Observation of Sb2O3 Nanocrystals in SiO2 after Sb Ion Implantation |
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| Authors: | Velislava A Ignatova Oleg I Lebedev Uwe Wätjen Luc Van Vaeck Jef Van Landuyt Renaat Gijbels Freddy Adams |
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| Institution: | (1) Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk, Belgium, BE;(2) EMAT, RUCA, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerpen, Belgium, BE;(3) EC-JRC, Institute for Reference Materials and Measurements, Retieseweg, B-2440 Geel, Belgium, BE |
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| Abstract: | Antimony nanocrystals were formed in thin SiO2 films using low-energy ion implantation of Sb followed by annealing. Using Fourier transform laser microprobe mass spectrometry
(FT LMMS), we observed for the first time the presence of antimony oxide in the intermediate phase (as-implanted layer of
Sb) by means of signals referring to the intact Sb2O3 molecules. Only SbO+ fragments, but no adduct ions of Sb2O3 could be detected in annealed samples. The size and the distribution of the nanocrystals formed around the initial depth
of implantation were studied in the as-implanted samples by high-resolution electron microscopy (HREM). The crystalline structure
of these nanocrystals was also studied and the presence of antimony trioxide Sb2O3 in the form of valentinite was proven. After the annealing step, the implanted material had spread into a wider band. The
method introduced here, based on combining TEM (transmission electron microscopy) and FT LMMS results, offers the possibility
of studying the evolution of the phases in Sb nanocrystal formation. |
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| Keywords: | : Nanocrystals antimony oxide ion implantation FT LMMS HREM |
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