| Nanodots and microwires of ZrO_2 grown on LaAlO_3 by photo-assisted metal–organic chemical vapor deposition |
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| 引用本文： | 郭峰,汪薪生,庄仕伟,李国兴,张宝林,周本初. Nanodots and microwires of ZrO_2 grown on LaAlO_3 by photo-assisted metal–organic chemical vapor deposition[J]. 中国物理 B, 2016, 25(2): 28103-028103. DOI: 10.1088/1674-1056/25/2/028103 |
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| 作者姓名： | 郭峰 汪薪生 庄仕伟 李国兴 张宝林 周本初 |
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| 作者单位： | State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant No. 51002063) and the International Science and Technology Cooperation Program of Science and Technology Bureau of Changchun City, China (Grant No. 12ZX68). |
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| 摘 要： | ZrO_2 nanodots are successfully prepared on LaAlO_3(LAO)(100) substrates by photo-assisted metal-organic chemical vapor deposition(MOCVD). It is indicated that the sizes and densities of ZrO_2 nanodots are controllable by modulating the growth temperature, oxygen partial pressure, and growth time. Meanwhile, the microwires are observed on the surfaces of substrates. It is found that there is an obvious competitive relationship between the nanodots and the microwires. In a growth temperature range from 500℃ to 660℃, the microwires turn longest and widest at 600℃, but in contrast, the nanodots grow into the smallest diameter at 600℃. This phenomenon could be illustrated by the energy barrier, decomposition rate of Zr(tmhd)_4, and mobility of atoms. In addition, growth time or oxygen partial pressure also affects the competitive relationship between the nanodots and the microwires. With increasing oxygen partial pressure from 451 Pa to 75_2 Pa,the microwires gradually grow larger while the nanodots become smaller. To further achieve the controllable growth, the coarsening effect of ZrO_2 is modified by varying the growth time, and the experimental results show that the coarsening effect of microwires is higher than that of nanodots by increasing the growth time to quickly minimize ZrO_2 energy density.
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| 收稿时间： | 2015-08-04 |
Nanodots and microwires of ZrO2 grown on LaAlO3 by photo-assisted metal-organic chemical vapor deposition |
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| Affiliation: | State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China |
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| Abstract: | ZrO2 nanodots are successfully prepared on LaAlO3 (LAO) (100) substrates by photo-assisted metal-organic chemical vapor deposition (MOCVD). It is indicated that the sizes and densities of ZrO2 nanodots are controllable by modulating the growth temperature, oxygen partial pressure, and growth time. Meanwhile, the microwires are observed on the surfaces of substrates. It is found that there is an obvious competitive relationship between the nanodots and the microwires. In a growth temperature range from 500 ℃ to 660 ℃, the microwires turn longest and widest at 600 ℃, but in contrast, the nanodots grow into the smallest diameter at 600 ℃. This phenomenon could be illustrated by the energy barrier, decomposition rate of Zr(tmhd)4, and mobility of atoms. In addition, growth time or oxygen partial pressure also affects the competitive relationship between the nanodots and the microwires. With increasing oxygen partial pressure from 451 Pa to 752 Pa, the microwires gradually grow larger while the nanodots become smaller. To further achieve the controllable growth, the coarsening effect of ZrO2 is modified by varying the growth time, and the experimental results show that the coarsening effect of microwires is higher than that of nanodots by increasing the growth time to quickly minimize ZrO2 energy density. |
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| Keywords: | ZrO2 photo-assisted MOCVD nanodots microwires |
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