| 二次非球面镜检测中基于波前等高线图的调整方法 |
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| 引用本文： | 晁格平,杨朋利,杨子建,付晓庆,王艳维. 二次非球面镜检测中基于波前等高线图的调整方法[J]. 应用光学, 2014, 35(4): 652-655 |
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| 作者姓名： | 晁格平 杨朋利 杨子建 付晓庆 王艳维 |
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| 作者单位： | 1.西安应用光学研究所,陕西 西安 710065 |
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| 摘 要： | 为了提高非球面光学元件的检测精度及效率，缩短调整环节的时间，分析了非球面干涉检测过程中被检非球面镜的调整误差对检测结果波前信息的影响，提出利用波前等高线图走势准确判断调整方向的调整方法。建立调整方向与被检镜失调量之间的关系，并利用光学设计软件Zemax仿真模拟检测光路，结合二次非球面镜的光学公差分析判断调整量的大小。基于该调整方法，利用Zygo激光干涉仪对口径为50 mm的双曲面进行检测，最终检测结果是RMS为0.014 ,实验表明该方法简单、可行。
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| 关 键 词： | 光学检测 波前等高线 调整误差 二次非球面 |
| 收稿时间： | 2014-01-24 |
Adjustment method of testing conic aspheric optical elements based on wavefront contour map |
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| Chao Ge-ping,Yang Peng-li,Yang Zi-jian,Fu Xiao-qing,Wang Yan-wei. Adjustment method of testing conic aspheric optical elements based on wavefront contour map[J]. Journal of Applied Optics, 2014, 35(4): 652-655 |
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| Authors: | Chao Ge-ping Yang Peng-li Yang Zi-jian Fu Xiao-qing Wang Yan-wei |
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| Affiliation: | 1.Xi-an Institute of Applied Optics,Xi-an 710065,China |
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| Abstract: | In order to improve the testing accuracy and efficiency of aspheric surface optical elements and reduce the adjusting time, the influence of adjustment error of testing elements in aspheric surface interference measurement on wavefront information of testing result was analyzed. The adjustment method which could judge the adjustment orientation accurately by taking advantage of the wavefront contour map trend was presented on this basis. The relation between adjustment orientation and alignment amount of testing elements was established. Using the optical design software Zemax，the measuring ray path of a conic aspheric surface was simulated, and the amount of adjustment was determined through analyzing the tolerance. According to this method, a hyperbolic mirror with an aperture of 50 mm was tested by Zygo laser interferometer, and the final testing result was 0.014 λ(RMS). Experiments show that the method is simple and feasible. |
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| Keywords: | optical testing wavefront contour adjustment error conic aspheric surface |
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