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Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system
Authors:Kong Wei-Jin  Shen Zi-Cai  Wang Shu-Hu  Shao Jian-D  Fan Zheng-Xiu  Lu Chao-Jing
Affiliation:College of Physics Science, Qingdao University, Qingdao 266071, China; Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China; Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract:This paper reports that SiO2 is selected to fabricatebroadband antireflection (AR) coatings on fused silica substrate byusing glancing angle deposition and physical vapour deposition.Through accurate control of the graded index of the SiO2 layer,transmittance of the graded broadband AR coating can achieve an averagevalue of 98% across a spectral range of 300--1850~nm. Moreover,a laser-induced damage threshold measurement of the fabricated ARcoating is performed by using a one-on-one protocol according toISO11254-1, resulting in an average damage threshold of17.2~J/cm$^{2}$.
Keywords:broadband antireflection coating   graded index   glancingangle deposition
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