| 摘 要： | We propose and experimentally demonstrate a broadband 1×3 adiabatic splitter based on the silicon-on-insulator technology,with simultaneous tapering of velocity and coupling.The designed structure becomes simulated transmission uniformity of three outputs better than 0.5 dB in a broadband of 250 nm,and a large simulated fabrication tolerance is obtained.A manufactured splitter whose parameters greatly diverge from the design acquires a measured result of the worst splitting ratio better than 1.5 dB as well as an excess loss lower than0.8 dB in a large wavelength range of 80 nm.A post-simulation based on the tested splitter obtains a result that meets the actual transmission well.
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