| 金刚石刀具nm级表面轮廓质量多参数集成测量方法 |
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| 引用本文： | 岳晓斌, 徐敏, 崔海龙, 等. 金刚石刀具nm级表面轮廓质量多参数集成测量方法[J]. 强激光与粒子束, 2015, 27: 114102. doi: 10.11884/HPLPB201527.114102 |
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| 作者姓名： | 岳晓斌 徐敏 崔海龙 雷大江 张晓峰 |
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| 作者单位： | 1.复旦大学 光科学与工程系, 上海 200433;;;2.复旦大学 光科学与工程系,上海超精密光学制造工程技术研究中心, 上海 200433;;;3.中国工程物理研究院 机械制造工艺研究所, 四川 绵阳 621 900 |
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| 摘 要： | 为有效解决金刚石刀具表面轮廓质量评价指标分散、无法进行全面系统测量的难题，基于原子力显微镜和超精密回转轴系，提出了实现前后刀面粗糙度、刃口锋利度和刃口微豁三个关键指标的集成测量方法。根据金刚石刀具表面轮廓质量的测量要求，以原子力显微镜扫描系统、气浮隔振平台、二维移动平台以及精密回转轴系为基础构建测量系统，精确测量了金刚石刀具刃口附近的表面微观形貌；采用基于MATLAB开发的专用测量软件对原始数据进行处理，得到金刚石刀具前后刀面粗糙度值、刃口锋利度值和刃口微豁范围；并对测量误差进行了分析，提出了控制要求。通过上述自主开发的测量仪器，可以高效、完整地描述金刚石刀具表面轮廓质量，能够实现nm级粗糙度、亚m级锋利度以及m级微豁的准确测量。
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| 关 键 词： | 原子力显微镜 金刚石刀具 表面轮廓质量 多参数集成测量 |
| 收稿时间： | 2015-08-25 |
| 修稿时间： | 2015-09-17 |
Multi-parameter integrated measuring method for nano-scale surface profile of diamond tool |
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| Yue Xiaobin, Xu Min, Cui Hailong, et al. Multi-parameter integrated measuring method for nano-scale surface profile of diamond tool[J]. High Power Laser and Particle Beams, 2015, 27: 114102. doi: 10.11884/HPLPB201527.114102 |
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| Authors: | Yue Xiaobin Xu Min Cui Hailong Lei Dajiang Zhang Xiaofeng |
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| Affiliation: | 1. Department of Optical Science and Engineering,Fudan University,Shanghai 200433,China;;;2. Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;;;3. Shanghai Ultra-Precision Optical Manufacturing Engineering Center,Department of Optical Science and Engineering,Fudan University,Shanghai 200433,China |
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| Abstract: | Due to lack of complete set of testing equipment and methods, and no unified evaluation parameters at present, the tool quality can not be comprehensively and systematically tested. The paper proposes a method that can test the roughness value, sharpness value and the range of micro-defect of diamond tool at the same time based on the atomic force microscope and ultra precision aerostatic bearings. In order to meet the measurement requirements for the surface profile of the diamond tools, the measurement system is constructed based on the atomic force microscope, the vibration isolation platform, the 2D mobile platform and the ultra precision aerostatic bearings. The surface morphology of the cutting edge of diamond tool is accurately measured. The roughness value, sharpness value and the range of micro-defect of diamond tool are accurately extracted by special measurement software. The measurement errors are analyzed and the control requirements are proposed. The test system based on above analysis can achieve comprehensive evaluation of multi-parameters, and laid the foundation for the quality evaluation of diamond tool in ultra-precision machining. |
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| Keywords: | atomic force microscope diamond tool surface profile quality multi-parameter integrated measurement |
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