| Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films |
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| 引用本文： | 庞洪超 罗顺忠 龙兴贵 安竹 刘宁 段艳敏 吴兴春 杨本福 王培禄 郑思孝. Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films[J]. 中国物理快报, 2006, 23(12): 3238-3241 |
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| 作者姓名： | 庞洪超 罗顺忠 龙兴贵 安竹 刘宁 段艳敏 吴兴春 杨本福 王培禄 郑思孝 |
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| 作者单位： | [1]Key laboratory of Radiation Physics and Technology of MOE, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064 [2]Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 321900 |
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| 基金项目： | Supported by the China Academy of Engineering Physics under Grant No 2003Z0501. |
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| 摘 要： | Helium-charged nanocrystalline titanium films have been deposited by HeAr magnetron co-sputtering. The effects of substrate temperature on the helium content and microstructure of the nanocrystalline titanium films have been studied. The results indicate that helium atoms with a high concentration are evenly incorporated in the deposited titanium films. When the substrate temperature increases from 60℃ to 350℃ while the other deposition＇parameters are fixed, the helium content decreases gradually from 38.6 at.% to 9.2at.%, which proves that nanocrystalline Ti films have a great helium storage capacity. The 20 angle of the Bragg peak of （002） crystal planes of the He-charged Ti film shifts to a lower angle and that of （100） crystal plane is unchanged as compared with that of the pure Ti film, which indicates that the lattice parameter c increases and a keeps at the primitive value. The grain refining and helium damage result in the diffraction peak broadening.
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| 关 键 词： | 基底温度 纳米晶态钛膜 氦原子 氦含量 显微结构 HeAr磁控管溅射沉积法 |
| 收稿时间： | 2006-03-13 |
| 修稿时间： | 2006-03-13 |
Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films |
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| PANG Hong-Chao,sup,LUO Shun-Zhong,sup,LONG Xing-Gui,sup,AN Zhu,sup,LIU Ning,sup,DUAN Yan-Min,sup,WU Xing-Chun,sup,YANG Ben-Fu,sup,WANG Pei-Lu,sup,ZHENG Si-Xiao. Effects of Substrate Temperature on Helium Content and Microstructure of Nanocrystalline Titanium Films[J]. Chinese Physics Letters, 2006, 23(12): 3238-3241 |
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| Authors: | PANG Hong-Chao&sup LUO Shun-Zhong&sup LONG Xing-Gui&sup AN Zhu&sup LIU Ning&sup DUAN Yan-Min&sup WU Xing-Chun&sup YANG Ben-Fu&sup WANG Pei-Lu&sup ZHENG Si-Xiao |
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| Affiliation: | 1.Key laboratory of Radiation Physics and Technology of MOE, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064;2.Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 321900 |
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| Abstract: | |
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| Keywords: | 28.41.Qb 81.07.Bc 81.15.Cd |
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