器件采用栅长为0.7μm,夹断电压为-3.2V,获得了最高跨导为202mS/mm,最大漏源饱和电流密度为915mA/mm的优良性能和结果.     

AlGaN/GaN HEMT中慢瞬态的数值解释

观察了AlGaN/GaN HEMT器件在短期应力后不同栅偏置下的一组漏极电流瞬态,发现瞬态的时间常数随栅偏压变化很小,据此判断这组瞬态由电子陷阱的释放引起.为了验证这个判断,采用数值仿真手段计算了上述瞬态.分别考虑了在器件中不同空间位置的电子陷阱,分析了应力和瞬态中相应的陷阱行为,对比和解释了仿真曲线与测量结果的异同.基于上述讨论,提出测量的瞬态可能是表面深陷阱和GaN层体陷阱的综合作用的结果.     

Effect of fluorine interface redistribution on performance of AlGaN/GaN HEMTs

The effect of fluorine interface redistribution on dc and microwave performances of SF₆ plasma-treated AlGaN/GaN high-electron mobility transistors (HEMTs) was investigated. Selective SF₆ plasma treatment of the AlGaN/GaN HEMT gate interface yielded increases in the current gain cut-off frequency (f_T) and maximum frequency of oscillation (f_max) of almost 60%. Annealing induced fluorine interface redistribution showed a low impact on the electron drift mobility and a negligible impact on the peak transconductance of the HEMTs. A large impact of the fluorine interface redistribution was observed for the threshold voltage and sheet carrier concentration of two-dimensional electron gas (2DEG). Consequently, it led to a decrease in the f_T and f_max values, but the values were still higher than those of conventional reference HEMTs.