激光衍射测量中应用插值细分的可行性分析

激光衍射测微的精度关键在于衍射图样暗纹间距的精确测量，暗纹间距的测量目前主要采用高位数、小中心距的固体图象传感器线阵，为此，提出了一种硬件插值细分的方法。介绍了激光衍射的测量原理，分析了图像传感器的功能，根据采样和恢复定理，对输出的视频信号进行间距插值细分的可行性进行了论证，给出了插值细分的电路框图。分析表明其测量精度不受器件中心距大小的限制，为低位数、大中心距的固体图象传感器线阵的应用提供了方便。

THE FEASIBILITY STUDY OF EQUIDISTANCE SUBDIVISION AND IT'S APPLICATION ON LASER DIFFRACTION MEASUREMENT

The precise measure of the laser diffraction pattern dark distance is key to the accuracy of the laser diffraction micro-measure. At present,the measures of dark pattern distance are adopted mainly the solid image sensor of high pass bit and small central distance.Therefore,come up with a new method of the hardware equidistant subdivision.Moreover,introduce the measure principle of laser diffraction, analyses the function of the image sensor,basing on the sampling and recovery theorem,prove the feasibility of the distance equidistant subdivision with output video signal,and give the circuit diagram of the equidistant subdivision.Above studies show that,the measure accuracy is not restricted the devices diameters of the central distance,so it brings much benefit for the application in the solid image sensor of low pass bit and big central distance.