|
|||||
|
|
Determination of Mean Thickness of an Oxide Layer on a Silicon Sphere by Spectroscopic Ellipsometry |
|
| Authors: | ZHANG Ji-Tao LI Yan LUO Zhi-Yong WU Xue-Jian |
| Affiliation: | [1]State Key Lab of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084 [2]National Institute of Metrology, Beijing 100013 |
| Abstract: | |
| Keywords: | |
| 本文献已被 维普 等数据库收录！ | |