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A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5) |
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| Authors: | Dezelah Charles L Wiedmann Monika K Mizohata Kenichiro Baird Ronald J Niinistö Lauri Winter Charles H |
| Institution: | Laboratory of Inorganic and Analytical Chemistry, Department of Chemical Technology, Helsinki University of Technology, P.O. Box 6100, FI-02015 Espoo, Finland. |
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