| 30.4 nm Cr/Al/Cr自支撑滤光片的研制 |
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| 引用本文： | 付联效, 吴永刚, 伍和云, 等. 30.4 nm Cr/Al/Cr自支撑滤光片的研制[J]. 强激光与粒子束, 2009, 21(02). |
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| 作者姓名： | 付联效 吴永刚 伍和云 焦宏飞 吕刚 王振华 |
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| 作者单位： | 1.同济大学 精密光学工程技术研究所,上海 200092 |
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| 摘 要： | 依据材料的质量吸收系数和波长的关系，选择Cr和Al 设计和制备30.4 nm自支撑滤光片。在制备时以NaCl为脱膜剂，以热蒸发方式蒸镀Al，以电子束蒸发方式蒸镀Cr, 制备了30.4 nm的Cr/Al/Cr自支撑滤光膜，并对滤光片的表面缺陷进行了分析。通过显微镜观察，滤光膜均匀纯净，无明显针孔。Cr/Al/Cr自支撑滤光片在合肥国家同步辐射实验室进行了测量, Cr/Al/Cr厚度为5 nm/500 nm/5 nm和12.5 nm/500 nm/12.5 nm的滤光片在30.4 nm波长处的透过率分别为7.6%和4.6%，透过率曲线和理论计算基本一致。用紫外分光光度计测量得滤光片在200～800 nm波长范围的透过率小于0.02%，满足使用要求。
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| 关 键 词： | 滤光膜 质量吸收系数 自支撑 透过率 缺陷 |
Fabrication and characterization of 30.4 nm Cr/Al/Cr self-supporting filters |
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| fu lianxiao, wu yonggang, wu heyun, et al. Fabrication and characterization of 30.4 nm Cr/Al/Cr self-supporting filters[J]. High Power Laser and Particle Beams, 2009, 21. |
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| Authors: | fu lianxiao wu yonggang wu heyun jiao hongfei lü gang wang zhenhua |
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| Affiliation: | 1. Institute of Precise Optical Engineering and Technology,Tongji University,Shanghai 200092,China |
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| Abstract: | Cr and Al were chosen to design the 30.4 nm self-supporting filter based on relation between mass absorption coefficient and wavelength. NaCl was chosen as parting agent, Al was deposited by thermal evaporation, Cr was deposited by electron-beam evaporation, and finally 30.4 nm Cr/Al/Cr self-supporting filters were prepared. Observed under microscope, the filter topography was clean and uniform without apparent pinholes. The Cr/Al/Cr filters were measured in th National Synchrotron Radiation Laboratory in Hefei, and the transmittances of Cr(5 nm)/Al(500 nm)/Cr (5 nm) filter and Cr(12.5 nm)/Al(500 nm)/Cr(12.5 nm) filter are 7.6% and 4.6% at the wavelength of 30.4 nm, respectively. The measured transmittance curves of the two filters in EUV region are in general accordance with the predictio |
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| Keywords: | filter mass absorption coefficient self-supporting transmittance defect |
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