Antireflection ln2O3 coatings of self‐organized TiO2 nanotube layers prepared by atomic layer deposition |
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| Authors: | Jan M. Macak Jan Prikryl Hanna Sopha Lukas Strizik |
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| Affiliation: | 1. Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Pardubice, Czech Republic;2. Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Pardubice, Czech Republic |
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| Abstract: | We report on the uniform anti‐reflection coating of TiO2 nanotube layers with a secondary material – indium trioxide (In2O3) – by atomic layer deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nanotubes for three different tube layers with aspect ratio up to ≈80, which is so far the highest aspect ratio reported for ALD‐processed self‐organized anodic TiO2 nanotubes. We show that uniform In2O3coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim) |
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| Keywords: | TiO2 nanotubes In2O3 antireflection coating atomic laser deposition light absorption |
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