Methods for Thickness Determination of SiC Homoepilayers by Using Infrared Reflectance Spectroscopy |
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| Authors: | LI Zhi-Yun SUN Ji-Wei ZHANG Yu-Ming ZHANG Yi-Men TANG Xiao-Yan |
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| Affiliation: | Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071 |
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| Abstract: | Infrared reflectance spectra have been widely used to measure layer thickness based either on calculation or on curve fitting, and two traditional methods for thickness determination have been studied. Considering the disadvantages of those two methods, we propose a new fitting model based on the fitting of the fringe order difference. In comparison with the measured results, the new fitting model shows its superiority not only for its stable and accurate results which have great agreement with the results from SEM, but also for its simple and quick fitting process. |
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| Keywords: | 81.05.Hd 81.70.Fy |
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