| Behaviour of Self-Standing CVD Diamond Film with Different Dominant Crystalline Surfaces in Thermal-Iron Plate Polishing |
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| 引用本文： | 陈广超 周祖源 李彬 周有良 李成明 唐伟忠 佟玉梅 吕反修. Behaviour of Self-Standing CVD Diamond Film with Different Dominant Crystalline Surfaces in Thermal-Iron Plate Polishing[J]. 中国物理快报, 2006, 23(8): 2266-2268 |
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| 作者姓名： | 陈广超 周祖源 李彬 周有良 李成明 唐伟忠 佟玉梅 吕反修 |
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| 作者单位： | [1]School of Material Science and Engineering, University of Science and Technology Beijing, Beijing 100083 [2]School of Metallurgical and Ecological Engineering, University of Science and Technology Beijing, Beijing 100083 |
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| 基金项目： | Supported by the National High Technology Development Programme of China under Grant No 2002AA305508, the National Natural Science Foundation of China under Grant No 50472095, the Scientific Research Foundation （SRF） for the Returned 0verseas Chinese Scholars （R0CS）, State Education Ministry （2003-14）, the Beijing Novel Project （No 2003A13）, and the Beijing Natural Science Foundation under Grant No 2062015. |
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| 摘 要： | Self-standing CVD diamond films with different dominant crystalline surfaces are polished by the thermal-iron plate polishing method. The influence of the dominant crystalline surfaces on polishing etfficiency is investigated by measuring the removal rate and final roughness. The smallest rms roughness of 0.14 μm is measured with smallest removal rate in the films with the initial （220） dominant crystalline surface. Activation energy for the polishing is analysed by the Arrhenius relation. It is found that the values are 170kJ/mol, 222kJ/mol and 214kJ/mol for the film with three different dominant crystalline surfaces. Based on these values, the polishing cause is regarded as the graphitization-controlling process. In the experiment, we find that transformation of the dominant crystalline surfaces from （111） to （220） always appears in the polishing process when we polish the （111） dominant surface.
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| 关 键 词： | 金刚石薄膜 晶质表面 晶体学 薄膜物理学 |
| 收稿时间： | 2006-04-05 |
| 修稿时间： | 2006-04-05 |
Behaviour of Self-Standing CVD Diamond Film with Different Dominant Crystalline Surfaces in Thermal-Iron Plate Polishing |
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| CHEN Guang-Chao,ZHOU Zu-Yuan,LI Bin,ZHOU You-Liang,J. Askri,LI Cheng-Ming,TANG Wei-Zhong,TONG Yu-Mei,LU Fan-Xiu. Behaviour of Self-Standing CVD Diamond Film with Different Dominant Crystalline Surfaces in Thermal-Iron Plate Polishing[J]. Chinese Physics Letters, 2006, 23(8): 2266-2268 |
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| Authors: | CHEN Guang-Chao ZHOU Zu-Yuan LI Bin ZHOU You-Liang J. Askri LI Cheng-Ming TANG Wei-Zhong TONG Yu-Mei LU Fan-Xiu |
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| Affiliation: | 1.School of Material Science and Engineering, University of Science and Technology Beijing, Beijing 100083 ;2.School of Metallurgical and Ecological Engineering, University of Science and Technology Beijing, Beijing 100083 |
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| Abstract: | |
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| Keywords: | 81.05.Uw 81.65.Ps |
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