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High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre |
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| Authors: | Zhu Yu Xu Xue-Jun Li Zhi-Yong Zhou Liang Han Wei-Hu Fan Zhong-Chao Yu Yu-De Yu Jin-Zhong |
| Affiliation: | State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
| Abstract: | A high efficiency and broad bandwidth grating couplerbetween a silicon-on-insulator (SOI) nanophotonic waveguide and fibreis designed and fabricated. Coupling efficiencies of 46{%} and25{%} at a wavelength of 1.55~$mu $m are achieved by simulationand experiment, respectively. An optical 3~dB bandwidth of 45~nmfrom 1530~nm to 1575~nm is also obtained in experiment. Numericalcalculation shows that a tolerance to fabrication error of 10~nmin etch depth is achievable. The measurement results indicate thatthe alignment error of $pm $2~$mu $m results in less than 1~dBadditional coupling loss. |
| Keywords: | grating coupler silicon-on-insulator couplingefficiency bandwidth |
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