| Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section |
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| 作者姓名： | 夏金松 余金中 樊中朝 王章涛 陈少武 |
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| 作者单位： | StateKeyLaboratoryonIntegratedOptoelectronics,InstituteofSemiconductors,ChineseAcademyofSciences,Beijing100083 |
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| 摘 要： | A 3-dB multimode interference optical coupler based on rib waveguides with trapezoidal cross section was designed and fabricated on silicon-on-insulator wafer. Potassium hydroxide (KOH) anisotropic chemical etching of silicon was used to fabricate the waveguides to obtain smooth interface. A modified finite-difference beam propagation method was used to simulate the multimode rib waveguide with slope interfaces. The rms roughness of etching interface is as small as 1.49nm. The propagation loss of the waveguide is 1.3dB/cm at wavelength of 1.55μm. The fabricated 3-dB coupler has a good uniformity of 0.2 dB.
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| 关 键 词： | 梯形截面 硅波导 各向异性化学蚀刻技术 氢氧化钾 多模干涉光学耦合器件 波导光学 |
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