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Analytical results for the cluster size distribution in controlled deposition processes
Authors:Ke Jian-Hong  Chen Xiao-Shuang  Lin Zhen-Quan
Affiliation:National Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China; College of Physics and Electronic Information Engineering, Wenzhou University, Wenzhou 325035, China
Abstract:This paper proposes a controlled particle deposition modelfor cluster growth on the substrate surface and then presents exactresults for the cluster (island) size distribution. In the system,at every time step a fixed number of particles are injected into thesystem and immediately deposited onto the substrate surface. Itinvestigates the cluster size distribution by employing thegeneralized rate equation approach. The results exhibit that theevolution behaviour of the system depends crucially on the detailsof the adsorption rate kernel. The cluster size distribution cantake the Poisson distribution or the conventional scaling form insome cases, while it is of a quite complex form in other cases.
Keywords:cluster growth   deposition   kinetic behaviour
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