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Reduction of Ordering Temperature of FePt-Al2O3 Thin Films by N2 Addition During Sputtering
引用本文:曹江伟 N.Katayama 杨正 魏福林 M.Matsumoto A.Morisako 刘小晰 S.Takei. Reduction of Ordering Temperature of FePt-Al2O3 Thin Films by N2 Addition During Sputtering[J]. 中国物理快报, 2005, 22(11): 2899-2902
作者姓名:曹江伟 N.Katayama 杨正 魏福林 M.Matsumoto A.Morisako 刘小晰 S.Takei
作者单位:[1]Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000 [2]Department of Information Engineering, Shinshu University, 4-17-I Wakasato, Nagano 380-8553, Japan
摘    要:We investigate the effect of N2 addition during sputtering on the microstructure and magnetic properties of FePt-Al2O3 thin films. The texture of FePt phase in FePt-Al2O3 thin films changes from (111) to a more random orientation by N2 addition during sputtering. The ordering temperature of FePt phase reduces about 100℃ with appropriate N2 partial pressure. A larger coercivity of 6.0 × 10^5 Aim is obtained with N2 partial pressure about 15%. Structural analysis reveals that a small quantity of Fe3N phase forms during sputtering and the release of N atoms during the post annealing induces a large number of vacancies in the films, which benefits to the transformation of FePt phase from fcc to fct.

关 键 词:薄膜 电子喷射 微观结构 磁性质 三氧化二铝
收稿时间:2005-07-03
修稿时间:2005-07-03

Reduction of Ordering Temperature of FePt-Al2O3 Thin Films by N2 Addition During Sputtering
CAO Jiang-Wei, N. Katayama, YANG Zheng, WEI Fu-Lin, M. Matsumoto, A. Morisako, LIU Xiao-Xi, S. Takei. Reduction of Ordering Temperature of FePt-Al2O3 Thin Films by N2 Addition During Sputtering[J]. Chinese Physics Letters, 2005, 22(11): 2899-2902
Authors:CAO Jiang-Wei   N. Katayama   YANG Zheng   WEI Fu-Lin   M. Matsumoto   A. Morisako   LIU Xiao-Xi   S. Takei
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