| 微波脉冲氮气等离子体发射光谱测量 |
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| 引用本文： | 邱风, 闫二艳, 孟凡宝, 等. 微波脉冲氮气等离子体发射光谱测量[J]. 强激光与粒子束, 2014, 26: 023004. doi: 10.3788/HPLPB201426.023004 |
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| 作者姓名： | 邱风 闫二艳 孟凡宝 刘明海 马弘舸 |
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| 作者单位： | 1.中国工程物理研究院 应用电子学研究所, 高功率微波技术重点实验室, 四川 绵阳 621 900;;;2.强电磁工程与新技术国家重点实验室华中科技大学, 武汉 430074 |
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| 摘 要： | 通过发射光谱测量和拟合不同的微波脉宽和气压下C波段微波放电的氮气等离子体振动温度、转动温度和电子激发温度。气压在266～400 Pa时，等离子体的振动温度为(2700100) K，电子激发温度为(0.32 0.015) eV，转动温度随脉宽增加而上升，实验中测得的最大转动温度为370 K。偏离266～400 Pa时，振动温度和电子激发温度同时出现了下降的趋势，而转动温度出现了上升的趋势。这意味着电子激发温度和振动温度具有很强的关联性。
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| 关 键 词： | 振动温度 转动温度 电子激发温度 微波脉冲放电 光谱测量 |
| 收稿时间： | 2013-08-07 |
| 修稿时间： | 2013-11-11 |
Emission spectrum diagnostics for nitrogen plasmas generated by pulsed microwave discharge |
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| Qiu Feng, Yan Eryan, Meng Fanbao, et al. Emission spectrum diagnostics for nitrogen plasmas generated by pulsed microwave discharge[J]. High Power Laser and Particle Beams, 2014, 26: 023004. doi: 10.3788/HPLPB201426.023004 |
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| Authors: | Qiu Feng Yan Eryan Meng Fanbao Liu Minghai Ma Hongge |
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| Affiliation: | 1. Science and Technology on High Power Microwave Laboratory,Institute of Applied Electronics,CAEP,P.O.Box 919-1015,Mianyang 621900,China;;;2. State Key Laboratory of Advanced Electromagnetic Engineering and Technology,Huazhong University of Science and Technology,Wuhan 430074,China |
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| Abstract: | Emission spectrum measurement and simulation are conducted to derive the vibration, rotation and electronic excitation temperature of nitrogen plasmas generated in microwave discharge with different pulse width and pressure. At the pressure of 266~400 Pa, the vibration temperature of plasmas is (2700100) K, electronic excitation temperature is (0.320.015) eV. Rotation temperature rises with the rising of pulse width, the maximum rotation temperature measured in this experiment is 370 K. Vibration temperature and electronic excitation temperature trend to decrease at the same time at the pressure away from 266～400 Pa, but rotation temperature trends to increase. This means electronic excitation temperature and vibration temperature have a strong relationship. |
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| Keywords: | vibrational temperature rotational temperature electronic excitation temperature microwave-pulsed discharge spectrum measurement |
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