| 基底温度对ZnO/Cu/ZnO透明导电膜性能的影响 |
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| 引用本文： | 李爱丽,闫金良,石亮,刘建军. 基底温度对ZnO/Cu/ZnO透明导电膜性能的影响[J]. 人工晶体学报, 2009, 38(5): 1227-1230 |
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| 作者姓名： | 李爱丽 闫金良 石亮 刘建军 |
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| 作者单位： | 鲁东大学物理与电子工程学院,烟台,264025;鲁东大学物理与电子工程学院,烟台,264025;鲁东大学物理与电子工程学院,烟台,264025;鲁东大学物理与电子工程学院,烟台,264025 |
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| 摘 要： | 采用射频磁控溅射ZnO陶瓷靶、直流磁控溅射Cu靶的方法在不同基底温度下制备了ZnO/Cu/ZnO多层膜.用X射线衍射仪、原子力显微镜、紫外可见分光光度计和四探针测试仪对样品的性能进行了表征.结果表明,随着基底温度的升高,ZnO层c轴择优取向明显,结晶程度变好,Cu层的结晶性先变好后逐渐变差;多层膜表面均方根粗糙度随基底温度的升高而增加;光学透过率随基底温度的升高逐渐增大,基底温度为300 ℃时最大透过率接近90;;面电阻随基底温度的升高逐渐增加,最小面电阻为12.4 Ω/□.
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| 关 键 词： | 透明导电膜 多层膜 光学性质 电学性质 |
Influence of Substrate Temperature on Properties of ZnO/Cu/ZnO Transparent Conductive Films |
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| LI Ai-li,YAN Jin-liang,SHI Liang,LIU Jian-jun. Influence of Substrate Temperature on Properties of ZnO/Cu/ZnO Transparent Conductive Films[J]. Journal of Synthetic Crystals, 2009, 38(5): 1227-1230 |
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| Authors: | LI Ai-li YAN Jin-liang SHI Liang LIU Jian-jun |
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| Affiliation: | School of Physics and Electronic Engineering;Ludong University;Yantai 264025;China |
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| Abstract: | ZnO/Cu/ZnO multilayer films were prepared by RF sputtering of ZnO and DC sputtering of Cu target at different substrate temperature. The properties of ZnO/Cu/ZnO films characterized by X-ray diffraction (XRD),atomic force microscopy (AFM),double-beam UV-spectrophotometer and four-point probe method. The results showed that the ZnO layers have a preferred c-axis orientation,as the substrate temperature increasing,the crystallinity of ZnO layers increases,the crystallinity of Cu layers increases initially and... |
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| Keywords: | transparent conductive films multilayer films optical properties electrical properties |
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